CN205893458U - Efficiency of hydrogen chloride turns into chlorination gallium is improved device - Google Patents
Efficiency of hydrogen chloride turns into chlorination gallium is improved device Download PDFInfo
- Publication number
- CN205893458U CN205893458U CN201620797442.8U CN201620797442U CN205893458U CN 205893458 U CN205893458 U CN 205893458U CN 201620797442 U CN201620797442 U CN 201620797442U CN 205893458 U CN205893458 U CN 205893458U
- Authority
- CN
- China
- Prior art keywords
- hydrogen chloride
- gallium
- windmill
- converted
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides an efficiency of hydrogen chloride turns into chlorination gallium is improved device for hydride gaseous phase epitaxial growth material, including reactor, windmill and splendid attire container, reactor is provided with the reacting chamber that holds liquid gallium source, and inlet port and venthole, windmill are installed at reactor, and liquid container installs on the windmill. In the carrier roller device, utilize the aerodynamic principle, the mist that contains hydrogen chloride that gets into from the inlet port, circular motion is to drive windmill and splendid attire container during the top of passing through liquids gallium source, liquid gallium source has been ladled out to splendid attire container when motion, then liquid gallium source is spilt lou through the splendid attire container or the seepage is come out, spill lou or liquid gallium source that the seepage was come out will take place the reaction with hydrogen chloride in the mist, the area of contact of hydrogen chloride with the gallium source has been increaseed, improve the conversion rate that hydrogen chloride generated the chlorination gallium, gallium nitride growth of single crystal in -process hydrogen chloride gas utilization ratio has been improved.
Description
Technical field
This utility model is related to a kind of gallium source device for hvpe growing gallium nitride crystal, more particularly to a kind of raising
Hydrogen chloride is converted into the device of gallium chloride efficiency.
Background technology
Gallium nitride represents one of material as typical third generation quasiconductor, in the opto-electronic device such as blue light or ultraviolet light neck
Domain all has significant application value.The maximum bottleneck problem of opto-electronic device development at present, it is simply that lacking homoepitaxy substrate, is led
Cause current opto-electronic device performance, cannot obtain all the time and be greatly improved, seriously constrain the development of opto-electronic device.So development
Homoepitaxy substrate, is the priority research areass that current nitride develops further.In the growing gallium nitride crystal being currently known
Method, hydride vapor phase epitaxy method is expected to obtain important application.
It is frequently encountered by an important problem it is simply that in hydrogen chloride and liquid-gallium source in hydride gas phase epitaxial growth material
During reaction, liquid-gallium source due to being present in the bottom of gallium source container, when hydrogen chloride gas flow through gallium source surface,
Gas only near gallium source surface could be reacted with gallium source, generate gallium chloride, substantial amounts of hydrogen chloride gas with carrier gas from
Gallium flows through above source, and chemical reaction, in addition to the loss causing reacting gas, unreacted hydrogen chloride gas in a large number do not occur
Adverse effect also be will result in the gallium nitride quality hereafter generating.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of hydrogen chloride that improves to be converted into gallium chloride
The device of efficiency, improves the conversion ratio that hydrogen chloride generates gallium chloride, improves hydrogen chloride gas in gallium nitride single crystal growth course
Utilization rate.
In order to achieve the above object, the technical solution adopted in the utility model is:
A kind of raising hydrogen chloride is converted into the device of gallium chloride efficiency, including reactor, is provided with receiving liquid in reactor
The reative cell in body gallium source, reactor is provided with air inlet and venthole, also includes windmill and container containing, and described windmill is pacified
It is contained in reactor, container containing is arranged on windmill.
As preferred embodiment of the present utility model, container containing bottom described in the utility model is provided with water conservancy diversion and leads to
Hole.
As preferred embodiment of the present utility model, container containing described in the utility model is in bowl cup-like structure, described
Water conservancy diversion through hole at least.
As preferred embodiment of the present utility model, windmill described in the utility model includes rotary shaft and turning arm, rotation
Rotating shaft is movably arranged in reactor, and turning arm is installed on the rotary shaft, and container containing is arranged on turning arm.
As preferred embodiment of the present utility model, turning arm described in the utility model is set to straight-arm or curved boom,
Turning arm at least two, a described turning arm is at least connected with a container containing.
As preferred embodiment of the present utility model, windmill described in the utility model includes rotary shaft, connecting rod, rotating ring
And rotating vane, rotary shaft is movably arranged in reactor, and connecting rod one end is connected with rotary shaft, and the other end is with rotating ring even
Connect, rotating vane is arranged on rotating ring, and on rotating ring, free suspension has container containing.
As preferred embodiment of the present utility model, container containing described in the utility model at least.
As preferred embodiment of the present utility model, connecting rod described in the utility model is set to straight-bar or knee, even
At least one, bar.
As preferred embodiment of the present utility model, rotating vane described in the utility model is at least two panels.
As preferred embodiment of the present utility model, windmill described in the utility model at least.
Compared with prior art, the beneficial effects of the utility model are: so that windmill is rotated using the gas of air inlet, drive
Container containing rotates, and liquid-gallium source is scooped up by container containing, and liquid-gallium source is spilt by container containing or leaks out, and increases
Hydrogen chloride and the contact area in gallium source, extend the response time of hydrogen chloride and gallium source, improve the conversion that hydrogen chloride generates gallium chloride
Rate, improves hydrogen chloride gas utilization rate in gallium nitride single crystal growth course.
Brief description
Fig. 1 is first embodiment accompanying drawing of this utility model；
Fig. 2 is this utility model container containing enlarged drawing；
Fig. 3 is second embodiment accompanying drawing of this utility model.
In figure 1. reactor, 2. air inlet, 3. venthole, 41. rotary shafts, 42. turning arms, 55. container containings, 51. lead
Opening, 61. rotary shafts, 62. connecting rods, 63. rotating rings, 64. rotating vanes.
Specific embodiment
Purport of the present utility model is to overcome the deficiencies in the prior art, provides a kind of hydrogen chloride that improves to be converted into gallium chloride
The device of efficiency, improves the conversion ratio that hydrogen chloride generates gallium chloride, thus improve the efficiency that hydrogen chloride is converted into gallium nitride, more
Plus effectively utilize hydrogen chloride gas.
It is described in detail referring to the drawings with reference to embodiment, to enter to technical characteristic of the present utility model and advantage
Row deeper into annotation.
As illustrated in the accompanying drawings from 1 to 3, a kind of raising hydrogen chloride is converted into gallium chloride efficiency to structural representation of the present utility model
Device, including reactor 1, is provided with the reative cell accommodating liquid-gallium source, reactor 1 is provided with air inlet 2 He in reactor
Venthole 3, air inlet 2 and gas outlet 3 can be any fluidal texture, flow into including single or multiple jet pipe, and single or multiple jet pipe flows out；
Enter reaction interior containing the carrier gas such as nitrogen, hydrogen and hydrogen chloride gas mixture from air inlet 2, be then passed through on liquid-gallium source
Fang Hou, discharges reactor from venthole 3；Windmill and container containing 5 is also included, this windmill is arranged on reactor in this reactor
Interior, container containing 5 is arranged on windmill, when entering from air inlet 2 containing the carrier gas such as nitrogen, hydrogen and hydrogen chloride gas mixture
Enter, when above liquid-gallium source, due to the impulse force of gas flowing generation, drive windmill and container containing 5 to move in a circle,
When container containing 5 leaves liquid-gallium source liquid level, liquid-gallium source is scooped up, liquid-gallium source spills in liquid-gallium source ullage, spreads
The liquid-gallium source spilling will be reacted with hydrogen chloride in mixed gas, generate gallium chloride.Alternatively, it is also possible in reactor
Driving means are installed, axle being rotated with driving means and rotate, thus driving windmill to move in a circle, completing said process.
Additionally, described container containing 5 bottom is provided with water conservancy diversion through hole 51, a part of liquid-gallium source is from water conservancy diversion through hole 51
Ooze out, the liquid-gallium source oozed out adds hydrogen chloride contact area, reacts with hydrogen chloride in mixed gas, generate gallium chloride.Institute
The container containing 5 stated is in bowl cup-like structure, and bowl shape structural base is provided with least one water conservancy diversion through hole 51, water conservancy diversion through hole 51 number
Could be arranged to one, two or three, water conservancy diversion through hole 51 number is flexibly arranged as needed, and certain container containing can also
It is set to the arbitrary shape that tubular, spoon shape or others have open accommodating cavity.
For windmill structure, there are following two preferred embodiments.
In embodiment one as described in Figure 1, windmill includes rotary shaft 41 and turning arm 42, and rotary shaft is movably arranged on
In reactor 1, can move in a circle after stress, turning arm 42 is arranged in rotary shaft 41, rotary shaft be provided with splendid attire and holds
Device 5, when passing through this windmill containing the carrier gas such as nitrogen, hydrogen and hydrogen chloride gas mixture, the impulse force that gas flowing produces is made
On windmill, act predominantly on container containing 5, container containing 5 moves in a circle, be rotated simultaneously arm 42 and with rotation
The rotary shaft 41 that pivoted arm 42 is connected moves in a circle, and liquid-gallium source is scooped up during moving in a circle by container containing 5, liquid-gallium
A source part spills out by the opening of container containing, and another part is leaked out by the water conservancy diversion through hole 51 of container containing bottom
Come, spill or the liquid-gallium source of seepage increases the contact area of hydrogen chloride in liquid-gallium source and mixed gas, improve liquid
Gallium source generates the reaction efficiency of gallium chloride with hcl reaction.
Additionally, turning arm 42 can be straight-arm or curved boom, turning arm 42 at least two just enables windmill stress and turns
Dynamic, turning arm 42 may be arranged as three, four or five, and turning arm 42 is flexibly arranged as needed；One turning arm
At least one container containing 5 is connected on 42 free ends naturally it is also possible to connect two, three or four, on turning arm 42
The container containing 5 connecting can flexibly be arranged as needed.
In the present embodiment, rotary shaft 41 is fixedly connected four turning arms 42, this turning arm is straight-arm and is uniformly distributed
On the rotary shaft, the angle between adjacent two turning arms 42 is 90 °, and each turning arm 42 free end is fixedly connected a splendid attire
Container 5, all container containing 5 opening directions are towards unanimously.
In embodiment two as described in accompanying drawing 3, windmill include rotary shaft 61, connecting rod 62. rotating ring 63 and rotating vane
64, rotary shaft 61 is movably arranged on reaction interior, can move in a circle, connecting rod 63 one end is connected to rotary shaft 61 after stress
On, the other end is connected to rotating ring 63, and rotating vane 64 is arranged on outside on rotating ring 63, and on rotating ring 63, free suspension has
Container containing 5, container containing 5 is subject to action of gravity, remains plumbness, opening direction is upward.When containing nitrogen, hydrogen
When passing through this windmill Deng carrier gas with hydrogen chloride gas mixture, gas flows the momentum effect producing on windmill, Main Function
On rotating vane, rotating vane 64 moves in a circle, and drives coupled rotating ring 63 to move in a circle simultaneously, rotation
Ring 63 drives container containing 5, connecting rod 62 and the rotary shaft 61 being connected with connecting rod to move in a circle again, and container containing 5 does circle
In all motor processs, liquid-gallium source is scooped up, container containing 5 is subject to action of gravity, remains plumbness, opening direction court
On, the water conservancy diversion through hole 51 that liquid-gallium source is passed through on container containing leaks out, and the liquid-gallium source leaking out will be with mixed gas
Middle hydrogen chloride reacts, and increases liquid-gallium source and hydrogen chloride contact area, improves the efficiency that hydrogen chloride generates gallium chloride.
Additionally, described container containing 5 at least is it is also possible to install two, three or four or more,
This not concrete restriction, can flexibly set according to actual needs, flexible here according to the space on needs and rotating ring
Setting；Connecting rod 62 is set to straight-bar or knee, at least one, connecting rod 62, and connecting rod plays support and connects rotary shaft and rotating ring
Effect, connecting rod 62 flexibly arranges as needed, and connecting rod can be around the arbitrarily angled arrangement of rotary shaft；Rotating vane 64 is at least
Rotating vane more than two panels, only two panels just enables windmill and moves in a circle, this rotating vane could be arranged to two panels, three
Piece or four, rotating vane is flexibly arranged according to actual needs, and when rotating vane is uniformly distributed outside rotating ring, windmill is subject to
Power equalizes most.
In this practical embodiment, between rotary shaft 61 and rotating ring 63, it is provided with two connecting rods 62, two connecting rod 62 angle is
180 °, rotating ring 63 is provided with two symmetrical liquid leakage device 5, outside rotating ring 63, is connected to four rotating vanes 64, rotation
Rotating vane piece 64 is evenly distributed on outside annulus, and between adjacent two rotating vanes 64, angle is 180 °.
In this utility model, using aerodynamic principle, the gas of flowing, when windmill and container containing, carries wind symptom
Car and container containing move in a circle, and liquid-gallium source is scooped up by container containing, and liquid-gallium spills or seepage from container containing
Out, increase liquid-gallium source and hydrogen chloride contact area, effectively improve hydrogen chloride and generate gallium chloride conversion ratio, improve nitridation
Hydrogen chloride gas utilization rate in algan single crystal growth course.
Clear, complete description is carried out to this utility model by the technical scheme in above example it is clear that described
Embodiment be this utility model part embodiment, rather than whole embodiment.Based on the enforcement in this utility model
Example, the every other embodiment that those of ordinary skill in the art are obtained under the premise of not making creative work, broadly fall into
The scope of this utility model protection.
Claims (10)
1. a kind of raising hydrogen chloride is converted into the device of gallium chloride efficiency, including reactor (1), is provided with receiving liquid in reactor
The reative cell in body gallium source, reactor is provided with air inlet (2) and venthole (3) it is characterised in that: also include windmill and splendid attire
Container (5), described windmill is arranged in reactor (1), and container containing (5) is arranged on windmill.
2. according to claim 1 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described Sheng
Packaging container (5) bottom is provided with water conservancy diversion through hole (51).
3. according to claim 2 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described Sheng
Packaging container (5) is in bowl cup-like structure, described water conservancy diversion through hole (51) at least.
4. according to any one of claim 1-3 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that:
Described windmill includes rotary shaft (41) and turning arm (42), and rotary shaft (41) is movably arranged in reactor, turning arm (42)
It is arranged in rotary shaft (41), container containing (5) is arranged on turning arm (42).
5. according to claim 4 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described rotation
Pivoted arm (42) is set to straight-arm or curved boom, turning arm (42) at least two, and a described turning arm (42) at least connects
It is connected to a container containing (5).
6. according to any one of claim 1-3 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that:
Described windmill includes rotary shaft (61), connecting rod (62), rotating ring (63) and rotating vane (64), rotary shaft (61) activity peace
It is contained in reactor (1), connecting rod (62) one end is connected with rotary shaft (61), and the other end is connected with rotating ring (43), rotating vane
(44) it is arranged on rotating ring (63), the upper free suspension of rotating ring (43) has container containing (5).
7. according to claim 6 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described Sheng
Packaging container (5) at least one.
8. according to claim 7 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described company
Bar (62) is set to straight-bar or knee, at least one, connecting rod (62).
9. according to claim 8 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described rotation
Rotating vane piece (64) is at least two panels.
10. according to claim 9 improve hydrogen chloride be converted into gallium chloride efficiency device it is characterised in that: described
Windmill at least one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620797442.8U CN205893458U (en) | 2016-07-27 | 2016-07-27 | Efficiency of hydrogen chloride turns into chlorination gallium is improved device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620797442.8U CN205893458U (en) | 2016-07-27 | 2016-07-27 | Efficiency of hydrogen chloride turns into chlorination gallium is improved device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205893458U true CN205893458U (en) | 2017-01-18 |
Family
ID=57784685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620797442.8U Active CN205893458U (en) | 2016-07-27 | 2016-07-27 | Efficiency of hydrogen chloride turns into chlorination gallium is improved device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205893458U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112572265A (en) * | 2019-09-29 | 2021-03-30 | 张国义 | Multifunctional transport vehicle |
-
2016
- 2016-07-27 CN CN201620797442.8U patent/CN205893458U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112572265A (en) * | 2019-09-29 | 2021-03-30 | 张国义 | Multifunctional transport vehicle |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106757342A (en) | A kind of anti-solvent diffusion growth ABX3The method of perovskite monocrystalline | |
| CN104911705A (en) | Method for growing ABX3 perovskite single crystals in low-temperature solution | |
| CN107325812A (en) | A kind of perovskite structure luminescent material and its production method based on anti-solvent | |
| CN106676631A (en) | Method for preparing ABX3 perovskite single crystal film | |
| CN105586641B (en) | Methylamine lead halide phosphate compounds monocrystalline micro flakes growing method and grower | |
| CN104107643B (en) | The preparation method and its usage of metal organic framework film | |
| CN105758687B (en) | A kind of cultivation of halmeic deposit original position and sealing sampling mechanism | |
| CN205893458U (en) | Efficiency of hydrogen chloride turns into chlorination gallium is improved device | |
| CN106206951A (en) | The new application of polyvinylamine, perovskite thin film, perovskite solaode and preparation method thereof | |
| CN105514276A (en) | Mesoporous perovskite photovoltaic material and preparation method thereof | |
| CN106745249A (en) | BiVO4The hydro-thermal method preparation technology of nano wire | |
| US8539907B2 (en) | Apparatus for chemical bath deposition between two covers, wherein a cover is a substrate | |
| CN207197871U (en) | Funnel type water-vapor interface bubble approach collection device of greenhouse | |
| US20090273189A1 (en) | Compact-sized generation of appreciable hydropower through centrifuge-induced gravity effects | |
| US20200370529A1 (en) | Power device for increasing low flow rate | |
| CN203243835U (en) | Movable oxygenation device for aquaculture | |
| CN106706871A (en) | Water total dissolved gas observation system and application thereof | |
| CN205917722U (en) | Marine wind power and solar energy integration technical equipment | |
| CN206503671U (en) | A kind of tide energy engine | |
| CN204522945U (en) | Tail gas desulfurization catalytic oxidation still | |
| CN209352613U (en) | In a kind of haloflex diluted acid water and device | |
| CN207307669U (en) | A kind of uniform sufficient emulsion tank of New type agitation | |
| CN203212385U (en) | Solar shallow micro-nano aeration machine | |
| CN206862699U (en) | A kind of portable anti-adjustable deep siphon sampling apparatus of turbulent flow | |
| CN207839008U (en) | Cylindric dumped packing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |