CN205859333U - A kind of vacuum fine adjustment valve - Google Patents
A kind of vacuum fine adjustment valve Download PDFInfo
- Publication number
- CN205859333U CN205859333U CN201620883626.6U CN201620883626U CN205859333U CN 205859333 U CN205859333 U CN 205859333U CN 201620883626 U CN201620883626 U CN 201620883626U CN 205859333 U CN205859333 U CN 205859333U
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- CN
- China
- Prior art keywords
- valve
- valve body
- spool
- vacuum
- magnechuck
- Prior art date
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Abstract
A kind of vacuum fine adjustment valve, including valve body, spool, magnechuck and throttling muffler, described spool is placed in valve body, magnechuck is placed in top and the band movable valve plug upward sliding of spool, described valve body is provided with gas channel, and throttling muffler is arranged on valve body and connects with gas channel, the aperture of regulation throttling muffler, magnechuck band movable valve plug upward sliding, air enters the gas channel in valve body by throttling muffler and then enters into vacuum chamber.This utility model simple in construction, low cost, operating noise carries, by the conduction time of magnechuck and the aperture of regulation throttling muffler, realizing the precise fine-adjustment of vacuum chamber vacuum degree, this technology not only can be installed on chamber walls, but also can connect and pipe-line system by bolt, installed and used occasion flexible.
Description
Technical field
This utility model relates to technical field of vacuum, refers in particular to a kind of vacuum fine adjustment valve.
Background technology
Vacuum technique application, frequently refers to the trace regulation of vacuum degree in vacuum chamber, and the method for regulation is general
It it is all the vacuum degree allowing a small amount of air be filled with in vacuum chamber and changing in vacuum chamber.Currently used vacuum regulation valve is general
For electro-pneumatic ball valve and electromagnetic valve, and it is to design for malleation, and has that vacuum leakproofness is poor, cost is high and is difficult to trace
The shortcoming of regulation.
Utility model content
This utility model solves above-mentioned technical problem, it is provided that a kind of simple and effective vacuum fine adjustment valve.
In order to solve above-mentioned technical problem, the technical solution of the utility model is: a kind of vacuum fine adjustment valve, including valve body,
Spool, magnechuck and throttling muffler, described spool is placed in valve body, and magnechuck is placed in the top of spool and drives
Spool upward sliding, described valve body is provided with gas channel, and throttling muffler is arranged on valve body and connects with gas channel,
The aperture of regulation throttling muffler, magnechuck band movable valve plug upward sliding, air is entered in valve body by throttling muffler
Gas channel and then enter into vacuum chamber.
Further, described valve body include top cover, valve seat and sole piece, described valve seat be provided with air inlet, first lead to
Pore, upper air drain, lower air drain, described sole piece is provided with the second passage, air inlet, the first passage, lower air drain, second leads to
Pore composition gas channel, air by throttling muffler enter into air inlet, then along the first passage, lower air drain, the
Two passages enter into vacuum chamber.
Further, also including a self-oiling guide bushing, self-oiling guide bushing swelling is in valve seat, and spool is in self-oiling guide bushing
Slide up and down.
Further, the lower end of described spool is provided with dovetail groove, and dovetail groove is embedded with sealing ring.
Further, described top cover, valve seat and sole piece are locked by clamping screw, and clamping screw is arranged on diagonal angle,
Also including installing bolt, described installation bolt is arranged on another diagonal angle.
This utility model simple in construction, low cost, operating noise carries, by the conduction time of magnechuck and regulation throttling
The aperture of deafener, it is achieved the precise fine-adjustment of vacuum chamber vacuum degree, this technology not only can be installed on chamber walls, but also can bolt
Connect and pipe-line system, install and use occasion flexible.
Accompanying drawing explanation
Below in conjunction with the accompanying drawings detailed description of the invention of the present utility model is described in further detail.
Fig. 1 is sectional view of the present utility model;
Fig. 2 is axonometric chart of the present utility model.
Detailed description of the invention
Below in conjunction with the accompanying drawings and detailed description of the invention, this utility model is described further.
As it is shown in figure 1, a kind of vacuum fine adjustment valve, including valve body, spool 60, magnechuck 40 and throttling muffler 50, valve
Body includes top cover 10, valve seat 20 and sole piece 30, and valve seat 20 is provided with air inlet the 22, first passage 23, upper air drain 21, lower air drain
24, described sole piece 30 is provided with the second passage 31, air inlet the 22, first passage 23, lower air drain the 24, second passage 31
Composition gas channel.Spool 60 is placed in valve seat 20, and self-oiling guide bushing 70 swelling is in valve seat 20, and spool 60 is at self-oiling guide bushing
Sliding up and down in 70, the lower end of spool 60 is provided with dovetail groove, and dovetail groove is embedded with sealing ring, and magnechuck 40 is placed in spool 60
Top, and can band movable valve plug 60 upward sliding.Throttling muffler 50 is arranged at the air inlet 22 of valve seat 20, and regulation throttling disappears
The aperture of sound device 50, magnechuck 40 band movable valve plug upward sliding, air enters the air-flow in valve body by throttling muffler 50
Passage and then enter into vacuum chamber.
When needing to be filled with air in vacuum chamber, the aperture regulation charge flow rate of regulation throttling muffler 50, magnechuck 40
Energising, produces electromagnetic attraction, band movable valve plug 60 upward sliding, air through throttling muffler 50, the air inlet 22 of valve seat 20, the
One passage 23, lower air drain 24, the second passage 31 of sole piece 30 are filled with vacuum chamber.
After in vacuum chamber, vacuum degree reaches required value, magnechuck 40 power-off, electromagnetic attraction disappears, and spool 60 is at self
In the case of gravity and pull of vacuum, gliding along self-oiling guide bushing 70, the sealing ring in the dovetail groove of lower end is adjacent to sole piece 30
Upper surface, closes and blocks gas channel.Upper air drain 21 and the first passage 23 on valve seat 20 ensure that the top of spool 60 is in
The state isobaric with atmospheric pressure.
As in figure 2 it is shown, top cover 10, valve seat 20 and sole piece 30 are locked by clamping screw 80, it is right that clamping screw 80 is arranged on
On angle, also include install bolt 90, described installation bolt 90 is arranged on another diagonal angle, can be installed on chamber walls,
Can connect and pipe-line system by bolt again, install and use occasion flexible.
Although specifically show and describe this utility model in conjunction with preferred embodiment, but those skilled in the art should
This is understood, in the spirit and scope of the present utility model limited without departing from appended claims, in form and details
On this utility model is made a variety of changes, be protection domain of the present utility model.
Claims (5)
1. a vacuum fine adjustment valve, it is characterised in that include valve body, spool, magnechuck and throttling muffler, described spool
Being placed in valve body, magnechuck is placed in top and the band movable valve plug upward sliding of spool, and described valve body is provided with air-flow and leads to
Road, throttling muffler is arranged on valve body and connects with gas channel, the aperture of regulation throttling muffler, and magnechuck drives valve
Core upward sliding, air enters the gas channel in valve body by throttling muffler and then enters into vacuum chamber.
A kind of vacuum fine adjustment valve the most according to claim 1, it is characterised in that described valve body include top cover, valve seat and
Sole piece, described valve seat is provided with air inlet, the first passage, upper air drain, lower air drain, and described sole piece is provided with the second ventilation
Hole, air inlet, the first passage, lower air drain, second passage composition gas channel, air by throttling muffler enter into into
Pore, enter into vacuum chamber then along the first passage, lower air drain, the second passage.
A kind of vacuum fine adjustment valve the most according to claim 2, it is characterised in that also include a self-oiling guide bushing, self-lubricating
Guide pin bushing swelling is in valve seat, and spool slides up and down in self-oiling guide bushing.
4. according to a kind of vacuum fine adjustment valve described in Claims 2 or 3, it is characterised in that the lower end of described spool is provided with swallow
Stern notch, dovetail groove is embedded with sealing ring.
A kind of vacuum fine adjustment valve the most according to claim 2, it is characterised in that described top cover, valve seat and sole piece pass through
Clamping screw is locked, and clamping screw is arranged on diagonal angle, also includes installing bolt, and it is right that described installation bolt is arranged on another
On angle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620883626.6U CN205859333U (en) | 2016-08-16 | 2016-08-16 | A kind of vacuum fine adjustment valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620883626.6U CN205859333U (en) | 2016-08-16 | 2016-08-16 | A kind of vacuum fine adjustment valve |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205859333U true CN205859333U (en) | 2017-01-04 |
Family
ID=57593539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201620883626.6U Active CN205859333U (en) | 2016-08-16 | 2016-08-16 | A kind of vacuum fine adjustment valve |
Country Status (1)
Country | Link |
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CN (1) | CN205859333U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107477210A (en) * | 2017-09-21 | 2017-12-15 | 陈银 | A kind of novel two-position three-way reversal valve |
CN112361044A (en) * | 2020-11-09 | 2021-02-12 | 广西玉柴机器股份有限公司 | Vacuum chuck control valve |
-
2016
- 2016-08-16 CN CN201620883626.6U patent/CN205859333U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107477210A (en) * | 2017-09-21 | 2017-12-15 | 陈银 | A kind of novel two-position three-way reversal valve |
CN112361044A (en) * | 2020-11-09 | 2021-02-12 | 广西玉柴机器股份有限公司 | Vacuum chuck control valve |
CN112361044B (en) * | 2020-11-09 | 2024-04-09 | 广西玉柴机器股份有限公司 | Vacuum chuck control valve |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant |