CN205880384U - High density chopping light piece is with low chromatic dispersion light path - Google Patents
High density chopping light piece is with low chromatic dispersion light path Download PDFInfo
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- CN205880384U CN205880384U CN201620797504.5U CN201620797504U CN205880384U CN 205880384 U CN205880384 U CN 205880384U CN 201620797504 U CN201620797504 U CN 201620797504U CN 205880384 U CN205880384 U CN 205880384U
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- mirror
- axis paraboloidal
- collimation
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- metal film
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Abstract
The utility model provides a high density chopping light piece is with low chromatic dispersion light path, low chromatic dispersion light path that is used for the high density chopping the light piece of minor diameter femto second laser light beam especially, it uses the convex mirror including expanding to restraint, expand to restraint and use the concave mirror, off axis paraboloidal mirror is used in focus, off axis paraboloidal mirror for the collimation, contract to restraint and use the concave mirror, contract to restraint and use the convex mirror, expand the input of restrainting with the convex mirror and receive outside laser beam, expand to restraint and bundle be connected with the input of concave mirror with expanding with the output of convex mirror, it is connected with off axis paraboloidal mirror's input with focus to expand the output of restrainting with the concave mirror, focus is connected with off axis paraboloidal mirror's for the collimation input with off axis paraboloidal mirror's output, off axis paraboloidal mirror's output is connected with the input of concave mirror with contracting to restraint for the collimation, contract to restraint and bundle be connected with the input of convex mirror with contracting with the output of concave mirror, contract and restraint the laser beam who crosses with the outside transmission modulation of the input of convex mirror. The utility model discloses can the realized price cheap, no effect of dispersion be applicable to the sensitive pulsed laser light source of each type femto second laser light source and other chromatic dispersions.
Description
Technical field
A kind of high density chopper blade low dispersion road is related at this utility model, particularly a kind of for minor diameter femtosecond
The low dispersion road of the high density chopper blade of laser beam, expands including reflective, focuses on, collimates and contracting beam optical path.
Background technology
Resonance scanner (Resonant Scanner) is substituted because of its advantage being capable of quickly scanning (30fps)
Traditional galvanometer scanner (Galvanometer Scanner), quickly scans as X-axis in optical scanning microscope
Main flow device (is not related to the polygon scanner (Polygon Scanner) being rarely used) herein.With there is linear scanning
Characteristic, the galvanometer scanner being operated in closed loop states is different, and resonance scanner is operated in open loop situations, and its scanning speed is often
A line presents near sinusoidal change: at the two ends of every a line, its scanning speed is zero；In the central authorities of every a line, it scans speed
Spend the fastest.In each row, its scanning speed presents and accelerates to maximum from zero, then is decelerated to zero thus the rule of RLF reverse line feed.
This means resonance scanner scan every a line middle body (about 88%) time, its scanning speed approximate at the uniform velocity；In scanning
During the two ends of every a line, the problems such as its scanning speed is the slowest, is easily caused excessive sample and exposes, dye bleach.It is thus desirable to
When scanning the two ends of every a line, by the way of cutting off laser and inputting (rather than closing laser instrument), solve problem above.
Therefore, be quickly carried out opening of laser input uses the optics of resonance scanner to sweep with closing to become the most in good time
Retouch a key technology in microscope.The most widely used technology has Pockers cell based on Electro-optical Modulation effect
(Pockel cell) and acousto-optic modulator based on acousto-optic modulation effect (AOM).Acousto-optic modulation compared with Electro-optical Modulation technology,
It has higher extinction ratio (generally higher than 1000:1), lower driving power, more excellent temperature stability and more preferable light
Point mass and lower price.Its shortcoming is that the dispersion of acousto-optic modulator is serious, can make the obvious broadening of femto-second laser pulse, make
Become image quality decrease.Both technology can meet the primary demand of optical scanning microscope from aspect of performance, and common lacks
Point is expensive.The quotation of a set of electrooptic modulator being typically used for optical scanning microscope system is minimum wants 80,000 people
About coin.Although this price proportion in the import optical scanning microscope system that a set of value is millions of is little, but
It is that its cheaper alternative of exploitation is the most great for the domestic optical scanning microscope system significance realizing hundreds of thousands unit rank.
It is (remote that resonance scan mechanical light modulators has higher extinction ratio compared with electrooptic modulator and acousto-optic modulator
More than 1000:1), cheap, non-dispersive effect, it is adaptable to all types of optical scanning microscopes, as confocal fluorescent is micro-
Mirror, various nonlinear optics scanning microscopes (multi-photon, CARS, SHG, STED etc.).Resonance scan mechanical light modulators
Being distributed hundreds of through hole on chopper blade, the size of through hole is the least.Therefore the laser beam spot sizes allowed is at 0.95um to 50um
Between.These nonlinear optics scanning microscopes all use titanium sapphire femto-second laser or other pulse lasers to make light source,
Its Output of laser beam diameter is about 1.2mm.So need extra light path that femtosecond laser beam focuses on the through hole of chopper blade
Position,
The most again the diameter of the femtosecond laser beam passed through is recovered to 1.2mm.Whole light path does not produce obvious pulse
Broadening.
Therefore the utility model proposes a kind of high density chopper blade low dispersion road, particularly a kind of for minor diameter
The low dispersion road of the high density chopper blade of femtosecond laser beam, expands including reflective, focuses on, collimates and contracting beam optical path.This
Utility model is capable of cheap, non-dispersive effect, it is adaptable to all types of femtosecond laser light source and other dispersions are sensitive
Pulsed laser light source.
Utility model content
The purpose of this utility model is to realize the low color of a kind of high density chopper blade for minor diameter femtosecond laser beam
Astigmatism road, expands including reflective, focuses on, collimates and contracting beam optical path.This utility model is capable of cheap, and non-dispersive is imitated
Should, it is adaptable to all types of femtosecond laser light source and the pulsed laser light source of other dispersions sensitivity.
For achieving the above object, this utility model employing technical scheme is: it includes expanding with convex mirror, expands and uses concave surface
Mirror, focusing off axis paraboloidal mirror, collimation off axis paraboloidal mirror, contracting bundle concave mirror, contracting bundle convex mirror, expand and use convex surface
The input of mirror receives outside laser beam, expands and is connected with the input of concave mirror with expanding with the outfan of convex mirror, expands
The outfan of bundle concave mirror is connected with the input of focusing off axis paraboloidal mirror, the outfan of focusing off axis paraboloidal mirror
Being connected with the input of collimation off axis paraboloidal mirror, the outfan of collimation off axis paraboloidal mirror is defeated with contracting bundle concave mirror
Entering end to connect, the outfan of contracting bundle concave mirror is connected with the input of contracting bundle convex mirror, the input of contracting bundle convex mirror
Outwards transmit modulated laser beam.
Described expands with convex mirror for by outside diverging laser beam, and material is optical glass or quartz, plated surface
Film is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector；
Described expands with concave mirror for the laser beam collimator and extender that will dissipate, and material is optical glass or quartz,
Surface coating is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector；
Described focusing off axis paraboloidal mirror is for the laser beam focusing that will expand, and the position of focus is at chopper blade
On through hole, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or the metal of matcoveredn
Film；
The laser beam collimation that described collimation off axis paraboloidal mirror dissipates after focusing on, the position of focus is being cut
On the through hole of mating plate, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or matcoveredn
Metal film；
Described contracting bundle concave mirror is for the laser beam collimation focusing by collimation, and material is optical glass or quartz,
Surface coating is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector；
Described contracting bundle convex mirror is for the laser beam collimation that will focus on, and material is optical glass or quartz, surface
Plated film is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector.
Operation principle of the present utility model is such that in use, expands and swashs with the input reception of convex mirror is outside
Light light beam, expands and is connected with the input of concave mirror with expanding with the outfan of convex mirror, expand with the outfan of concave mirror with
The input of focusing off axis paraboloidal mirror connects, the outfan of focusing off axis paraboloidal mirror and collimation off axis paraboloidal mirror
Input connect, the outfan of collimation off axis paraboloidal mirror is connected with the input of contracting bundle concave mirror, contracting bundle concave surface
The outfan of mirror is connected with the input of contracting bundle convex mirror, and the input of contracting bundle convex mirror outwards transmits modulated laser
Light beam.Expand and form one group reflective beam expander optical system with expanding with concave mirror with convex mirror.The focusing of light beam and collimation are all
Use off axis paraboloidal mirror.Contracting bundle convex mirror and contracting bundle concave mirror form one group of reflective contracting beam optics system.All mirrors
Sheet uses reflective operation principle, and avoids the obvious broadening effect using lens and prism to cause femtosecond laser.
This utility model, owing to have employed technique scheme, has the advantage that
1, cheap；
2, non-dispersive effect, it is adaptable to all types of femtosecond laser light source and other dispersions are sensitive
Pulsed laser light source.
Accompanying drawing explanation
Fig. 1 is structured flowchart of the present utility model.
Detailed description of the invention
The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings: as it is shown in figure 1, it includes expanding with convex
Face mirror 1, expands with concave mirror 2, focuses on off axis paraboloidal mirror 3, collimation off axis paraboloidal mirror 4, contracting bundle concave mirror 5, contracting
Bundle convex mirror 6, expands and receives outside laser beam with the input of convex mirror 1, expand the outfan with convex mirror 1 and expand
Connect with the input of concave mirror 2, expand and be connected with the input of focusing off axis paraboloidal mirror 3 with the outfan of concave mirror 2,
Focus on and be connected with the input of collimation off axis paraboloidal mirror 4 with the outfan of off axis paraboloidal mirror 3, collimation off axis paraboloid mirror
The outfan of mirror 4 is connected with the input of contracting bundle concave mirror 5, contracting the bundle outfan of concave mirror 5 and contracting bundle convex mirror 6
Input connects, and the input of contracting bundle convex mirror 6 outwards transmits modulated laser beam.
Described expands with convex mirror 1 for by outside diverging laser beam, and material is optical glass or quartz, plated surface
Film is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector；
Described expands with concave mirror 2 for the laser beam collimator and extender that will dissipate, and material is optical glass or quartz,
Surface coating is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector；
Described focusing off axis paraboloidal mirror 3 is for the laser beam focusing that will expand, and the position of focus is at chopper blade
Through hole on, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or the metal of matcoveredn
Film；
The laser beam collimation that described collimation off axis paraboloidal mirror 4 dissipates after focusing on, the position of focus exists
On the through hole of chopper blade, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or matcoveredn
Metal film；
Described contracting bundle concave mirror 5 is for the laser beam collimation focusing by collimation, and material is optical glass or quartz,
Surface coating is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector；
Described contracting bundle convex mirror 6 is for the laser beam collimation that will focus on, and material is optical glass or quartz, surface
Plated film is naked metal film, and low dispersive medium film or the metal film of matcoveredn, for spherical reflector.
Operation principle of the present utility model is such that in use, expands and swashs with the input reception of convex mirror 1 is outside
Light light beam, expands the outfan with convex mirror 1 and is connected with the input of concave mirror 2 with expanding, and expands with the outfan of concave mirror 2
Being connected with the input of focusing off axis paraboloidal mirror 3, the outfan of focusing off axis paraboloidal mirror 3 uses off-axis parabolic with collimation
The input of face mirror 4 connects, and the collimation input of the outfan of off axis paraboloidal mirror 4 with contracting bundle concave mirror 5 is connected, contracting bundle
Being connected with the input of the outfan 5 of concave mirror with contracting bundle convex mirror 6, the input of contracting bundle convex mirror 6 outwards transmits tune
The laser beam made.Expand and form one group reflective beam expander optical system with expanding with concave mirror 2 with convex mirror 1.Light beam
Focus on and collimation all uses off axis paraboloidal mirror.Contracting bundle convex mirror 5 and contracting bundle concave mirror 6 form one group of reflective contracting Shu Guang
System.All eyeglasses use reflective operation principles, and avoid use lens and prism to cause femtosecond laser obvious
Broadening effect.
Embodiment: generally widely used in the optical scanning microscope product that resonance scanner is CTI company of the U.S.,
There is the resonant frequency of about 8KHz, using the teaching of the invention it is possible to provide the maximum sweep rate of 15600 row/second.Therefore for a width 512x512's
Image, frame per second can reach the fastest 30 frames/second.For simple scanning, each image (is just including 256 forward scan row
To definition be from left to right) and 256 reverse scan row.Owing to being resonance scan, often row forward scan and reverse scan institute
The time consumed is identical.A diameter of 100mm of every chopper blade, sheet comprises the complete blanking structure realizing a frame scan.Cause
The rotating speed of this motor is 1800rpm, is equivalent to 30fps.Chopper blade is divided into 520 equal portions (15600 near the part of circumference
Divided by 30), wherein 512 equal portions part punching, in every equal portions, the area of punching accounts for the 88% of every part, and the area not punched accounts for 12%,
Corresponding often row 88% approximates part and the high order end 6% of uniform speed scanning, the part of low order end 6% blanking respectively.The part of punching allows
Laser passes through；The part do not punched stops laser completely.Remaining 8 equal portions do not punch, and after corresponding every frame end, probe returns to down
The process of one frame the first row original position.The design of this chopper blade is applicable to bilateral scanning.Sweep when resonance scanner starts forward
When retouching the first row poem, first pass through the laser blanking zone of 6%, front the 6% of first equal portions not perforated zone on corresponding chopper blade；After warp
Cross 88% scanning area, centre 88% perforated zone of first equal portions on corresponding chopper blade；Again through 6% laser blanking zone, correspondence is cut
Rear the 6% of first equal portions not perforated zone on mating plate；Resonance scanner line feed afterwards starts reverse scan and repeats a upper process, cuts
Mating plate is rotated further second equal portions of entrance, by that analogy ... when resonance scanner completes the 512nd row, and namely the 256th
Reverse scan row, initially enters the field blanking stage afterwards.Probe returns to the original position of the first row.In the process, chopping the light
Sheet continues to revolve through remaining 8 equal portions not perforated zone, stops that laser is to realize field blanking.With Scitec company of compatible Britain machinery chopping the light
As a example by the chopper blade of device, a diameter of 100mm of chopper blade, thickness is 0.5mm, and material is CZ108 pyrite, and motor speed is
3600rpm.Corresponding beam diameter is about 1.9um.The numerical aperture of corresponding 800nm wavelength is about 0.25, and half-angle is about 14 degree.
If beam diameter increase can cause laser to flatten slow by the intermediate zone between blanking, scanogram edge quality is made to become
Difference.As a example by the MaiTai Deepsee titanium sapphire femto-second laser of Spectral Physics company of the U.S., Output of laser
Beam diameter is 1.2mm, therefore uses 1/2 inch diameter, expanding with convex mirror 1 and 1 inch diameter, 75mm of-7.5mm focal length
The expanding of focal length carries out 10 times with concave mirror 2 and expands, and expands rear laser beam spot sizes and is about 12mm.Focusing off axis paraboloidal mirror
3 use 1/2 inch diameter, 90 degree of reflections, the specification that reflection focal length is 1 inch.Just 800nm femtosecond laser beam can be focused on
For the hot spot of diameter 1.9um, and sufficiently large operating distance is had to make chopper blade may be located at focal position.Collimation is thrown with off-axis
Object plane mirror 4 uses specification as focusing on and using off axis paraboloidal mirror 3.Collimation with off axis paraboloidal mirror 4 use with focus on from
The same specification of axis paraboloidal mirror 3.Contracting bundle concave mirror 5 uses specification as expanding and using concave mirror 2.Contracting bundle convex mirror
6 use specification as expanding and using convex mirror 1.
Fig. 1 is only annexation schematic diagram, and light path is not limited to Fig. 1, can make and the most reasonably change.
Described in the utility model expand with convex mirror 1 for by outside diverging laser beam, material be optical glass or
Quartz, surface coating is naked metal film, low dispersive medium film or the metal film of matcoveredn；
Described in the utility model expanding with concave mirror 2 for the laser beam collimator and extender that will dissipate, material is optics
Glass or quartz, surface coating is naked metal film, low dispersive medium film or the metal film of matcoveredn；
Focusing off axis paraboloidal mirror 3 described in the utility model is for the laser beam focusing that will expand, the position of focus
Putting on the through hole of chopper blade, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or have guarantor
The metal film of sheath；
The laser beam collimation that collimation off axis paraboloidal mirror 4 described in the utility model dissipates after focusing on, burnt
The position of point is on the through hole of chopper blade, and material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film
Or the metal film of matcoveredn；
Contracting bundle concave mirror 5 described in the utility model is for the laser beam collimation focusing by collimation, and material is optics
Glass or quartz, surface coating is naked metal film, low dispersive medium film or the metal film of matcoveredn；
Contracting bundle convex mirror 6 described in the utility model is for the laser beam collimation that will focus on, and material is optical glass
Or quartz, surface coating is naked metal film, low dispersive medium film or the metal film of matcoveredn；
The reflection angle of focusing off axis paraboloidal mirror 3 described in the utility model and collimation off axis paraboloidal mirror 4 is
15 degree to 120 degree.
Claims (7)
1. a high density chopper blade uses low dispersion road, it is characterised in that: it includes expanding with convex mirror, expands and uses concave surface
Mirror, focusing off axis paraboloidal mirror, collimation off axis paraboloidal mirror, contracting bundle concave mirror, contracting bundle convex mirror, expand and use convex surface
The input of mirror receives outside laser beam, expands and is connected with the input of concave mirror with expanding with the outfan of convex mirror, expands
The outfan of bundle concave mirror is connected with the input of focusing off axis paraboloidal mirror, the outfan of focusing off axis paraboloidal mirror
Being connected with the input of collimation off axis paraboloidal mirror, the outfan of collimation off axis paraboloidal mirror is defeated with contracting bundle concave mirror
Entering end to connect, the outfan of contracting bundle concave mirror is connected with the input of contracting bundle convex mirror, the input of contracting bundle convex mirror
Outwards transmit modulated laser beam；
Described expands with convex mirror for by outside diverging laser beam, and material is optical glass or quartz, and surface coating is
Naked metal film, low dispersive medium film or the metal film of matcoveredn；
Described expands with concave mirror for the laser beam collimator and extender that will dissipate, and material is optical glass or quartz, surface
Plated film is naked metal film, low dispersive medium film or the metal film of matcoveredn；
Described focusing off axis paraboloidal mirror is for the laser beam focusing that will expand, and the position of focus is at the through hole of chopper blade
On, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or the metal film of matcoveredn；
The laser beam collimation that described collimation off axis paraboloidal mirror dissipates after focusing on, the position of focus is at chopper blade
Through hole on, material is optical glass or quartz, and surface coating is naked metal film, low dispersive medium film or the metal of matcoveredn
Film；
Described contracting bundle concave mirror is for the laser beam collimation focusing by collimation, and material is optical glass or quartz, surface
Plated film is naked metal film, low dispersive medium film or the metal film of matcoveredn；
Described contracting bundle convex mirror is for the laser beam collimation that will focus on, and material is optical glass or quartz, surface coating
For naked metal film, low dispersive medium film or the metal film of matcoveredn.
2. high density chopper blade as claimed in claim 1 a kind of uses low dispersion road, it is characterised in that: described focusing with from
The reflection angle of axis paraboloidal mirror is 15 degree to 120 degree.
3. high density chopper blade as claimed in claim 1 a kind of uses low dispersion road, it is characterised in that: described collimation with from
The reflection angle of axis paraboloidal mirror is 15 degree to 120 degree.
4. a kind of high density chopper blade as claimed in claim 1 uses low dispersion road, it is characterised in that: described expands with convex
Face mirror is spherical reflector.
5. a kind of high density chopper blade as claimed in claim 1 uses low dispersion road, it is characterised in that: described contracting bundle is with convex
Face mirror is spherical reflector.
6. a kind of high density chopper blade as claimed in claim 1 uses low dispersion road, it is characterised in that: described expands with recessed
Face mirror is spherical reflector.
7. a kind of high density chopper blade as claimed in claim 1 uses low dispersion road, it is characterised in that: described contracting bundle is with recessed
Face mirror is spherical reflector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620797504.5U CN205880384U (en) | 2016-07-27 | 2016-07-27 | High density chopping light piece is with low chromatic dispersion light path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620797504.5U CN205880384U (en) | 2016-07-27 | 2016-07-27 | High density chopping light piece is with low chromatic dispersion light path |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205880384U true CN205880384U (en) | 2017-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620797504.5U Expired - Fee Related CN205880384U (en) | 2016-07-27 | 2016-07-27 | High density chopping light piece is with low chromatic dispersion light path |
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| Country | Link |
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| CN (1) | CN205880384U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107677378A (en) * | 2017-09-04 | 2018-02-09 | 中国科学院上海光学精密机械研究所 | Heavy caliber femtosecond laser pulse width accurate measurement device |
| CN108227218A (en) * | 2016-12-22 | 2018-06-29 | 凝辉(天津)科技有限责任公司 | A kind of low dispersion modulating device |
-
2016
- 2016-07-27 CN CN201620797504.5U patent/CN205880384U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108227218A (en) * | 2016-12-22 | 2018-06-29 | 凝辉(天津)科技有限责任公司 | A kind of low dispersion modulating device |
| CN107677378A (en) * | 2017-09-04 | 2018-02-09 | 中国科学院上海光学精密机械研究所 | Heavy caliber femtosecond laser pulse width accurate measurement device |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170111 Termination date: 20200727 |