CN205940665U - Air -flow sensor - Google Patents
Air -flow sensor Download PDFInfo
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- CN205940665U CN205940665U CN201620921043.8U CN201620921043U CN205940665U CN 205940665 U CN205940665 U CN 205940665U CN 201620921043 U CN201620921043 U CN 201620921043U CN 205940665 U CN205940665 U CN 205940665U
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- air
- temperature detecting
- flow sensor
- resistance
- air flow
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Abstract
The utility model discloses an air -flow sensor. Air -flow sensor includes: the back has the quartz substrate of cavity, quartz substrate openly along the air current to the ambient air temperature measuring resistor that arranges in proper order, upper reaches temperature measuring resistor, resistance and low reaches temperature measuring resistor generate heat, wherein, upper reaches temperature measuring resistor, generate heat resistance and low reaches temperature measuring resistor all set up in the correspondence in the air mass flow measurement zone of cavity, respectively with a plurality of terminal electrodes that ambient air temperature measuring resistor, upper reaches temperature measuring resistor, generate heat resistance and low reaches temperature measuring resistor independently connect. The utility model provides an air -flow sensor's precision and adaptive capacity to environment can not hold concurrently the problem.
Description
Technical field
The utility model embodiment is related to semiconductor technology, more particularly, to a kind of air flow sensor.
Background technology
Mass air flow sensor is that the air mass flow of suction is converted into the utensil of electric signal.The operation principle of mass air flow sensor is
Flow through the temperature difference of heating resistor surrounding air produced by heating resistor by measuring air, and according to default temperature difference with
The corresponding relation of air mass flow, determines current leaked-in air amount.Mass air flow sensor comprises for measurement temperature difference
Air flow sensor and counting circuit.
In the electronic control system of the internal combustion engines such as automobile, air flow sensor is used for providing help to calculate inflow air
The temperature difference of amount.Because automobile use environment is more severe, the mechanical disturbance such as vibrations of vehicle is easily caused air flow sensor
In measuring circuit be badly shaken.For this reason, the service life of current air flow sensor and certainty of measurement are all limited.
Accordingly, it would be desirable to improve to prior art.
Utility model content
The utility model provides a kind of air flow sensor, to solve the precision of air flow sensor in prior art
The problem that can not get both with adaptive capacity to environment.
Utility model embodiment provides a kind of air flow sensor, including：The back side has the quartz substrate of cavity；?
Described quartz substrate front along air flow arrange successively surrounding air temperature detecting resistance, upstream temperature detecting resistance, heating resistor and under
Trip temperature detecting resistance；Wherein, described upstream temperature detecting resistance, heating resistor and downstream temperature detecting resistance may be contained within corresponding described cavity
In air-flow measurement area；Respectively with described surrounding air temperature detecting resistance, upstream temperature detecting resistance, heating resistor and downstream thermometric electricity
Multiple terminal electrodes of resistance independent connection.
The utility model using the high rigidity of quartz, high shock resistance, as the substrate of air flow sensor, not only
Be applied to bad environments such as automobiles, have the environment that high stability needs, and the quality material due to quartz substrate, can
Increase the area in air-flow measurement region, and then the upstream and downstream temperature detecting resistance being located at air-flow measurement region is surveyed
Obtain more accurate temperature difference.The present embodiment not only solves in the presence of a harsh environment, air flow sensor jolted by the external world and
Flimsy problem, also solves the measurement range of existing air flow sensor and precision cannot mate Automobile Design needs
Problem.Additionally, adopting quartz substrate, effectively reduce the cost of existing air flow sensor.
Brief description
Fig. 1 is the structural representation of the air flow sensor in the utility model embodiment；
Fig. 2 is the sectional view of terminal electrode in air flow sensor in the utility model embodiment；
Fig. 3 is the sectional view of resistance in air flow sensor in the utility model embodiment.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than to restriction of the present utility model.Further need exist for
Bright, for the ease of description, in accompanying drawing, illustrate only the part related to the utility model rather than entire infrastructure.
The structural representation of the air flow sensor that Fig. 1 provides for the utility model, the present embodiment may be installed automobile
Internal combustion engine air inlet, to realize the measurement to air mass flow.Described air flow sensor includes：Quartz substrate 11, environment are empty
Gas temperature detecting resistance 13, upstream temperature detecting resistance 14, heating resistor 15 and downstream temperature detecting resistance 16, the terminal electrode of corresponding each resistance
12.
Wherein, the back side of described quartz substrate 11 has cavity 111.Wherein, described cavity 111 is just corresponding to quartz substrate 11
The air-flow measurement area in face.The thickness of described quartz substrate 11 is in [300,500] μm interval.Cavity 111 roof is at a distance of quartz
The thickness in substrate 11 front is in [10,20] μm.Wherein, described cavity 111 top is not necessarily flat with institute's quartz substrate 11 fronts
OK.Can need cavity 111 top shape is adjusted according to actual design.For example, the section of described cavity 111 wall is U-shaped.
Arrange successively surrounding air temperature detecting resistance 13, upstream temperature detecting resistance along air flow in described quartz substrate 11 front
14th, heating resistor 15 and downstream temperature detecting resistance 16；Wherein, described upstream temperature detecting resistance 14, heating resistor 15 and downstream thermometric electricity
Resistance 16 may be contained within the air-flow measurement area of corresponding described cavity 111.Wherein, described surrounding air temperature detecting resistance 13, on
Trip temperature detecting resistance 14, heating resistor 15 and downstream temperature detecting resistance 16 are all independently connected terminal electrode 12.
Here, from the inflow entrance of air to flow export be arranged in order surrounding air temperature detecting resistance 13, upstream temperature detecting resistance 14,
Heating resistor 15 and downstream temperature detecting resistance 16.Wherein, in order to improve certainty of measurement, each resistance adopts snakelike bending structure to improve
Resistance, mutual insulating between the adjacent flat line of bending.Between between surrounding air temperature detecting resistance 13 and upstream temperature detecting resistance 14
Every more than the interval between upstream temperature detecting resistance 14 and heating resistor 15.Wherein, constitute each resistance metal layer thickness [100,
200], between nm, the winding displacement width of each resistance is between [10,30] μm.
Wherein, described surrounding air temperature detecting resistance 13 is used for measuring the original temperature of current leaked-in air.
Described heating resistor 15 is externally controlled the control of circuit, flows into the heat needed for air for producing heating.
Described upstream temperature detecting resistance 14 is used for measuring before air flows through heating resistor 15, first being heated by heating resistor 15
Temperature.
Described downstream temperature detecting resistance 16 is used for measuring after air flows through heating resistor 15, second being heated by heating resistor 15
Temperature.
Wherein, the first temperature and the temperature difference of second temperature are external control circuit value to be measured.Described environment is empty
Between spacing between gas temperature detecting resistance 13 and upstream temperature detecting resistance 14 is more than between upstream temperature detecting resistance 14 and heating resistor 15
Away from.It is also possible to be located in air-flow measurement area outside described surrounding air temperature detecting resistance 13 can be located at air-flow measurement area.
As shown in figure 1, in the right (or left) of each resistance, being provided with the independent terminal electrode 12 connecting each resistance.Specifically
Ground, each independent JA(junction ambient) air temperature detecting resistance 13 of terminal electrode 12, upstream temperature detecting resistance 14, heating resistor 15 and downstream
Temperature detecting resistance 16.For the ease of being connected with wire, each terminal electrode 12 is the first metal material being laid in quartz substrate 11.
The temperature signal that described terminal electrode 12 is used for being sensed the resistance being connected passes to described external control circuit.Its
In, described external control circuit citing includes：Amplifying circuit, air mass flow calculate circuit etc..
Wherein, described terminal electrode 12 is the first metal material with each resistance.Temperature-sensitive selected by described first metal material
Metal or alloy, be exemplified as metal platinum (Pt) material.
In a kind of alternative, Fig. 2 is shown as the sectional view of terminal electrode in air flow sensor, in order to reduce terminal
The interference to resistance for the electrode 12, can also cover conductance on each terminal electrode 12 and be less than described terminal electrode 12 conduction
The metal film 21 of rate.Wherein, described metal film 21 is exemplified as CrAu.The thickness of described metal film 21 is in [200,400] nm.
Specifically, during fabrication, first photoresist is covered in the quartz substrate 11 being provided with each resistance and terminal electrode 12
On, then the photoresist on each terminal electrode is removed, then, adhesion metal film 21 is so that this metal film 21 covers in light
In photoresist and each terminal electrode, then remove the photoresist covering metal film 21, to retain the metal film on each terminal electrode 12
21.
