CN206022331U - Semiconductor production graphite sector - Google Patents
Semiconductor production graphite sector Download PDFInfo
- Publication number
- CN206022331U CN206022331U CN201620917205.0U CN201620917205U CN206022331U CN 206022331 U CN206022331 U CN 206022331U CN 201620917205 U CN201620917205 U CN 201620917205U CN 206022331 U CN206022331 U CN 206022331U
- Authority
- CN
- China
- Prior art keywords
- graphite
- fan
- sector
- semiconductor production
- shaped pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The utility model discloses a kind of semiconductor production graphite sector, including fan-shaped pedestal, connector and the disk be made up of graphite, semicircle opening is provided with the top of the fan-shaped pedestal, the semicircle opening two ends are provided with the first circular arc opening, the connector both sides are provided with the second circular arc opening corresponding with the first circular arc opening, at the top of the fan-shaped pedestal, both sides are respectively provided with a connection piece, and the disk is connected with semicircle opening.Sector of the present utility model is made up of graphite, and weight opposing metallic is greatly reduced, and graphite has good conductive and heat conductivility, reduces the energy consumption of semiconductor production equipment, is conducive to energy-conserving and environment-protective.
Description
Technical field
The utility model is related to a kind of semiconductor production equipment, more particularly to a kind of semiconductor production graphite sector.
Background technology
The sector of existing semiconductor production adopts metal material system in order to ensure its conductive and heat conductivility, typically
Into, but the weight of sector is which increases, even and if adopt metal material, cannot also ensure the conductive and heat conduction of sector
Performance, the energy consumption so as to cause semiconductor production equipment are higher, are unfavorable for energy-conserving and environment-protective.
Utility model content
For solving above-mentioned technical problem, the utility model discloses a kind of semiconductor production graphite sector, including by
Fan-shaped pedestal, connector and disk that graphite is made, are provided with semicircle opening at the top of the fan-shaped pedestal, the semicircle is opened
Mouth two ends are provided with the first circular arc opening, and the connector both sides are provided with the second circular arc corresponding with the first circular arc opening and open
Mouthful, at the top of the fan-shaped pedestal, both sides are respectively provided with a connection piece, and the disk is connected with semicircle opening.
Used as further improvement of the utility model, the fan-shaped pedestal includes top base and the bottom base being crisscross arranged,
The top base forms step connecting portion with the edge of bottom base.
Used as further improvement of the utility model, the connector back is arranged with one group of connection groove.
The beneficial effects of the utility model are：
Sector of the present utility model is made up of graphite, and weight opposing metallic is greatly reduced, and graphite have good
Conductive and heat conductivility, reduces the energy consumption of semiconductor production equipment, is conducive to energy-conserving and environment-protective.
Description of the drawings
For the technical scheme being illustrated more clearly that in the utility model embodiment, below will be to making needed for embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present utility model,
For those of ordinary skill in the art, without having to pay creative labor, can be being obtained according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1 is structural representation of the present utility model；
Back structures schematic diagrames of the Fig. 2 for connector.
Mark in figure：1- sector pedestals；The semicircle openings of 11-；12- the first circular arc openings；13- top bases；Base under 14-
Seat；2- connectors；21- the second circular arc openings；22- connects groove；3- disks.
Specific embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.
As shown in figure 1, a kind of semiconductor production graphite sector, including the fan-shaped pedestal 1, connector being made up of graphite
2 and disk 3, semicircle opening 11 is provided with the top of fan-shaped pedestal 1,11 two ends of semicircle opening are provided with the first circular arc opening
12.
2 both sides of connector are provided with and 12 corresponding second circular arc opening 21 of the first circular arc opening, 2 back pair of connector
Claim to be provided with one group of connection groove 22.
1 top both sides of fan-shaped pedestal are respectively provided with a connection piece 2, and disk 3 is connected with semicircle opening 11.
Fan-shaped pedestal 1 includes the edge shape of the top base 13 being crisscross arranged and bottom base 14, top base 13 and bottom base 14
Into step connecting portion.
One fan-shaped pedestal 1, two connectors 2 and a disk 3 can be spliced into a set of sector, and covering sector can spell more
It is connected into the disk of a middle with hole.
Sector of the present utility model is made up of graphite, and weight opposing metallic is greatly reduced, and graphite have good
Conductive and heat conductivility, reduces the energy consumption of semiconductor production equipment, is conducive to energy-conserving and environment-protective.
Preferred embodiment of the present utility model is the foregoing is only, not in order to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements that is made etc. should be included in the utility model
Protection domain within.
Claims (3)
1. a kind of semiconductor production graphite sector, it is characterised in that the fan-shaped pedestal that includes being made up of graphite, connector with
And disk, semicircle opening is provided with the top of the fan-shaped pedestal, the semicircle opening two ends are provided with the first circular arc opening, institute
State connector both sides and be provided with the second circular arc opening corresponding with the first circular arc opening, both sides respectively set at the top of the fan-shaped pedestal
There is a connection piece, the disk is connected with semicircle opening.
2. semiconductor production according to claim 1 graphite sector, it is characterised in that the fan-shaped pedestal includes handing over
The wrong top base for arranging and bottom base, the top base form step connecting portion with the edge of bottom base.
3. semiconductor production according to claim 2 graphite sector, it is characterised in that the connector back is symmetrical
It is provided with one group of connection groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620917205.0U CN206022331U (en) | 2016-08-22 | 2016-08-22 | Semiconductor production graphite sector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620917205.0U CN206022331U (en) | 2016-08-22 | 2016-08-22 | Semiconductor production graphite sector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206022331U true CN206022331U (en) | 2017-03-15 |
Family
ID=58250120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620917205.0U Expired - Fee Related CN206022331U (en) | 2016-08-22 | 2016-08-22 | Semiconductor production graphite sector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206022331U (en) |
-
2016
- 2016-08-22 CN CN201620917205.0U patent/CN206022331U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170315 Termination date: 20200822 |