CN205986795U - Trompil formula crystal chip - Google Patents
Trompil formula crystal chip Download PDFInfo
- Publication number
- CN205986795U CN205986795U CN201620759870.1U CN201620759870U CN205986795U CN 205986795 U CN205986795 U CN 205986795U CN 201620759870 U CN201620759870 U CN 201620759870U CN 205986795 U CN205986795 U CN 205986795U
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- China
- Prior art keywords
- installing zone
- tuning fork
- crystal chip
- clearance hole
- electrode
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Abstract
The utility model discloses a trompil formula crystal chip, include tuning fork structure and the installing zone constituteed by two parallel resonance arm, its characterized in that: be equipped with the clearance hole at the installing zone, the clearance hole adopts the complete eating thrown of wet etching technology, and it is the through -hole on surface about the thickness orientation runs through to form along the Z axle. The utility model discloses process out the clearance hole at crystal chip mounting region, can avoid the energy dissipation of installing zone, improved the figure of merit of syntonizer, avoid external vibration to pass through the installing zone with the temperature variation simultaneously and transmit the tuning fork structure to the stability of syntonizer has been improved, still adopting to corrode on quartz crystal chip tuning fork and processing out the groove structure of two -sided symmetry, grooved tuning fork structure can form mating electrode in the both sides of cell body and the side of tuning fork, has increased electrode design's flexibility, is favorable to optimizing the electrode overall arrangement to promote the launching efficiency of electrode effectively.
Description
Technical field
The utility model is related to crystal chip structure, more particularly, to a kind of perforating crystal chip structure.
Background technology
Quartz crystal chip, such as resonator, generally adopt the quartz wafer of Z cut type, using either physically or chemically processing
Go out tuning fork structure, according to the piezoelectric modulus of quartz crystal, make electrode at the four sides of tuning fork, using the piezo-electric effect of quartz crystal
Enter row energization so that tuning fork structure can do flexural vibrations along X axis.But the electrode that four sides makes can not effectively play electrode
Launching efficiency.Crystal resonator is generally connected with pedestal by installing zone, if installing zone is not taken effectively with vibration tuning fork
Quarantine measures, it will lead to vibrational energy to dissipate, reduce the quality factor of resonator, meanwhile, extraneous vibration and temperature change
Tuning fork structure will be delivered to by installing zone, thus affecting the stability of resonator.
Utility model content
For the deficiency existing for prior art, the problem that the utility model is solved is, how to provide one kind can carry
High resonator stability and effective chip structure playing electrode excitation efficiency.
For achieving the above object, the utility model adopts following scheme：
Perforating crystal chip, including the tuning fork structure being made up of two parallel resonance arms and installing zone, sets in installing zone
There is clearance hole, described clearance hole adopts wet corrosion technique fully etched through formation through-thickness runs through the through hole of upper and lower surface.
Described clearance hole is installing zone along the 50%～80% of X-direction overall width along the width of X-direction.
Described clearance hole is symmetrical arranged along installing zone Y direction axis.
Described resonance arm upper and lower surface is designed with groove and its positional symmetry, described groove madial wall and resonance arm side surface
Form electrode.
Compared to prior art, the utility model has the advantages that：
1st, the utility model processes clearance hole in crystal chip installing zone, is avoided that the energy dissipation of installing zone, improves
The quality factor of resonator, avoid the vibration in the external world and temperature change to be delivered to tuning fork structure by installing zone simultaneously, thus
Improve the stability of resonator.
2nd, the utility model goes out the trough body structure of double-sided symmetrical using corrosion processing on quartz crystal chip tuning fork, relatively
In original unslotted tuning fork, the form of electrode can only be made at four sides, the tuning fork structure of fluting can be in the both sides of cell body and tuning fork
Side formed pairing electrode, increased the flexibility of electrode design, be conducive to optimize electrode lay-out, thus effectively being lifted
The launching efficiency of electrode.
Brief description
Fig. 1 is structural representation of the present utility model.
In figure, 1- groove, 2- clearance hole.
Specific embodiment
In the utility model, resonator tuning fork structure is designed according to crystal chip structural requirement and plot structure is installed, generally
Using the quartz crystal chip of wet etching machine-shaping, crystal adopts Z cut type, and that is, thickness is the Z axis of crystal to tuning fork width
Select crystal X, Y-axis with length respectively.Below in conjunction with the accompanying drawings the utility model is described in further detail, but this practicality is new
The embodiment not limited to this of type.
Embodiment：
Perforating quartz crystal chip, as shown in Figure 1, including the tuning fork structure being made up of two parallel resonance arms and peace
Dress area, described double resonance arm is symmetrical with respect to the axis of Y direction.It is provided with clearance hole 2, described clearance hole 2 in installing zone
Using wet corrosion technique fully etched through being formed along Z axis is the through hole that thickness direction runs through upper and lower surface.
So, installing zone and tuning fork structure being effectively isolated, thus avoiding the energy dissipation of installing zone, improve
The quality factor of resonator.
Described clearance hole 2 is 50%～80% along width and the installing zone of X-direction along the ratio of the width of X-direction, excellent
Select 70%.
So, vibration and the temperature change in the external world on the premise of guaranteeing product strength, can at utmost be avoided
Tuning fork structure is delivered to by installing zone, makes the stability of resonator more preferable.
Described clearance hole 2 is symmetrical arranged along installing zone Y direction axis.Described clearance hole 2 can pass through described axis
Line, it is shaped as rectangle or oval or other symmetric shapes.The quantity of described clearance hole 2 is at least one.
So, by the symmetrical vibration that can be prevented effectively from the external world and temperature change of clearance hole to two resonance
Arm causes different impacts moreover it is possible to effectively reduce energy dissipation.
Described resonance arm upper and lower surface is designed with groove 1 and its position is symmetrical along the axis of Y direction, described groove 1
Madial wall forms electrode with resonance arm side surface.
So, increased the flexibility of electrode design, be conducive to optimizing electrode lay-out, thus effectively lifting electrode
Launching efficiency.
In the utility model, can be formed and there is different cell bodies or the crystal of hole body structure by way of substep corrodes
Chip.
The first step, forms metal erosion mask by photoetching process, using wet corrosion technique, by crystal chip and installation
The isolation pore structure in area corrodes shaping simultaneously, while forming crystal chip tuning fork structure, also form the installing zone of eating thrown
Isolation pore structure.Second step, by photoetching process, forms the cell body etching mask on tuning fork structure, by wet corrosion technique,
Form the trough body structure on tuning fork, by the control corrosion rate process time, can get the trough body structure of different depth, cell body can not lose
Wear.
Finally illustrate, above example only in order to the technical solution of the utility model to be described and unrestricted, although ginseng
According to preferred embodiment, the utility model is described in detail, it will be understood by those within the art that, can be to this
The technical scheme of utility model is modified or equivalent, the objective without deviating from utility model technical scheme and scope,
It all should be covered in the middle of right of the present utility model.
Claims (4)
1. perforating crystal chip, including the tuning fork structure being made up of two parallel resonance arms and installing zone it is characterised in that：?
Installing zone is provided with clearance hole（2）, described clearance hole（2）Using wet corrosion technique fully etched through formation through-thickness runs through
The through hole of upper and lower surface.
2. perforating crystal chip according to claim 1 it is characterised in that：Described clearance hole（2）Width along X-direction
Spend for installing zone along the 50%～80% of X-direction overall width.
3. perforating crystal chip according to claim 1 it is characterised in that：Described clearance hole（2）Along installing zone Y-axis side
It is symmetrical arranged to axis.
4. the perforating crystal chip according to claim 1 or 2 or 3 it is characterised in that：Described resonance arm upper and lower surface is all
It is provided with groove（1）And its positional symmetry, described groove（1）Madial wall forms electrode with resonance arm side surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620759870.1U CN205986795U (en) | 2016-07-19 | 2016-07-19 | Trompil formula crystal chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620759870.1U CN205986795U (en) | 2016-07-19 | 2016-07-19 | Trompil formula crystal chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205986795U true CN205986795U (en) | 2017-02-22 |
Family
ID=58025360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620759870.1U Active CN205986795U (en) | 2016-07-19 | 2016-07-19 | Trompil formula crystal chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205986795U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114543778A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Method for assembling vibration reduction structure in chip |
-
2016
- 2016-07-19 CN CN201620759870.1U patent/CN205986795U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114543778A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Method for assembling vibration reduction structure in chip |
| CN114543778B (en) * | 2020-11-24 | 2023-04-28 | 北京晨晶电子有限公司 | Method for assembling vibration reduction structure in chip |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |