CN205710909U - Gaseous phase deposition stove electrical control gear - Google Patents
Gaseous phase deposition stove electrical control gear Download PDFInfo
- Publication number
- CN205710909U CN205710909U CN201620373681.0U CN201620373681U CN205710909U CN 205710909 U CN205710909 U CN 205710909U CN 201620373681 U CN201620373681 U CN 201620373681U CN 205710909 U CN205710909 U CN 205710909U
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- China
- Prior art keywords
- electrical control
- control gear
- gaseous phase
- phase deposition
- deposition stove
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- Control Of Temperature (AREA)
Abstract
The utility model discloses a kind of gaseous phase deposition stove electrical control gear, this gaseous phase deposition stove electrical control gear includes frequency converter, servo-driver, power regulating eqiupment, the first motor, the second motor, the first transformer, calandria and main controller；One end of frequency converter is connected with power supply, and the other end of frequency converter and the first motor connect；One end of servo-driver is connected with power supply, and the other end of servo-driver and the second motor connect；One end of power regulating eqiupment is connected with power supply, and the other end of power regulating eqiupment is connected with calandria through the first transformer；Frequency converter, servo-driver and power regulating eqiupment are all connected with main controller.Technical solutions of the utility model improve the automatization level of gaseous phase deposition stove.
Description
Technical field
The utility model relates to field of electrical control, particularly to a kind of gaseous phase deposition stove electrical control gear.
Background technology
Gas phase deposition technology be one quickly grow, widely used surface filming technology, it can be used to
Prepare the film coating of various special mechanical property (as superhard, high anti-corrosion, heat-resisting and anti-oxidant etc.),
Usual vapour deposition uses CVD (Chemical Vapor Deposition, gas chemistry precipitates) cvd furnace
Realize.
CVD deposition stove common in the market is all mini-plant, mainly laboratory equipment.Really
The main equipment putting into industrialized mass production is extremely rare.These mini-plants are mostly simpler and cruder, work(
Can be single, automaticity is low, it is difficult to satisfied production is actually needed.
Utility model content
Main purpose of the present utility model is to provide a kind of gaseous phase deposition stove electrical control gear, it is intended to improve
The automatization level of gaseous phase deposition stove.
For achieving the above object, the utility model proposes a kind of gaseous phase deposition stove electrical control gear, bag
Include frequency converter, servo-driver, power regulating eqiupment, the first motor, the second motor, the first transformer, heating
Body and main controller；One end of described frequency converter is connected with power supply, the other end of described frequency converter and described the
One motor connects；One end of described servo-driver is connected with described power supply, described servo-driver another
One end is connected with described second motor；One end of described power regulating eqiupment is connected with described power supply, described power regulating eqiupment
The other end be connected with described calandria through described first transformer；Described frequency converter, described servo-drive
Device and described power regulating eqiupment are all connected with described main controller.
Preferably, also include that described gaseous phase deposition stove electrical control gear also includes touch screen computer, described
Touch screen computer is connected with described main controller.
Preferably, described gaseous phase deposition stove electrical control gear also includes temperature controller, described temperature controller and institute
State main controller to connect.
Preferably, described gaseous phase deposition stove electrical control gear also includes mass flowmenter, described quality stream
Gauge is connected with described main controller, and described mass flowmenter is also connected with described power supply.
Preferably, described gaseous phase deposition stove electrical control gear also includes weighing instrument, described weighing instrument and institute
Stating main controller to connect, institute's weighing instrument is also connected with described power supply.
Preferably, described gaseous phase deposition stove electrical control gear also includes vacuum breaker, and described vacuum is adjusted
Joint valve is connected with described main controller.
Preferably, described gaseous phase deposition stove electrical control gear also includes the second transformer, and described second becomes
Depressor is connected between described power supply and described servo-driver.
Preferably, described gaseous phase deposition stove electrical control gear also includes current transducer and voltage transmitter,
Described current transducer and described voltage transmitter are respectively to described first transformer output extremely described calandria
Electric current and voltage sample, and transmit to described main controller.
Preferably, described calandria uses graphite heating body.
