CN205899241U - Support piece and decompression drying equipment - Google Patents
Support piece and decompression drying equipment Download PDFInfo
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- CN205899241U CN205899241U CN201620889862.9U CN201620889862U CN205899241U CN 205899241 U CN205899241 U CN 205899241U CN 201620889862 U CN201620889862 U CN 201620889862U CN 205899241 U CN205899241 U CN 205899241U
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- support
- pin
- supporting
- described support
- support base
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Abstract
The utility model discloses a support piece, wherein, support piece include the support column and with the support cap that support column one end is connected, the support column is including supporting the base and supporting the needle, the one end that supports the needle with the support cap is connected, the other end that supports the needle with the support base is connected, support the perpendicular to of following of needle the cross -sectional area who supports the axis direction of needle is less than support the perpendicular to of following of cap the cross -sectional area of the axis direction of support needle, just support the perpendicular to of following of needle the cross -sectional area who supports the axis direction of needle is less than support the perpendicular to of following of base support the cross -sectional area of the axis direction of needle. The utility model provides a decompression drying equipment. The utility model provides a support piece can make that photosensitive resist of each part evenly volatilizees on the base plate that supports.
Description
Technical field
This utility model is related to manufacturing field of equipment and in particular to a kind of support member and the drying under reduced pressure including this support member
Equipment.
Background technology
During the manufacturing of display, it usually needs carry out multiexposure, multiple exposure, it is required for substrate before exposing every time
The techniques such as the drying under reduced pressure after carrying out the coating of photoresist and coating.Drying under reduced pressure refers to quickly by the air pressure in confined space
Reduce so that photoresist seethes with excitement under low pressure to reach the purpose of the quick volatilization of solvent.Pass through drying under reduced pressure after photoresist coating,
Quickly the vehicle substance in photoresist can be volatilized so that photoresist caliper uniformity meets subsequent technique requires.
During drying under reduced pressure, the shape of support meanss and material structure etc. all can produce one to the effect of drying under reduced pressure
Fixed impact.As shown in figure 1, being decompression drying equipment structural representation in prior art, including drying under reduced pressure chamber 2 and setting
Support meanss 1 in drying under reduced pressure chamber 2, support meanss 1 include multiple support members 10, and each support member 10 includes support column 11
With support cap 12, wherein support cap 12 in supporting substrate and substrate directly contact.
But, the decompression drying equipment in Fig. 1 can lead to the uneven phenomenon of photoresist solvent volatilization on substrate to occur.
Utility model content
This utility model be intended at least solve one of technical problem present in prior art it is proposed that a kind of support member and
Decompression drying equipment.
For achieving the above object, as one side of the present utility model, provide a kind of support member, described support member is used
In decompression drying equipment, described decompression drying equipment includes drying under reduced pressure chamber and the support being arranged in described drying under reduced pressure chamber
Device, described support meanss include multiple support members, and wherein, described support member is included support column and connected with described support column one end
The support cap connecing, described support column includes support base and supports pin, and one end of described support pin is connected with described support cap, institute
State and support the other end of pin to be connected with described support base, the described edge supporting pin is perpendicular to the described axis direction supporting pin
Cross-sectional area is less than the described cross-sectional area perpendicular to the described axis direction supporting pin for the edge supporting cap, and described supports pin
It is less than the edge of described support base along the cross-sectional area perpendicular to the described axis direction supporting pin perpendicular to described support pin
The cross-sectional area of axis direction.
Preferably, described support base and described support pin are cylindric, the described diameter supporting pin and described support
The diameter ratio of base is 1:15 to 1:8.
Preferably, the described height supporting pin is not less than 10mm.
Preferably, the described diameter supporting pin is between 0.4mm to 1mm.
Preferably, described support cap includes body and tip, and described body is connected with described support pin, and described tip deviates from
Described support pin.
Preferably, described body is cylindric, and the diameter of described body is between 0.6mm to 2mm.
As second aspect of the present utility model, provide a kind of decompression drying equipment, described decompression drying equipment includes
Drying under reduced pressure chamber and the support meanss being arranged in described drying under reduced pressure chamber, described support meanss include multiple support members, wherein,
Described support member is previously described support member.
Preferably, described support meanss also include supporting table, and described support base is fixedly installed in described supporting table.
Preferably, the described support base surface relative with described supporting table is respectively formed with even along respective thickness direction
Connect hole, be connected by connector between described support base and described supporting table, one end of described connector is inserted into described
The connection in the hole of support base, the other end of described connector is inserted into the connection in the hole of described supporting table.
