CN205789865U - The spray structure of a kind of dry etching equipment and nozzle contiguous block thereof - Google Patents
The spray structure of a kind of dry etching equipment and nozzle contiguous block thereof Download PDFInfo
- Publication number
- CN205789865U CN205789865U CN201620609732.5U CN201620609732U CN205789865U CN 205789865 U CN205789865 U CN 205789865U CN 201620609732 U CN201620609732 U CN 201620609732U CN 205789865 U CN205789865 U CN 205789865U
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- Prior art keywords
- nozzle
- contiguous block
- hole
- dry etching
- bolt
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Abstract
This utility model provides spray structure and the nozzle contiguous block thereof of a kind of dry etching equipment.The spray structure of described dry etching equipment includes nozzle contiguous block, fixing bolt and nozzle, described nozzle contiguous block is provided with nozzle connecting hole and is positioned at two bolt fixing hole of nozzle connecting hole both sides, described fixing bolt is screwed in described bolt fixing hole, described nozzle contiguous block is fixed on the chamber interior of dry etching equipment, and described nozzle is inserted in described nozzle connecting hole.This utility model is by changing the design of nozzle contiguous block, nozzle contiguous block is changed into double-side fastening mode by original monolateral fixed form, can be prevented effectively from due to Rig up error during maintenance, cause the monolateral tilting of nozzle contiguous block, cause special gas to leak and the bad problem of technique that causes.
Description
Technical field
This utility model relates to the process equipment field of display floater, particularly relate to a kind of dry etching equipment spray structure and
Its nozzle contiguous block.
Background technology
In the chamber interior of dry etching (dry etching) equipment, special gas jets (Gas Nozzle) is generally connected by a nozzle
Block (Gas Nozzle Block) is installed on chamber inner wall, this nozzle contiguous block be respectively arranged at two ends with nozzle connecting hole and a spiral shell
Bolt fixing hole, is fixed to chamber inner wall by nozzle contiguous block, then by nozzle by the fixing bolt being screwed in bolt fixing hole
Chamber interior and air supply channel can be connected in inserting nozzle connecting hole, supply to chamber interior.
When installing said nozzle contiguous block because be by monolateral fixing by the way of fix nozzle contiguous block, therefore,
Easily cause the special gas caused because the nozzle end of nozzle contiguous block tilts when mounted to leak, cause having a strong impact on to technique.
Utility model content
In view of this, this utility model provide a kind of avoid install time the monolateral tilting of nozzle contiguous block dry etching equipment
Spray structure and nozzle contiguous block.
The nozzle contiguous block that this utility model provides includes the nozzle connecting hole being provided thereon and is positioned at nozzle connecting hole
Two bolt fixing hole of both sides.
According to an embodiment of the present utility model, described nozzle connecting hole is positioned at the middle part of described nozzle contiguous block, institute
State two bolt fixing hole and lay respectively at the two ends of described nozzle contiguous block.
According to an embodiment of the present utility model, described bolt fixing hole is a stepped hole, and its small-bore part is used for
Connecting the bar portion of fixing bolt, its large aperture part is for housing the head of fixing bolt.
According to an embodiment of the present utility model, described nozzle connecting hole is a stepped hole, and its small-bore part is used for
Plugging the connecting tube of nozzle, its large aperture part is for housing the apical head of nozzle.
According to an embodiment of the present utility model, described nozzle contiguous block is kidney-shaped ceramic block.
The spray structure of the dry etching equipment that this utility model provides, including nozzle contiguous block, fixing bolt and nozzle, described
Nozzle contiguous block is located at the chamber interior of dry etching equipment, and described nozzle contiguous block is provided with nozzle connecting hole and is positioned at nozzle even
Connecing two bolt fixing hole of both sides, hole, described fixing bolt is screwed in described bolt fixing hole, and described nozzle is inserted in described
In nozzle connecting hole.
According to an embodiment of the present utility model, the chamber inner wall of described dry etching equipment is provided with groove, and described nozzle is even
Connect block to be fixed in described groove by described fixing bolt, and its surface is concordant with the chamber inner surface of dry etching equipment.
According to an embodiment of the present utility model, described bolt fixing hole is a stepped hole, and its small-bore part is used for
Connecting the bar portion of fixing bolt, its large aperture part is for housing the head of fixing bolt.
According to an embodiment of the present utility model, described fixing bolt is hexagon socket head cap screw, and its end face is connected with nozzle
The corresponding flush of block.
According to an embodiment of the present utility model, described nozzle connecting hole and described nozzle tight fit, described nozzle is even
Connecing Kong Weiyi stepped hole, its small-bore part is for plugging the connecting tube of nozzle, and its large aperture part is for housing the head of nozzle
Top, portion.
Nozzle contiguous block, by changing the design of nozzle contiguous block, is changed by this utility model by original monolateral fixed form
For double-side fastening mode, can be prevented effectively from due to Rig up error during maintenance, cause the monolateral tilting of nozzle contiguous block, cause special gas
The bad problem of technique leaked and cause.
Described above is only the general introduction of technical solutions of the utility model, in order to better understand skill of the present utility model
Art means, and can be practiced according to the content of description, and in order to allow above and other purpose of the present utility model, feature
Can become apparent with advantage, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, describe in detail as follows.
Accompanying drawing explanation
Fig. 1 show the perspective exploded view of the spray structure of this utility model dry etching equipment.
Fig. 2 show the three-dimensional of the spray structure of this utility model dry etching equipment and assembles schematic diagram.
Fig. 3 show the front schematic perspective view of this utility model nozzle contiguous block.
Fig. 4 show the back side schematic perspective view of this utility model nozzle contiguous block.
Wherein, 10-nozzle contiguous block, 11-nozzle connecting hole, 12-bolt fixing hole, 20-fixes bolt, 30-groove.
Detailed description of the invention
By further illustrating the technological means and effect that this utility model taked by reaching predetermined utility model purpose,
Below in conjunction with accompanying drawing and preferred embodiment, this utility model is described in detail as follows.
Fig. 1 and Fig. 2 show the schematic perspective view of the spray structure of this utility model dry etching equipment.Such as Fig. 1 and Fig. 2 institute
Showing, the spray structure of this utility model dry etching equipment includes nozzle contiguous block 10, fixing bolt 20 and nozzle (not shown).
Wherein, nozzle contiguous block 10 is located at the chamber interior of dry etching equipment, and specifically, the chamber inner wall of dry etching equipment is provided with
Groove 30, nozzle contiguous block 10 is fixed in groove 30 by fixing bolt 20.
As shown in Figures 3 and 4, in the present embodiment, nozzle contiguous block 10 is kidney-shaped ceramic block.Set on nozzle contiguous block 10
There is the nozzle connecting hole 11 in the portion of being located therein and be positioned at two bolt fixing hole 12 of nozzle connecting hole 11 both sides, in this enforcement
In example, bolt fixing hole 12 is positioned at the two ends of nozzle contiguous block 10.In the present embodiment, bolt fixing hole 12 is that a cross section is
Circular stepped hole, its small-bore part is near the back side of nozzle contiguous block 10, and for connecting the bar portion of fixing bolt 20, it is big
Aperture portion is near the front of nozzle contiguous block 10, for housing the head of fixing bolt 20.Nozzle connecting hole 11 is also transversal
Face is circular stepped hole, and its small-bore part is near the back side of nozzle contiguous block 10, and for plugging the connecting tube of nozzle, it is big
Aperture portion is near the front of nozzle contiguous block 10, for housing the apical head of nozzle.
Fixing bolt 20 is screwed in bolt fixing hole 12, and nozzle contiguous block 10 is fixed to the recessed of dry etching equipment chamber inner wall
In groove 30, after nozzle contiguous block 10 fixes, its surface is concordant with the chamber inner surface of dry etching equipment.At the present embodiment
In, fixing bolt 20 is hexagon socket head cap screw, and after it is screwed in bolt fixing hole 12, its end face is right with nozzle contiguous block 10
Answer flush.
Nozzle is inserted in nozzle connecting hole 11, with nozzle connecting hole 11 tight fit.In the present embodiment, nozzle is mushroom
Shape nozzle, after nozzle inserts nozzle connecting hole 11, the connecting tube of nozzle inserts in the small-bore part of nozzle connecting hole 11, nozzle
Apical head insert in the large aperture part of nozzle connecting hole 11.
To sum up, this utility model is by changing the design of nozzle contiguous block, by nozzle contiguous block by original monolateral fixing
Mode changes double-side fastening mode into, can be prevented effectively from due to Rig up error during maintenance, cause the monolateral tilting of nozzle contiguous block, draw
The bad problem of technique rising special gas to leak and to cause.
The above, be only preferred embodiment of the present utility model, not this utility model is made any in form
Restriction, although this utility model is disclosed above with preferred embodiment, but is not limited to this utility model, any ripe
Know professional and technical personnel, in the range of without departing from technical solutions of the utility model, when in the technology of available the disclosure above
Hold and make a little change or be modified to the Equivalent embodiments of equivalent variations, as long as being without departing from technical solutions of the utility model
Hold, any simple modification, equivalent variations and modification above example made according to technical spirit of the present utility model, the most still
Belong in the range of technical solutions of the utility model.
Claims (10)
1. a nozzle contiguous block, it is characterised in that described nozzle contiguous block includes nozzle connecting hole and the position being provided thereon
Two bolt fixing hole in nozzle connecting hole both sides.
Nozzle contiguous block the most according to claim 1, it is characterised in that: described nozzle connecting hole is positioned at described nozzle and connects
The middle part of block, said two bolt fixing hole lays respectively at the two ends of described nozzle contiguous block.
Nozzle contiguous block the most according to claim 1, it is characterised in that: described bolt fixing hole is a stepped hole, and it is little
Aperture portion is for connecting the bar portion of fixing bolt, and its large aperture part is for housing the head of fixing bolt.
Nozzle contiguous block the most according to claim 1, it is characterised in that: described nozzle connecting hole is a stepped hole, and it is little
Aperture portion is for plugging the connecting tube of nozzle, and its large aperture part is for housing the apical head of nozzle.
Nozzle contiguous block the most according to claim 1, it is characterised in that: described nozzle contiguous block is kidney-shaped ceramic block.
6. a spray structure for dry etching equipment, including nozzle contiguous block, fixing bolt and nozzle, described nozzle contiguous block is located at
The chamber interior of dry etching equipment, it is characterised in that: described nozzle contiguous block is provided with nozzle connecting hole and is positioned at nozzle connection
Two bolt fixing hole of both sides, hole, described fixing bolt is screwed in described bolt fixing hole, and described nozzle is inserted in described spray
In mouth connecting hole.
The spray structure of dry etching equipment the most according to claim 6, it is characterised in that: the chamber inner wall of described dry etching equipment
Being provided with groove, described nozzle contiguous block is fixed in described groove by described fixing bolt, and its surface and dry etching equipment
Chamber inner surface is concordant.
The spray structure of dry etching equipment the most according to claim 6, it is characterised in that: described bolt fixing hole is a step
Hole, its small-bore part is for connecting the bar portion of fixing bolt, and its large aperture part is for housing the head of fixing bolt.
The spray structure of dry etching equipment the most according to claim 6, it is characterised in that: described fixing bolt is interior hexagonal spiral shell
Bolt, the corresponding flush of its end face and nozzle contiguous block.
The spray structure of dry etching equipment the most according to claim 6, it is characterised in that: described nozzle connecting hole is with described
Nozzle tight fit, described nozzle connecting hole is a stepped hole, and its small-bore part is for plugging the connecting tube of nozzle, its large aperture
Part is for housing the apical head of nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620609732.5U CN205789865U (en) | 2016-06-21 | 2016-06-21 | The spray structure of a kind of dry etching equipment and nozzle contiguous block thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620609732.5U CN205789865U (en) | 2016-06-21 | 2016-06-21 | The spray structure of a kind of dry etching equipment and nozzle contiguous block thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205789865U true CN205789865U (en) | 2016-12-07 |
Family
ID=58132320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620609732.5U Active CN205789865U (en) | 2016-06-21 | 2016-06-21 | The spray structure of a kind of dry etching equipment and nozzle contiguous block thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205789865U (en) |
-
2016
- 2016-06-21 CN CN201620609732.5U patent/CN205789865U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |