CN205980721U - Silicon wafer cleaning machine with cooling device - Google Patents
Silicon wafer cleaning machine with cooling device Download PDFInfo
- Publication number
- CN205980721U CN205980721U CN201620848497.7U CN201620848497U CN205980721U CN 205980721 U CN205980721 U CN 205980721U CN 201620848497 U CN201620848497 U CN 201620848497U CN 205980721 U CN205980721 U CN 205980721U
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- CN
- China
- Prior art keywords
- silicon wafer
- air duct
- cold air
- wafer cleaner
- cleaning machine
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a silicon wafer cleaning machine with cooling device, including the silicon wafer cleaning machine body, its characterized in that: unloading bench side at the cleaning machine body is provided with the cold air duct, the cold air duct passes through the tuber pipe and links to each other with the air conditioner, by the air conditioner to the defeated cold air convey of cold air duct. The utility model discloses making the silicon chip after drying cool off fast in the cold air duct in unloading platform transportation process, cong 60~70 DEG C of quick coolings to 30 DEG C of left and right sides, just can directly going up the sorter and select separately, the cool time that has significantly reduced has improved work efficiency.
Description
Technical field
This utility model belongs to silicon chip cutting technique field, more particularly to a kind of Wafer Cleaning with chiller
Machine.
Background technology
Silicon chip needs through degumming, cleaning after the completion of cutting.Silicon chip clean in cleaning machine after also by hot blast
Dried., at 60 ~ 70 DEG C, the too high separator that can affect of temperature is to silicon chip for the silicon temperature that silicon wafer cleaner dries out at present
Detection accuracy.When original solution is to treat that silicon temperature is reduced to 30 DEG C about by placement a period of time,
Go up separator again to be sorted.Thus cause the prolongation of process time, have impact on production efficiency.
Content of the invention
This utility model purpose is the defect for existing silicon wafer cleaner, provides and a kind of can quickly cool down silicon chip
Silicon wafer cleaner with chiller.
This utility model for achieving the above object, adopts the following technical scheme that：
A kind of silicon wafer cleaner with chiller, including silicon wafer cleaner body it is characterised in that：In cleaning machine originally
It is provided with cold air duct, described cold air duct is connected with air conditioner by airduct, from air conditioner to cold wind above the blanking bench of body
Passage transporting cold wind.
It is further characterized by：Described cold air duct air outlet is located at blanking bench top.
Further：It is provided with guide plate, described guide plate tilts to blanking bench tail end direction in described air outlet.
Preferably：Described cold air duct afterbody is provided with backwind tube, and described backwind tube is connected with air conditioner air inlet.
It is provided with return air fan in described backwind tube.
Described return air fan is axial flow blower.
Described cold air duct height is 250-350mm.
This utility model makes the silicon chip after drying quickly cool down in cold air duct in blanking bench course of conveying, from 60 ~
70 DEG C are cooled fast to 30 DEG C about and are sorted it is possible to directly go up separator, greatly reduce cool time, improve work
Make efficiency.
Brief description
Fig. 1 is this utility model structural representation.
Specific embodiment
A kind of silicon wafer cleaner with chiller as shown in Figure 1, including silicon wafer cleaner body 1, in cleaning machine basis
It is provided with cold air duct 9, described cold air duct 9 is connected with air conditioner 4 by airduct 3, by air conditioner 4 above the blanking bench 2 of body 1
To cold air duct 9 transporting cold wind.
The air outlet 5 of described cold air duct 9 is located at blanking bench 2 top so that the silicon chip dried can from blanking bench 2 top
To begin to cool down.It is provided with guide plate 6, described guide plate 6 tilts to blanking bench 2 tail end direction, makes cold wind in described air outlet 5
Blow to blanking bench 2 tail end direction, extend the cool time of silicon chip.Described cold air duct 9 afterbody is provided with backwind tube 7, institute
State backwind tube 7 to be connected so that the cold wind after cooling down reuses with air conditioner 4 air inlet, decrease the loss of cold.Described time
It is provided with axle stream return air fan 8 in airduct 7, by the pressure return air of axle stream return air fan 8, improve the rate flow of cold wind,
Improve cooling effectiveness.Described cold air duct 9 height is 250-350mm, slightly above silicon chip height, decreases the consumption of cold wind,
Energy saving.
Claims (7)
1. a kind of silicon wafer cleaner with chiller, including silicon wafer cleaner body it is characterised in that：In cleaning machine body
Blanking bench above be provided with cold air duct, described cold air duct is connected with air conditioner by airduct, is led to from air conditioner to cold wind
Road transporting cold wind.
2. the silicon wafer cleaner with chiller according to claim 1 it is characterised in that：Described cold air duct air-out
Mouth is located at blanking bench top.
3. the silicon wafer cleaner with chiller according to claim 2 it is characterised in that：Setting in described air outlet
There is guide plate, described guide plate tilts to blanking bench tail end direction.
4. the silicon wafer cleaner with chiller according to Claims 2 or 3 it is characterised in that：Described cold air duct
Afterbody is provided with backwind tube, and described backwind tube is connected with air conditioner air inlet.
5. the silicon wafer cleaner with chiller according to claim 4 it is characterised in that：Setting in described backwind tube
There is return air fan.
6. the silicon wafer cleaner with chiller according to claim 5 it is characterised in that：Described return air fan is axle
Flow fan.
7. the silicon wafer cleaner with chiller according to any one of claim 1-3 it is characterised in that：Described cold wind
Channel height is 250-350mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620848497.7U CN205980721U (en) | 2016-08-05 | 2016-08-05 | Silicon wafer cleaning machine with cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620848497.7U CN205980721U (en) | 2016-08-05 | 2016-08-05 | Silicon wafer cleaning machine with cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205980721U true CN205980721U (en) | 2017-02-22 |
Family
ID=58029567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620848497.7U Active CN205980721U (en) | 2016-08-05 | 2016-08-05 | Silicon wafer cleaning machine with cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205980721U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109539689A (en) * | 2018-11-23 | 2019-03-29 | 江苏科林泰电子有限公司 | Full-automatic silicon wafer cleaning machine with cooling device |
-
2016
- 2016-08-05 CN CN201620848497.7U patent/CN205980721U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109539689A (en) * | 2018-11-23 | 2019-03-29 | 江苏科林泰电子有限公司 | Full-automatic silicon wafer cleaning machine with cooling device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211013 Address after: 710199 no.388 Hangtian Middle Road, Chang'an District, Xi'an City, Shaanxi Province Patentee after: LONGI GREEN ENERGY TECHNOLOGY Co.,Ltd. Address before: No. 111-1, Ximei Road, New District, Wuxi City, Jiangsu Province, 214000 Patentee before: WUXI LONGI SILICON MATERIALS Corp. |
|
| TR01 | Transfer of patent right |