CN205832842U - A kind of emission-control equipment - Google Patents
A kind of emission-control equipment Download PDFInfo
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- CN205832842U CN205832842U CN201620547266.2U CN201620547266U CN205832842U CN 205832842 U CN205832842 U CN 205832842U CN 201620547266 U CN201620547266 U CN 201620547266U CN 205832842 U CN205832842 U CN 205832842U
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Abstract
This application discloses a kind of emission-control equipment, including water tank, described water tank upper includes that the liquid being positioned at left side being interconnected drenches dust removal component and is positioned at the spray washing parts on right side, described liquid drenches the top of dust removal component and is provided with the reaction chamber communicated therewith, the top of described reaction chamber has the gas inlet parts introduced exhaust gas within described reaction chamber, the lateral surface of described reaction chamber sidewall has the air supply part introducing combustion-supporting gas, the medial surface of the sidewall of described reaction chamber is coated with intensive cavernous metal inner core, and the spout of described air supply part is respectively positioned between the sidewall of described reaction chamber and described metal inner core, and described spout all holes with described metal inner core are connected.The above-mentioned emission-control equipment that the application provides, it is possible to avoid particulate matter or dust adhesion in reaction chamber, reduce the burden safeguarding cleaning, it is to avoid pollutant spread.
Description
Technical field
This utility model relates to gas purification technique field, more particularly, it relates to a kind of emission-control equipment.
Background technology
In the manufacture field such as quasiconductor, panel display, LED, solar energy and MEMS be micro electronmechanical, production process all can
Producing waste gas, as a example by semiconductor manufacturing, its process apparatus gas of discharge when producing can be divided into following three types: the first kind
It is flammable explosive gas, such as hydrogen (H2) or silane (SiH4)；Equations of The Second Kind is toxic gas, such as nitrous oxide (N2O), chlorine
(Cl2), fluorine gas (F2)；3rd class is greenhouse gases, such as carbon tetrafluoride (CF4), Nitrogen trifluoride (NF3), sulfur hexafluoride (SF6)
Etc., wherein Nitrogen trifluoride (NF3) also there is toxicity, carbon tetrafluoride (CF4) be also proved in zoopery and can destroy cell wall
Structure so that it is it is intracellular that his pollutant are easier to entrance, therefore must carry out before these gases are discharged in surrounding
Process.
At present, conventional exhaust-gas treatment mode include " thermal decomposition+liquid drenches formula ", " fuel gas buring+liquid pouring formula " and " high temperature etc. from
Formula is drenched in daughter+liquid " etc., it is all that first exhaust-gas treatment is become stable side-product, then carries out liquid in Ye Lin district and drench and rinse.Wherein " combustion gas is fired
Burning+liquid drenches formula " use with acceptance the most extensively, burn processing reaction equation is as follows:
But, along with the increase of new processing procedure plant waste gases discharge capacity in recent years, the such as silicon dioxide of the by-product in production process
This kind of dust can be mingled with in the offgas, and this is accomplished by making corresponding process.Such as process apparatus is based on silane (SiH4) work
In the production of skill, the burning of combustion gas in reaction chamber needs combustion-supporting gas such as oxygen (O2), due to silane (SiH4) can be with oxygen (O2)
Produce oxidation reaction, produce silicon dioxide (SiO2), and this type of fuel gas buring emission-control equipment is for reducing oxynitride
(NOx) generation, the multistage combustion mode extensively used in many every profession and trades will be used to supply, and this kind of mode is in reaction
Chamber provides unnecessary oxygen.And too much oxygen easily produces above-mentioned reaction and causes the generation of silica dust, this dust
After entering emission-control equipment inside, owing to each spout in device is upset mutually between jet, air-flow, cause giving up
Particulate matter in gas not only can move with the direction of air-flow, and can be disturbed by the air-flow of other spouts, blows to multiple spout
Between without the region of spout, these particulate matter volumes are small, the intermolecular gravitation interacted that exists, but also there is electrostatic and inhale
Gravitation, or owing to high temperature can produce adhesion etc., all can cause on the surface that particulate matter sticks to around spout, and this will be by
Gradually blocking emission-control equipment inner space, the efficiency not only affecting place's process gases the most also can cause potential safety hazard.In factory
Toilet in, if safeguarding cleaning emission-control equipment and the central exhaust duct that is connected with device rear end thereof frequently, not only
Increasing the weight of the burden of staff, also easily cause pollutant diffusion, the frequency therefore reducing emission-control equipment maintenance just becomes non-
The most important.
Utility model content
For solving above-mentioned technical problem, this utility model provides a kind of emission-control equipment, it is possible to avoid particulate matter or
Dust adhesion, in reaction chamber, reduces the burden safeguarding cleaning, it is to avoid pollutant spread.
The above-mentioned emission-control equipment that this utility model provides, including:
Water tank, described water tank upper includes that the liquid being positioned at left side being interconnected drenches dust removal component and is positioned at the spray on right side
Washing components, described liquid drench dust removal component top be provided with the reaction chamber communicated therewith, the top of described reaction chamber have by
Waste gas introduces the gas inlet parts within described reaction chamber, and the lateral surface of described reaction chamber sidewall has introducing combustion-supporting gas
Air supply part, the medial surface of the sidewall of described reaction chamber is coated with intensive cavernous metal inner core, and described air supply part
Spout is respectively positioned between the sidewall of described reaction chamber and described metal inner core, and described spout all with the hole phase of described metal inner core
Connection.
Preferably, in above-mentioned emission-control equipment, described metal inner core be shaped as truncated cone-shaped, and described metal inner core
The diameter of upper surface less than the diameter of lower surface.
Preferably, in above-mentioned emission-control equipment, the hole of described metal inner core be diameter range be 0.5 millimeter to 0.8
The hole of millimeter.
Preferably, in above-mentioned emission-control equipment, described metal inner core is nickel metal inner core.
Preferably, in above-mentioned emission-control equipment, described air supply part includes connecting the blower fan having gas tank.
Preferably, in above-mentioned emission-control equipment, described blower fan is to connect to have oxygen gas tank or compressed air gas tank
Blower fan.
From technique scheme it can be seen that emission-control equipment provided by the utility model, owing to including water tank, institute
State the liquid pouring dust removal component being positioned at left side that water tank upper includes being interconnected and the spray washing parts being positioned at right side, described
Liquid drench dust removal component top be provided with the reaction chamber communicated therewith, the top of described reaction chamber have introduce exhaust gas into described instead
The gas inlet parts in intracavity portion, the lateral surface of described reaction chamber sidewall are answered to have the air supply part introducing combustion-supporting gas, described
The medial surface of the sidewall of reaction chamber is coated with intensive cavernous metal inner core, and the spout of described air supply part is respectively positioned on described
Between sidewall and the described metal inner core of reaction chamber, and described spout all holes with described metal inner core are connected, therefore even
Under continuous air feed pattern, the inner peripheral surface spreading all over the minimum metal inner core in the gap between tiny hole and Kong Yukong produces inside gas
Stream film, causes the silica dioxide granule thing cannot be to the close attachment of the inner surface of metal inner core such that it is able to avoid particulate matter or powder
Dirt sticks in reaction chamber, reduces the burden safeguarding cleaning, it is to avoid pollutant spread.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawing can be obtained according to the accompanying drawing provided.
The schematic diagram of the first emission-control equipment that Fig. 1 provides for the embodiment of the present application；
The operation principle schematic diagram of the emission-control equipment that Fig. 2 provides for the embodiment of the present application.
Detailed description of the invention
Core concept of the present utility model is to provide a kind of emission-control equipment, it is possible to avoid particulate matter or dust adhesion
In reaction chamber, reduce the burden safeguarding cleaning, it is to avoid pollutant spread.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
The first emission-control equipment that the embodiment of the present application provides is as it is shown in figure 1, what Fig. 1 provided for the embodiment of the present application
The schematic diagram of the first emission-control equipment.This emission-control equipment includes:
Water tank 1, described water tank 1 top includes that the liquid being positioned at left side being interconnected drenches dust removal component 2 and is positioned at right side
Spray washing parts 3, described liquid drenches the top of dust removal component 2 and is provided with the reaction chamber 4 communicated therewith, and this reaction chamber 4 is used for wrapping
Enclose the flame and tail gas to be processed generated by burning torch, therein tail gas to be processed is decomposed, reduce nitrogen oxygen
The generation of compound；
The top of described reaction chamber 4 has gas inlet parts 5 introduced exhaust gas within described reaction chamber 4, described instead
The lateral surface answering chamber 4 sidewall has the air supply part 6 introducing combustion-supporting gas, and the medial surface of the sidewall of described reaction chamber 4 is coated with
Intensive cavernous metal inner core 7, and the spout of described air supply part 6 is respectively positioned on the sidewall of described reaction chamber 4 and described metal
Between inner core 7, and described spout all holes with described metal inner core 7 are connected, and concrete, the urceolus of reaction chamber is erect and is arranged on
Liquid drenches in dust removal component 2, and metal inner core 7 is installed in the inner peripheral surface of urceolus, has the diameter less than urceolus, this urceolus inner peripheral surface
And in the space between metal inner core outer peripheral face, form the space structure installing multistage feeder.
The operation principle of above-mentioned emission-control equipment is as in figure 2 it is shown, the exhaust-gas treatment that Fig. 2 provides for the embodiment of the present application fills
The operation principle schematic diagram put, waste gas enters this emission-control equipment from the gas inlet parts 5 being positioned at reaction chamber top, combustion-supporting
Gas enters this reaction chamber 4 on the left of reaction chamber 4 after the hole of metal inner core 7, is formed after utilizing flame the two to be lighted
Gas reaches environmental protection standard after sequentially passing through liquid and drenching the dedusting of dust removal component 2 and the washing of spray washing parts 3, leaves this
Emission-control equipment.
From technique scheme it can be seen that the first emission-control equipment of being provided of the embodiment of the present application, due to bag
Including water tank, described water tank upper includes that the liquid being positioned at left side being interconnected drenches dust removal component and is positioned at the spray washing portion on right side
Part, described liquid drenches the top of dust removal component and is provided with the reaction chamber communicated therewith, and the top of described reaction chamber has draws waste gas
Entering the gas inlet parts within described reaction chamber, the lateral surface of described reaction chamber sidewall has the gas supply part introducing combustion-supporting gas
Part, the medial surface of the sidewall of described reaction chamber is coated with intensive cavernous metal inner core, and the spout of described air supply part is equal
Between the sidewall and described metal inner core of described reaction chamber, and described spout all holes with described metal inner core are connected,
Therefore, under continuous air feed pattern, the inner peripheral surface spreading all over the minimum metal inner core in the gap between tiny hole and Kong Yukong produces
Inside air-flow film, causes the silica dioxide granule thing cannot be to the close attachment of the inner surface of metal inner core such that it is able to avoid
In grain thing or dust adhesion reaction chamber, reduce the burden safeguarding cleaning, it is to avoid pollutant spread.
The second emission-control equipment that the embodiment of the present application provides, is the basis at the first emission-control equipment above-mentioned
On, also include following technical characteristic:
Described metal inner core be shaped as truncated cone-shaped, and straight less than lower surface of the diameter of the upper surface of described metal inner core
Footpath.Owing to the most progressively strengthening the inner surface diameter of metal inner core, so that it may the source of the gas air feed air-flow making top and the bottom is the most mutual
Interference, and owing to the waste gas stream of silane-containing can reflect more silica dioxide granule thing, institute with the oxygen in source of the gas air feed
Inner core with the most gradually enlarged diameter, it is possible to preferably away from silica dioxide granule thing.
The third emission-control equipment that the embodiment of the present application provides, is the basis at above-mentioned the second emission-control equipment
On, also include following technical characteristic:
The hole of described metal inner core be diameter range be the hole of 0.5 millimeter to 0.8 millimeter.There is the metal inner core in this hole
Inner peripheral surface be entirely and uniformly flow to the air-flow at center, particulate matter does not the most exist to the close active force of the inner peripheral surface of inner core, and
And owing to hole is fine and closely woven, do not exist as existing cavity, between multiple spouts, there is larger area can the district of adhered particles thing
Territory, the waste gas stream thus with particulate matter only may proceed to flow to device next stage region.
The 4th kind of emission-control equipment that the embodiment of the present application provides, is the basis at the third emission-control equipment above-mentioned
On, also include following technical characteristic:
Described metal inner core is nickel metal inner core, and the inner core of this material is a kind of common inner core, and hole is intensive, and easily
In processing, low cost, therefore select this metal inner core just can reduce the production cost of whole emission-control equipment.
In any of the above-described kind of emission-control equipment, described air supply part can include connecting the blower fan having gas tank, to protect
Demonstrate,prove combustion-supporting gas and can enter this emission-control equipment endlessly, to promote the abundant burning of waste gas, remove removing and harmful gas.
Further, described blower fan can preferably connect oxygen gas tank or the blower fan of compressed air gas tank.Blower fan is adopted
Source of the gas medium can be oxygen, air or compressed air, do not limit.Oxygen can be supplied by oxygen gas tank, pressure
Contracting air can be supplied by air compressor machine or compressed air cylinder, and the source of air can be the air in environment, and the effect of blower fan is
It is introduced into reaction chamber.
Above-mentioned various emission-control equipment, all it can be avoided that particulate matter or dust adhesion are in reaction chamber, reduce and safeguards clearly
The burden of reason, it is to avoid pollutant spread.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses this practicality new
Type.Multiple amendment to these embodiments will be apparent from for those skilled in the art, is determined herein
The General Principle of justice can realize in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause
This, this utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest scope consistent with features of novelty.
Claims (6)
1. an emission-control equipment, it is characterised in that include that water tank, described water tank upper include that be interconnected is positioned at left side
Liquid drench dust removal component and be positioned at the spray washing parts on right side, described liquid drenches the top of dust removal component and is provided with and communicates therewith
Reaction chamber, the top of described reaction chamber has the gas inlet parts introduced exhaust gas within described reaction chamber, described reaction chamber
The lateral surface of sidewall has the air supply part introducing combustion-supporting gas, and the medial surface of the sidewall of described reaction chamber is coated with intensive porous
The metal inner core of shape, and the spout of described air supply part is respectively positioned between the sidewall of described reaction chamber and described metal inner core, and
Described spout all holes with described metal inner core are connected.
Emission-control equipment the most according to claim 1, it is characterised in that described metal inner core be shaped as truncated cone-shaped,
And the diameter of the upper surface of described metal inner core is less than the diameter of lower surface.
Emission-control equipment the most according to claim 2, it is characterised in that the hole of described metal inner core is that diameter range is
The hole of 0.5 millimeter to 0.8 millimeter.
Emission-control equipment the most according to claim 3, it is characterised in that described metal inner core is nickel metal inner core.
5. according to the emission-control equipment described in any one of claim 1-4, it is characterised in that described air supply part includes connecting
There is the blower fan of gas tank.
Emission-control equipment the most according to claim 5, it is characterised in that described blower fan is that connection has oxygen gas tank or pressure
The blower fan of contracting air cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620547266.2U CN205832842U (en) | 2016-06-07 | 2016-06-07 | A kind of emission-control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620547266.2U CN205832842U (en) | 2016-06-07 | 2016-06-07 | A kind of emission-control equipment |
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| Publication Number | Publication Date |
|---|---|
| CN205832842U true CN205832842U (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620547266.2U Active CN205832842U (en) | 2016-06-07 | 2016-06-07 | A kind of emission-control equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109028102A (en) * | 2018-06-27 | 2018-12-18 | 德淮半导体有限公司 | The burner and its application method of gas |
| CN109163337A (en) * | 2018-09-25 | 2019-01-08 | 江苏宏仁特种气体有限公司 | Silicone hydride combustion device |
| CN109821373A (en) * | 2019-03-11 | 2019-05-31 | 中南大学 | A kind of plasma emission-control equipment and method |
| CN111412481A (en) * | 2020-03-19 | 2020-07-14 | 长江存储科技有限责任公司 | Exhaust gas treatment device |
-
2016
- 2016-06-07 CN CN201620547266.2U patent/CN205832842U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109028102A (en) * | 2018-06-27 | 2018-12-18 | 德淮半导体有限公司 | The burner and its application method of gas |
| CN109163337A (en) * | 2018-09-25 | 2019-01-08 | 江苏宏仁特种气体有限公司 | Silicone hydride combustion device |
| CN109821373A (en) * | 2019-03-11 | 2019-05-31 | 中南大学 | A kind of plasma emission-control equipment and method |
| CN111412481A (en) * | 2020-03-19 | 2020-07-14 | 长江存储科技有限责任公司 | Exhaust gas treatment device |
| CN111412481B (en) * | 2020-03-19 | 2023-01-10 | 长江存储科技有限责任公司 | Exhaust gas treatment device |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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| CP03 | Change of name, title or address |
Address after: 201821 room 2, 2 floor, 2, 2229 Yongsheng Road, Jiading District industrial area, Shanghai. Patentee after: Shanghai Sheng Jian environmental system Polytron Technologies Inc Address before: 201821 25F, Taihu Shijia International Building, 1198 De Fu Road, Jiading District, Shanghai Patentee before: SHANGHAI SHENGJIAN ENVIRONMENT SYSTEM TECHNOLOGY CO., LTD. |