CN205761986U - A kind of photoresist vapour-recovery unit of gluing self-revolving machine - Google Patents
A kind of photoresist vapour-recovery unit of gluing self-revolving machine Download PDFInfo
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- CN205761986U CN205761986U CN201620502800.8U CN201620502800U CN205761986U CN 205761986 U CN205761986 U CN 205761986U CN 201620502800 U CN201620502800 U CN 201620502800U CN 205761986 U CN205761986 U CN 205761986U
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- top board
- motor
- electric motors
- linear electric
- movable block
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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Abstract
nullA kind of photoresist vapour-recovery unit of gluing self-revolving machine，Belong to etching machine technical field，Including controller、Second motor、Bearing、Rotating shaft、First gear、Second movable block、Cylinder、Second gear、Inner shell、Discharge pipe、Micro-cleaner、Second linear electric motors、Rope、Roller、First motor、Wheel carrier、Second top board、First movable block、First linear electric motors、First top board、Shell、Multistage retractable rod and support plate，Described inner shell is installed in the enclosure，The first top board is each side installed at inner shell top，First linear electric motors are installed under the first top board，First movable block is installed on the first linear electric motors，Second top board is installed under the first movable block，Wheel carrier is installed under the second top board，Roller is installed on wheel carrier，The axle of roller is connected by shaft coupling and the first motor，First motor is arranged on wheel carrier，Rope upper end is wrapped on roller；The utility model has the advantages that: top board gas outlet size can be regulated.
Description
Technical field
This utility model relates to the photoresist vapour-recovery unit of a kind of gluing self-revolving machine, belongs to etching machine technical field.
Background technology
Placing the wafer on self-revolving machine, photoresist is sprayed at the center wafer of rotation by nozzle, and the photoresist of liquid exists
According to centrifugal force on the wafer rotated, sprawl and come, according to the viscosity of self, with thickness distribution equably, photoetching on wafer
After glue has been smeared, when self-revolving machine stops the rotation, the photoresist foundation heat dissipation of the steam form that self-revolving machine overhead is floating, by
Gas outlet on the gluing self-revolving machine inner shell top board of prior art cannot adjusting size so that the photoresist of steam form cannot
Discharge from gas outlet, make the photoresist of steam form again drop on wafer after striking inner shell wall, affect the matter of wafer
Amount.In order to solve above-mentioned difficulties, need to develop a photoresist vapour-recovery unit that can regulate top board gas outlet size.
Summary of the invention
The purpose of this utility model is to provide the photoresist vapour-recovery unit of a kind of gluing self-revolving machine.
Problem to be solved in the utility model is that the gas outlet on the gluing self-revolving machine inner shell top board of prior art cannot be adjusted
The problem of joint size.
For realizing the purpose of this utility model, the technical solution adopted in the utility model is:
A kind of photoresist vapour-recovery unit of gluing self-revolving machine, including controller, the second motor, bearing, rotating shaft, first
Gear, the second movable block, cylinder, the second gear, inner shell, discharge pipe, micro-cleaner, the second linear electric motors, rope, roller,
First motor, wheel carrier, the second top board, the first movable block, the first linear electric motors, the first top board, shell, multistage retractable rod and
Plate, in the enclosure, the first top board is each side installed at inner shell top to the installation of described inner shell, installs the first straight line under the first top board
Motor, the first linear electric motors are installed the first movable block, install the second top board under the first movable block, install wheel under the second top board
Frame, wheel carrier is installed roller, and the axle of roller is connected by shaft coupling and the first motor, and the first motor is arranged on wheel carrier, rope
Upper end is wrapped on roller, and rope lower end is mounted on bearings, and bearing is arranged in rotating shaft, and rotating shaft is arranged on the second linear electric motors
On, rotating shaft to be installed the first gear, the second gear is installed on the right side of the first gear, the second gear is arranged on the output shaft of the second motor
On, the second motor is arranged under support plate, and support plate is arranged under multistage retractable rod, and multistage retractable rod is arranged under the second top board, the
Second movable block is installed on two linear electric motors, cylinder is installed under the second movable block, the piston rod of cylinder is installed micro-cleaner,
Installing discharge pipe under shell, controller is arranged on shell, controller by wire respectively with the first motor, the second motor, the
One linear electric motors, the second linear electric motors are connected with micro-cleaner.
Described cylinder internal solenoid valve, electromagnetic valve is connected with controller by wire.
The utility model has the advantages that: after photoresist has been smeared, when self-revolving machine stops the rotation, it is straight that controller controls first
Line electric motor starting, makes the first movable block move left and right, and makes two the second top boards be located remotely from each other, makes going out between two the second top boards
QI KOU becomes big, facilitates the passage that the photoresist of steam form is discharged between shell and inner shell from gas outlet, then discharges from discharge pipe；
Controller controls the first electric motor starting, makes roller rotate, and makes rope move up and down, and makes multistage retractable rod do stretching motion, makes micro-
Vacuum cleaner moves up and down type；Controller controls the second electric motor starting, makes the second gear rotate, and makes the first gear rotate, makes second
Linear electric motors rotate, and make micro-cleaner rotate；Controller controls the second linear electric motors and starts, and makes to move about the second movable block
Dynamic, make micro-cleaner move left and right；Controller controls cylinder and does stretching motion, makes micro-cleaner move left and right, expands micro-
The absorption region of type vacuum cleaner, the photoresist of floating aerial steam form is absorbed by micro-cleaner.
Accompanying drawing explanation
Fig. 1 is the photoresist vapour-recovery unit overall structure figure of this utility model a kind of gluing self-revolving machine；
In figure: 1, controller the 2, second motor 3, bearing 4, rotating shaft the 5, first gear the 6, second movable block
7, cylinder the 8, second gear 9, inner shell 10, discharge pipe 11, micro-cleaner the 12, second linear electric motors 13, rope
Son 14, roller the 15, first motor 16, wheel carrier the 17, second top board the 18, first movable block the 19, first straight-line electric
Machine the 20, first top board 21, shell 22, multistage retractable rod 23, support plate.
Detailed description of the invention
Below in conjunction with the accompanying drawings and this utility model is further described by embodiment.
The photoresist vapour-recovery unit of this utility model a kind of gluing self-revolving machine, including controller the 1, second motor 2, axle
Hold 3, rotating shaft the 4, first gear the 5, second movable block 6, cylinder the 7, second gear 8, inner shell 9, discharge pipe 10, micro-cleaner 11,
Second linear electric motors 12, rope 13, roller the 14, first motor 15, wheel carrier the 16, second top board the 17, first movable block 18, first are straight
Line motor the 19, first top board 20, shell 21, multistage retractable rod 22 and support plate 23, described inner shell 9 is arranged in shell 21, inner shell 9
The first top board 20 is each side installed at top, and the first linear electric motors 19 installed by the first top board 20 times, on the first linear electric motors 19
Installing the first movable block 18, the first movable block 18 times installs the second top board 17, and after photoresist has been smeared, self-revolving machine stops the rotation
Time, controller 1 controls the first linear electric motors 19 and starts, and makes the first movable block 18 move left and right, and makes two the second top boards 17 mutual
Away from, make the gas outlet between two the second top boards 17 become big, facilitate the photoresist of steam form to be discharged to shell 21 from gas outlet
And the passage between inner shell 9, then discharge from discharge pipe 10；Wheel carrier 16 installed by second top board 17 times, and wheel carrier 16 is installed roller 14,
The axle of roller 14 is connected by shaft coupling and the first motor 15, and the first motor 15 is arranged on wheel carrier 16, and rope 13 upper end is wound around
On roller 14, rope 13 lower end is arranged on bearing 3, and controller 1 controls the first motor 15 and starts, and makes roller 14 rotate, makes
Rope 13 moves up and down, and makes multistage retractable rod 22 do stretching motion, makes micro-cleaner 11 move up and down；Bearing 3 is arranged on and turns
On axle 4, rotating shaft 4 is arranged on the second linear electric motors 12, and rotating shaft 4 is installed the first gear 5, installs second on the right side of the first gear 5
Gear 8, the second gear 8 is arranged on the output shaft of the second motor 2, and the second motor 2 is arranged on support plate 23 times, and controller 1 controls
Second motor 2 starts, and makes the second gear 8 rotate, and makes the first gear 5 rotate, and makes the second linear electric motors 12 rotate, makes miniature dust absorption
Device 11 rotates；Support plate 23 is arranged on multistage retractable rod 22 times, and multistage retractable rod 22 is arranged on the second top board 17 times, the second straight-line electric
Installing the second movable block 6 on machine 12, controller 1 controls the second linear electric motors 12 and starts, and makes the second movable block 6 move left and right, makes
Micro-cleaner 11 moves left and right；Second movable block 6 times install cylinder 7, cylinder 7 internal solenoid valve, electromagnetic valve by wire with
Controller 1 is connected, and the piston rod of cylinder 7 is installed micro-cleaner 11, and shell installs discharge pipe 10 21 times, and controller 1 controls
Cylinder 7 does stretching motion, makes micro-cleaner 11 move left and right, and expands the absorption region of micro-cleaner 11, micro-cleaner
The photoresist of floating aerial steam form is absorbed by 11, and controller 1 is arranged on shell 21, and controller 1 passes through wire
It is connected with first motor the 15, second motor the 2, first linear electric motors the 19, second linear electric motors 12 and micro-cleaner 11 respectively.
This utility model using method: after photoresist has been smeared, when self-revolving machine stops the rotation, controller 1 controls first
Linear electric motors 19 start, and make the first movable block 18 move left and right, and make two the second top boards 17 be located remotely from each other, make two the second top boards
Gas outlet between 17 becomes big, facilitates the photoresist of steam form to be discharged to the passage between shell 21 and inner shell 9 from gas outlet, then
Discharge from discharge pipe 10；Controller 1 controls the first motor 15 and starts, and makes roller 14 rotate, and makes rope 13 move up and down, makes multistage
Expansion link 22 does stretching motion, makes micro-cleaner 11 move up and down；Controller 1 controls the second motor 2 and starts, and makes the second gear
8 rotate, and make the first gear 5 rotate, make the second linear electric motors 12 rotate, make micro-cleaner 11 rotate；Controller 1 controls second
Linear electric motors 12 start, and make the second movable block 6 move left and right, make micro-cleaner 11 move left and right；Controller 1 controls cylinder 7
Doing stretching motion, make micro-cleaner 11 move left and right, expand the absorption region of micro-cleaner 11, micro-cleaner 11 will drift
The photoresist of floating aerial steam form absorbs.
Claims (2)
1. a photoresist vapour-recovery unit for gluing self-revolving machine, including controller (1), the second motor (2), bearing (3), turns
Axle (4), the first gear (5), the second movable block (6), cylinder (7), the second gear (8), inner shell (9), discharge pipe (10), miniature suction
Dirt device (11), the second linear electric motors (12), rope (13), roller (14), the first motor (15), wheel carrier (16), the second top board
(17), the first movable block (18), the first linear electric motors (19), the first top board (20), shell (21), multistage retractable rod (22) and
Plate (23), is characterized in that: described inner shell (9) is arranged in shell (21), and the first top board is each side installed at inner shell (9) top
(20), installing the first linear electric motors (19) under the first top board (20), the first linear electric motors (19) are upper installs the first movable block (18),
Installing the second top board (17) under first movable block (18), install wheel carrier (16) under the second top board (17), wheel carrier installs rolling on (16)
Wheel (14), the axle of roller (14) is connected by shaft coupling and the first motor (15), and the first motor (15) is arranged on wheel carrier (16),
Rope (13) upper end is wrapped on roller (14), and rope (13) lower end is arranged on bearing (3), and bearing (3) is arranged on rotating shaft (4)
On, rotating shaft (4) is arranged on the second linear electric motors (12), upper the first gear (5) of installing of rotating shaft (4), the first gear (5) right side peace
Filling the second gear (8), the second gear (8) is arranged on the output shaft of the second motor (2), and the second motor (2) is arranged on support plate
(23) under, support plate (23) is arranged under multistage retractable rod (22), and multistage retractable rod (22) is arranged under the second top board (17), and second
Linear electric motors (12) are upper installs the second movable block (6), installs cylinder (7), on the piston rod of cylinder (7) under the second movable block (6)
Installing micro-cleaner (11), install discharge pipe (10) under shell (21), controller (1) is arranged on shell (21), controller
(1) by wire respectively with the first motor (15), the second motor (2), the first linear electric motors (19), the second linear electric motors (12) and
Micro-cleaner (11) is connected.
The photoresist vapour-recovery unit of a kind of gluing self-revolving machine the most according to claim 1, is characterized in that: described cylinder
(7) internal solenoid valve, electromagnetic valve is connected with controller (1) by wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620502800.8U CN205761986U (en) | 2016-05-30 | 2016-05-30 | A kind of photoresist vapour-recovery unit of gluing self-revolving machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620502800.8U CN205761986U (en) | 2016-05-30 | 2016-05-30 | A kind of photoresist vapour-recovery unit of gluing self-revolving machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205761986U true CN205761986U (en) | 2016-12-07 |
Family
ID=59979450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620502800.8U Active CN205761986U (en) | 2016-05-30 | 2016-05-30 | A kind of photoresist vapour-recovery unit of gluing self-revolving machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205761986U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106638429A (en) * | 2016-12-28 | 2017-05-10 | 长沙贤正益祥机械科技有限公司 | Rotating angle indicating tool adaptable to rotary shaft at any angles, and dust suppression vehicle |
| CN115365064A (en) * | 2022-09-20 | 2022-11-22 | 马鞍山粤美智造电子科技有限公司 | Automatic gluing machine for production of warm chopping boards |
-
2016
- 2016-05-30 CN CN201620502800.8U patent/CN205761986U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106638429A (en) * | 2016-12-28 | 2017-05-10 | 长沙贤正益祥机械科技有限公司 | Rotating angle indicating tool adaptable to rotary shaft at any angles, and dust suppression vehicle |
| CN106638429B (en) * | 2016-12-28 | 2019-01-04 | 浙江瑞邦智能装备股份有限公司 | A kind of rotational angle marking tools, dust suppression vehicle adapting to any angle shaft |
| CN115365064A (en) * | 2022-09-20 | 2022-11-22 | 马鞍山粤美智造电子科技有限公司 | Automatic gluing machine for production of warm chopping boards |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |