CN205879114U - Device of perception glass substrate position deviation - Google Patents
Device of perception glass substrate position deviation Download PDFInfo
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- CN205879114U CN205879114U CN201620666265.XU CN201620666265U CN205879114U CN 205879114 U CN205879114 U CN 205879114U CN 201620666265 U CN201620666265 U CN 201620666265U CN 205879114 U CN205879114 U CN 205879114U
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- light source
- microscope carrier
- alignment pin
- glass substrate
- perceptron
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Abstract
The utility model discloses a device of perception glass substrate position deviation. The device is including at least one skew sensing structure. Skew sensing structure including can following the locating pin that direction that the perpendicular to is used for placing glass substrate's microscope carrier surface reciprocated, and is located the light source emitter and the light source perceptron of locating pin both sides, wherein, the locating pin is not when receiving the exogenic action, the locating pin shelters from light source emitter to the light that the light source perceptron sent, the light source perceptron can not arrive in the perception light source emitter to the light that the light source perceptron sent, the locating pin is when receiving the exogenic action, the locating pin does not shelter from light source emitter to the light that the light source perceptron sent, the light source perceptron can arrive in the perception light source emitter to the light that the light source perceptron sent. The utility model discloses a be used for solving that the glass substrate in the laser crystallization device places the problem that the position was placed in the position deviation expectancy among the prior art.
Description
Technical field
This utility model relates to laser crystallization field, particularly relates to the device of a kind of perception position of glass substrate deviation.
Background technology
In prior art, the effect of the mechanical arm in Laser crystallization equipment, generally comprise: by the shape with microscope carrier upper surface
It is placed on described microscope carrier upper surface with equivalently-sized glass substrate so that described glass substrate pastes with described microscope carrier upper surface
It is combined, and each edge of described glass substrate just aligns respectively with each edge of described microscope carrier.After alignment, glass substrate
Fig. 1 a and Fig. 1 b is can be found in the position relationship of the alignment pin in Laser crystallization equipment.
Wherein, Fig. 1 a is each edge of glass substrate 1 top view when just aliging respectively with each edge of microscope carrier, Fig. 1 b
For the profile along the dotted line a-a in Fig. 1 a.The structure that reference 2 in Fig. 1 a and Fig. 1 b is referred to, is provided in carrying
The alignment pin of edge of table.
In actual scene, described mechanical arm is when placing described glass substrate, it is possible to can make described glass substrate
Actual placement offset relative to desired placement location.Such as, the relatively common situation that described skew occurs,
It is that glass substrate is placed on above the alignment pin outside microscope carrier edge by described mechanical arm so that glass substrate and microscope carrier upper surface
Can not fit together.Now, the position relationship of glass substrate, alignment pin and microscope carrier can participate in Fig. 1 c and Fig. 1 d.Fig. 1 c is glass
Top view when glass substrate 1 is placed on the alignment pin 2 outside microscope carrier 3 edge, Fig. 1 d is the section along the dotted line a-a in 1c
Figure.
Owing to microscope carrier 3 surface exists vac sorb active force, can adsorb downwards glass substrate 1, this results in works as glass
When the riding position of substrate 1 occurs skew relative to desired placement location, glass substrate 1 is easily in described vac sorb effect
Under the effect of power, the phenomenon such as bend or rupture.
For avoiding the problems referred to above, need whether the riding position of perception glass substrate 1 is sent out relative to desired placement location
Raw skew.But how whether the riding position of perception glass substrate 1 offsets relative to desired placement location, prior art
Solution is not the most proposed.
Utility model content
This utility model embodiment provides the device of a kind of perception position of glass substrate deviation, in order to solve in prior art
The problem of the glass substrate placement location deviation expection placement location in Laser crystallization equipment.
This utility model embodiment employing following technical proposals:
The device of a kind of perception position of glass substrate deviation, described device includes that at least one deviates perceptual structure;
Described deviation perceptual structure, including can be upper and lower along the direction on the microscope carrier surface being perpendicular to for placing glass substrate
The alignment pin of movement, and it is positioned at light source emitter and the light source perceptron of described alignment pin both sides;
Wherein, described alignment pin is when being not affected by External Force Acting, and described alignment pin blocks described light source emitter to described
The light that light source perceptron sends so that described light source perceptron can not perceive described light source emitter to described light source perceptron
The light sent;Described alignment pin is when by External Force Acting, and described alignment pin does not block described light source emitter to described light source
The light that perceptron sends so that described light source perceptron can perceive described light source emitter and send to described light source perceptron
Light.
Preferably, described alignment pin is positioned at outside the outward flange of the microscope carrier for placing glass substrate, and described alignment pin
Fit towards outside the side outside described outward flange, with described outward flange;
Described alignment pin is location outside described outward flange, is positioned at described light source emitter and described light source perception
In the middle of device, and respectively and there is space between described light source emitter and described light source perceptron;
The upper surface of described alignment pin is higher than the upper surface of described microscope carrier.
Preferably, described alignment pin includes wedge body and movable part:
The inclined-plane of described wedge body is towards the top of described microscope carrier;
Described movable part is connected with described wedge body lower surface;
Wherein, when described alignment pin is by downward External Force Acting, described movable part can drive described wedge
Body moves down along the direction being perpendicular to described microscope carrier surface;When described external force disappears, described movable part can drive
Described alignment pin moves up along the direction being perpendicular to described microscope carrier surface.
Preferably, described movable part is spring.
Preferably, described light source emitter and light source perceptron are positioned at the outer peripheral outside of described microscope carrier;
Preferably, the light source emission port that described light source emitter comprises is towards described alignment pin;
Preferably, the light source perception mouth that described light source perceptron comprises is towards described alignment pin;
Preferably, the light that the light source emission port that described light source emitter comprises sends is horizontal light.
Preferably, described microscope carrier:
Cross section be shaped as rectangle;
Comprise the passage communicated up and down.
Preferably, described passage:
Cross section be shaped as rectangle;
Number is 20;
On four parallel lines parallel with any one limit in described microscope carrier cross section;Transversal near described microscope carrier
Four described passages it are evenly distributed respectively, away from the two of described microscope carrier cross-section center point on two parallel lines of face central point
Six described passages it are evenly distributed respectively on bar parallel lines;Wherein, described four parallel lines are the five of described microscope carrier cross section
Bisector.
Preferably, the number of described deviation perceptual structure is 8, is distributed in the four edges of described microscope carrier upper surface two-by-two
Outside outer peripheral outside, and the outward flange on each limit of described microscope carrier, two deviation perceptual structures of distribution are evenly distributed on institute
State the both sides of the central point of each of microscope carrier.
Preferably, described device also includes loading pin:
Described loading pin can move up and down in described passage;
The top of described loading pin is spheroid, and described spheroid can rotate along any direction;
When described alignment pin does not block the light that described light source emitter sends to described light source perceptron, described loading pin
It is positioned in described passage, and the upper surface of described loading pin is not higher than described microscope carrier upper surface;Block described at described alignment pin
During the light that light source emitter sends to described light source perceptron, described loading pin is moved upward to described loading in described passage
The position that the upper surface of pin contacts with the lower surface of described glass substrate, described spheroid rotates and described glass substrate can be driven to move
Dynamic so that described glass substrate occurred level displacement.
Preferably, the lower end of described loading pin is cuboid.
At least one technical scheme above-mentioned that this utility model application embodiment uses can reach following beneficial effect:
When described glass substrate placement location deviation expection placement location, the most described glass substrate is placed on described location
When selling above, due to the elastic device of described alignment pin lower end so that alignment pin moves down, now, described light source perceptron
The light source that light source emitter sends can be perceived.Described light source perceptron can perceive the light source that light source emitter sends,
Show that described glass substrate placement location deviate from expection placement location.
It addition, the spheroid on described loading pin top can rotate, and then described glass substrate is driven to move in the horizontal direction
Dynamic, the placement location of final described glass substrate returns to desired location.
Therefore, the deviation of the glass substrate placement location in Laser crystallization equipment expection during the application can solve the problem that prior art
The problem of placement location, and this deviation can be corrected.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing further understanding of the present application, constitutes a part of the present utility model,
Schematic description and description of the present utility model is used for explaining this utility model, is not intended that of the present utility model improper
Limit.In the accompanying drawings:
Fig. 1 a is the top view of glass substrate in prior art, microscope carrier and the relative position of alignment pin;
Fig. 1 b is the profile in prior art along the dotted line a-a in Fig. 1 a;
Fig. 1 c is glass substrate and the top view of microscope carrier in prior art;
Fig. 1 d is the profile in prior art along the dotted line a-a in Fig. 1 a;
Fig. 2 a is that this utility model embodiment provides perception glass substrate when a kind of glass substrate is placed on desired location
The device of position deviation and microscope carrier, the top view of the relative position of glass substrate;
Fig. 2 b is the profile that this utility model embodiment provides along the dotted line c-c in Fig. 2 a;
Fig. 2 c is the profile that this utility model embodiment provides along the dotted line b-b in Fig. 2 a;
Fig. 2 d is that this utility model embodiment provides the deviation perceptual structure profile along the dotted line a-a in Fig. 2 a;
Fig. 2 e is the front view that this utility model embodiment provides deviation perceptual structure;
Fig. 2 f is the top view that this utility model embodiment provides deviation perceptual structure;
Fig. 2 g is the right view that this utility model embodiment provides deviation perceptual structure;
Fig. 2 h is that this utility model embodiment provides perception glass base when a kind of glass substrate is not placed on desired location
The device of Board position deviation and microscope carrier, the top view of the relative position of glass substrate;
Fig. 2 i is that this utility model embodiment provides perception glass base when a kind of glass substrate is not placed on desired location
The device of Board position deviation and microscope carrier, the top view of the relative position of glass substrate;
Fig. 2 j is the profile that this utility model embodiment provides along the dotted line c-c in Fig. 2 i;
Fig. 2 k is the profile that this utility model embodiment provides along the dotted line b-b in Fig. 2 i.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearer, concrete below in conjunction with this utility model
Technical solutions of the utility model are clearly and completely described by embodiment and corresponding accompanying drawing.Obviously, described embodiment
It is only some embodiments of the present application rather than whole embodiments.Based on the embodiment in the application, ordinary skill
The every other embodiment that personnel are obtained under not making creative work premise, broadly falls into the scope of the application protection.
Below in conjunction with accompanying drawing, describe the technical scheme that this utility model embodiment provides in detail.
In order to position is placed in the deviation of the glass substrate placement location in Laser crystallization equipment expection in solution prior art
The problem put, this utility model embodiment provides the device of a kind of perception position of glass substrate deviation.Wherein, described device includes
At least one deviates perceptual structure.
Described deviation perceptual structure, including can be upper and lower along the direction on the microscope carrier surface being perpendicular to for placing glass substrate
The alignment pin of movement, and it is positioned at light source emitter and the light source perceptron of described alignment pin both sides.
Wherein, described alignment pin is when being not affected by External Force Acting, and described alignment pin blocks described light source emitter to described
The light that light source perceptron sends so that described light source perceptron can not perceive described light source emitter to described light source perceptron
The light sent;Described alignment pin is when by External Force Acting, and described alignment pin does not block described light source emitter to described light source
The light that perceptron sends so that described light source perceptron can perceive described light source emitter and send to described light source perceptron
Light.
In order to preferably make the structure of device described in reader understanding, carry out as a example by the device that Fig. 2 a, Fig. 2 b, Fig. 2 c show
Explanation.
Wherein, described Fig. 2 a is the perception position of glass substrate deviation when glass substrate is placed on expection placement location
Device and microscope carrier, the top view of the relative position relation of glass substrate, Fig. 2 b is the profile along the dotted line c-c in Fig. 2 a,
Fig. 2 c is the profile along the dotted line b-b in Fig. 2 a.
It should be noted that the expection placement location of described glass substrate 15 is the surface on microscope carrier 1.Wherein, described glass
As the shape of the shape of glass substrate 15, size and described microscope carrier 1, size.Place when described glass substrate 15 is placed on expection
Time on position, described glass substrate 15 fits together with described microscope carrier 1 upper surface, and each edge of described glass substrate 15 is firm
Align respectively with each edge of described microscope carrier 1 well.
The structure in dotted line frame in Fig. 2 a is the deviation perceptual structure when glass substrate is placed on expection placement location.
Wherein, described deviation perceptual structure, whether the placement location for glass substrate described in perception 15 deviates expection placement location.Institute
State the device of perception position of glass substrate deviation, comprise eight deviation perceptual structures.Deviation perceptual structure is distributed in described two-by-two
Two be distributed outside the outer peripheral outside of the four edges of microscope carrier 1 upper surface, and the outward flange on described 1 each limit of microscope carrier are partially
The both sides of the central point of each of described microscope carrier it are evenly distributed on from perceptual structure.
Described deviation perceptual structure includes alignment pin 2, light source emitter 3 and light source perceptron 4.Wherein, this deviation sense
Know that structure can be found in Fig. 2 d, Fig. 2 e and Fig. 2 f.Fig. 2 d is the deviation perceptual structure profile along the dotted line a-a in Fig. 2 a.Figure
2e is the front view of the deviation perceptual structure in Fig. 2 d.Fig. 2 f is the top view of the deviation perceptual structure in Fig. 2 d.
Separately below microscope carrier 1, alignment pin 2, light source emitter 3 and light source perceptron 4 are described:
(1) microscope carrier 1
The upper surface of described microscope carrier 1 be shaped as rectangle, comprise the passage 9 communicated up and down.The shape of described passage 9 cross section
Shape is rectangle, and number is 20, on four parallel lines parallel with any one limit in described microscope carrier 1 cross section;
Four described passages 9 it are evenly distributed respectively, away from described load on two parallel lines of described microscope carrier 1 cross-section center point
Six described passages 9 it are evenly distributed respectively on two parallel lines of platform 1 cross-section center point;Wherein, described four parallel lines
Five bisectors for described microscope carrier 1 cross section.
(2) alignment pin 2
Described alignment pin 2 includes wedge body 5 and movable part 6.
Described alignment pin 2 is positioned at for placing outside the outward flange of microscope carrier 1 of glass substrate, and the court of described alignment pin 2
Fit outside side outside described outward flange, with described outward flange;
Described alignment pin 2 location outside described outward flange, is positioned at described light source emitter 3 and described light source sense
Know the centre of device 4, and respectively and there is space between described light source emitter 3 and described light source perceptron 4;
The upper surface of described alignment pin 2 is higher than the upper surface of described microscope carrier 1;
The inclined-plane of described wedge body 5 is towards the top of described microscope carrier;
Described movable part 6 is connected with described wedge body 5 lower surface.
Wherein, described movable part 6 is spring, the axis at the place, elastic force direction of described spring and described wedge body
The dead in line of gravity direction place.
It should be strongly noted that when described alignment pin 2 is by downward External Force Acting, described movable part 6 energy
Described wedge body 5 is enough driven to move down along the direction being perpendicular to described microscope carrier surface;When described external force disappears, described live
Dynamic component 6 can drive described alignment pin 2 to move up along the direction being perpendicular to described microscope carrier surface.
Wherein, when described glass substrate 15 is placed on described expection placement location, described alignment pin 2 is not by outer masterpiece
With, described alignment pin 2 blocks the light 14 that described light source emitter 3 sends, described light source perceptron to described light source perceptron 4
4 can not perceive the light 14 (seeing Fig. 2 d) that described light source emitter 3 sends to described light source perceptron 4;At described glass
When substrate 15 is not placed on described expection placement location, described glass substrate 15 is placed on described alignment pin 2, described alignment pin
2 under the effect of described glass substrate 15, does not block the light that described light source emitter 3 sends to described light source perceptron 4, described
Light source perceptron 4 can perceive the light 14 (seeing Fig. 2 g) that described light source emitter 3 sends to described light source perceptron 4.
Wherein, Fig. 2 g is that described glass substrate 15 is placed on the right view of described deviation perceptual structure time above described alignment pin 2.
(3) light source emitter 3, light source perceptron 4
Described light source emitter 3 and light source perceptron 4 are positioned at the outer peripheral outside of described microscope carrier 1;
The light source emission port 12 that described light source emitter 3 comprises is towards described alignment pin 2;
The light source perception mouth 13 that described light source perceptron 4 comprises is towards described alignment pin 2;
The light 14 that the light source emission port 12 that described light source emitter 3 comprises sends is horizontal light.
In addition to the parts of above-mentioned introduction, the device of described perception position of glass substrate deviation can also include loading pin
8。
Loading pin 8 be described below:
Described loading pin 8 can move up and down in described passage 9;
The top of described loading pin 8 is spheroid 10, and lower end is cuboid 11, and described spheroid 10 can turn along any direction
Dynamic;
When described glass substrate 15 is placed on described expection placement location, described alignment pin 2 blocks described light source to be launched
The light 14 that device 3 sends to described light source perceptron 4, described loading pin 8 is positioned at below described microscope carrier 1, is i.e. positioned at described passage 9
Underface, and the upper surface of described loading pin 8 is not higher than described microscope carrier 1 upper surface, sees Fig. 2 b;Put at described glass substrate 15
Putting time on described alignment pin 2 (seeing Fig. 2 h), described alignment pin 2 does not block described light source emitter 3 to described light source perception
The light 14 that device 4 sends, described loading pin 8 is moved up, until moving to the upper table of described loading pin 8 by described passage 9
Face contacts with the lower surface of described glass substrate 15, and position when described glass substrate 15 may exit off described alignment pin 2, institute
Stating spheroid 10 rotation can drive described glass substrate 15 to move so that described glass substrate 15 occurred level displacement (sees figure
2i, Fig. 2 j and Fig. 2 k).
Wherein, Fig. 2 h is described glass substrate described deviation perceptual structure and microscope carrier, glass base when being placed on alignment pin
The top view of the relative position of plate.
Fig. 2 i is that described loading pin moves to described deviation perceptual structure and microscope carrier, glass substrate during more than microscope carrier upper surface
The top view of relative position.
Fig. 2 j is the profile along the dotted line c-c in Fig. 2 i.
Fig. 2 k is the profile along the dotted line b-b in Fig. 2 i.
When described glass substrate 15 is placed on above described alignment pin 2, described alignment pin 2 is at described glass substrate 15
Under action of gravity, can move down.Owing to described alignment pin 2 moves down so that be originally radiated on described alignment pin 2
Light 14, can be radiated at above described light source perceptron 4.When light source perceptron 4 perceives light, show described glass base
The placement location of plate 15 deviate from expection placement location.
Now, described loading pin 8 is moved up so that spheroid 10 and the described glass substrate 15 that described loading pin 8 includes
Contact, described spheroid 10 rotates in a certain direction, described glass substrate 15 can be driven to move, and then make described glass substrate
15 surfaces moving to expection placement location, at this moment move down described loading pin 8 so that described glass substrate 15 is with described
Microscope carrier 1 fits together, the problem just correcting described glass substrate 15 placement location deviation expection placement location.
Therefore, the deviation of the glass substrate placement location in Laser crystallization equipment during this utility model can solve the problem that prior art
The problem of expection placement location, and this deviation can be corrected so that described glass substrate can be placed on described expection and put
Seated position.
The foregoing is only embodiment of the present utility model, be not limited to this utility model.For this area
For technical staff, this utility model can have various modifications and variations.All institutes within spirit of the present utility model and principle
Any modification, equivalent substitution and improvement etc. made, within should be included in right of the present utility model.
Claims (10)
1. the device of a perception position of glass substrate deviation, it is characterised in that described device includes that at least one deviates perception
Structure;
Described deviation perceptual structure, including moving up and down along the direction on the microscope carrier surface being perpendicular to for placing glass substrate
Alignment pin, and be positioned at light source emitter and the light source perceptron of described alignment pin both sides;
Wherein, described alignment pin is when being not affected by External Force Acting, and described alignment pin blocks described light source emitter to described light source
The light that perceptron sends so that described light source perceptron can not perceive described light source emitter and send to described light source perceptron
Light;Described alignment pin is when by External Force Acting, and described alignment pin does not block described light source emitter to described light source perception
The light that device sends so that described light source perceptron can perceive what described light source emitter sent to described light source perceptron
Light.
2. device as claimed in claim 1, it is characterised in that:
Described alignment pin is positioned at outside the outward flange of the microscope carrier for placing glass substrate, and described alignment pin towards outside described
Fit outside side outside edge, with described outward flange;
Described alignment pin is location outside described outward flange, is positioned in described light source emitter and described light source perceptron
Between, and respectively and there is space between described light source emitter and described light source perceptron;
The upper surface of described alignment pin is higher than the upper surface of described microscope carrier.
3. device as claimed in claim 1, it is characterised in that described alignment pin includes wedge body and movable part:
The inclined-plane of described wedge body is towards the top of described microscope carrier;
Described movable part is connected with described wedge body lower surface;
Wherein, when described alignment pin is by downward External Force Acting, described movable part can drive described wedge body edge
The direction being perpendicular to described microscope carrier surface moves down;When described external force disappears, described movable part can drive described
Alignment pin moves up along the direction being perpendicular to described microscope carrier surface.
4. device as claimed in claim 3, it is characterised in that described movable part is spring.
5. device as claimed in claim 1, it is characterised in that:
Described light source emitter and light source perceptron are positioned at the outer peripheral outside of described microscope carrier;
The light source emission port that described light source emitter comprises is towards described alignment pin;
The light source perception mouth that described light source perceptron comprises is towards described alignment pin;
The light that the light source emission port that described light source emitter comprises sends is horizontal light.
6. device as claimed in claim 1, it is characterised in that described microscope carrier:
Cross section be shaped as rectangle;
Comprise the passage communicated up and down.
7. device as claimed in claim 6, it is characterised in that described passage:
Cross section be shaped as rectangle;
Number is 20;
On four parallel lines parallel with any one limit in described microscope carrier cross section;In described microscope carrier cross section
It is evenly distributed four described passages respectively on two parallel lines of heart point, puts down for two away from described microscope carrier cross-section center point
Six described passages it are evenly distributed respectively on line;Wherein, described four parallel lines are five deciles of described microscope carrier cross section
Line.
8. the device as described in claim arbitrary in claim 1-7, it is characterised in that the number of described deviation perceptual structure is 8
Individual, it is distributed in the outer peripheral outside of the four edges of described microscope carrier upper surface, and the outward flange on each limit of described microscope carrier two-by-two
Two deviation perceptual structures of outside distribution are evenly distributed on the both sides of the central point of each of described microscope carrier.
9. the device as described in claim arbitrary in claim 6-7, it is characterised in that described device also includes loading pin:
Described loading pin can move up and down in described passage;
The top of described loading pin is spheroid, and described spheroid can rotate along any direction;
When described alignment pin does not block the light that described light source emitter sends to described light source perceptron, described loading pins position in
In described passage, and the upper surface of described loading pin is not higher than described microscope carrier upper surface;Described light source is blocked at described alignment pin
During the light that emitter sends to described light source perceptron, described loading pin is moved upward to described loading pin in described passage
The position that upper surface contacts with the lower surface of described glass substrate, described spheroid rotates and described glass substrate can be driven to move,
Make described glass substrate occurred level displacement.
10. device as claimed in claim 9, it is characterised in that: the lower end of described loading pin is cuboid.
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CN107170703A (en) * | 2017-06-19 | 2017-09-15 | 武汉华星光电技术有限公司 | A kind of position of glass substrate apparatus for correcting and method |
CN108382858A (en) * | 2018-03-22 | 2018-08-10 | 昆山国显光电有限公司 | A kind of method and apparatus of reforming of glass substrate |
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CN107170703A (en) * | 2017-06-19 | 2017-09-15 | 武汉华星光电技术有限公司 | A kind of position of glass substrate apparatus for correcting and method |
CN107170703B (en) * | 2017-06-19 | 2019-11-05 | 武汉华星光电技术有限公司 | A kind of position of glass substrate apparatus for correcting and method |
CN108382858A (en) * | 2018-03-22 | 2018-08-10 | 昆山国显光电有限公司 | A kind of method and apparatus of reforming of glass substrate |
CN108382858B (en) * | 2018-03-22 | 2019-12-10 | 昆山国显光电有限公司 | Method and device for correcting glass substrate |
CN109081557A (en) * | 2018-09-28 | 2018-12-25 | 彩虹(合肥)液晶玻璃有限公司 | Glass plate generates system and glass plate offset distance generation method |
CN109081557B (en) * | 2018-09-28 | 2021-08-03 | 彩虹(合肥)液晶玻璃有限公司 | Glass sheet generating system and glass sheet offset distance generating method |
CN113587808A (en) * | 2021-06-22 | 2021-11-02 | 荣耀终端有限公司 | Electronic equipment and detection system |
CN113587808B (en) * | 2021-06-22 | 2022-04-12 | 荣耀终端有限公司 | Electronic equipment and detection system |
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