CN205868709U - Even machine of gluing of spraying - Google Patents
Even machine of gluing of spraying Download PDFInfo
- Publication number
- CN205868709U CN205868709U CN201620716813.5U CN201620716813U CN205868709U CN 205868709 U CN205868709 U CN 205868709U CN 201620716813 U CN201620716813 U CN 201620716813U CN 205868709 U CN205868709 U CN 205868709U
- Authority
- CN
- China
- Prior art keywords
- heating
- thermal insulation
- warm table
- insulation ceramics
- sol evenning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Resistance Heating (AREA)
Abstract
The utility model discloses an even machine of gluing of spraying, include casing, dustcoat, warm table, rotary device down, casing upper portion is located down to the dustcoat, and link to each other with last housing seal, the casing upper end is located down to the warm table, and lies in the dustcoat, the warm table up end is equipped with heating device, it is internal that rotary device locates the inferior valve, and continuous with the center department transmission of warm table. Adopt the utility model discloses even machine of gluing of spraying can effectively carry out film heating spin coating, silence, high efficiency.
Description
Technical field
This utility model relates to a kind of spraying sol evenning machine.
Background technology
Thin film spin coating uses spraying sol evenning machine to carry out, and existing apparatus uses top firing, by the electric furnace on lid
Silk eddy-current heating build thermal environment, will be spun on substrate be placed in thermal environment meet heat spin coating requirement, set around chuck
Having temp-sensing element and automatic centering sensing element, sensing in real time is spun on object variations in temperature and guarantees to be in center.But
This device cannot solve to be spun on object temperature accurately control with sprayable, can problem that dynamically spin coating is multiplex, and heated
Oxygen and the impact of steam during in journey, thin film is easily subject to air.
Summary of the invention
The purpose of this utility model is to solve defect present in prior art, it is provided that in a kind of heating spin coating process
Not by air impact, and the device that spin coating and heating individually control.
In order to achieve the above object, this utility model provides a kind of spraying sol evenning machine, including lower house, outer housing, heating
Platform, rotary apparatus；Cover at outward lower house top, and be connected with upper shell sealing；Warm table is located at lower house upper end, and is positioned at
In outer housing；Warm table upper surface is provided with heater；Rotary apparatus is located in lower house, and with the center transmission phase of warm table
Even.
Wherein, rotary apparatus is positioned at warm table lower end；Warm table lower end is provided with ball.
Heater includes eddy heating for heating resistance wire, fuse protector, temperature regulator, information process unit, infrared temperature
Sensing unit；Eddy heating for heating resistance wire is located on warm table, is close to the upper surface of warm table, and connects with fuse protector；Infrared
Sensing element is located on lower house；Information process unit respectively with fuse protector, temperature regulator and infrared temperature detecting element phase
Even.
Eddy heating for heating resistance wire is planar spiral.
Warm table includes thermal insulation ceramics cylinder, heating plate and spring fitting device；Thermal insulation ceramics cylinder lower surface seals, upper surface
Opening, and upper surface opening part is provided with annular groove, the size of annular groove is suitable with the size of heating plate；At annular groove
It is provided with fixing threaded hole；Heating plate is located at thermal insulation ceramics cylinder upper end open, and is positioned at annular groove, and solid by fixing screw
It is scheduled on thermal insulation ceramics cylinder；Eddy heating for heating resistance wire is located in thermal insulation ceramics cylinder, and is close to heating plate lower surface；The fixing dress of spring
It is set to two, is respectively arranged on the two ends of thermal insulation ceramics cylinder upper surface.
Heating plate uses aircraft aluminum；Outer housing uses boronation glass.
Spring fitting device includes position-limiting drum, spring and card；Position-limiting drum one end seals, and is fixed on heat insulation by this end
Ceramic cylinder upper surface opening part；The other end opening of position-limiting drum, opening direction is inwardly；Spring one end is fixed on position-limiting drum sealed end
Inner face；Card is in the shape of the letter V, and at flex point, the other end with spring is connected.
Rotary apparatus includes direct current generator, little gear, gear wheel and steel pipe；The output shaft of direct current generator by little gear with
Gear wheel is meshed；Steel pipe one end passes gear wheel central shaft, and is fixedly linked with gear wheel；Thermal insulation ceramics cylinder lower surface is provided with
Through hole, the steel pipe other end passes thermal insulation ceramics cylinder lower surface, and is fixedly linked with thermal insulation ceramics cylinder；Electric wire it is provided with in steel pipe；Molten
Cut-off protector, temperature regulator and information process unit are located in lower house, and are positioned at warm table lower end；Eddy heating for heating resistance wire
Connected with fuse protector by electric wire.
Sealing lubricating oil chamber it is provided with in lower house；Little gear and gear wheel are located in sealing lubricating oil chamber；Seal profit
Slide in having chamber and be full of lubricating oil.
Lower house upper surface is provided with seal groove, and the size of seal groove is suitable with the size of outer housing lower port；In seal groove
It is provided with sealing ring；Outer housing is provided with noble gas inlet, noble gas outlet and nozzle fixing port.
This utility model has the advantage that compared to existing technology by steam and the shadow of oxygen in outer housing isolation air
Ring, and reduce noise.Utilizing the independent heater of two sets and rotary apparatus to carry out, heater uses card tray bottom noncontact
Formula eddy heating for heating mode, controls to try to get to the heart of a matter temperature by temperature control system, and by infrared temperature sensor monitoring card dish temperature, utilizes fusing guarantor
Protect device and carry out temperature control.Sealing lubricating oil intracavity is located at by the travelling gear of rotary apparatus, can increase the service life of gear,
And the warm table lower end being attached thereto is provided with ball, can effectively reduce quiet in spin coating process.Employing this utility model sprays
It is coated with sol evenning machine, can effectively carry out film heating spin coating, quiet, efficient.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation in Fig. 1 in lower house；
Fig. 3 is the structural representation of warm table in Fig. 2；
Fig. 4 is the structured flowchart of heater in Fig. 2.
In figure, 1-lower house, 101-display screen, 102-temperature adjustment knob, 103-rotating speed knob, 2-outer housing, 21-noble gas
Inlet, 22-nozzle fixing port, 23-noble gas outlet, 3-warm table, 31-heating plate, 32-thermal insulation ceramics cylinder, 33-limits
Position cylinder, 34-spring, 35-card, 36-fixing threaded hole, 4-eddy heating for heating resistance wire, 5-ball, 6-steel pipe, 7-sealing lubricating oil
Chamber, the little gear of 8-, 9-gear wheel, 10-infrared inductor, 11-direct current generator, 12-treats spin coating sample.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is described in detail.
As it is shown in figure 1, this utility model spraying sol evenning machine includes lower house 1, outer housing 2；Lower house 1 upper end is provided with sealing
Groove, seal groove is in the form of a ring, suitable with outer housing 2 lower port, is provided with sealing ring in seal groove, and outer housing 2 covers on described lower house 1
Time, sealed by sealing ring, play sound insulation and the effect of isolation air.Outer housing 2 uses boronation glass, which is provided with inertia
Gas inlet 21, nozzle fixing port 22 and noble gas outlet 23.Use gas fast joint to be fixed on noble gas to inject
On mouth 21 and noble gas outlet 23；Spray equipment is fixed on nozzle fixing port 22, uses 0.2mm atomizer, external
30ml liquid containing bottle, utilizes force (forcing) pump that liquid pressing is sent into rubber hose (0.4*0.6mm) and enters atomizer.On lower house 1
It is provided with warm table 3 and infrared inductor 10 in end, outer housing 2.
Shown in Fig. 2, in lower house 1, from top to bottom it is sequentially provided with warm table 3, roller layer, sealing lubricating oil chamber 7 and
Rotary apparatus, heater.As shown in Figure 4, heater includes eddy heating for heating resistance wire 4, fuse protector, temperature adjusting
Device, information process unit, infrared temperature detecting element 10.Information process unit uses single-chip microcomputer.Warm table 3 includes thermal insulation ceramics cylinder
32, heating plate 31 and spring fitting device, in conjunction with Fig. 3.Heating plate 31 uses space flight aluminium.Thermal insulation ceramics cylinder 32 lower surface is close
Envelope, upper surface opening, and opening part is provided with annular groove, the size of annular groove is suitable with the size of heating plate 31；Annular
Groove is provided with fixing threaded hole；Heating plate 31 is located at thermal insulation ceramics cylinder 32 upper end open, and is positioned at annular groove.Heating plate
The correspondence position of 31 also is provided with fixing threaded hole 36, and is fixed on thermal insulation ceramics cylinder 32 by fixing screw through fixing threaded hole 36
On.Eddy heating for heating resistance wire 4, in snail shape, is located in thermal insulation ceramics cylinder 32, and is close to heating plate 31 lower surface；Spring is solid
Determining device is two, is respectively arranged on the two ends of thermal insulation ceramics cylinder upper surface.
As it is shown on figure 3, spring fitting device includes position-limiting drum 33, spring 34 and card 35；Position-limiting drum 33 one end seals, and
It is fixed on thermal insulation ceramics cylinder 32 upper surface opening part by this end；The other end opening of position-limiting drum 33, opening direction is inwardly；Spring
34 one end are fixed on position-limiting drum 33 sealed end inner face；Card 35 is in the shape of the letter V, and at flex point, the other end with spring 34 is connected.Logical
Cross that two ends card 35 is fixing treats spin coating sample 12.Warm table 3 lower end is provided with some balls 5, forms roller layer, reduces warm table rotation
Turn the noise formed.Rotary apparatus includes direct current generator 11, little gear 8, gear wheel 9 and steel pipe 6；The output shaft of direct current generator 11
It is meshed with gear wheel 9 by little gear 8；Steel pipe 6 one end is through the central shaft of gear wheel 9, and is fixedly linked with gear wheel 9；
The other end of steel pipe 6 passes thermal insulation ceramics cylinder 32 lower surface, and is fixedly linked with thermal insulation ceramics cylinder 32；It is provided with electric wire in steel pipe 6,
Eddy heating for heating resistance wire 4 is connected with fuse protector by electric wire.As shown in Figure 4, information process unit respectively with fuse protection
Device, temperature regulator are connected with infrared temperature detecting element.In conjunction with Fig. 1, lower house 1 outer surface is provided with temperature adjustment knob 102, rotating speed knob
103 and display screen 101.Temperature adjustment knob 102 is connected with temperature regulator, controls temperature；Rotating speed knob 103 and direct current generator 11 phase
Even, rotating speed is controlled.Display screen 101 is connected with information process unit, carry out temperature and rotating speed real-time, intuitively show.
Claims (10)
1. a spraying sol evenning machine, it is characterised in that: include lower house, outer housing, warm table, rotary apparatus；Cover at outside described
Described lower house top, and be connected with upper shell sealing；Described warm table is located at described lower house upper end, and is positioned at described outer housing
In；Described warm table upper surface is provided with heater；Described rotary apparatus is located in described lower house, and with described warm table
Center transmission is connected.
Spraying sol evenning machine the most according to claim 1, it is characterised in that: described rotary apparatus is positioned under described warm table
End；Described warm table lower end is provided with ball.
Spraying sol evenning machine the most according to claim 2, it is characterised in that: described heater includes eddy heating for heating resistance
Silk, fuse protector, temperature regulator, information process unit, infrared temperature detecting element；Described eddy heating for heating resistance wire is located at described
On warm table, it is close to the upper surface of described warm table, and connects with described fuse protector；Institute is located at by described infrared induction element
State on lower house；Described information process unit is connected with described fuse protector, temperature regulator and infrared temperature detecting element respectively.
Spraying sol evenning machine the most according to claim 3, it is characterised in that: described eddy heating for heating resistance wire is snail
Shape.
Spraying sol evenning machine the most according to claim 4, it is characterised in that: described warm table includes thermal insulation ceramics cylinder, heating
Sheet and spring fitting device；Described thermal insulation ceramics cylinder lower surface seals, upper surface opening, and upper surface opening part is provided with annular recessed
Groove, the size of described annular groove is suitable with the size of described heating plate；It is provided with fixing threaded hole at described annular groove；Described
Heating plate is located at described thermal insulation ceramics cylinder upper end open, and is positioned at described annular groove, and is fixed on by fixing screw
On thermal insulation ceramics cylinder；Described eddy heating for heating resistance wire is located in described thermal insulation ceramics cylinder, and is close to described heating plate lower surface；Institute
Stating spring fitting device is two, is respectively arranged on the two ends of described thermal insulation ceramics cylinder upper surface.
Spraying sol evenning machine the most according to claim 5, it is characterised in that: described heating plate uses aircraft aluminum；Outside described
Cover uses boronation glass.
Spraying sol evenning machine the most according to claim 5, it is characterised in that: described spring fitting device includes position-limiting drum, bullet
Spring and card；Described position-limiting drum one end seals, and is fixed on described thermal insulation ceramics cylinder upper surface opening part by this end；Described limit
The other end opening of position cylinder, opening direction is inwardly；Described spring one end is fixed on position-limiting drum sealed end inner face；Described card in
V-shaped, at flex point, the other end with described spring is connected.
Spraying sol evenning machine the most according to claim 5, it is characterised in that: described rotary apparatus includes direct current generator, little tooth
Wheel, gear wheel and steel pipe；The output shaft of described direct current generator is meshed with gear wheel by little gear；Described steel pipe one end passes
Described gear wheel central shaft, and be fixedly linked with described gear wheel；Described thermal insulation ceramics cylinder lower surface is provided with through hole, described steel pipe
The other end is through the through hole of described thermal insulation ceramics cylinder lower surface, and is fixedly linked with described thermal insulation ceramics cylinder；Set in described steel pipe
Live wire；Described fuse protector, temperature regulator and information process unit are located in described lower house, and are positioned at described heating
Platform lower end；Described eddy heating for heating resistance wire is connected with fuse protector by described electric wire.
Spraying sol evenning machine the most according to claim 8, it is characterised in that: it is provided with sealing lubricating oil chamber in described lower house
Room；Described little gear and gear wheel are located in described sealing lubricating oil chamber；Described sealing lubrication is full of lubricating oil in having chamber.
Spraying sol evenning machine the most according to claim 2, it is characterised in that: described lower house upper surface is provided with seal groove, institute
The size stating seal groove is suitable with the size of described outer housing lower port；It is provided with sealing ring in described seal groove；On described outer housing
It is provided with noble gas inlet, noble gas outlet and nozzle fixing port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620716813.5U CN205868709U (en) | 2016-07-08 | 2016-07-08 | Even machine of gluing of spraying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620716813.5U CN205868709U (en) | 2016-07-08 | 2016-07-08 | Even machine of gluing of spraying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205868709U true CN205868709U (en) | 2017-01-11 |
Family
ID=57696504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620716813.5U Expired - Fee Related CN205868709U (en) | 2016-07-08 | 2016-07-08 | Even machine of gluing of spraying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205868709U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114247611A (en) * | 2020-10-20 | 2022-03-29 | 深圳铭毅基因科技有限公司 | Constant temperature gel spread gluey equipment |
-
2016
- 2016-07-08 CN CN201620716813.5U patent/CN205868709U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114247611A (en) * | 2020-10-20 | 2022-03-29 | 深圳铭毅基因科技有限公司 | Constant temperature gel spread gluey equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208837110U (en) | A kind of atomizer and electronic cigarette | |
| WO2019200957A1 (en) | Electronic heating apparatus | |
| CN205868709U (en) | Even machine of gluing of spraying | |
| CN105919164A (en) | Heating element, atomization head, atomizer and electronic cigarette | |
| CN209524749U (en) | Smelting furnace is used in a kind of steel-making | |
| CN204181441U (en) | Electric cooker | |
| CN110754704A (en) | Atomization device | |
| CN213516954U (en) | Energy-conserving temperature measuring machine of thermos cup | |
| CN108023447B (en) | Liquid insulation rotary baking curing device and method for armature | |
| CN108110974B (en) | Visual system and monitoring control method for liquid insulation rotary baking solidification of armature | |
| CN209660252U (en) | A kind of plant protection unmanned aerial vehicle mist droplet particle size and discharge rate regulation device | |
| CN205848690U (en) | Heat generating component, atomising head, nebulizer and electronic cigarette | |
| CN208861781U (en) | A kind of dehumidification device in transformer breather | |
| JP2016118100A (en) | Dry vacuum pump and manufacturing method of dry vacuum pump | |
| CN207784289U (en) | A kind of electronic smoke atomizer and the electronic cigarette | |
| CN213223103U (en) | Special drying equipment of transformer coil | |
| CN109595727A (en) | Atomizer and atomising device | |
| JP4695090B2 (en) | Exhaust conduit for rotary atomizer with pneumatic turbine | |
| CN109003789A (en) | A kind of transformer breather of automatic dehumidifying | |
| CN106383143A (en) | Rotating disc type thermal fatigue testing device for thermal barrier coating | |
| CN107707081A (en) | A kind of electric pump of water-cooled machine | |
| CN210921800U (en) | Nitrogen heater with electromagnetic induction coil | |
| CN109341091B (en) | Double-energy boiler safety protection device | |
| CN209354380U (en) | A kind of cast aluminium integrated heating pump | |
| CN209000690U (en) | A kind of transformer breather of automatic dehumidifying |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170111 Termination date: 20180708 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |