CN205843855U - Pliable pressure sensor - Google Patents
Pliable pressure sensor Download PDFInfo
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- CN205843855U CN205843855U CN201620806987.0U CN201620806987U CN205843855U CN 205843855 U CN205843855 U CN 205843855U CN 201620806987 U CN201620806987 U CN 201620806987U CN 205843855 U CN205843855 U CN 205843855U
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- electrode
- flexible substrate
- pressure sensor
- pliable pressure
- substrate
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Abstract
The utility model discloses a kind of pliable pressure sensor.This pressure transducer includes: levels substrate；The electrode being placed on substrate；Insulation filling material between electrode.This pressure transducer uses flexible substrate, and electrode material uses metal material or carbon powder material to process, and electrode processing method uses impressing mode, can realize the purpose of such device large-scale batch production.The advantages such as the novel flexible pressure transducer that the utility model proposes has highly sensitive, can manufacture on a large scale, of many uses.
Description
Technical field
This utility model relates to technical field of pressure detection, particularly flexible sensor field, is specially a kind of flexible pressure
Force transducer.
Background technology
Conventional pressure sensor is as the dedicated devices of acquisition controlling point pressure data, conventional pressure transducer kind
Various, it is broadly divided into by sensitive mechanism difference that pressure resistance type, piezoelectric type, condenser type, optical sensor formula, magnetic is sensor-type, excusing from death sensing
Formula and mechanical sensing type etc..Preferably pressure transducer, it should there is the features such as with low cost, preparation is simple and ruggedness is strong.
Conventional pressure sensor is with a wide range of applications in industries such as electric power, automobile, household, industry manufactures, but normal pressures
Sensor is all based on greatly rigid support substrate, is not suitable for the pressure detecting of large area or irregular surface, exists and be processed into
The problems such as this height, flow process are complicated.
Summary of the invention
The purpose of this utility model is to provide one and has higher sensitivity, and processing is simple, pliable pressure with low cost
Sensor.
This utility model adopts the following technical scheme that realization:
A kind of pliable pressure sensor, including upper strata flexible substrate and lower floor's flexible substrate, in the flexible substrate of described upper strata
Electrode is distributed, described lower floor flexible substrate is distributed bottom electrode, described upper electrode and bottom electrode interval positioned opposite；Described
Flexible concertina insulating barrier is set between levels flexible substrate.
The operation principle of sensor is, when being pressed in effectively on upper and lower substrate, flexible expandable insulating barrier can shrink,
Making upper/lower electrode close to each other, the effective area between upper/lower electrode increases, and the capacitance of device changes, and then by electricity
The change of capacitance determines the force value of effect.
Preferably, described levels flexible substrate uses polyethylene terephthalate or polyimide material system
Make.
Described upper/lower electrode uses metal material or carbon powder material to make.
Described flexible concertina insulating barrier uses polydimethyl siloxane material to make.
Concrete manufacture method is as follows:
1) pretreatment of flexible substrate material: first by flexible substrate material (polyethylene terephthalate (PET) or
Person's polyimides (PI) successively uses ethanol and water to clean under ultrasound mode 5 minutes, is then dried by backing material.
2), electrode use metal material or carbon powder material to process, the diameter dimension of metal or carbon powder particle is less than 10
Micron, this electrode material need to be equipped with volatile slurry as adhering material simultaneously, and volatile slurry uses polyester material.Electrode leads to
Cross and use the mode of nano impression or silk screen printing to be prepared in substrate.
3) preparation of pressure sensitive material:
Scalable insulating layer material selects polydimethylsiloxane (Polydimethylsiloxane, PDMS).By rotation
Turn the processing modes such as coating or silk screen printing to be prepared on electrode structure by ground floor PDMS.
Use mode in layer, pyrrole monomer is poured in ferric chloride solution, above-mentioned preparation is had one layer of PDMS knot
The device of structure is soaked in above-mentioned solution, stands 30 seconds, further takes out, and prepares the poly-pyrrole of monolayer on the ground floor PDMS formed
Cough up polymer.
By the processing mode such as spin coated or silk screen printing, second layer PDMS is prepared in poly-pyrrole the most again
Cough up on polymer, repeat above-mentioned action, eventually form three layers of PDMS and accompany the sensitive layer structure of two-layer polypyrrole polymers, shape
Become pressure sensitive layer.
4) after imprinting moulding, device is placed in the vacuum drying oven of 60-120 DEG C of temperature range heating 10-60min,
Adhering material with volatile fraction slurry.
After device completes, need to be packaged test job, the device of processing can be applicable to irregular surface temperature detection
Special scenes.
This pliable pressure sensor compared with prior art, has following technical effect that
By using stamping technique to realize the purpose of large-scale production, simultaneously by using metal material or carbon powder material to make
For electrode material, on the one hand compatible with nanometer embossing, another aspect reduces the purpose of electrode material cost.
Accompanying drawing explanation
Fig. 1 represents structural representation of the present utility model.
In figure, 1-upper strata flexible substrate, 2-lower floor flexible substrate, the upper electrode of 3-, 4-bottom electrode, 5-flexible concertina insulate
Layer.
Detailed description of the invention
Below in conjunction with the accompanying drawings specific embodiment of the utility model is described in detail.
A kind of novel pliable pressure sensor, this device mainly comprise levels substrate, the electrode being placed on substrate and
Flexible insulating material between electrode.As it is shown in figure 1, specifically, include upper strata flexible substrate 1 and lower floor's flexible substrate 2, described
Electrode 3 is distributed in upper strata flexible substrate 1, described lower floor flexible substrate 2 is distributed bottom electrode 4, described upper electrode 3 and lower electricity
Pole 4 is spaced positioned opposite；Between described levels flexible substrate 1,2, flexible concertina insulating barrier 5 is set.
Levels flexible substrate mainly can use polyethylene terephthalate (PET) or polyimides (PI) etc.
There is the material of preferable pliability and insulating properties.
Electrode mainly uses metal material (such as conductive silver paste) or carbon powder material, and electrode is positioned at substrate, and and substrate
Being in close contact, electrode structure uses interdigital shape, and electrode material is prepared by the way of using nano impression or silk screen printing
In substrate.Impressing mould or wire mark template line thickness according to the pliable pressure sensor electrode size of required processing and
Fixed.
Flexible expandable insulating layer material selects the PDMS with preferable ductility, as the bullet of pliable pressure sensor
Property capacitor layers dielectric material, when being pressed in effectively on upper and lower substrate, flexible expandable insulating barrier can shrink so that up and down
Electrode is close to each other, and the effective area between upper/lower electrode increases, and the capacitance of device changes, and then by the change of capacitance
Change the force value determining effect.
The plurality of advantages such as this pliable pressure sensor has highly sensitive, can manufacture on a large scale, of many uses.
To pliable pressure sensor construction and preparation method thereof disclosed in this utility model, literary composition applies specific case pair
Principle of the present utility model and embodiment are set forth, and the explanation of above example is only intended to help and understands that this practicality is new
The method of type and core concept thereof；Be it should be understood that and be the foregoing is only specific embodiment of the utility model, not
For limiting this utility model, all within spirit of the present utility model and principle, any amendment, the equivalent made, change
Enter, within should be included in protection domain of the present utility model.
Claims (4)
1. a pliable pressure sensor, it is characterised in that: include upper strata flexible substrate (1) and lower floor's flexible substrate (2), described
Electrode (3) is distributed in upper strata flexible substrate (1), described lower floor flexible substrate (2) is distributed bottom electrode (4), described in power on
Pole (3) and bottom electrode (4) are spaced positioned opposite；Described levels flexible substrate arranges flexible concertina insulating barrier between (1,2)
(5).
Pliable pressure sensor the most according to claim 1, it is characterised in that: described levels flexible substrate (1,2) is adopted
Make of polyethylene terephthalate or polyimide material.
Pliable pressure sensor the most according to claim 1, it is characterised in that: described upper/lower electrode (3,4) uses metal
Material or carbon powder material make.
Pliable pressure sensor the most according to claim 1, it is characterised in that: described flexible concertina insulating barrier (5) uses
Polydimethyl siloxane material makes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620806987.0U CN205843855U (en) | 2016-07-28 | 2016-07-28 | Pliable pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620806987.0U CN205843855U (en) | 2016-07-28 | 2016-07-28 | Pliable pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205843855U true CN205843855U (en) | 2016-12-28 |
Family
ID=57641730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620806987.0U Active CN205843855U (en) | 2016-07-28 | 2016-07-28 | Pliable pressure sensor |
Country Status (1)
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| CN (1) | CN205843855U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092386A (en) * | 2016-07-28 | 2016-11-09 | 国网山西省电力公司忻州供电公司 | Pliable pressure sensor |
| CN107389232A (en) * | 2017-06-15 | 2017-11-24 | 华南理工大学 | A kind of asymmetric flexible force sensitive sensing material of bio-based and preparation method thereof |
| WO2018120226A1 (en) * | 2016-12-30 | 2018-07-05 | 华为技术有限公司 | Method for preparing capacitor and capacitor |
| CN108801513A (en) * | 2017-05-05 | 2018-11-13 | 北京赛特超润界面科技有限公司 | A kind of flexibility stress sensor and preparation method thereof fettering conduction liquid film based on nano wire |
-
2016
- 2016-07-28 CN CN201620806987.0U patent/CN205843855U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092386A (en) * | 2016-07-28 | 2016-11-09 | 国网山西省电力公司忻州供电公司 | Pliable pressure sensor |
| CN106092386B (en) * | 2016-07-28 | 2019-02-22 | 国网山西省电力公司忻州供电公司 | Pliable pressure sensor |
| WO2018120226A1 (en) * | 2016-12-30 | 2018-07-05 | 华为技术有限公司 | Method for preparing capacitor and capacitor |
| CN108801513A (en) * | 2017-05-05 | 2018-11-13 | 北京赛特超润界面科技有限公司 | A kind of flexibility stress sensor and preparation method thereof fettering conduction liquid film based on nano wire |
| CN107389232A (en) * | 2017-06-15 | 2017-11-24 | 华南理工大学 | A kind of asymmetric flexible force sensitive sensing material of bio-based and preparation method thereof |
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| GR01 | Patent grant |