CN205997192U - A kind of silicon wafer turnover flusher - Google Patents
A kind of silicon wafer turnover flusher Download PDFInfo
- Publication number
- CN205997192U CN205997192U CN201620882256.4U CN201620882256U CN205997192U CN 205997192 U CN205997192 U CN 205997192U CN 201620882256 U CN201620882256 U CN 201620882256U CN 205997192 U CN205997192 U CN 205997192U
- Authority
- CN
- China
- Prior art keywords
- dovetail
- fixed seat
- positioning chuck
- platy structure
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
This utility model is related to mechanical field, more particularly, to a kind of silicon wafer turnover flusher.Comprise frame, vertical platy structure is comprised on described frame, can turn on this platy structure and positioning chuck is installed, while comprising handle in the middle part of described positioning chuck, it is dovetail fixed seat that positioning chuck passes through platy structure, comprises a holding tank in the middle part of dovetail fixed seat, also comprise the dovetail mount that can be sleeved in the holding tank of dovetail fixed seat, described dovetail mount is the projection of top, can be clamped in dovetail fixed seat, fixed underpan can place silicon chip between projection and lower section fixed underpan.Beneficial effect：Silicon rod is jointly driven to rotate by dovetail mechanism and rotating shaft, the silicon rod after cutting is made to ratate 90 degrees, mucilage glue surface will be in side, it is rinsed from top to bottom by shower water, it is difficult to the mortar of cleaning before mortar between silicon chip especially mucilage glue surface position, will be clean by cleaning down, reduce the mortar remaining between silicon chip, solve the fouling problems of Wafer Cleaning.
Description
Technical field
This utility model is related to mechanical field, more particularly, to a kind of silicon wafer turnover flusher.
Background technology
After silicon rod slicing, silicon chip needs to rinse degumming, when hanging vertical flushing silicon chip in bottom, silicon chip mucilage glue surface on top, two
The shower water of side hardly enters glue-line and silicon chip junction, causes this position mortar remaining, cement mortar ratio is normal, auxiliary material quality reaches
Mark, can wash off eventually through matting dirty, if seasonal variations, auxiliary material mass change, mucilage glue surface position can be caused dirty
Cannot clean, its main cause is that flushing water cannot be introduced into mucilage glue surface position, and residual mortar cannot clean.
Utility model content
The purpose of utility model：In order to provide a kind of effect more preferable silicon wafer turnover flusher, specific purposes are shown in specifically
Multiple substantial technological effects of implementation section.
In order to reach as above purpose, this utility model adopts the following technical scheme that：
A kind of silicon wafer turnover flusher, it is characterised in that comprising frame, described frame comprises vertical tabular knot
Structure, this platy structure can turn and be provided with positioning chuck, comprise handle in the middle part of described positioning chuck, and positioning chuck is while wear
Crossing platy structure is dovetail fixed seat, comprises a holding tank, also comprise to be sleeved on dovetail fixed seat in the middle part of dovetail fixed seat
Holding tank in dovetail mount, described dovetail mount is the projection of top, raised can be clamped in dovetail and the fixed underpan of lower section between
In fixed seat, fixed underpan can place silicon chip.
The further technical scheme of this utility model is, described fixed underpan comprises multiple clips, and clip can clamp silicon
Piece.
The further technical scheme of this utility model is, described positioning chuck comprises multiple holes, on described platy structure
Also comprise hole, also comprise to pass through the bolt in the hole on the hole and platy structure on positioning chuck, this bolt can be by positioning chuck
It is relatively fixed.
The further technical scheme of this utility model is, described frame comprises Storage water tank, and Storage water tank is fixed positioned at dovetail
The lower section of seat.
The further technical scheme of this utility model is, comprises wheel below described frame.
The further technical scheme of this utility model is, the plurality of hole is distributed around chuck perimeter.
The further technical scheme of this utility model is, described platy structure can lift, and it can drive positioning chuck
And handle and the lifting of dovetail fixed seat.
Using this utility model of as above technical scheme, have the advantages that with respect to prior art：By dovetail machine
Structure and rotating shaft drive silicon rod to rotate jointly, so that the silicon rod after cutting is ratated 90 degrees, mucilage glue surface will be in side, by shower water certainly
Upper and under be rinsed, be difficult to the mortar of cleaning before the especially mucilage glue surface position of the mortar between silicon chip, will be done by cleaning down
Only, reduce the mortar remaining between silicon chip, solve the fouling problems of Wafer Cleaning.
Brief description
In order to further illustrate this utility model, it is further illustrated below in conjunction with the accompanying drawings：
Fig. 1 is first state structural representation of utility model；
Fig. 2 is utility model second state structural representation；
Wherein：1. frame；2. dovetail fixed seat；3. dovetail mount；4. fixed underpan；5. handle；6. positioning chuck；7. fixing
Hole.
Specific embodiment
Below in conjunction with the accompanying drawings embodiment of the present utility model is illustrated, embodiment is not constituted to limit of the present utility model
System：
A kind of silicon wafer turnover flusher, it is characterised in that comprising frame, described frame comprises vertical tabular knot
Structure, this platy structure can turn and be provided with positioning chuck, comprise handle in the middle part of described positioning chuck, and positioning chuck is while wear
Crossing platy structure is dovetail fixed seat, comprises a holding tank, also comprise to be sleeved on dovetail fixed seat in the middle part of dovetail fixed seat
Holding tank in dovetail mount, described dovetail mount is the projection of top, raised can be clamped in dovetail and the fixed underpan of lower section between
In fixed seat, fixed underpan can place silicon chip.The technique effect of the essence that the technical scheme at this place is played and its realize process
For as follows：Jointly drive silicon rod to rotate by dovetail mechanism and rotating shaft, so that the silicon rod after cutting is ratated 90 degrees, mucilage glue surface will be in
Side, is rinsed from top to bottom by shower water, is difficult to the sand of cleaning before the especially mucilage glue surface position of the mortar between silicon chip
Slurry, will be clean by cleaning down, reduce the mortar remaining between silicon chip, solve the fouling problems of Wafer Cleaning.Plummer rotates
The information such as speed also need to send into display screen, so collectively form silicon chip edge silicon and fall grinding attachment, dovetail unit is located at whole machine
The front end of structure, and be connected with rotating shaft unit, rotating shaft unit is connected with lifting unit, is rotated by rotating shaft unit, drives dovetail list
Unit's rotation, drives silicon rod to rotate.
Job step is as follows：
(1) material is fixed on dovetail and takes；
(2) by the rotation of rotating shaft, drive bar dextrorotation to turn 90 degrees position, by the pin-and-hole locking on rotating shaft chuck
Position of rotation；The pin-and-hole at this place is fixing hole；
(3) make silicon rod be in suitable flushing highly by elevating mechanism；
(4) open Flushing nozzle, the mortar between hand-held moving flushing silicon chip；
(5) remove the alignment pin on chuck, by the rotation of rotating shaft, drive silicon rod to ratate 90 degrees again clockwise, make silicon chip court
On, wait for degumming.
Multiple clips are comprised on described fixed underpan, clip can clamp silicon chip.The essence that the technical scheme at this place is played
Technique effect and its process of realizing be as follows：This place provides a kind of specific fixed structure, and similar implementation all exists
In the protection domain of this patent.
Multiple holes are comprised on described positioning chuck, described platy structure also comprises hole, also comprise to pass through positioning chuck
On hole and platy structure on hole bolt, positioning chuck can be relatively fixed by this bolt.It is alignment pin.By alignment pin
Carry out position locking.
Storage water tank is comprised on described frame, Storage water tank is located at the lower section of dovetail fixed seat.The space rinsed is Storage water tank.
Wheel is comprised below described frame.Wheel facilitates its movement.The plurality of hole is distributed around chuck perimeter.Adjustment is more
Convenient.
Described platy structure can lift, and it can drive positioning chuck and handle and the lifting of dovetail fixed seat.Lifting
Mode and structure a lot, can be a steel wire stretchy platy structure lifting.Elevating mechanism reduces silicon rod to suitable position
Put, by rotating shaft, drive silicon rod to rotate to desired location, practical alignment pin carries out position locking, cut by flushing
Silicon chip gap, makes residual mortar all rinse well, completes silicon rod after cutting is participated in the flushing of mortar.
In a creative way, each effect above is individually present moreover it is possible to complete the combination of the above results with a nested structure.
It is clear that the technique effect that above structure is realized is realized, and discounting for additional technical scheme, this patent title is also
It can be a kind of cleaning rotational structure.In figure not shown part details.
It should be noted that multiple schemes that this patent provides comprise the basic scheme of itself, separate, not mutually
Restriction, but it can also be mutually combined in the case of not conflicting, and reach multiple effects and jointly realize.
Of the present utility model ultimate principle, principal character and of the present utility model advantage have been shown and described above.Ability
The technical staff in domain it should be recognized that this utility model is not restricted to the described embodiments, described in above-described embodiment and description
Principle of the present utility model is simply described, on the premise of without departing from this utility model spirit and scope, this utility model also can
There are various changes and modifications, these changes and improvements both fall within claimed scope.
Claims (7)
1. a kind of silicon wafer turnover flusher, it is characterised in that comprising frame, described frame comprises vertical platy structure,
Can turn on this platy structure and positioning chuck is installed, in the middle part of described positioning chuck, comprise handle, positioning chuck is while pass through
Platy structure is dovetail fixed seat, comprises a holding tank, also comprise to be sleeved on dovetail fixed seat in the middle part of dovetail fixed seat
Dovetail mount in holding tank, described dovetail mount is the projection of top, can be clamped in dovetail solid between projection and lower section fixed underpan
In reservation, fixed underpan can place silicon chip.
2. as claimed in claim 1 a kind of silicon wafer turnover flusher it is characterised in that comprising multiple on described fixed underpan
Clip, clip can clamp silicon chip.
3. as claimed in claim 1 a kind of silicon wafer turnover flusher it is characterised in that comprising multiple on described positioning chuck
Hole, described platy structure also comprises hole, also comprises to pass through the bolt in the hole on the hole and platy structure on positioning chuck, should
Positioning chuck can be relatively fixed by bolt.
4. as claimed in claim 1 a kind of silicon wafer turnover flusher it is characterised in that comprising Storage water tank in described frame,
Storage water tank is located at the lower section of dovetail fixed seat.
5. as claimed in claim 1 a kind of silicon wafer turnover flusher it is characterised in that comprising wheel below described frame.
6. as claimed in claim 3 a kind of silicon wafer turnover flusher it is characterised in that the plurality of hole is around chuck perimeter
Distribution.
7. as claimed in claim 1 a kind of silicon wafer turnover flusher it is characterised in that described platy structure can lift,
It can drive positioning chuck and handle and the lifting of dovetail fixed seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620882256.4U CN205997192U (en) | 2016-08-16 | 2016-08-16 | A kind of silicon wafer turnover flusher |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620882256.4U CN205997192U (en) | 2016-08-16 | 2016-08-16 | A kind of silicon wafer turnover flusher |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205997192U true CN205997192U (en) | 2017-03-08 |
Family
ID=58198859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620882256.4U Expired - Fee Related CN205997192U (en) | 2016-08-16 | 2016-08-16 | A kind of silicon wafer turnover flusher |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205997192U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110435026A (en) * | 2019-08-11 | 2019-11-12 | 赫晓苓 | A kind of photovoltaic slice device that can cut conversion and break-resistance in real time |
| CN110899228A (en) * | 2019-12-07 | 2020-03-24 | 义乌市千智机械设备有限公司 | Workpiece cleaning device for machining of mechanical equipment |
-
2016
- 2016-08-16 CN CN201620882256.4U patent/CN205997192U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110435026A (en) * | 2019-08-11 | 2019-11-12 | 赫晓苓 | A kind of photovoltaic slice device that can cut conversion and break-resistance in real time |
| CN110435026B (en) * | 2019-08-11 | 2021-06-04 | 安徽伟迈信息技术有限公司 | Photovoltaic section device capable of cutting, converting and preventing breakage in real time |
| CN110899228A (en) * | 2019-12-07 | 2020-03-24 | 义乌市千智机械设备有限公司 | Workpiece cleaning device for machining of mechanical equipment |
| CN110899228B (en) * | 2019-12-07 | 2020-11-03 | 义乌市千智机械设备有限公司 | Workpiece cleaning device for machining of mechanical equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170308 Termination date: 20210816 |