CN205808442U - A kind of rotation introducer of vacuum equipment - Google Patents

A kind of rotation introducer of vacuum equipment Download PDF

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Publication number
CN205808442U
CN205808442U CN201620787989.XU CN201620787989U CN205808442U CN 205808442 U CN205808442 U CN 205808442U CN 201620787989 U CN201620787989 U CN 201620787989U CN 205808442 U CN205808442 U CN 205808442U
Authority
CN
China
Prior art keywords
importing
axle
vacuum chamber
electrode
introducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201620787989.XU
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Chinese (zh)
Inventor
张磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Heng Wei Instrument Science And Technology Ltd
Original Assignee
Suzhou Heng Wei Instrument Science And Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN201620787989.XU priority Critical patent/CN205808442U/en
Application granted granted Critical
Publication of CN205808442U publication Critical patent/CN205808442U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses the rotation introducer of a kind of vacuum equipment, including vacuum chamber, the importing seat being plugged in hermetically in described vacuum chamber, the importing axle being arranged on described importing seat and be plugged in rotatably in described vacuum chamber along Pivot Point Center line direction, described introducer also includes the some electrodes in the radial direction being arranged on described importing axle, described electrode the most described importing axle is fixedly installed in described vacuum chamber, described electrode and described importing between centers insulate setting mutually, described introducer also includes the stem being plugged in described vacuum chamber hermetically, described electrode is connected on described stem by lead-in wire.Rotation introducer of the present utility model, simple in construction, easy to operate, effectively prevent in running, wire wound on electrode occurs in situation about importing on axle, make to import axle can at a high speed, continuous print rotate, also add the multiformity of experiment simultaneously, improve the sustainability of experiment.

Description

A kind of rotation introducer of vacuum equipment
Technical field
This utility model relates to vacuum equipment field, is specifically related to the rotation introducer of a kind of vacuum equipment.
Background technology
In prior art, in order to realize in vacuum environment every researchs and analyses, generally the electrode of detection is connected Importing on axle rotating, its contact conductor also directly imports axle and is commonly mounted on importing seat with rotation, carries out in the method The installation of electrode, in use, electrode can rotate with the rotation importing axle, thus easily causes contact conductor to be wrapped in Import on axle, be unfavorable for detection, to this end, be badly in need of solving the problems referred to above.
Summary of the invention
The purpose of this utility model is to provide the rotation introducer of a kind of vacuum equipment, which solves in prior art and exists Problem, introducer introduces electrode, and the lead-in wire of this electrode will not be wrapped on importing axle, it is simple to detection, simultaneously Can realize importing the high speed of axle, rotating continuously.
For reaching above-mentioned purpose, the technical solution adopted in the utility model is: the rotation introducer of a kind of vacuum equipment, bag Include vacuum chamber, the importing seat being plugged in described vacuum chamber hermetically, be arranged on described importing seat and along Pivot Point Center line side Importing axle in being plugged in described vacuum chamber rotatably, described introducer also includes the radial direction being arranged on described importing axle On some electrodes, described electrode the most described importing axle is fixedly installed in described vacuum chamber, and described electrode is led with described Entering between centers to insulate mutually setting, described introducer also includes the stem being plugged in described vacuum chamber hermetically, and described electrode leads to Cross lead-in wire to be connected on described stem.
Preferably, described electrode is located in the radially outer side portions of described importing axle by bearing holder (housing, cover), outside described bearing includes Ring, the internal ring that can rotate relative to described outer shroud, described internal ring mutually conducts electricity with outer interannular, and the internal ring of described bearing closely overlaps Being located in the radially outer side portions of described importing axle and rotate with the rotation of described importing axle, the internal ring of described bearing is led with described Entering axle to insulate mutually setting, the outer shroud the most described importing axle that the outer shroud of described bearing is provided with described electrode and described bearing is solid It is scheduled in described vacuum chamber.
It is further preferred that the outer shroud of described electrode or described bearing is fixedly mounted on described vacuum chamber by fixture In, setting of insulating mutually between described electrode with described fixture or between the outer shroud of described bearing and described fixture.
When importing axle and axially can stretch into along himself in vacuum chamber or retract, in order to prevent fixture from wearing and tearing, this Fixture described in is fabricated from a flexible material.
Can revolve with the rotation of described importing axle it is further preferred that be fixedly provided with in the output end of described importing axle The laboratory table turned, is also associated with lead-in wire between the internal ring of described bearing and described laboratory table.
Preferably, the radially outer side portions of described importing axle is arranged with insulating trip, is used for preventing described importing axle with described Conduct electricity between electrode.
Preferably, between the cavity wall of described importing seat and described vacuum chamber, between the cavity wall of described stem and described vacuum chamber Setting is sealed mutually respectively by sealing ring.
Due to the utilization of technique scheme, this utility model compared with prior art has the advantage that this practicality is new The rotation introducer of type, by being arranged on being relatively fixed by electrode on importing axle, and is connected to lead-in wire by electrode by lead-in wire On post thus electrode signal is drawn outside vacuum chamber, here, by this setting so that electrode will not revolve with the rotation importing axle Turning, the lead-in wire on electrode will not be wrapped on importing axle, and the situation not havinging wire breaking occurs so that importing axle can be high Speed, continuous print rotate, and reduce the maintenance rate of electrode simultaneously, and this simple in construction, easy to operate, and add experiment can Can property and improve the persistence of experiment.
Accompanying drawing explanation
Accompanying drawing 1 is the structural representation rotating introducer of vacuum equipment described in the utility model;
Wherein: 1, vacuum chamber;2, seat is imported;21, axle is imported;22, laboratory table;3, electrode;4, lead-in wire;5, stem;6、 Fixture;7, bearing;71, outer shroud;72, internal ring;8, insulating trip;9, sealing ring.
Detailed description of the invention
Come below in conjunction with the accompanying drawings the technical solution of the utility model is further elaborated.
See described in Fig. 1, the rotation introducer of a kind of vacuum equipment, including vacuum chamber 1, it is plugged in vacuum chamber 1 hermetically Interior imports seat 2, the importing axle 21 being plugged in vacuum chamber 1 being arranged on importing seat 2 and rotating along Pivot Point Center line direction, This introducer also includes being arranged on importing axle 21 some electrodes 3 in the radial direction, and this electrode 3 imports the fixing peace of axle 21 relatively Being contained in vacuum chamber 1, setting of insulating mutually between this electrode 3 with importing axle 21, introducer also includes being plugged in hermetically in vacuum chamber 1 Stem 5, electrode 34 is connected on stem 5 by lead-in wire, thus is drawn by signal and carry out detection outside vacuum chamber 1 and analyze.
Here, this importing seat 2 is all installed with a sealing flange with in the cavity wall of vacuum chamber 1, by two panels flange and set Sealing ring 9 between this two panels flange makes importing seat 2 be plugged in hermetically in vacuum chamber 1;Same, this stem 5 be also It is plugged in hermetically in vacuum chamber 1 by this set-up mode.
In this example, this electrode 3 is set in by bearing 7 in the radially outer side portions importing axle 21, and this bearing 7 includes outer shroud 71, the internal ring 72 rotated around Pivot Point Center line direction relative to outer shroud 71, mutually conducts electricity between this internal ring 72 and outer shroud 71, here, and should Bearing 7 can be rolling bearing can also be sliding bearing.The internal ring 72 of this bearing is closely set in the radial direction importing axle 21 Rotating on lateral part and with the rotation importing axle 21, the internal ring 72 of this bearing is arranged with importing the insulation of axle 21 phase, this bearing The outer shroud 71 of electrode 3 and this bearing is installed on outer shroud 71 relatively import axle 21 and be fixed in vacuum chamber 1.By this setting, make When proper importing axle 21 rotates, electrode 3 does not rotates with the rotation importing axle 21 in being fixed on vacuum chamber 1, thus is not result in The lead-in wire 4 being connected on electrode 3 is wrapped in the phenomenon imported on axle 21 and occurs so that importing axle 21 can high speed, continuous print rotation Turn, improve the persistence of experiment.Certainly may be used without following structure: be set in import axle 21 radial outside, with importing axle 21 rotate and the conduction ring plate that rotates and the brush in ring plate radially outer side portions that is slidably connected, and ring plate is with to import axle 21 electricity exhausted Edge, is then arranged on electrode 3 on brush, by above-mentioned setting, it is possible to realizes electrode 3 and relatively imports axle 21 and be fixedly mounted in In vacuum chamber 1.
Here, can relatively import axle 21 in order to ensure electrode 3 and be fixedly mounted in vacuum chamber 1, this electrode 3 or bearing Outer shroud 71 is fixedly mounted in vacuum chamber 1 by fixture 6, between this electrode 3 and fixture 6 or the outer shroud 71 of bearing and fixture Insulate mutually between 6 setting.If import axle 21 for straight line rotation importing axle 21, in order to prevent fixture 6 from importing axle 21 along its axle Rupturing during extending or retract in vacuum chamber 1, here, this fixture 6 have employed flexible material and makes.
In order to prevent electrode 3 and import generation electric conduction phenomena between axle 21, here, the radially outer side portions importing axle 21 is overlapped Being provided with insulating trip 8, concrete, insulating trip 8 is positioned between the internal ring 72 importing axle 21 and bearing.
Here, in order to realize detection in vacuum chamber 1, being installed with in the output end importing axle 21 can be with importing axle The rotation of 21 and the laboratory table 22 that rotates, the internal ring 72 of this bearing be also connected leaded 4 between laboratory table 22, electrode 3 is by outward Ring, internal ring lead-in wire 4 transmits a signal in laboratory table 22, completes detection, and this set-up mode adds the probability of experiment.
Above-described embodiment only for technology of the present utility model design and feature are described, its object is to allow and is familiar with technique Personage will appreciate that content of the present utility model and implement according to this, protection domain of the present utility model can not be limited with this. All according to this utility model spirit made equivalence change or modify, all should contain protection domain of the present utility model it In.

Claims (7)

1. a rotation introducer for vacuum equipment, the importing seat including vacuum chamber, being plugged in described vacuum chamber hermetically, peace The importing axle being contained on described importing seat and be plugged in rotatably in described vacuum chamber along Pivot Point Center line direction, its feature exists In, described introducer also includes the some electrodes in the radial direction being arranged on described importing axle, described electrode relatively described in lead Entering axle to be fixedly installed in described vacuum chamber, described electrode and described importing between centers insulate setting mutually, and described introducer also wraps Including the stem being plugged in hermetically in described vacuum chamber, described electrode is connected on described stem by lead-in wire.
The rotation introducer of vacuum equipment the most according to claim 1, it is characterised in that described electrode is sheathed by bearing In the radially outer side portions of described importing axle, described bearing includes outer shroud, the internal ring that can rotate relative to described outer shroud, described interior Ring mutually conducts electricity with outer interannular, and the internal ring of described bearing is closely set in the radially outer side portions of described importing axle and with described Importing the rotation of axle and rotate, the internal ring of described bearing and described importing axle insulate setting mutually, installation on the outer shroud of described bearing The outer shroud the most described importing axle having described electrode and described bearing is fixed in described vacuum chamber.
The rotation introducer of vacuum equipment the most according to claim 2, it is characterised in that described electrode or described bearing Outer shroud is fixedly mounted in described vacuum chamber by fixture, between described electrode and described fixture or described bearing outer shroud with Insulate mutually between described fixture setting.
The rotation introducer of vacuum equipment the most according to claim 3, it is characterised in that described fixture is by flexible material Material is made.
The rotation introducer of vacuum equipment the most according to claim 2, it is characterised in that the output end of described importing axle On be fixedly provided with the laboratory table that can rotate with the rotation of described importing axle, between the internal ring of described bearing and described laboratory table also Connect leaded.
The rotation introducer of vacuum equipment the most according to claim 1 and 2, it is characterised in that the radial direction of described importing axle It is arranged with insulating trip on lateral part, is used for preventing from conducting electricity between described importing axle and described electrode.
The rotation introducer of vacuum equipment the most according to claim 1, it is characterised in that described importing seat and described vacuum Between the cavity wall in chamber, between described stem and the cavity wall of described vacuum chamber, seal setting mutually by sealing ring respectively.
CN201620787989.XU 2016-07-26 2016-07-26 A kind of rotation introducer of vacuum equipment Withdrawn - After Issue CN205808442U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620787989.XU CN205808442U (en) 2016-07-26 2016-07-26 A kind of rotation introducer of vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620787989.XU CN205808442U (en) 2016-07-26 2016-07-26 A kind of rotation introducer of vacuum equipment

Publications (1)

Publication Number Publication Date
CN205808442U true CN205808442U (en) 2016-12-14

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CN201620787989.XU Withdrawn - After Issue CN205808442U (en) 2016-07-26 2016-07-26 A kind of rotation introducer of vacuum equipment

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106248128A (en) * 2016-07-26 2016-12-21 苏州衡微仪器科技有限公司 A kind of rotation introducer of vacuum equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106248128A (en) * 2016-07-26 2016-12-21 苏州衡微仪器科技有限公司 A kind of rotation introducer of vacuum equipment
CN106248128B (en) * 2016-07-26 2018-07-03 苏州衡微仪器科技有限公司 A kind of rotation inducting device of vacuum equipment

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20161214

Effective date of abandoning: 20180703

AV01 Patent right actively abandoned