This alternative utilizes the higher metal film of conductance Lai " short-circuit " each terminal electrode, can effectively solve the problem that terminal electricity
The impact to certainty of measurement for the radiating of pole part.
In alternative dispensing means, Fig. 3 is shown as the sectional view of resistance in air flow sensor, and described air mass flow passes
Sensor also includes covering in all ohmically insulating protective layers 22.Thus effectively prevent each resistance be subject to extraneous static lotus, dust,
The interference of steam etc..The thickness of described insulating protective layer 22 is exemplified as 100nm.The material of described insulating protective layer 22 is exemplified as nitrogen
SiClx.
The present embodiment, using quartzy high rigidity, high shock resistance, as the substrate of air flow sensor, is not only fitted
For bad environments such as automobiles, have in the environment that high stability needs, and the quality material due to quartz substrate, Neng Gouzeng
Plus the area in air-flow measurement region, and then the upstream and downstream temperature detecting resistance being located at air-flow measurement region is recorded
More accurate temperature difference.The present embodiment not only solves in the presence of a harsh environment, and air flow sensor is jolted by the external world and easy
The problem damaged, also solves the measurement range of existing air flow sensor and precision cannot mate asking of Automobile Design needs
Topic.Additionally, adopting quartz substrate, effectively reduce the cost of existing air flow sensor.
It should be noted that the precision of the size being previously mentioned in the various embodiments described above and size range is not necessarily limited in
1 μm and 1nm, described precision can also be in [0.1,0.9] μm He [0.1,0.9] nm between.
Note, above are only preferred embodiment of the present utility model and institute's application technology principle.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, can carry out various bright for a person skilled in the art
Aobvious change, readjust and substitute without departing from protection domain of the present utility model.Therefore although passing through above example
The utility model is described in further detail, but the utility model is not limited only to above example, without departing from
In the case of the utility model design, other Equivalent embodiments more can also be included, and scope of the present utility model is by appended
Right determine.
Claims (6)
1. a kind of air flow sensor is it is characterised in that include：
The back side has the quartz substrate of cavity；
Arrange successively surrounding air temperature detecting resistance, upstream temperature detecting resistance, heating electric along air flow in described quartz substrate front
Resistance and downstream temperature detecting resistance；Wherein, described upstream temperature detecting resistance, heating resistor and downstream temperature detecting resistance may be contained within described in correspondence
In the air-flow measurement area of cavity；
Respectively with described surrounding air temperature detecting resistance, upstream temperature detecting resistance, heating resistor and downstream temperature detecting resistance independent connection
Multiple terminal electrodes.
2. air flow sensor according to claim 1 it is characterised in that described quartz substrate thickness [300,
500]μm.
3. air flow sensor according to claim 1 is less than it is characterised in that covering conductance on each terminal electrode
The metal film of described terminal electrode conductance.
4. air flow sensor according to claim 1 is it is characterised in that cover insulation protection on all resistance
Layer.
5. air flow sensor according to claim 1 is it is characterised in that the winding displacement width of each resistance is in [10,30] μ
Between m.
6. air flow sensor according to claim 1 is it is characterised in that described cavity roof is at a distance of quartz substrate
Positive face thickness is in [10,20] μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620921043.8U CN205940665U (en) | 2016-08-22 | 2016-08-22 | Air -flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620921043.8U CN205940665U (en) | 2016-08-22 | 2016-08-22 | Air -flow sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205940665U true CN205940665U (en) | 2017-02-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620921043.8U Active CN205940665U (en) | 2016-08-22 | 2016-08-22 | Air -flow sensor |
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| CN (1) | CN205940665U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764349A (en) * | 2016-08-22 | 2018-03-06 | 上海微联传感科技有限公司 | Air flow sensor and preparation method thereof |
-
2016
- 2016-08-22 CN CN201620921043.8U patent/CN205940665U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764349A (en) * | 2016-08-22 | 2018-03-06 | 上海微联传感科技有限公司 | Air flow sensor and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190202 Address after: 214135 China Sensor Network International Innovation Park F2, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Huajing sensor technology (Wuxi) Co., Ltd. Address before: 201203 2, 3 building, 439 Chunchun Road, Pudong New Area, Shanghai. Patentee before: Microlink SensTech Shanghai Co., Ltd. |