CN205941630U - Integrated circuit direct current test probe facility - Google Patents

Integrated circuit direct current test probe facility Download PDF

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Publication number
CN205941630U
CN205941630U CN201620925585.2U CN201620925585U CN205941630U CN 205941630 U CN205941630 U CN 205941630U CN 201620925585 U CN201620925585 U CN 201620925585U CN 205941630 U CN205941630 U CN 205941630U
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China
Prior art keywords
probe
fixing hole
integrated circuit
hole
test
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Active
Application number
CN201620925585.2U
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Chinese (zh)
Inventor
陈�峰
陈一峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chengdu Hiwafer Technology Co Ltd
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Chengdu Hiwafer Technology Co Ltd
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Priority to CN201620925585.2U priority Critical patent/CN205941630U/en
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Publication of CN205941630U publication Critical patent/CN205941630U/en
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Abstract

The utility model provides an integrated circuit direct current test probe facility, it includes the probe station and visits the needle base seat, the one end of visiting the needle base seat is equipped with the probe, be equipped with a plurality of fixed orificess that are the matrix arrangement on the probe station, the bottom surface of visiting the needle base seat is equipped with the mounting hole with a plurality of fixed orifices one -to -ones, be equipped with the electric magnet column with fixed orifices looks adaptation in each mounting hole, be equipped with the electromagnetism controlling part in the spy needle base seat, when the electromagnetism controlling part is switched on, electromagnetism controlling part driving electromagnet post stretches out and stretches into in the fixed orifices from the mounting hole, when the electromagnetism controlling part cuts off the power supply, in the electromagnetism controlling part driving electromagnet post withdrawal mounting hole. In this way, the utility model discloses can be according to the fixed or removal spy needle base seat of test needs.

Description

Integrated circuit DC test probe unit
Technical field
This utility model is related to current testing device technical field, more particularly to a kind of integrated circuit DC test probe Device.
Background technology
Currently, the volume of integrated circuit is less and less, function gets more and more, and higher integrated level leads to chip area more next Less, required test request probe is more and more thinner, and each probe spacing is more and more nearer, to integrated circuit testing, especially grinds The manual test that the stage of sending out widely applies, On-wafer measurement propose new challenge.
Compared with full-automatic testing, manual test need not buy probe card, need not carry out test program, and cost is lower, surveys It is convenient that examination is changed, but the testing time is longer, so manual test is suitably applied the research and development of products stage.In actual manual probe There is following defect in test process:Because probe is more and more thinner, once careless manipulation causes slight impact can damage needle point, Cause test error;Manual test is generally used for development, and the product size researched and developed is indefinite, and the flexible range of probe tip Typically small, need traveling probe pedestal, and existing test device probe base is all generally fixed.
Utility model content
This utility model is mainly solving the technical problems that provide a kind of integrated circuit DC test probe unit, Neng Gougen Need fixing or traveling probe pedestal according to test.
For solving above-mentioned technical problem, the technical scheme that this utility model adopts is:There is provided a kind of integrated circuit straight Current test probe unit, including probe station and probe base, one end of described probe base is provided with probe, and described probe station sets There are multiple fixing holes arranged in arrays, the bottom surface of described probe base is provided with is installed correspondingly with the plurality of fixing hole Hole, each described installation in the hole is provided with the electromagnet post being adapted with described fixing hole, is provided with electromagnetism control in described probe base Part, when described electromagnetism control is energized, described electromagnetism control drives described electromagnet post to stretch out from described installing hole and stretch into institute State in fixing hole, when described electromagnetism control power-off, described electromagnetism control drives the described electromagnet post described installation in the hole of retraction.
Preferably, it is provided with manual actuation unit in described probe base, described manual actuation unit is used for driving described spy Around pin or move up and down.
Preferably, the spacing between two neighboring fixing hole is 0.5~5cm, and the depth of described fixing hole is 20~50mm.
Preferably, described fixing hole be shaped as square, the length of side of described fixing hole is 0.5~5cm.
Preferably, described fixing hole is generally circular in shape, a diameter of 0.5~5cm of described fixing hole.
It is different from the situation of prior art, the beneficial effects of the utility model are:By arranging in matrix in probe station setting Multiple fixing holes of row, probe base is placed on probe station, and the bottom surface of probe base has the electric magnet being adapted with fixing hole Post, electromagnet post can be flexible under electromagnetic property effect, and when energized, electromagnet post stretches in fixing hole, probe base quilt Fixing, when power is off, electromagnet post is retracted, and probe base can move such that it is able to need to fix according to test on probe station Or traveling probe pedestal, can be hardly damaged in order to the movement of probe, probe.
Brief description
Fig. 1 is the structural representation of this utility model embodiment integrated circuit DC test probe unit.
Fig. 2 is the schematic top plan view of the probe station of this utility model embodiment integrated circuit DC test probe unit.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out Clearly and completely description is it is clear that described embodiment is only a part of embodiment of the present utility model rather than whole Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of making creative work The every other embodiment being obtained, broadly falls into the scope of this utility model protection.
In the lump referring to Fig. 1 and Fig. 2, the integrated circuit DC test probe unit of the present embodiment includes probe station 1 and probe Pedestal 2, one end of probe base 2 is provided with probe 21, and probe station 1 is provided with multiple fixing holes 11 arranged in arrays, probe base The bottom surface of seat 2 is provided with the one-to-one installing hole 22 with multiple fixing holes 11, is provided with and fixing hole 11 phase in each installing hole 22 The electromagnet post 23 of adaptation, is provided with electromagnetism control 3 in probe base 2, when electromagnetism control 3 is energized, electromagnetism control 3 drives electromagnetism Iron prop 23 stretches out from installing hole 22 and stretches into fixing hole 11, when electromagnetism control 3 power-off, electromagnetism control 3 DM post In 23 retraction installing holes 22.
In the present embodiment, it is provided with manual actuation unit 4 in probe base 2, manual actuation unit 3 is used for driving probe 21 Around or move up and down.
Fixing hole 11 is mainly used in Motionless electromagnetic iron prop 23, in a concrete application, between two neighboring fixing hole 11 Spacing be 0.5~5cm, the depth of fixing hole 11 is 20~50mm.The shape of fixing hole 11 can be square or circular, phase Ying Di, electromagnet post 23 is also square or circular, when being shaped as square of fixing hole 11, and the length of side of fixing hole 11 is 0.5 ~5cm, fixing hole 11 generally circular in shape when, a diameter of 0.5~5cm of fixing hole 11.
In order to ensure reliability, probe base 2 does not all have electric magnet characteristic in addition to electromagnet post 23.Probe station 1 can To adopt soft magnetic materials, such as ferrum, cobalt, nickel etc. and its alloy etc..
For the convenience of manual operation, power switch button and probe operation panel can be arranged on probe base 2, when When needing fixing probe base 2, button can be turned on the power switch, electromagnetism control 3 is energized, and electromagnet post 23 is stretched by electromagnetism control 3 Go out installing hole 22 and stretch in fixing hole 11, so that probe base 2 is fixed on probe station 1, be smoothed out beneficial to test.Work as needs During traveling probe pedestal 2, button, electromagnetism control 3 power-off can be turned off the power switch, in electromagnet post 23 retraction installing hole 22, make Obtain probe base 2 to move freely on probe station 1.
Probe 21 carries out DC test by the way of pin bundle, can control probe 21 in little model on probe operation panel Around in enclosing, move up and down.
The foregoing is only embodiment of the present utility model, not thereby limit the scope of the claims of the present utility model, every The equivalent structure made using this utility model description and accompanying drawing content or equivalent flow conversion, or be directly or indirectly used in Other related technical fields, are all included in the same manner in scope of patent protection of the present utility model.

Claims (5)

1. a kind of integrated circuit DC test probe unit is it is characterised in that include probe station and probe base, described probe base One end of seat is provided with probe, and described probe station is provided with multiple fixing holes arranged in arrays, and the bottom surface of described probe base sets There is the one-to-one installing hole with the plurality of fixing hole, each described installation in the hole is provided with the electricity being adapted with described fixing hole Magnetic column, is provided with electromagnetism control in described probe base, when described electromagnetism control is energized, described electromagnetism control drives described electricity Magnetic column stretches out from described installing hole and stretches into described fixing hole, and when described electromagnetism control power-off, described electromagnetism control drives The dynamic described electromagnet post described installation in the hole of retraction.
2. integrated circuit DC test probe unit according to claim 1 is it is characterised in that set in described probe base There is manual actuation unit, around described manual actuation unit is used for driving described probe or move up and down.
3. integrated circuit DC test probe unit according to claim 1 and 2 is it is characterised in that two neighboring fixation Spacing between hole is 0.5~5cm, and the depth of described fixing hole is 20~50mm.
4. integrated circuit DC test probe unit according to claim 3 is it is characterised in that the shape of described fixing hole For square, the length of side of described fixing hole is 0.5~5cm.
5. integrated circuit DC test probe unit according to claim 3 is it is characterised in that the shape of described fixing hole For circle, a diameter of 0.5~5cm of described fixing hole.
CN201620925585.2U 2016-08-23 2016-08-23 Integrated circuit direct current test probe facility Active CN205941630U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620925585.2U CN205941630U (en) 2016-08-23 2016-08-23 Integrated circuit direct current test probe facility

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620925585.2U CN205941630U (en) 2016-08-23 2016-08-23 Integrated circuit direct current test probe facility

Publications (1)

Publication Number Publication Date
CN205941630U true CN205941630U (en) 2017-02-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620925585.2U Active CN205941630U (en) 2016-08-23 2016-08-23 Integrated circuit direct current test probe facility

Country Status (1)

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CN (1) CN205941630U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108459180A (en) * 2017-02-21 2018-08-28 意法半导体股份有限公司 For can magnetic actuation device probe card and test system including probe card

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108459180A (en) * 2017-02-21 2018-08-28 意法半导体股份有限公司 For can magnetic actuation device probe card and test system including probe card

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