CN205899065U - A phase plate for contrast phase microscope - Google Patents
A phase plate for contrast phase microscope Download PDFInfo
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- CN205899065U CN205899065U CN201620804869.6U CN201620804869U CN205899065U CN 205899065 U CN205899065 U CN 205899065U CN 201620804869 U CN201620804869 U CN 201620804869U CN 205899065 U CN205899065 U CN 205899065U
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Abstract
The utility model provides a phase plate for contrast phase microscope, this phase plate scribble round annular thin layer (2) on glass substrate (1), annular thin layer (2) are including directly scribbling bottom (5), intermediate layer (6) and top layer (7) on glass substrate (1), and intermediate layer (6) are the mgF2 layer, bottom (5) are the metal layer that the material is the same with top layer (7), and this metal layer's material is one of them kind among metal cr, nb, ti, the ni, this phase plate has the change bit and absorbs multiple actions such as light beam with each other, and it is little to have a broadband phase change, make through its wavelength at 450nm is the broadband light beam phase value of 700nm within range 90 about, can directly use under the broadband light source, and this phase plate rete simple structure is convenient for make.
Description
Technical field
This utility model is related to one kind and is used for phase-contrast phase-plate, the especially phase place absorbing film of phase-plate.
Background technology
The eyes of people can only differentiate the wavelength (color) of visible ray and the change of amplitude it is impossible to the change of differential phase.But
It is most of biological sample highly transparent, light wave is basically unchanged by rear amplitude, but there is the change of phase place, the eyes sensation of people
Less than.Living cells sample and unstained preparation are not changed due to the wavelength of light and amplitude, so human eye cannot directly be observed,
But light but there occurs change through the phase place of sample, therefore can be using interference of light and diffraction effect through sample not
Optical path difference with the light at position is changed into difference of vibration, makes high-visible between intracellular various structures.Optical path difference is changed into shakes
Width difference critical component be exactly the ring component that matches, light pass through cell when, cell can produce 1/4 λ Phase delay (i.e. phase place be-
90 degree), when subsequently again by the phase-plate that scribbles phase place absorbing membrane, if making phase place absorbing membrane also have the phase of -1/4 λ
Potential difference, then create the phase contrast of 1/2 λ, according to interfering theorem, under the phase contrast of 1/2 λ (180 °), by transparent cell
Light and the interference being offseted by the light of the ring that matches so that the material of cell and surrounding forms dark contrast, from
And it is visible in detail.According to above-mentioned principle, Dutch scientist zernike has invented phase contrast microscope in nineteen thirty-five, and by
This obtains nineteen fifty-three Nobel Prize.Phase contrast microscope is mainly used in observing living cells, achromophil tissue slice or lack contrast
Stained preparation.From structure, it is with general microscope difference: phase-contrast condenser has ring-shaped light
Hurdle, is provided with phase-plate at object lens back focal plane.Phase contrast microscope be can by light by object when the phase contrast (or optical path difference) that produces
It is changed into the microscope that amplitude (light intensity) changes.Phase contrast microscope also referred to as matches microscope or phase microscope.
The phase place absorbing membrane of conventional phase plate needs to plate different thin film on substrate, has monolayer mgf2 thin film, and
For light-absorbing monolayer cr thin film；It is concrete that face is coated with the monolayer cr thin film 12 of ring-type on substrate 1 as shown in Figure 1 and Figure 2,
This cr thin film is used for absorbing light, also referred to as absorbs ring, on substrate 1 its in addition to the monolayer cr12 thin film of ring-type in face
Its region is coated with monolayer mgf2 thin film 11；Monolayer mgf2 thin film and monolayer cr12 thin film are all the optical coatings of nanometer grade thickness,
Monolayer cr12 thin film is substantially thinner than monolayer mgf2 thin film.Although monolayer mgf2 can change phase place (as negative claims technique),
Monolayer mgf2 film is only capable of forming -1/4 λ phase contrast in a certain specific wavelength, is not suitable for broadband light source, using broadband light
During source, contrast will be decreased obviously it is therefore necessary to increase the monochromatic filter of a piece of specific wavelength before light source；But filter
The introducing of piece inevitably results in the loss of energy of light source, causes the dimness of visual field.In addition, the phase place absorbing membrane of conventional phase plate
Have a common boundary due to forming the ring-type with high low head between its monolayer mgf2 thin film and monolayer cr12 thin film, ring-type intersection plated film
Precision it is difficult to ensure that, lead to manufacturing process long flow path, yield rate is low, limit working (machining) efficiency so that manufacturing cost is higher.
This utility model is precisely in order to solve above-mentioned technical problem.
Content of the invention
Technical problem to be solved in the utility model is for the above-mentioned state of the art, provide a kind of be easy to manufacture be used for
Phase-contrast phase-plate, and make to be the visible ray tool in 450nm-700nm wavelength band through the wavelength of this phase-plate
There is relatively-stationary phase value.
The technical scheme that this utility model solution above-mentioned technical problem is adopted is:
A kind of it is used for phase-contrast phase-plate, including glass substrate (1) it is characterised in that described glass substrate (1)
On scribble ring shape thin layer (2), form annular membrane floor (2) area, form circular complete printing opacity in annular membrane floor (2) the area in
Area (3), annular membrane layer (2) profile circularizes complete transparent area (4)；Described annular membrane layer (2) includes being coated directly on glass
Substrate (1) bottom (5) above, it is coated in this bottom (5) interlayer (6) above and is coated in interlayer (6) top layer (7) above；Folder
Layer (6) is mgf2 layer, and bottom (5) and top layer (7) are material identical metallic diaphragm, the material of this metallic diaphragm is metal cr,
One of which in nb, ti, ni.
The physical thickness of the bottom (5) of described annular membrane layer (2) is 8nm to 12 nm, and the physical thickness of top layer (7) is
3 nm to 6 nm, the physical thickness of interlayer (6) is 80nm to 120nm.
Concrete scheme one: the bottom (5) of described annular membrane layer (2) and top layer (7) are metal cr film layer, described annular
The physical thickness of the bottom (5) of thin layer (2) is 8nm to 12 nm, and the physical thickness of top layer (7) is 3 nm to 6 nm, described
The physical thickness of interlayer (6) is 110nm to 116nm.Preferably, the physical thickness of the bottom (5) of described annular membrane layer (2)
For 10nm, the physical thickness of top layer (7) is 4.12nm, and the physical thickness of interlayer (6) is 113.7nm.
Concrete scheme two: the bottom (5) of described annular membrane layer (2) and top layer (7) are metal nb film layer, described annular
The physical thickness of the bottom (5) of thin layer (2) is 8nm to 12 nm, and the physical thickness of top layer (7) is 3.5 nm to 6 nm, folder
The physical thickness of layer (6) is 80nm to 90nm.Preferably, the physical thickness of the bottom (5) of described annular membrane layer (2) is
10nm, the physical thickness of top layer (7) is 5nm, and the physical thickness of interlayer (6) is 86.63nm.
Concrete scheme three: the bottom (5) of described annular membrane layer (2) and top layer (7) are metal ti film layer, described annular
The physical thickness of the bottom (5) of thin layer (2) is 8nm to 12 nm, and the physical thickness of top layer (7) is 3.5 nm to 6 nm, folder
The physical thickness of layer (6) is 95nm to 105nm.Preferably, the physical thickness of the bottom (5) of described annular membrane layer (2) is
10nm, the physical thickness of top layer (7) is 5nm, and the physical thickness of interlayer (6) is 100.39nm.
Concrete scheme four: the bottom (5) of described annular membrane layer (2) and top layer (7) are metal ni film layer, described annular
The physical thickness of the bottom (5) of thin layer (2) is 1nm to 3nm, and the physical thickness of top layer (7) is 1nm to 3 nm, interlayer (6)
Physical thickness be 98nm to 108nm.Preferably, the physical thickness of the bottom (5) of described annular membrane layer (2) is 2 nm,
The physical thickness on top layer (7) is 2nm, and the physical thickness of interlayer (6) is 102.39nm.
Above in each scheme, described glass substrate (1) is all to be suitable using n-bk7 substrate.
A kind of phase contrast microscope is it is characterised in that be configured with the as above phase-plate described in each scheme in its object lens.
Membrane phase is integrated by coatings optimization design by this utility model with absorbing film, develops a kind of multilamellar phase place
The phase-plate of absorbing film, this multilamellar phase place absorbing film is a kind of metal medium plural layers, has change position and absorbs light beam
Deng multiple action, this phase place absorbing film has that broadband phase place change is little, makes through its wavelength in the range of 450nm-700nm
Broadband beam phase value be -90 ° about, can directly use under broadband light source, can reach with Single wavelength under
Identical contrast, has the advantages that transmitance and Vapor recovery unit, surface residual reflect little simultaneously；Due to this utility model phase place
To wavelength, the broadband light beam for 450nm-700nm has relatively-stationary phase value to absorbing film, is therefore no longer necessary to 550nm's
Bandpass filter filters to broadband light source, greatly reduce the energy of light source decay that 550nm bandpass filter leads to so that
System imaging effect is obviously improved.And, the phase place absorbing membrane with respect to conventional phase plate, due to this utility model phase-plate
Phase place absorbing film be only coated in a ring shape thin layer above glass substrate, there is no the phase place absorbing membrane of conventional phase plate
The ring-type with high low head being formed between monolayer mgf2 thin film and monolayer cr12 thin film is had a common boundary；This utility model annular membrane
Though layer is multilayer film, simply in the multiple plated film of same annular region, coating process is easily implemented；Coating process stream
Journey is also substantially shorter, and coating process is stable, and qualification rate also greatly promotes.
Brief description
Fig. 1 is the phase place absorbing film cross-sectional view of conventional phase plate；
Fig. 2 is the phase place absorbing film plane figure schematic diagram of conventional phase plate；
Fig. 3 is the phase place absorbing film cross-sectional view of this utility model phase-plate；
Fig. 4 is that the phase place absorbing film film layer of this utility model phase-plate forms structural representation；
Fig. 5 is the phase place absorbing film plane figure schematic diagram of this utility model phase-plate；
Fig. 6 is the bottom (5) of phase place absorbing film and the top layer (7) of this utility model phase-plate all using metal cr film layer
When, the phase value curve chart of the broadband light beam being 450nm-700nm through its wavelength；
Fig. 7 is Fig. 6 situation corresponding beam transmittance curve chart；
Fig. 8 is Fig. 6 situation corresponding light beam reflectance curve figure；
Fig. 9 is the bottom (5) of phase place absorbing film and the top layer (7) of this utility model phase-plate all using metal nb film layer
When, the phase value curve chart of the broadband light beam being 450nm-700nm through its wavelength；
Figure 10 is the bottom (5) of phase place absorbing film and the top layer (7) of this utility model phase-plate all using metal ti film layer
When, the phase value curve chart of the broadband light beam being 450nm-700nm through its wavelength；
Figure 11 is the bottom (5) of phase place absorbing film and the top layer (7) of this utility model phase-plate all using metal ni film layer
When, the phase value curve chart of the broadband light beam being 450nm-700nm through its wavelength；
Figure 12 for wavelength be 450nm-700nm broadband light beam through this utility model each embodiment phase-plate and tradition
Phase value comparative graph during phase-plate.
Because phase place absorbing film is the optical coating of nanometer grade thickness, therefore Fig. 1, Fig. 3, Fig. 4 are vertical magnification figure.
Specific embodiment
Below to describe specific embodiment of the present utility model shown in Fig. 3 to Figure 12 in detail.
As shown in Fig. 3, Fig. 5, one kind is used for phase-contrast phase-plate, and including glass substrate 1, glass substrate 1 is optional
With for n-bk7 substrate.Glass substrate 1 scribbles a ring shape thin layer 2 above, forms annular membrane floor 2 area, annular membrane layer 2
Form circular transparent area 3 completely, annular membrane layer 2 profile circularizes complete transparent area 4, as shown in Figure 5 in area.This annular membrane
Layer 2 is exactly the phase place absorbing film of this utility model phase-plate.This annular membrane layer 2 includes being coated directly on above glass substrate 1
Bottom 5, the interlayer 6 being coated in above this bottom 5 and the top layer 7 being coated in above interlayer 6, interlayer 6 is mgf2 layer, specifically as Fig. 4 institute
Show；Bottom 5 and top layer 7 are metal cr film layer, or bottom 5 is metal nb film layer with top layer 7, or bottom 5 is with top layer 7
Metal ti film layer, or bottom 5 is metal ni film layer with top layer 7.Particularly may be divided into following three kinds of modes to implement.
Embodiment one
Glass substrate 1 is selected as n-bk7 substrate.Bottom 5 and the top layer 7 of annular membrane layer 2 are metal cr film layer, annular
The physical thickness of the bottom 5 of thin layer 2 is 8nm to 12 nm, and the physical thickness on top layer 7 is 3 nm to 5.5 nm, and interlayer 6 is also
Be mgf2 layer physical thickness be 110nm to 116nm.Preferred value: the physical thickness of the bottom 5 of annular membrane layer 2 is 10nm, table
The physical thickness of layer 7 is 4.12nm, and the physical thickness of interlayer 6 is 113.7nm.
The bottom 5 of annular membrane layer 2 being metal cr film layer is equal with the physical thickness of the interlayer 6 of mgf2 layer with top layer 7
During for preferred value, the phase value distribution of the broadband light beam being 450nm-700nm through its wavelength is as shown in fig. 6, light beam is saturating
Rate of crossing is distributed as shown in fig. 7, light beam reflectivity distribution is as shown in Figure 8.
Embodiment two
Glass substrate 1 is selected as n-bk7 substrate.Bottom 5 and the top layer 7 of annular membrane layer 2 are metal nb film layer, annular
The physical thickness of the bottom 5 of thin layer 2 is 8nm to 12 nm, and the physical thickness on top layer 7 is 3.5 nm to 6nm, and interlayer 6 is also
Be mgf2 layer physical thickness be 80nm to 90nm.Preferred value: the physical thickness of the bottom 5 of annular membrane layer 2 is 10nm, top layer
7 physical thickness is 5nm, and the physical thickness of interlayer 6 is 86.63nm.
The bottom 5 of annular membrane layer 2 being metal nb film layer is equal with the physical thickness of the interlayer 6 of mgf2 layer with top layer 7
During for preferred value, the phase value distribution of the broadband light beam being 450nm-700nm through its wavelength is as shown in Figure 9.
Embodiment three
Glass substrate 1 is selected as n-bk7 substrate.Bottom 5 and the top layer 7 of annular membrane layer 2 are metal ti film layer, annular
The physical thickness of the bottom 5 of thin layer 2 is 8nm to 12 nm, and the physical thickness on top layer 7 is 3.5 nm to 6nm, and interlayer 6 is also
Be mgf2 layer physical thickness be 95nm to 105nm.Preferred value: the physical thickness of the bottom 5 of annular membrane layer 2 is 10nm, table
The physical thickness of layer 7 is 5nm, and the physical thickness of interlayer 6 is 100.39nm.
The bottom 5 of annular membrane layer 2 being metal ti film layer is equal with the physical thickness of the interlayer 6 of mgf2 layer with top layer 7
During for preferred value, the phase value distribution of the broadband light beam being 450nm-700nm through its wavelength is as shown in Figure 10.
Example IV
Glass substrate 1 is selected as n-bk7 substrate.Bottom 5 and the top layer 7 of annular membrane layer 2 are metal ni film layer, annular
The physical thickness of the bottom 5 of thin layer 2 is 1nm to 3 nm, and the physical thickness on top layer 7 is 1 nm to 3nm, and interlayer 6 is namely
The physical thickness of mgf2 layer is 98nm to 108nm.Preferred value: the physical thickness of the bottom 5 of annular membrane layer 2 is 2nm, top layer 7
Physical thickness be 2nm, the physical thickness of interlayer 6 is 102.39nm.
The bottom 5 of annular membrane layer 2 being metal ni film layer is equal with the physical thickness of the interlayer 6 of mgf2 layer with top layer 7
During for preferred value, the phase value distribution of the broadband light beam being 450nm-700nm through its wavelength is as shown in figure 11.
Be compared to each other as follows by various embodiments above and using the technique effect of the conventional phase plate of monolayer mgf2 thin film:
The phase being the conventional phase plate using various embodiments above phase-plate and using monolayer mgf2 thin film with following table one
Place value compares, and all using respective preferred value, be wavelength through light beam is 450nm-700nm to respective thin layer physical thickness
Broadband light beam.
Table one
Wavelength is the broadband light beam of 450nm-700nm through this utility model each embodiment phase-plate and conventional phase plate
When phase value compare referring also to Figure 12.By Figure 12 and upper table one as can be seen that adopting the embodiment one of cr/mgf2/cr film layer
Phase-plate there is curve the most flat, effect is best；This phase absorbing film is substantially than the phase-plate of conventional monolayers mgf2 film
And the position of other metal film phase-plates is mutually more smooth, can directly be worked using broadband light source, and conventional monolayers mgf2
The phase-plate of film only at 550nm near for -90 degree (- 1/4 λ), so 550nm bandpass filter must be used at light source
Filtered.
With respect to the phase place absorbing membrane of conventional phase plate, the phase place due to this utility model each embodiment phase-plate absorbs
Film is only coated in the ring shape thin layer above glass substrate, does not have monolayer mgf2 in the phase place absorbing membrane of conventional phase plate
The ring-type with high low head being formed between thin film and monolayer cr12 thin film is had a common boundary；Though this utility model annular membrane layer is many
Tunic, but simply in the multiple plated film of same annular region, coating process is easily implemented；Coating process flow process also can be big
Big shortening, coating process is stable, and qualification rate also greatly promotes.Using cr/mgf2/cr film layer embodiment one phase-plate not only
Technique effect is especially good, and is easy to manufacture.Embodiment two, embodiment three, the phase-plate of example IV also can reach traditional phase
Position plate identical function, completes to replace conventional phase plate to use.Although do not have big in serviceability effect at them
Break through, but the simplification due to its film layer structure, again such that it manufactures becomes convenient easy, solve conventional phase plate long-term
Since the big problem of manufacture difficulty.
Claims (10)
1. a kind of it is used for phase-contrast phase-plate, including glass substrate (1) it is characterised in that on described glass substrate (1)
Scribble ring shape thin layer (2), form annular membrane floor (2) area, in annular membrane floor (2) area, form circular transparent area completely
(3), annular membrane layer (2) profile circularizes complete transparent area (4)；Described annular membrane layer (2) includes being coated directly on glass base
Plate (1) bottom (5) above, it is coated in this bottom (5) interlayer (6) above and is coated in interlayer (6) top layer (7) above；Interlayer
(6) be mgf2 layer, bottom (5) and top layer (7) are material identical metallic diaphragm, the material of this metallic diaphragm is metal cr, nb,
One of which in ti, ni.
2. phase-plate as claimed in claim 1 is it is characterised in that the physical thickness of the bottom (5) of described annular membrane layer (2)
For 8nm to 12 nm, the physical thickness of top layer (7) is 3 nm to 6 nm, and the physical thickness of interlayer (6) is 80nm to 120nm.
3. phase-plate as claimed in claim 2 is it is characterised in that the bottom (5) of described annular membrane layer (2) and top layer (7)
It is metal cr film layer, the physical thickness of described interlayer (6) is 110nm to 116nm.
4. phase-plate as claimed in claim 3 is it is characterised in that the physical thickness of the bottom (5) of described annular membrane layer (2)
For 10nm, the physical thickness of top layer (7) is 4.12nm, and the physical thickness of interlayer (6) is 113.7nm.
5. phase-plate as claimed in claim 2 is it is characterised in that the bottom (5) of described annular membrane layer (2) and top layer (7)
It is metal nb film layer, the physical thickness of the bottom (5) of described annular membrane layer (2) is 10nm, and the physical thickness of top layer (7) is
5nm, the physical thickness of interlayer (6) is 86.63nm.
6. phase-plate as claimed in claim 2 is it is characterised in that the bottom (5) of described annular membrane layer (2) and top layer (7)
It is metal ti film layer, the physical thickness of the bottom (5) of described annular membrane layer (2) is 10nm, and the physical thickness of top layer (7) is
5nm, the physical thickness of interlayer (6) is 100.39nm.
7. phase-plate as claimed in claim 1 is it is characterised in that the bottom (5) of described annular membrane layer (2) and top layer (7)
It is metal ni film layer, the physical thickness of the bottom (5) of described annular membrane layer (2) is 1nm to 3nm, the physics of top layer (7)
Thickness is 1nm to 3 nm, and the physical thickness of interlayer (6) is 98nm to 108nm.
8. phase-plate as claimed in claim 7 is it is characterised in that the physical thickness of the bottom (5) of described annular membrane layer (2)
For 2 nm, the physical thickness of top layer (7) is 2nm, and the physical thickness of interlayer (6) is 102.39nm.
9. the phase-plate as described in any one of claim 1 to 8 is it is characterised in that described glass substrate (1) is n-bk7 substrate.
10. a kind of phase contrast microscope is it is characterised in that be configured with phase-plate as claimed in claim 9 in its object lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620804869.6U CN205899065U (en) | 2016-07-28 | 2016-07-28 | A phase plate for contrast phase microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620804869.6U CN205899065U (en) | 2016-07-28 | 2016-07-28 | A phase plate for contrast phase microscope |
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| CN205899065U true CN205899065U (en) | 2017-01-18 |
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| CN201620804869.6U Withdrawn - After Issue CN205899065U (en) | 2016-07-28 | 2016-07-28 | A phase plate for contrast phase microscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106094092A (en) * | 2016-07-28 | 2016-11-09 | 宁波永新光学股份有限公司 | A kind of for phase-contrast phase-plate |
-
2016
- 2016-07-28 CN CN201620804869.6U patent/CN205899065U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106094092A (en) * | 2016-07-28 | 2016-11-09 | 宁波永新光学股份有限公司 | A kind of for phase-contrast phase-plate |
| CN106094092B (en) * | 2016-07-28 | 2018-05-11 | 宁波永新光学股份有限公司 | A kind of phase-plate for phase contrast microscope |
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Granted publication date: 20170118 Effective date of abandoning: 20180511 |