Technical solutions of the utility model by arrange frequency converter, servo-driver, power regulating eqiupment, the first motor,
Second motor, the first transformer, calandria and main controller, define a kind of gaseous phase deposition stove electrical control
Device.First electric machine rotation described in the described main controller described transducer drive of control, such that it is able to set the
The rotating speed of one motor, described first motor is for dragging the workpiece plate uniform rotation in gaseous phase deposition stove；Institute
State main controller and also control the rotational angular velocity of the second motor described in described servo driver drives, described second
Motor is for dragging the lifting of the bell in gaseous phase deposition stove；Described main controller also controls power regulating eqiupment and regulates institute
State the heating power of calandria.Technical solutions of the utility model pass through main controller, it is achieved sink chemical gaseous phase
Long-pending automatically controls, it is not necessary to manual intervention, improves production efficiency.
Brief description
In order to be illustrated more clearly that the utility model embodiment or technical scheme of the prior art, below will
The accompanying drawing of required use in embodiment or description of the prior art is briefly described, it should be apparent that,
Accompanying drawing in describing below is only some embodiments of the present utility model, for ordinary skill people
From the point of view of Yuan, on the premise of not paying creative work, can also obtain according to the structure shown in these accompanying drawings
Obtain other accompanying drawing.
Fig. 1 is the schematic diagram of the utility model gaseous phase deposition stove electrical control gear one embodiment.
Drawing reference numeral illustrates:
| Label | Title | Label | Title |
| QF0 | Main breaker | UR | Power regulating eqiupment |
| QF1 | First breaker | FTF | Fuse |
| QF2 | Second breaker | TC | Temperature controller |
| UF1 | Frequency converter | MFC | Mass flowmenter |
| UF2 | Servo-driver | PW | Weighing instrument |
| M1 | First motor | YM | Vacuum breaker |
| M2 | Second motor | CPA | Current transducer |
| TM1 | First transformer | CPV | Voltage transmitter |
| TM2 | Second transformer | FH | Calandria |
| KM | Contactor | U1 | Main controller |
| PC | Touch screen computer |
The realization of the utility model purpose, functional characteristics and advantage will in conjunction with the embodiments, do referring to the drawings into
One step explanation.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the utility model embodiment, to the technology in the utility model embodiment
Scheme is clearly and completely described, it is clear that described embodiment is only of the present utility model one
Section Example, rather than whole embodiments.Based on the embodiment in the utility model, this area is general
The every other embodiment that logical technical staff is obtained under the premise of not making creative work, broadly falls into
The scope of the utility model protection.
It is to be appreciated that the directional instruction of institute in the utility model embodiment (such as upper and lower, left and right,
It is forward and backward ...) it is only used for explaining the phase between each parts under a certain particular pose (as shown in drawings)
To position relationship, motion conditions etc., if this particular pose changes, then directionality indicates also
Correspondingly change therewith.
In addition, the description relating to " first ", " second " etc. in the utility model is only used for describing purpose,
And it is not intended that indicate or imply its relative importance or the implicit number indicating indicated technical characteristic
Amount.Thus, define " first ", the feature of " second " can be expressed or implicitly include at least one
Individual this feature.In addition, the technical scheme between each embodiment can be combined with each other, but must be with
Based on those of ordinary skill in the art are capable of, when conflicting or nothing occurs in the combination of technical scheme
Will be understood that when method realizes that the combination of this technical scheme does not exists, the guarantor also not required at the utility model
Within the scope of protecting.
The utility model proposes a kind of gaseous phase deposition stove electrical control gear.
With reference to Fig. 1, in the utility model one embodiment, this gaseous phase deposition stove electrical control gear includes becoming
Frequently device UF1, servo-driver UF2, power regulating eqiupment UR, the first motor M1, the second motor M2, the first change
Depressor TM1, calandria FH and main controller U1；One end of described frequency converter UF1 is with power supply (in figure not
Illustrate) connect, the other end of described frequency converter UF1 is connected with described first motor M1；Described servo is driven
One end of dynamic device UF2 is connected with described power supply, the other end of described servo-driver UF2 and described second electricity
Machine M2 connects；One end of described power regulating eqiupment UR is connected with described power supply, the other end of described power regulating eqiupment UR
It is connected with described calandria FH through described first transformer TM1；Described frequency converter UF1, described servo are driven
Dynamic device UF2 and described power regulating eqiupment UR is all connected with described main controller U1.
It should be noted that when carrying out chemical gaseous phase deposition, frequency converter UF1 drives the first motor M1 even
Speed rotates, to drive the workpiece plate uniform rotation in gaseous phase deposition stove so that unstrpped gas can be uniform
In work piece surface deposition, it is achieved optimal deposition effect.
In the present embodiment, the second motor M2 is servomotor.Servo-driver UF2 drives the second motor M2
Rotate, drag the lifting of the bell being positioned at gaseous phase deposition stove bottom, to open or close the furnace chamber of cvd furnace.
Owing to the volume of reacting furnace is relatively big, in order to ensure that should have certain sealing when body of heater closes again can not
Damaging sealing ring, folding speed simultaneously is also adjustable, uses servo-driver UF2 to drive servomotor here
Rotate, to control the furnace cover lifting of gaseous phase deposition stove.
Technical solutions of the utility model by arrange frequency converter UF1, servo-driver UF2, power regulating eqiupment UR,
First motor M1, the second motor M2, the first transformer TM1, calandria FH and main controller U1, form
A kind of gaseous phase deposition stove electrical control gear.The described frequency converter UF1 of described main controller U1 control drives institute
Stating the first motor M1 to rotate, such that it is able to set the rotating speed of the first motor M1, described first motor M1 uses
Workpiece plate uniform rotation in dragging gaseous phase deposition stove；Described main controller U1 also controls described servo-drive
Device UF2 drives the rotational angular velocity of described second motor M2, and described second motor M2 is used for dragging gas phase and sinks
The furnace cover lifting of long-pending stove；Described main controller U1 also controls the heating work(of the described calandria FH of power regulating eqiupment UR regulation
Rate.Technical solutions of the utility model realize automatically controlling chemical gaseous phase deposition by main controller U1, nothing
Need manual intervention, improve production efficiency.
Further, described gaseous phase deposition stove electrical control gear also includes touch screen computer PC, described tactile
Touch screen computer PC to be connected with described main controller U1.Touch screen computer PC is used for showing various control parameter,
Operator enters line parameter by touch screen computer PC and arranges, and assigns various control command.
Further, described gaseous phase deposition stove electrical control gear also includes temperature controller TC, described temperature controller
TC is connected with described main controller U1.
It should be noted that temperature controller TC can be day island proper electricity board temperature controller TC, by RS485 interface
Carry out communication with main controller U1.Temperature controller TC gathers the temperature in gaseous phase deposition stove furnace chamber, temperature signal
First send into temperature controller TC to show, more directly passed out to by the specialized simulation delivery outlet of temperature controller TC
Main controller U1, finally this temperature of display screen display at touch screen computer PC.Temperature controller TC is by temperature
Degree setting value outputs a control signal to main controller after comparing with temperature feedback value after PID arithmetic
U1, main controller U1 control the power of power regulating eqiupment UR regulation calandria FH again.
Further, described gaseous phase deposition stove electrical control gear also includes mass flowmenter MFC, described
Mass flowmenter MFC is connected with described main controller U1, described mass flowmenter MFC also with described electricity
Source connects.
Mass flowmenter MFC is for carrying out flow-control, quality stream to the unstrpped gas of chemical gaseous phase deposition
Gauge MFC sends flow value and mass value to main controller U1, and is shown on touch screen computer PC.
Operator can directly change the flow of unstrpped gas by touch screen computer PC.Different unstrpped gas is adopted
Measure with different mass flowmenter MFC, to prevent the corrosion to mass flowmenter MFC for the gas.
Further, described gaseous phase deposition stove electrical control gear also includes weighing instrument PW, described weighing instrument
PW is connected with described main controller U1, and institute weighing instrument PW is also connected with described power supply.
It should be noted that some corrosive gas also do not have suitable mass flowmenter MFC, thus adopt
Indirectly measure by the quality to gas for the weighing instrument PW.
Further, described gaseous phase deposition stove electrical control gear also includes vacuum breaker YM, described very
Air-conditioning joint valve YM is connected with described main controller U1.
It should be noted that before chemical gas phase reaction, when not being passed through unstrpped gas in furnace chamber, it is desirable to
Being vacuum state in furnace chamber, furnace pressure is the smaller the better.But when be passed through unstrpped gas start reaction after, it is to be ensured that stove
There is certain furnace pressure, therefore it is required that the vacuum breaker YM being loaded on outlet pipe quickly to beat in chamber
Reach a certain specific angle.Main controller U1 controls the electronic execution machine being arranged on vacuum breaker YM
Structure, electric operator can rotate the ball valve in vacuum breaker YM accordingly automatically to corresponding angle.
Meanwhile, this positional information is also fed back into main controller U1, and is shown in touch screen computer PC with angle form
On.
Further, described gaseous phase deposition stove electrical control gear also includes the second transformer TM2, described
Second transformer TM2 is connected between described power supply and described servo-driver UF2.
The voltage that first transformer TM1 is used for power regulating eqiupment UR output is depressured, and raises power regulating eqiupment
The electric current of UR output, to provide low-voltage, big electric current to calandria FH.In the present embodiment, described add
Hot body FH uses graphite heating body FH.
Further, described gaseous phase deposition stove electrical control gear also includes current transducer CPA and voltage
Transmitter CPV, described current transducer CPA and described voltage transmitter CPV are respectively to described first
Transformer TM1 output is sampled to electric current and the voltage of described calandria FH, and transmits to described master
Control device U1.
It should be noted that main controller U1 is according to by current transducer CPA and voltage transmitter CPV
Sampled signal, the corresponding power output adjusting power regulating eqiupment UR, it is achieved power control more accurately.
In the present embodiment, described main controller U1 uses Mitsubishi FX3U type PLC assembly.
This gaseous phase deposition stove electrical control gear also includes the total open circuit being connected to power input AC-input
It device QF0, the first circuit breaker Q F1 being connected between frequency converter UF1 and main breaker QF0, is connected to
It the second circuit breaker Q F2 between second transformer TM2 and main breaker QF0, is connected to the second breaker
Contactor KM between QF2 and the second transformer TM2.Described power regulating eqiupment UR and described main breaker
It is connected with fuse FTF, mass flowmenter MFC and weighing instrument PW and main breaker QF0 between QF0
Between be also associated with fuse FTF.
It should be noted that one end input voltage of main breaker QF0 is 380V three-phase in the present embodiment
Alternating current, provides 380V three-phase to respectively frequency converter UF1, the first transformer TM1 and power regulating eqiupment UR
Alternating current；Mass flowmenter MFC then only connects the electricity mutually of in 380V alternating current with weighing instrument PW, obtains
Obtain the alternating current of 220V, using as power supply.
In conjunction with concrete schematic diagram, technical solutions of the utility model are further elaborated:
Touch screen computer PC and main controller U1 initializes after powering on, Guan Bi main breaker QF0, second break
Road device QF2；
Operator sends order by touch screen computer PC, and main controller U1 control servo-driver UF2 drives
Dynamic second motor M2 rotates, and declines with the bell dragging below gaseous phase deposition stove, opens furnace chamber, operator
Put the workpiece on the workpiece plate in furnace chamber, and send order by touch screen computer PC again, control servo
Driver UF2 drives the second motor M2 to rotate, and drags the bell below gaseous phase deposition stove and rises, closes
Furnace chamber；
Air pressure in main controller U1 control vacuum breaker YM regulation furnace chamber, closes the first circuit breaker Q F1,
Main controller U1 control frequency converter UF1 drives the first motor M1 to rotate to drag workpiece plate rotation；
Unstrpped gas is fed through in furnace chamber by main controller U1 control mass flowmenter MFC and weighing instrument PW,
And control power regulating eqiupment UR calandria FH power is loaded onto setting value；Record according to temperature controller TC simultaneously
Temperature value adjusts the power output of power regulating eqiupment UR, and main controller U1 is always according to current transducer CPA and electricity
Electric current that pressure transmitter CPV records, magnitude of voltage, adjust output voltage, the electric current of power regulating eqiupment UR.
Technical solutions of the utility model can be to the temperature in furnace chamber, pressure, the flow of unstrpped gas or weight
The parameters such as amount monitor on touch screen computer PC in real time, easy to operate, control accuracy is high, automation
Degree is high.
The foregoing is only preferred embodiment of the present utility model, not thereby limit of the present utility model specially
Profit scope, every under inventive concept of the present utility model, in utilizing the utility model specification and accompanying drawing
The equivalent structure transformation of Rong Suozuo, or directly/be indirectly used in other related technical fields and be included in this
In the scope of patent protection of utility model.
Claims (9)
1. a gaseous phase deposition stove electrical control gear, it is characterised in that include frequency converter, servo-drive
Device, power regulating eqiupment, the first motor, the second motor, the first transformer, calandria and main controller；Described change
Frequently one end of device is connected with power supply, and the other end of described frequency converter is connected with described first motor；Described watch
The one end taking driver is connected with described power supply, the other end of described servo-driver and described second motor
Connect；One end of described power regulating eqiupment is connected with described power supply, and the other end of described power regulating eqiupment is through described first
Transformer is connected with described calandria；Described frequency converter, described servo-driver and described power regulating eqiupment all with
Described main controller connects.
2. gaseous phase deposition stove electrical control gear as claimed in claim 1, it is characterised in that also include
Described gaseous phase deposition stove electrical control gear also includes touch screen computer, described touch screen computer and described master
Control device connects.
3. gaseous phase deposition stove electrical control gear as claimed in claim 1, it is characterised in that described gas
Phase cvd furnace electrical control gear also includes temperature controller, and described temperature controller is connected with described main controller.
4. gaseous phase deposition stove electrical control gear as claimed in claim 1, it is characterised in that described gas
Phase cvd furnace electrical control gear also includes mass flowmenter, and described mass flowmenter is with described main controller even
Connecing, described mass flowmenter is also connected with described power supply.
5. gaseous phase deposition stove electrical control gear as claimed in claim 1, it is characterised in that described gas
Phase cvd furnace electrical control gear also includes weighing instrument, and described weighing instrument is connected with described main controller, alleged
Weight instrument is also connected with described power supply.
6. gaseous phase deposition stove electrical control gear as claimed in claim 1, it is characterised in that described gas
Phase cvd furnace electrical control gear also includes vacuum breaker, and described vacuum breaker is with described main controller even
Connect.
7. the gaseous phase deposition stove electrical control gear as described in claim 1-6 any one, its feature exists
In described gaseous phase deposition stove electrical control gear also includes the second transformer, and described second transformer connects
Between described power supply and described servo-driver.
8. gaseous phase deposition stove electrical control gear as claimed in claim 7, it is characterised in that described gas
Phase cvd furnace electrical control gear also includes current transducer and voltage transmitter, described current transducer and
Electric current and the voltage of described first transformer output to described calandria is carried out by described voltage transmitter respectively
Sampling, and transmit to described main controller.
9. gaseous phase deposition stove electrical control gear as claimed in claim 8, it is characterised in that described add
Hot body uses graphite heating body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620373681.0U CN205710909U (en) | 2016-04-27 | 2016-04-27 | Gaseous phase deposition stove electrical control gear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620373681.0U CN205710909U (en) | 2016-04-27 | 2016-04-27 | Gaseous phase deposition stove electrical control gear |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205710909U true CN205710909U (en) | 2016-11-23 |
Family
ID=57291573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620373681.0U Active CN205710909U (en) | 2016-04-27 | 2016-04-27 | Gaseous phase deposition stove electrical control gear |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205710909U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108062069A (en) * | 2018-01-25 | 2018-05-22 | 无锡盈芯半导体科技有限公司 | For the control system of molybdenum disulfide CVD equipment |
-
2016
- 2016-04-27 CN CN201620373681.0U patent/CN205710909U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108062069A (en) * | 2018-01-25 | 2018-05-22 | 无锡盈芯半导体科技有限公司 | For the control system of molybdenum disulfide CVD equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180518 Address after: 518132 the 2 floor and 3 floor of B7 building, East Jian Fu Yi Jing Industrial City, Guangtian New District, Guangming New District, Shenzhen, Guangdong. Patentee after: Shenzhen Ming Hua Hang Electric Technology Technology Co., Ltd. Address before: 518000 Baoan District Songgang street, Shenzhen, Guangdong, No. 2, an run road, affluent industrial area. Patentee before: Shenzhen Gold Stone Technology Co., Ltd |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180914 Address after: 523000 V, No. 5 Huaxia first ring road, Langxia village, Qiaotou town, Dongguan, Guangdong. Patentee after: Dongguan Zhi orange semiconductor material Co., Ltd. Address before: 518132 the 2 floor and 3 floor of B7 building, East Jian Fu Yi Jing Industrial City, Guangtian New District, Guangming New District, Shenzhen, Guangdong. Patentee before: Shenzhen Ming Hua Hang Electric Technology Technology Co., Ltd. |
|
| TR01 | Transfer of patent right |