CN205958612U - Probe card installation device - Google Patents
Probe card installation device Download PDFInfo
- Publication number
- CN205958612U CN205958612U CN201621009568.0U CN201621009568U CN205958612U CN 205958612 U CN205958612 U CN 205958612U CN 201621009568 U CN201621009568 U CN 201621009568U CN 205958612 U CN205958612 U CN 205958612U
- Authority
- CN
- China
- Prior art keywords
- chute
- erecting bed
- probe card
- hole
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model provides a probe card installation device, including base plate and mount table, the base plate is made by printed circuit board, is provided with on the base plate by the probe that adhesive material is fixed, and what the base plate can be nimble installs within the mount table, and the accurate position of adjusting the probe makes it to aim at by test equipment in horizontal direction and vertical direction, and length and the width of mount table can be adjusted in a flexible way and make it to satisfy the customer and carry out the requirement of changing to basic plate size simultaneously, have improved the accuracy and the efficiency that detect, and the cost of manufacturing probe card has been reduced again to the while.
Description
Technical field
This utility model is related to semiconductor test technical field and in particular to a kind of probe card installation device.
Background technology
Now, in the production and exploitation of semiconductor device, in order to monitor stability, the debugging new product of semiconductor device
Design and carry out failure analysis it is often necessary to test the various electrology characteristics of semiconductor device.Logical in above-mentioned test process
Often use probe card.
Existing probe card is first to fix probe jointing material, then the pin being fixed with epoxy resin is fixed to
On printed substrate, then carry out being welded and fixed welding.But existing probe is when making probe card, customer demand can be run into
The width of change i.e. printed substrate needs situation about increasing, and that is accomplished by for printed substrate remaking needs
Width, the pin being fixed with epoxy resin is being assembled on new plank, is leading to make new printed substrate, the cycle is relatively
Long, cost is also than larger.
Utility model content
For solve above-mentioned technical problem, a kind of probe card installation device of the present utility model, arbitrarily extensible probe card
Length and width, it is possible to the accurate position changing probe is allowed to be aligned and is devices under, improves the efficiency of test.
In order to achieve the above object, a kind of probe card installation device of the present utility model, including substrate and erecting bed, described
Substrate is made up of printed circuit board (PCB), and substrate is provided with the probe fixed by jointing material, described substrate is provided with first and leads to
Hole and the second through hole, described erecting bed is provided with to place the groove of substrate, be provided with described groove the first chute and
Second chute, is provided with described first chute and the second chute and can move freely and carry out along the first chute with the second chute
The first fixing connecting bolt and the second connecting bolt, the first connecting bolt and the second connecting bolt pass through first through hole and second
Through hole simultaneously screws, and substrate can be fixed on erecting bed.
Further, described erecting bed also includes length adjustment plate and width adjustment plates, described length adjustment plate has
The length adjustment expansion link being connected with erecting bed, described width adjustment plates are had the width adjusting being connected with erecting bed and stretch
Bar.
Further, the first chute on described erecting bed and the second chute have several bolt spacing holes, described spiral shell
Bolt spacing hole equidistantly arranges on the first chute and the second chute.
Further, the first chute on described erecting bed and the upper arrangement in the horizontal direction of the second chute.
Further, the first chute on described erecting bed and the vertically upper arrangement of the second chute.
Further, the position of the first through hole on described substrate and the second through hole mutually piles, described first through hole
In the horizontal direction or vertical direction moves to be directed at the bolt spacing hole of the first chute and the second chute with the second through hole.
Further, described jointing material is epoxy resin.
Further, described erecting bed is made using with substrate identical printed circuit board (PCB).
This utility model compared with the existing technology, has advantages below and beneficial effect：
This utility model pin provides a kind of probe card installation device, the substrate of probe card can flexibly be arranged on erecting bed it
Interior, the position of accurate adjustment probe is allowed to be aligned and is devices under in the horizontal direction and the vertical direction, the length of erecting bed simultaneously
Degree and width can neatly be adjusted being allowed to meet the requirement that client is changed to the size of substrate, improve the essence of detection
Exactness and efficiency, reduce the cost manufacturing probe card simultaneously again.
Brief description
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or in description of the prior art the accompanying drawing of required use be briefly described it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, before not paying creative labor
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is sectional view of the present utility model；
Fig. 2 is the top view of this utility model substrate；
Fig. 3 is the top view of this utility model erecting bed.
Reference
1 substrate, 2 erecting bed, 3 epoxy resin, 4 probe, 5 first through hole 6 second through hole, 7 groove 8 first chute 9
Two chutes, 10 bolt spacing hole, 11 length adjustment plate, 12 length adjustment expansion link, 13 width adjustment plates 14 width adjusting is stretched
Bar 15 first connecting bolt 16 second connecting bolt
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely description is it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of making creative work
The every other embodiment being obtained, broadly falls into the scope of this utility model protection.
In order that the purpose of this utility model, technical scheme and advantage are clearer, come below in conjunction with the accompanying drawings to do further
Describe in detail.
As depicted in figs. 1 and 2, a kind of probe card installation device of the present invention, including the substrate 1 being made up of printed circuit board (PCB)
With the erecting bed 2 in order to installation base plate 1.The probe 4 fixed by epoxy resin 3 is provided with substrate 1, substrate 1 both sides are provided with
First through hole 5 and the second through hole 6.It is provided with erecting bed 2 to place the groove 7 of substrate 1, be provided with first in groove 7 sliding
Groove 8 and the second chute 9.The position of the first chute 8 and the second chute 9 is corresponding with first through hole 5 and the second through hole 6, and first is sliding
Being provided with groove 8 and the second chute 9 can be along the first chute 8 and the first connection moving freely and being fixed with the second chute 9
Bolt 15 and the second connecting bolt 16, the first connecting bolt 15 and the second connecting bolt 16 pass through first through hole 5 and the second through hole 6
And screw, substrate 1 can be fixed on erecting bed 2.
