CN206020314U - A kind of total reflection X-ray fluorescence analysis system - Google Patents
A kind of total reflection X-ray fluorescence analysis system Download PDFInfo
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- CN206020314U CN206020314U CN201621048660.8U CN201621048660U CN206020314U CN 206020314 U CN206020314 U CN 206020314U CN 201621048660 U CN201621048660 U CN 201621048660U CN 206020314 U CN206020314 U CN 206020314U
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Abstract
The utility model discloses a kind of total reflection X-ray fluorescence analysis system, including：Sample stage, X-ray tube, detector and inclined angle regulating mechanism.X-ray tube is two or more, and X-ray tube is circumferentially disposed around sample stage.Inclined angle regulating mechanism is connected with sample stage transmission, and the inclined angle regulating mechanism is used for adjusting the sample stage towards the transmitting terminal inclination of X-ray tube one of them described.Above-mentioned total reflection X-ray fluorescence analysis system, due to being provided with two or more X-ray tube, two or more X-ray tube just can adopt two or more targets.And transmitting terminal inclination of the sample stage towards one of X-ray tube is adjusted by inclined angle regulating mechanism, just can adopt the X-ray tube of required wherein certain target.Thus, above-mentioned total reflection X-ray fluorescence analysis system can be applied to the detection and analysis compared with multielement, and using more convenient.
Description
Technical field
This utility model is related to a kind of system of fluorescence analysis, more particularly, to a kind of total reflection X-ray fluorescence analysis system.
Background technology
Traditional total reflection X-ray fluorescence analysis technology generally matches single X-ray tube as excitaton source, and single
X-ray tube is specific with running voltage due to target, and during work, the characteristic spectral line of produced X ray is fixed.For example, adopt
L pedigree line of the X ray that the X-ray tube of Ag targets is produced in 25kV operating at voltages comprising Ag elements and continuous spectrum, and adopt
L pedigree line of the X ray produced in 25kV operating at voltages with the X-ray tube of W targets comprising W elements and continuous spectrum.It can be seen that,
Single X-ray tube is suitable for the detection and analysis of a part of element, and brings difficulty, such as target to the detection and analysis of other elements
The spectral line that material is produced when working can cover the characteristic spectral line of some elements to be measured completely, it is impossible to have different x-ray excitaton source concurrently
Characteristic advantage, the element species for being suitable for detection and analysis are limited.And if when X-ray tube is carried out dismounting and change, needing to re-start
Calibration and demarcate, complex operation and x-ray fluorescence analysis cannot be immediately available for.
Content of the invention
This is based on, this utility model is the defect for overcoming prior art, there is provided a kind of total reflection X-ray fluorescence analysis system
System, can be suitably used for the detection and analysis compared with multiple element.
Its technical scheme is as follows：A kind of total reflection X-ray fluorescence analysis system, including：Sample stage, the sample are carried
Thing platform is used for placing testing sample；X-ray tube, the X-ray tube are used for launching X ray to the sample stage, and the X is penetrated
Spool is two or more, and the X-ray tube is circumferentially disposed around the sample stage；Detector, the detector are used for receiving
Through the X-fluorescence that the testing sample is reflected；And inclined angle regulating mechanism, the inclined angle regulating mechanism and the sample
The transmission of product object stage is connected, and the inclined angle regulating mechanism is used for adjusting the sample stage towards X one of them described
The transmitting terminal of ray tube is inclined.
Wherein in one embodiment, the inclined angle regulating mechanism includes angular adjustment slide unit, the angular adjustment
Slide unit is connected with sample stage transmission, and the angular adjustment slide unit is used for adjusting the sample stage relative to level
The angle of inclination in face.
Wherein in one embodiment, the total reflection X-ray fluorescence analysis system also includes altitude mixture control slide unit, described
Altitude mixture control slide unit is connected with sample stage transmission, and the altitude mixture control slide unit is used for driving the sample stage liter
Drop action.
Wherein in one embodiment, the X-ray tube is two, and one of them described X-ray tube is arranged on the sample
The side of product object stage, another X-ray tube are arranged on the opposite side of the sample stage, and the detector is arranged on
The surface of the sample stage.
Wherein in one embodiment, the inclined angle regulating mechanism also includes rotating disk mechanism, the rotating disk mechanism with
The angular adjustment slide unit transmission is connected, and the rotating disk mechanism is used for driving the angular adjustment slide unit to rotate.
Wherein in one embodiment, the total reflection X-ray fluorescence analysis system also includes controller, the controller
It is electrically connected with the X-ray tube, the angular adjustment slide unit, the rotating disk mechanism, the controller is penetrated for controlling the X
Whether spool is launched X ray, is used for controlling the angle of the angular adjustment slide unit tilted deflecting and is used for controlling the rotating disk
The angle that mechanism rotates.
Wherein in one embodiment, the transmitting terminal of the X-ray tube is provided with collimator.
Wherein in one embodiment, the total reflection X-ray fluorescence analysis system also includes blowing mechanism, the purging
Mechanism is used for for anti-interference gas blowing to the sample stage.
Wherein in one embodiment, the blowing mechanism includes appendix and gas flowmeter, the gas flowmeter
It is installed on the appendix, the gas flowmeter is provided with flow control valve, and the outfan of the appendix is towards the sample
Product object stage.
Wherein in one embodiment, the anti-interference gas is nitrogen, carbon dioxide or oxygen.
Below the advantage or principle of preceding solution are illustrated：
1st, above-mentioned total reflection X-ray fluorescence analysis system, due to being provided with two or more X-ray tube, two or more X is penetrated
Spool just can adopt two or more targets.And sample stage is adjusted towards one of them by inclined angle regulating mechanism
The transmitting terminal of X-ray tube is inclined, and just can adopt the X-ray tube of required wherein certain target.Thus, above-mentioned total reflection
X-ray fluorescence analyzing system can be applied to the detection and analysis compared with multielement, and using more convenient.
2nd, angular adjustment slide unit can adjust sample stage angle of inclination with respect to the horizontal plane, and rotating disk mechanism drives angle
Degree adjusts slide unit and turns an angle.Sample stage can be caused towards which by angular adjustment slide unit and rotating disk mechanism so
In an X-ray tube to be detected transmitting terminal incline, so as to can guarantee that X-ray tube transmitting X ray anti-through testing sample
Enter in detector after penetrating.
3rd, altitude mixture control slide unit is used for driving sample stage lifting action, drives sample loading by altitude mixture control slide unit
Platform lifting is to adjust the height and position of testing sample, laggard so as to can guarantee that the X ray of X-ray tube transmitting is reflected through testing sample
Enter in detector.
4th, when X-ray tube is to the testing sample transmitting X ray in sample stage, by blowing mechanism by anti-interference gas
Body blows to sample stage, and the gas in testing sample peripheral environment just can be expelled by so anti-interference gas, be avoided that X is penetrated
The element (such as argon element) for producing impact on result of the test is excited by line, so as to just can ensure that the testing result of element to be measured
Accuracy.
Description of the drawings
Fig. 1 is the total reflection X-ray fluorescence analysis system structure diagram one described in this utility model embodiment；
Fig. 2 is the total reflection X-ray fluorescence analysis system structure diagram two described in this utility model embodiment；
Fig. 3 is the total reflection X-ray fluorescence analysis system structure diagram three described in this utility model embodiment.
Description of reference numerals：
10th, sample stage, 20, X-ray tube, 30, detector, 40, inclined angle regulating mechanism, 41, angular adjustment slides
Platform, 42, rotating disk mechanism, 50, altitude mixture control slide unit, 60, collimator, 71, appendix, 72, gas flowmeter.
Specific embodiment
Below embodiment of the present utility model is described in detail：
As shown in Figure 1, 2, the total reflection X-ray fluorescence analysis system described in this utility model embodiment, including：Sample is carried
Thing platform 10, X-ray tube 20, detector 30 and inclined angle regulating mechanism 40.
The sample stage 10 is used for placing testing sample.The X-ray tube 20 is used for the sample stage 10
Transmitting X ray, the X-ray tube 20 is two or more, and the X-ray tube 20 is circumferentially disposed around the sample stage 10.Institute
State detector 30 for receive the X-fluorescence that reflects through the testing sample.The inclined angle regulating mechanism 40 with described
The transmission of sample stage 10 is connected, and the inclined angle regulating mechanism 40 is used for adjusting the sample stage 10 towards wherein one
The transmitting terminal of the individual X-ray tube 20 is inclined, and so, the X ray that the transmitting terminal of the X-ray tube 20 is launched just can be through sample
Testing sample on product object stage 10 is reflexed in detector 30.
Above-mentioned total reflection X-ray fluorescence analysis system, due to being provided with two or more X-ray tube 20, two or more X is penetrated
Spool 20 just can adopt two or more targets.And sample stage 10 is adjusted towards which by inclined angle regulating mechanism 40
In an X-ray tube 20 transmitting terminal incline, just can adopt required wherein certain target X-ray tube 20.Thus, on
The total reflection X-ray fluorescence analysis system that states can be applied to the detection and analysis compared with multielement, and using more convenient.
Fig. 3 is referred to, the inclined angle regulating mechanism 40 includes angular adjustment slide unit 41 and rotating disk mechanism 42.The angle
Degree is adjusted slide unit 41 and is connected with the transmission of the sample stage 10, and the angular adjustment slide unit 41 is used for adjusting the sample loading
The angle of inclination with respect to the horizontal plane of platform 10.In the present embodiment, angular adjustment slide unit 41 includes installing plate, support column and stretches
Cylinder, is flexibly connected with support column one end in the middle part of installing plate, and telescopic cylinder is connected with the transmission of installing plate side, and telescopic cylinder stretches
When, just can adjust installing plate gradient with respect to the horizontal plane.Rotating disk mechanism 42 is driven phase with the angular adjustment slide unit 41
Even, the rotating disk mechanism 42 is used for driving the angular adjustment slide unit 41 to rotate.Angular adjustment slide unit 41 can adjust sample load
The angle of inclination with respect to the horizontal plane of thing platform 10,42 driving angle of rotating disk mechanism adjust slide unit 41 and turn an angle.So lead to
Over-angle adjusts slide unit 41 and can cause sample stage 10 towards one of those X-ray tube to be detected with rotating disk mechanism 42
20 transmitting terminal is inclined, so as to can guarantee that the X ray of the transmitting of X-ray tube 20 enters into detector 30 after testing sample reflection
In.
The total reflection X-ray fluorescence analysis system includes altitude mixture control slide unit 50.The altitude mixture control slide unit 50 and institute
State the transmission of sample stage 10 to be connected, the altitude mixture control slide unit 50 is used for driving 10 lifting action of the sample stage.Logical
Crossing altitude mixture control slide unit 50 drives sample stage 10 to lift to adjust the height and position of testing sample, so as to can guarantee that X ray
The X ray of the transmitting of pipe 20 is entered in detector 30 after testing sample reflection.
The X-ray tube 20 is two.One of them described X-ray tube 20 is arranged on the one of the sample stage 10
Side, another X-ray tube 20 are arranged on the opposite side of the sample stage 10.The detector 30 is arranged on the sample
The surface of product object stage 10.Fig. 1 is referred to, on the left of the use during X-ray tube 20, left side X-ray tube 20 is opened, and right side X is penetrated
Spool 20 is closed, and the X ray that left side X-ray tube 20 is produced is collimated through left side collimator 60, by altitude mixture control slide unit
50 adjust sample stage 10 to highly consistent with the X-ray beam after collimation, then by angular adjustment slide unit 41 by sample
Object stage 10 adjust to collimation after X-ray beam into suitable grazing angle (X ray to the left of sample stage 10
20 lopsidedness of pipe) be preferably totally reflected shooting condition to reach.Fig. 2 is referred to, on the right side of the use during X-ray tube 20, left side X
Ray tube 20 is closed, right side X-ray tube 20 is opened, and the X ray that right side X-ray tube 20 is produced carries out standard through right side collimator 60
Directly, sample stage 10 is adjusted to highly consistent with the X-ray beam after collimation by altitude mixture control slide unit 50, then passes through angle
Degree adjust slide unit 41 by sample stage 10 adjust to collimation after X-ray beam into a suitable grazing angle (sample
20 lopsidedness of X-ray tube to the right of object stage 10) reaching preferably total reflection shooting condition.Thus, can be same complete
The X-ray tube 20 of the different targets of two kinds of switching can be selected in reflection total reflection X-ray fluorescence analysis system with fast and flexible, kept
Level of integrated system, is easy to extend the element species scope for being suitable for detection and analysis.
The total reflection X-ray fluorescence analysis system also includes controller.The controller and the X-ray tube 20, institute
State angular adjustment slide unit 41, the rotating disk mechanism 42 to be electrically connected with, the controller is used for controlling whether the X-ray tube 20 is sent out
X ray is penetrated, is used for controlling the angle of 41 tilted deflecting of angular adjustment slide unit and is used for controlling 42 turns of the rotating disk mechanism
Dynamic angle.
The transmitting terminal of the X-ray tube 20 is provided with collimator 60.The X that X-ray tube 20 is launched is penetrated by collimator 60
It is directed on testing sample after line collimation, is avoided that X ray diverging causes to damage miscellaneous equipment or staff is caused not
Profit affects.
The total reflection X-ray fluorescence analysis system also includes blowing mechanism.The blowing mechanism is used for anti-interference gas
Body blows to the sample stage 10.Wherein, anti-interference gas includes the inorganic of gaseous state inorganic compound, oxygen and the oxygen of nitrogen and nitrogen
The inorganic gaseous compound of gaseous compound, phosphorus and phosphorus, carbon and its inorganic gaseous compound, hydrogen and its inorganic gaseous compound,
The inorganic gaseous volatile of boron, sulfur and its inorganic compound, halogen simple substance and its inorganic gaseous compound.For example, anti-interference gas
Body is included but is not limited to：Carbon monoxide, carbon dioxide, nitrogen, nitrogen oxides, hydrogen, oxygen, ozone, ammonia, hydrogen sulfide,
Halogen simple substance, gaseous halide etc..
When X-ray tube 20 is to the testing sample transmitting X ray in sample stage 10, will be anti-interference by blowing mechanism
Gas blows to sample stage 10, and the gas in testing sample peripheral environment just can be expelled, can be kept away by so anti-interference gas
Exempt from X ray to excite the element (such as argon element) for producing result of the test impact, so as to just can ensure that the inspection of element to be measured
Survey the accuracy of result.
The blowing mechanism includes appendix 71 and gas flowmeter 72.The gas flowmeter 72 is installed in the gas transmission
On pipe 71, the gas flowmeter 72 is provided with flow control valve, and the outfan of the appendix 71 is towards the sample stage
10.By gas flow speed in Flow-rate adjustment valve regulation appendix 71, gas flow velocity magnitude can be adjusted to 2L/min,
And the outfan of appendix 71 is arranged towards the sample stage 10, so can guarantee that in testing sample peripheral environment
Gas is expelled.
Each technical characteristic of embodiment described above arbitrarily can be combined, for making description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope of this specification record is all considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more concrete and detailed,
But therefore can not be interpreted as the restriction to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, some deformations and improvement can also be made, these belong to
Protection domain of the present utility model.Therefore, the protection domain of this utility model patent should be defined by claims.
Claims (10)
1. a kind of total reflection X-ray fluorescence analysis system, it is characterised in that include：
Sample stage, the sample stage are used for placing testing sample；
X-ray tube, the X-ray tube be used for the sample stage launch X ray, the X-ray tube be two or more, institute
State X-ray tube circumferentially disposed around the sample stage；
Detector, the detector are used for receiving the X-fluorescence reflected through the testing sample；And
Inclined angle regulating mechanism, the inclined angle regulating mechanism are connected with sample stage transmission, the inclination angle
Degree governor motion is used for adjusting the sample stage towards the transmitting terminal inclination of X-ray tube one of them described.
2. total reflection X-ray fluorescence analysis system according to claim 1, it is characterised in that the angle of inclination is adjusted
Mechanism includes that angular adjustment slide unit, the angular adjustment slide unit are connected with sample stage transmission, and the angular adjustment is slided
Platform is used for adjusting sample stage angle of inclination with respect to the horizontal plane.
3. total reflection X-ray fluorescence analysis system according to claim 1 and 2, it is characterised in that also include altitude mixture control
Slide unit, the altitude mixture control slide unit are connected with sample stage transmission, and the altitude mixture control slide unit is used for driving the sample
Product lifting of object loading table action.
4. total reflection X-ray fluorescence analysis system according to claim 2, it is characterised in that the X-ray tube is two
Individual, one of them X-ray tube is arranged on the side of the sample stage, and another described X-ray tube is arranged on described
The opposite side of sample stage, the detector are arranged on the surface of the sample stage.
5. total reflection X-ray fluorescence analysis system according to claim 2, it is characterised in that the angle of inclination is adjusted
Mechanism also includes rotating disk mechanism, and the rotating disk mechanism is connected with angular adjustment slide unit transmission, and the rotating disk mechanism is used for driving
The dynamic angular adjustment slide unit is rotated.
6. total reflection X-ray fluorescence analysis system according to claim 5, it is characterised in that also include controller, described
Controller is electrically connected with the X-ray tube, the angular adjustment slide unit, the rotating disk mechanism, and the controller is used for controlling
Whether the X-ray tube is launched X ray, is used for controlling the angle of the angular adjustment slide unit tilted deflecting and is used for controlling
The angle that the rotating disk mechanism is rotated.
7. total reflection X-ray fluorescence analysis system according to claim 1, it is characterised in that the transmitting of the X-ray tube
End is provided with collimator.
8. total reflection X-ray fluorescence analysis system according to claim 1, it is characterised in that also include blowing mechanism, institute
Stating blowing mechanism is used for for anti-interference gas blowing to the sample stage.
9. total reflection X-ray fluorescence analysis system according to claim 8, it is characterised in that the blowing mechanism includes
Appendix and gas flowmeter, the gas flowmeter are installed on the appendix, and the gas flowmeter is provided with flow tune
Section valve, the outfan of the appendix is towards the sample stage.
10. total reflection X-ray fluorescence analysis system according to claim 8, it is characterised in that the anti-interference gas is
Nitrogen, carbon dioxide or oxygen.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621048660.8U CN206020314U (en) | 2016-09-09 | 2016-09-09 | A kind of total reflection X-ray fluorescence analysis system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621048660.8U CN206020314U (en) | 2016-09-09 | 2016-09-09 | A kind of total reflection X-ray fluorescence analysis system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238621A (en) * | 2017-08-05 | 2017-10-10 | 深圳市华唯计量技术开发有限公司 | A kind of utilization total focus technology surveys the device of full constituent content |
| CN109164123A (en) * | 2017-06-29 | 2019-01-08 | 宝山钢铁股份有限公司 | The sample previewing method and device of X fluorescence spectrometer |
| US11921059B2 (en) | 2022-01-31 | 2024-03-05 | Canon Anelva Corporation | Inspection apparatus and inspection method |
-
2016
- 2016-09-09 CN CN201621048660.8U patent/CN206020314U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109164123A (en) * | 2017-06-29 | 2019-01-08 | 宝山钢铁股份有限公司 | The sample previewing method and device of X fluorescence spectrometer |
| CN107238621A (en) * | 2017-08-05 | 2017-10-10 | 深圳市华唯计量技术开发有限公司 | A kind of utilization total focus technology surveys the device of full constituent content |
| US11921059B2 (en) | 2022-01-31 | 2024-03-05 | Canon Anelva Corporation | Inspection apparatus and inspection method |
| US11927554B2 (en) | 2022-01-31 | 2024-03-12 | Canon Anelva Corporation | Inspection apparatus and inspection method |
| US11971370B2 (en) | 2022-01-31 | 2024-04-30 | Canon Anelva Corporation | Inspection apparatus and inspection method |
| US11977038B2 (en) | 2022-01-31 | 2024-05-07 | Canon Anelva Corporation | Inspection apparatus and inspection method |
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