Preferably, described supporting table includes magnetic support platform, and described support base is made up of ferromagnetic material, described support bottom
Seat is arranged on the surface of described supporting table.
The support member that this utility model provides, by the form that support column is arranged to support base and supports pin, and
The edge of support pin is less than the edge supporting cap perpendicular to the axis direction supporting pin perpendicular to the cross-sectional area of the axis direction supporting pin
Cross-sectional area, when this support member is applied in decompression drying equipment, support cap support substrate carry out drying under reduced pressure when,
Support pin and support cap not interfere with the air current flow around the strong point on substrate, solve in prior art due to the body of support column
Amass big and affect the uneven problem of photoresist volatilization on the substrate that air velocity causes, enable to each on supported substrate
Partial photoresist solvent uniformly volatilizees.
Brief description
Accompanying drawing is used to provide and further understands to of the present utility model, and constitutes a part for description, and following
Specific embodiment be used for together explaining this utility model, but do not constitute to restriction of the present utility model.In the accompanying drawings:
Fig. 1 is decompression drying equipment structural representation of the prior art；
A kind of decompression drying equipment structural representation that Fig. 2 provides for this utility model；
The structural representation of the support member that Fig. 3 provides for this utility model；
A kind of structural representation being connected between support member that Fig. 4 provides for this utility model and supporting table.
Wherein, 1, support meanss；10th, support member；11st, support column；111st, support base；112nd, support pin；12nd, support
Cap；13rd, supporting table；14th, connector；2nd, drying under reduced pressure chamber.
Specific embodiment
Below in conjunction with accompanying drawing, specific embodiment of the present utility model is described in detail.It should be appreciated that herein
Described specific embodiment is merely to illustrate and explains this utility model, is not limited to this utility model.
Study through inventor of the present utility model and find, the decompression drying equipment shown in Fig. 1 leads to photoresist on substrate
The reason uneven phenomenon of solvent volatilization occurs is as follows: in Fig. 1 support column 11 due to volume larger, have impact on surrounding
Air-flow is so that be located at the radiating rate of photoresist solvent of support column 11 top and the photoresist of other positions on substrate on substrate
The radiating rate of solvent is different, thus leading to the phenomenon of photoresist uneven thickness one on substrate to occur.
It should be noted that be previously mentioned in this utility model the noun of locality " on ", D score be all attached for this utility model
Direction shown in figure.The above-below direction that described " supporting the axis direction of pin " refers in Fig. 2 and Fig. 3, and " perpendicular to support
The axis direction of pin " refers to the left and right directions in Fig. 2 and Fig. 3.
As one side of the present utility model, as shown in Figures 2 and 3, provide a kind of support member 10, support member 10 is used
In decompression drying equipment, described decompression drying equipment includes drying under reduced pressure chamber 2 and the support dress being arranged in drying under reduced pressure chamber 2
Put 1, support meanss 1 include multiple support members 10, wherein, support member 10 is included support column 11 and is connected with support column 11 one end
Support cap 12, support column 11 includes support base 111 and supports pin 112, support one end of pin 112 to be connected with supporting cap 12,
The other end of support pin 112 is connected with support base 111, supports the edge of pin 112 transversal perpendicular to the axis direction supporting pin 112
Area be less than support cap 12 edge perpendicular to support pin 112 axis direction cross-sectional area, and support pin 112 edge perpendicular to
The cross-sectional area of the axis direction of support pin 112 is less than the horizontal stroke perpendicular to the axis direction supporting pin 112 for the edge of support base 111
Sectional area.
The support member that this utility model provides, by the form that support column is arranged to support base and supports pin, and
The edge of support pin is less than the edge supporting cap perpendicular to the axis direction supporting pin perpendicular to the cross-sectional area of the axis direction supporting pin
Cross-sectional area, when this support member is applied in decompression drying equipment, support cap support substrate carry out drying under reduced pressure when,
Support pin and support cap not interfere with the air current flow around the strong point on substrate, solve in prior art due to the body of support column
Amass big and affect the uneven problem of photoresist volatilization on the substrate that air velocity causes, enable to each on supported substrate
Partial photoresist solvent uniformly volatilizees.
Specifically, as shown in Fig. 2 the drying under reduced pressure chamber 2 that described decompression drying equipment includes is airtight vacuum chamber.Support dress
Put 1 to be arranged in drying under reduced pressure chamber 2, support meanss 1 are made up of multiple support members 10, multiple support members 10 can prop up support group jointly
Plate.Multiple strong points being contacted with support member 10 are existed on substrate.In this utility model, support column 11 passes through using support pin 112
The form combining with support base 111, supports the cross-sectional area of pin 112 to be much smaller than the cross-sectional area of support base 111, supports
The volume of pin 112 does not interfere with the flowing of air-flow, so this support means 1 does not interfere with photoresist solvent near the strong point
Evaporation rate.
In addition, because support column 11 is split-type structural in this utility model, so supporting pin 112 and support base 111
Different materials can be respectively adopted make.For example, support base 111 can be using the larger engineering plastics of intensity, such as polyethers
Ether ketone (peek), acid imide (pai) or polyimides (pi) etc., and support pin 112 less due to diameter, in order to ensure to support by force
Degree, can be made using stainless steel material or wolfram steel material, support cap 12 due to directly contacting with substrate, in order to avoid with base
Produce heat exchange between plate and substrate is caused with scuffing etc., the making material supporting cap 12 is engineering plastics, such as polyether-ether-ketone
(peek), acid imide (pai) or polyimides (pi) etc..
It is preferably carried out mode as one kind, support the making material of cap 12 to be preferably polyether-ether-ketone (peek), support pin
112 making material is preferably wolfram steel, and the making material of support base 111 is preferably polyether-ether-ketone (peek).
The making material of support base 111 adopts the low materials of thermal conductivity such as engineering plastics, when this support member 10 is applied to
When in described decompression drying equipment, the heat exchange between support member 10 and the substrate being supported can be effectively reduced, improve
The uneven phenomenon of photoresist solvent volatilization on the substrate being caused due to the material of support member 10.
As shown in figure 3, for a kind of structural representation of support member 10, for the support strength of balanced support post 11 and right
The influence degree of surrounding flow speed, as one kind specifically embodiment, support base 111 and support pin 112 are cylinder
Shape, supports the diameter of pin 112 to be 1:15 to 1:8 with the diameter ratio of support base 111.
If supporting a diameter of 1mm of pin 112, a diameter of 8mm～15mm of support base 111 supports pin it is preferable that working as
During 112 a diameter of 1mm, a diameter of 10mm of support base 111.
One kind as the height supporting pin 112 is preferably carried out mode, supports the height of pin 112 to be not less than 10mm.?
The height of support pin 112 is more than or equal to 10mm, and that is, the strong point is more than 10mm apart from the distance of support base 111, will not be because of
Blocking of support base 111 and affect the flowing of air-flow, so will not near the strong point photoresist solvent volatilization cause shadow
Ring.
One kind as the diameter supporting pin 112 is preferably carried out mode, support the diameter of pin 112 0.4mm to 1mm it
Between.
It is understood that supporting the diameter of pin 112 within the range, it is metal material in the making material supporting pin 112
Ensure that the support strength supporting pin 112 during material, and do not interfere with the flowing of surrounding flow.
Be preferably carried out mode as the one kind supporting cap 12, support cap 12 to include body and tip, described body with
Support pin 112 is connected, and described tip deviates from support pin 112.
Support cap 12 in support member 10 is directly contacted with substrate, and the diameter supporting the body of cap 12 also can be to support
Air current flow around point produces impact, is preferably carried out mode as one kind, and the body supporting cap 12 is cylindric, supports cap
The diameter of 12 body is between 0.6mm to 2mm.
It is understood that the previously described diameter supporting pin 112 is less than the diameter of the body supporting cap 12, work as support
When the diameter value of pin 112 is between 0.4mm to 1mm, supports the diameter of the body of cap 12 to take between 0.6mm to 2mm and be more than
Support the value of the diameter of pin 112.For example, support a diameter of 0.8mm of pin 112, then the diameter of the body of support cap 12 can be
Arbitrary value between 0.9mm to 2mm.
The one end supporting pin 112 is connected with supporting cap 12, as one kind specifically embodiment, supports and is formed with cap 12
First jack, supports one end of pin 112 to be inserted in described first jack and is connected with supporting cap 12.
It is understood that supporting cap 12 to be made up of engineering plastics as mentioned before, support pin 112 preferably by metal material
Material, wolfram steel make it is possible on supporting cap 12 described first jack of setting, its pore size is straight with support pin 112
Footpath size is coincide so that supporting one end of pin 112 can just be inserted in described first jack supporting cap 12.
It is understood that the first jack described previously is located on described body, described tip is arranged on the described body back of the body
On the surface of described first jack.
It should be appreciated that supporting the tip of cap 12 directly to contact with substrate, support cap 12 and substrate so can be reduced
Contact area, it is to avoid near the strong point photoresist solvent volatilization impact.
The other end supporting pin 112 is connected with support base 111, as one kind specifically embodiment, support base 111
On be formed with the second jack, support the other end of pin 112 to be inserted in described second jack and be connected with support base 111.
It should be appreciated that described second jack, described second jack and institute are formed on support base 111 through-thickness
State the first jack to be oppositely arranged, support the other end of pin 112 can just be inserted in described second jack.
It is understood that as it was noted above, the making material working as support base 111 is engineering plastics, such as polyether-ether-ketone
(peek) making material, supporting pin 112 is metal material, during as wolfram steel, forms described second and insert in support base 111
Hole, and the aperture of described second jack with support pin 112 diameter match so that support pin 112 the other end just permissible
It is inserted in described second jack.
As second aspect of the present utility model, provide a kind of decompression drying equipment, as shown in Fig. 2 described decompression is dry
Dry equipment includes drying under reduced pressure chamber 2 and the support meanss 1 being arranged in drying under reduced pressure chamber 2, and support meanss 1 include multiple supports
Part, wherein, described support member is previously described support member 10.
The decompression drying equipment that this utility model provides, by using previously described support member, when to drying under reduced pressure chamber
When interior substrate carries out drying under reduced pressure, because the support column in support member is set to support base and the form of support pin, and
The edge supporting pin is less than the edge supporting cap perpendicular to the axis side supporting pin perpendicular to the cross-sectional area of the axis direction supporting pin
To cross-sectional area, support pin and support cap not to interfere with air current flow around the strong point on substrate, solve prior art
In affect the uneven problem of photoresist volatilization on the substrate that air velocity causes because the volume of support column is big, enable to
On the substrate being supported, the photoresist solvent of each several part uniformly volatilizees.
Previously described support meanss 1 include multiple support members 10, as shown in Fig. 2 support meanss 1 also include supporting table
13, support base 111 is fixedly installed in supporting table 13.
It is understood that multiple support members 10 are located at the support bottom in same supporting table 13, in each support member 10
The surface that seat 111 deviates from described second jack is all connected with supporting table 13.
Connected mode between support base 111 and supporting table 13 has multiple, as one kind specifically embodiment, as schemed
Shown in 2, support base 111 surface relative with supporting table 13 is respectively formed with connecting hole along respective thickness direction, supports bottom
It is connected by connector 14 between seat 111 and supporting table 13, one end of connector 14 is inserted into the connecting hole of support base 111
Interior, the other end of connector 14 is inserted into the connection in the hole of supporting table 13.
Preferably, connector 14 includes threaded connector, and described connecting hole includes the spiral shell mating with described threaded connector
Pit.
It is understood that by being connected support base 111 and supporting table 13 using connector 14, and this connector is excellent
Elect threaded connector as, when support member 10 occur bending the problems such as when, can very easily by support base 111 from supporting table 13
On disassemble, be easy to the replacing of support member 10.
As another kind specifically embodiment, as shown in figure 4, supporting table 13 includes magnetic support platform, support base 111
It is made up of ferromagnetic material, support base 111 is arranged on the surface of supporting table 13.
It should be noted that as it was noted above, support base 111 deviates from the surface of described second jack with supporting table 13 even
Connect, herein, because support base 111 is made up of ferromagnetic material, and supporting table 13 is magnetic support platform, so support base 111
It is connected with supporting table 13 by magnetic force.
It is understood that supporting table 13 can be magnetic support platform, and the support base 111 in each support member 10 can
To be made up of ferromagnetic material, so, it is connected by magnetic force between the support base 111 of support member 10 and supporting table 13, with above
Described compares by way of connector connects, and eliminates setting connecting hole in supporting table 13 and support base 111, simultaneously
Also eliminate connector, and this connected mode can also facilitate the dismounting between support member 10 and supporting table 13.
The decompression drying equipment that this utility model provides, the support column in included support member is divided into support base and props up
Support pin form, be integrated form with existing support column compared with, support pin diameter be far smaller than support of the prior art
The diameter of post, it can be avoided that the flowing on surrounding flow produces impact, solves the diameter due to support column in prior art big
Flowing on surrounding flow produces impact and causes the uneven problem of photoresist solvent volatilization on substrate.Further, since supporting
Post is split-type structural it is possible to support pin and support base can be respectively adopted different making materials, in support base
By adopting engineering plastics, support pin to adopt metal material, further improve in prior art due to support column conduction of heat
There is the uneven phenomenon of the photoresist solvent volatilization that heat exchange causes in rate height and photoresist on substrate.
It is understood that embodiment of above be merely to illustrate that principle of the present utility model and adopt exemplary
Embodiment, but this utility model is not limited thereto.For those skilled in the art, without departing from this
In the case of the spirit of utility model and essence, various modifications and improvement can be made, these modifications and improvement are also considered as this reality
With new protection domain.
Claims (10)
1. a kind of support member, described support member is used in decompression drying equipment, and described decompression drying equipment includes drying under reduced pressure chamber
With the support meanss being arranged in described drying under reduced pressure chamber, described support meanss include multiple support members it is characterised in that described
Support member includes support column and the support cap being connected with described support column one end, and described support column includes support base and support
Pin, one end of described support pin is connected with described support cap, and the described other end supporting pin is connected with described support base, described
The edge supporting pin is less than the described edge supporting cap perpendicular to described perpendicular to the cross-sectional area of the described axis direction supporting pin
The cross-sectional area of the axis direction of support pin, and the described cross-sectional area perpendicular to the described axis direction supporting pin for the edge supporting pin
Less than described support base edge perpendicular to described support pin axis direction cross-sectional area.
2. support member according to claim 1 is it is characterised in that described support base and described support pin are cylinder
Shape, the diameter of described support pin and the diameter ratio of described support base are 1:15 to 1:8.
3. support member according to claim 2 is it is characterised in that the height of described support pin is not less than 10mm.
4. support member according to claim 2 is it is characterised in that the diameter of described support pin is between 0.4mm to 1mm.
5. support member as claimed in any of claims 1 to 4 it is characterised in that described support cap include body and
Tip, described body is connected with described support pin, and described tip deviates from described support pin.
6. it is characterised in that described body is cylindric, the diameter of described body exists support member according to claim 5
Between 0.6mm to 2mm.
7. a kind of decompression drying equipment, described decompression drying equipment includes drying under reduced pressure chamber and is arranged in described drying under reduced pressure chamber
Support meanss, described support meanss include multiple support members it is characterised in that described support member be claim 1 to 6 in appoint
Support member described in meaning one.
8. decompression drying equipment according to claim 7 is it is characterised in that described support meanss also include supporting table, institute
State support base to be fixedly installed in described supporting table.
9. decompression drying equipment according to claim 8 is it is characterised in that described support base is relative with described supporting table
Surface on be respectively formed with connecting hole along respective thickness direction, between described support base and described supporting table pass through connector
Connect, one end of described connector is inserted into the connection in the hole of described support base, and the other end of described connector is inserted into institute
State the connection in the hole of supporting table.
10. decompression drying equipment according to claim 8 is it is characterised in that described supporting table includes magnetic support platform, institute
State support base to be made up of ferromagnetic material, described support base is arranged on the surface of described supporting table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620889862.9U CN205899241U (en) | 2016-08-16 | 2016-08-16 | Support piece and decompression drying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620889862.9U CN205899241U (en) | 2016-08-16 | 2016-08-16 | Support piece and decompression drying equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205899241U true CN205899241U (en) | 2017-01-18 |
Family
ID=57779522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620889862.9U Expired - Fee Related CN205899241U (en) | 2016-08-16 | 2016-08-16 | Support piece and decompression drying equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205899241U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106873203A (en) * | 2017-04-21 | 2017-06-20 | 武汉华星光电技术有限公司 | Glass substrate thimble and Minton dryer |
| CN107357141A (en) * | 2017-07-28 | 2017-11-17 | 武汉华星光电技术有限公司 | A kind of substrate apparatus for baking and method |
-
2016
- 2016-08-16 CN CN201620889862.9U patent/CN205899241U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106873203A (en) * | 2017-04-21 | 2017-06-20 | 武汉华星光电技术有限公司 | Glass substrate thimble and Minton dryer |
| CN107357141A (en) * | 2017-07-28 | 2017-11-17 | 武汉华星光电技术有限公司 | A kind of substrate apparatus for baking and method |
| CN107357141B (en) * | 2017-07-28 | 2020-11-10 | 武汉华星光电技术有限公司 | Substrate baking device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170118 |
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| CF01 | Termination of patent right due to non-payment of annual fee |