As shown in figure 3, in order to enable users to accurately adjust the position of probe 4, the first chute on erecting bed 2 in test
8 and second chute 9 adopt cross-shaped configuration, the first connecting bolt 15 and the second connecting bolt 16 can be made along chute in the horizontal direction
Move up with Vertical Square.It is provided with several bolt spacing holes 10, bolt spacing hole 10 etc. on first chute 8 and the second chute 9
Spacing is arranged on the first chute 8 and the second chute 9, and position is symmetrical simultaneously.So defined by bolt spacing hole 10
Probe 4 in the horizontal direction with vertical direction on adjustment spacing, facilitate user more accurately to be calibrated.
Length adjustment plate 11 and width adjustment plates 13 are also included on erecting bed 2, length adjustment plate 11 has and erecting bed 2 phase
The length adjustment expansion link 12 connecting, width adjustment plates 13 have the width adjusting expansion link 14 being connected with erecting bed 2.Pass through
Adjustment length adjustable telescopic rod 12 and width adjusting expansion link 14 can change the length and width of erecting bed 2, meet client successively
Modification to substrate 1 size requires.
In actual use, user first substrate 1 is positioned within the groove 7 of erecting bed 2, then by substrate 1
First through hole 5 and the second through hole 6 be aligned chute, according to the position being devices under, edge in the horizontal direction and the vertical direction
First chute 8 and the second chute 9 move, and finally the first connecting bolt 15 and the second connecting bolt 16 are installed on first sliding
In groove 8 and the second chute 9, complete the fixed and positioned of probe card.
Additionally, when client proposes the requirement of modification substrate 1 size, user can propose demand according to client, adjusts length
Adjustable telescopic rod 12 and width adjusting expansion link 14, to change the length and width of erecting bed 2, it is to avoid prior art needs weight
Newly assemble the problem of various sizes of substrate 1.
In sum, a kind of probe card installation device of this utility model pin, the substrate 1 of probe card can flexibly be arranged on
Within erecting bed 2, the position of accurate adjustment probe 4 is allowed to be aligned and is devices under, simultaneously in the horizontal direction and the vertical direction
The length and width of erecting bed 2 can neatly be adjusted being allowed to meet the requirement that client is changed to the size of substrate 1, carries
The high degree of accuracy of detection and efficiency, reduce the cost manufacturing probe card simultaneously again.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all this
Within the spirit of utility model and principle, any modification, equivalent substitution and improvement made etc., should be included in this utility model
Protection domain within.
Claims (9)
1. a kind of probe card installation device is it is characterised in that include substrate and erecting bed, described substrate is by printed circuit board (PCB) system
Become, substrate is provided with the probe fixed by jointing material, described substrate is provided with first through hole and the second through hole, described peace
The groove of substrate is provided with to place on dress platform, in described groove, is provided with the first chute and the second chute, described first is sliding
Being provided with groove and the second chute can be along the first chute and the first connecting bolt moving freely and being fixed with the second chute
With the second connecting bolt, the first connecting bolt and the second connecting bolt pass through first through hole and the second through hole and screw, can be by base
Plate is fixed on erecting bed.
2. a kind of probe card installation device is adjusted it is characterised in that also including length on described erecting bed as claimed in claim 1
Section plate and width adjustment plates, described length adjustment plate has the length adjustment expansion link being connected with erecting bed, and described width is adjusted
Section plate has the width adjusting expansion link being connected with erecting bed.
3. as claimed in claim 2 a kind of probe card installation device it is characterised in that the length of the groove of described erecting bed and
Width is more than or equal to the length and width of substrate.
4. as claimed in claim 3 a kind of probe card installation device it is characterised in that the first chute on described erecting bed and
Second chute has several bolt spacing holes, and described bolt spacing hole equidistantly arranges on the first chute and the second chute.
5. as claimed in claim 4 a kind of probe card installation device it is characterised in that the first chute on described erecting bed and
Second chute is upper in the horizontal direction to be arranged.
6. as claimed in claim 5 a kind of probe card installation device it is characterised in that the first chute on described erecting bed and
Second chute is vertically upper to be arranged.
7. any one the probe card installation device as described in claim 4 or 5 it is characterised in that on described substrate first
The position of through hole and the second through hole mutually piles, and in the horizontal direction or vertical direction is moved for described first through hole and the second through hole
Move to be directed at the bolt spacing hole of the first chute and the second chute.
8. as claimed in claim 1 a kind of probe card installation device it is characterised in that described jointing material is asphalt mixtures modified by epoxy resin
Fat.
9. as claimed in claim 1 a kind of probe card installation device it is characterised in that described erecting bed is using identical with substrate
Printed circuit board (PCB) make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621009568.0U CN205958612U (en) | 2016-08-30 | 2016-08-30 | Probe card installation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621009568.0U CN205958612U (en) | 2016-08-30 | 2016-08-30 | Probe card installation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205958612U true CN205958612U (en) | 2017-02-15 |
Family
ID=57978961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621009568.0U Expired - Fee Related CN205958612U (en) | 2016-08-30 | 2016-08-30 | Probe card installation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205958612U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109540248A (en) * | 2018-12-27 | 2019-03-29 | 佛山科学技术学院 | A kind of water level probe device |
-
2016
- 2016-08-30 CN CN201621009568.0U patent/CN205958612U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109540248A (en) * | 2018-12-27 | 2019-03-29 | 佛山科学技术学院 | A kind of water level probe device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170215 Termination date: 20210830 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |