A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device
Technical field
This utility model relates to a kind of liquid waste treating apparatus, uses fine vacuum low-temperature evaporation more particularly, it relates to a kind of
The electronics acid pickle electron-level phosphoric acid recycling and processing device of method.
Background technology
The acid pickle produced during electron trade, liquid crystal industry, plasma industry production, correct without obtaining
Process just discharge, environment will certainly be caused irreversible infringement;On the other hand, above-mentioned electronics acid pickle also contains
There are pernitric acid and acetic acid, the most all seeking a kind of technology for the recycling of this electronics acid pickle, making every effort to allow
Phosphoric acid concentration and purity in electronics acid pickle improve, and at utmost removal nitric acid and acetic acid are to reuse, and target is exactly real
Turning waste into wealth of existing electronics acid pickle.
Electronics acid pickle evaporating temperature at ambient pressure is higher, and corrosivity is very strong, and maintenance of equipment amount is big, the life-span is short, is phosphoric acid
Liquid waste processing operating cost and equipment regular maintenance main cause costly.Phosphoric acid,diluted concentration technology in technique mainly because of
During improving for phosphoric acid concentration, the elevation of boiling point is very big, adds that, containing nitric acid and acetic acid in this electronics acid pickle, volatility is high, corrosion
Property strong, oxidisability is big, so common concentration technology and equipment cannot meet this electronics acid pickle and concentrate the requirement of reuse at all.
Summary of the invention
1. utility model to solve the technical problem that
The purpose of this utility model is to overcome existing electronics acid pickle to process above shortcomings, it is provided that a kind of electronics
Acid pickle electron-level phosphoric acid recycling and processing device, uses the technical solution of the utility model, utilizes fine vacuum low-temperature evaporation to concentrate
Method realize the concentration of electron-level phosphoric acid, evaporating temperature is low, reduces the material corrosivity of equipment pipe, and due to work
Make temperature to reduce so that equipment has a lot of advantage and extensive probability in terms of choosing material, effectively reduces project investment;
Further, processing procedure all completes under negative pressure state, and sour gas leaks minimizing, improves operating environment;Meanwhile, this device is also
There is the plurality of advantages such as evaporation efficiency height, energy continuous and stable production, simple to operate, processing cost is low, environmental benefit is obvious.
2. technical scheme
For reaching above-mentioned purpose, the technical scheme that this utility model provides is:
A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, including evaporation and concentration unit, dilute
Acid recovery unit, negative-pressure vacuum unit and cooling water circulation unit, wherein:
Described evaporation and concentration unit includes preheater, vaporizer and separator, the shell side of described vaporizer and preheating
The shell side of device is connected, outer row or reuse after sequentially passing through the shell side of vaporizer and the shell side of preheater from the raw steam of boiler;Institute
The inlet of the preheater stated connects original fluid container by feed pump, and the liquid outlet of preheater connects the inlet of separator, described
The circulation fluid outlet of separator connected the inlet of vaporizer, the liquid outlet of vaporizer and the circulation of separator by circulating pump
Liquid import is connected, and the liquid outlet of separator is connected with the inlet of concentrated solution cooler by discharging pump, concentrated solution cooler
Discharging opening connects finished acid tank;
Described dilute acid recycle unit includes condenser, on-condensible gas condenser and diluted acid tank, the steaming of described separator
Vapor outlet is connected with the air inlet of condenser, and the fixed gas outlet of condenser is connected with the air inlet of on-condensible gas condenser, cold
The condensate outlet of condenser is connected with the inlet of diluted acid tank, and the gas outlet of diluted acid tank is connected with the air inlet of condenser, dilute
The liquid outlet of acid tank is connected with mouth spray and the diluted acid collecting tank of on-condensible gas condenser respectively by thin acid pump, on-condensible gas
The liquid outlet of condenser is connected with the inlet of diluted acid tank;
Described negative-pressure vacuum unit includes knockout drum and vacuum pump set, the gas of described on-condensible gas condenser
Outlet is connected with vacuum pump set by knockout drum;
Described cooling water circulation unit includes cooling tower and cooling water pump, and described cooling tower is by cooling water pump respectively
Formed cooling water circulation with the shell side of the shell side of condenser and concentrated solution cooler.
Further, it is additionally provided with online testing device or sampling between liquid outlet and the discharging pump of described separator
Mouthful.
Further, described vaporizer and preheater use politef high temperature impregnated graphite vaporizer.
Further, described separator uses steel lining tetrafluoro separator, and this separator has independent inlet
And observation port, it is used for observing and controlling feed rate.
Further, described vacuum pump set uses Roots's twin-stage Water-ring vacuum unit.
Further, described thin acid pump uses F46 fluoroplastics chemical centrifugal pump.
Further, described feed pump, circulating pump and discharging pump use clamping plate type fluorine alloy centrifugal pump.
Further, described diluted acid tank and the material of knockout drum are TRPP.
3. beneficial effect
The technical scheme using this utility model to provide, compared with existing known technology, has the advantages that
(1) a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, it utilizes single-action fine vacuum
The method that low-temperature evaporation concentrates realizes the concentration of electron-level phosphoric acid, and steam consumption is low, saves the energy, and evaporating temperature is low, right
The material corrosivity of equipment pipe reduces, and owing to operating temperature reduces so that equipment has a lot of favourable in terms of choosing material
Condition and extensive probability, effectively reduce project investment;Further, processing procedure all completes under negative pressure state, outside sour gas
Let out minimizing, improve operating environment;
(2) a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, the liquid outlet of its separator
And it is additionally provided with online testing device or sample tap between discharging pump, the phosphoric acid concentration of concentration can easily and effectively be detected, reach
Re-use after electron-level phosphoric acid concentration;
(3) a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, its vaporizer and preheater
Using politef high temperature impregnated graphite vaporizer, separator uses steel lining tetrafluoro separator, has work for acids medium
Make the advantages such as dependable performance, length in service life, simple and convenient operation and maintenance;
(4) a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, its thin acid pump uses F46 fluorine
Plastics chemical centrifugal pump, can work under negative pressure state continuously, it is ensured that device steady running and have longer service life;Enter
Material pump, circulating pump and discharging pump use clamping plate type fluorine alloy centrifugal pump, under negative pressure state, can make high concentration material or crystal
Material continuous discharge work;
(5) a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, its diluted acid tank and gas-liquid are divided
Material from tank is TRPP, can meet the requirement of corrosion resistance, the most both economical rationally, reduce equipment and become
This;
(6) a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, it also has evaporation efficiency
The plurality of advantages such as height, energy continuous and stable production, simple to operate, processing cost is low, environmental benefit is obvious.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model.
Label declaration in schematic diagram:
E201, vaporizer;E202, condenser;E203, on-condensible gas condenser;E204, concentrated solution cooler;E205, pre-
Hot device;V101, original fluid container;V201, diluted acid tank;V202, knockout drum;P201, feed pump;P202, circulating pump;P203, go out
Material pump;P204, thin acid pump;P205, vacuum pump set;P206, cooling water pump;S201, separator;C201, cooling tower.
Detailed description of the invention
For further appreciating that content of the present utility model, in conjunction with the accompanying drawings and embodiments this utility model is described in detail.
Embodiment
A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present embodiment, be mainly used in electronics, liquid crystal, etc. from
Son etc. industry produce containing nitric acid and the recycling of the acid pickle of acetic acid, contain in a kind of solution is several molten
The physical process that matter separates, its ultimate principle is by the aqueous solution containing solutes such as phosphoric acid, nitric acid and acetic acid, under vacuum conditions
Heating, makes the solute nitric acid of volatile in solution, acetic acid evaporate together with water, utilizes cooling water condensation, shape by condenser
Become mixed acid to return to workshop to use;Meanwhile, along with the volume of solution reduces, in solution, the concentration of the most volatilizable solute phosphoric acid increases
Add, form the finished acid of prescribed concentration.Specifically, shown in Fig. 1, this electronics acid pickle electron-level phosphoric acid recycling dress
Putting, it is mainly made up of, wherein evaporation and concentration unit, dilute acid recycle unit, negative-pressure vacuum unit and cooling water circulation unit etc.:
Evaporation and concentration unit includes preheater E205, vaporizer E201 and separator S201, the shell side of vaporizer E201 with
The shell side of preheater E205 is connected, and sequentially passes through shell side and the shell side of preheater E205 of vaporizer E201 from the raw steam of boiler
Rear outer row or reuse, specifically can be connected to trench by the steam condensate (SC) in the shell side of preheater E205;Preheater E205 enters
Liquid mouth connects the inlet of the liquid outlet connection separator S201 of original fluid container V101, preheater E205 by feed pump P201, point
From device S201 circulation fluid export by circulating pump P202 connect vaporizer E201 inlet, the liquid outlet of vaporizer E201 with
The circulation fluid import of separator S201 is connected, and the liquid outlet of separator S201 is by discharging pump P203 and concentrated solution cooler E204
Inlet be connected, the discharging opening of concentrated solution cooler E204 connects finished acid tank;Effectively detect concentration for convenience
Phosphoric acid concentration, is additionally provided with online testing device or sample tap, at phosphorus between the liquid outlet and discharging pump P203 of separator S201
Acid concentration re-uses after reaching electron level.Above-mentioned vaporizer E201 is evaporator with external heating unit, takes in technology arrangement
The layout straggly that on vaporizer E201 and separator S201, relative superiority or inferiority is low, acid pickle is at gravitational difference and the dual function of thermal differential and is
Under system vacuum condition, the material in vaporizer E201 because of heating on alter, that relatively cool material in separator S201 declines is strong
Strong circulation, the speed of Matter Transfer, up to more than 1.5m/s, under this high speed vigorous exercise state, sets in making normally to produce
Received shipment row is more stable.
Dilute acid recycle unit includes condenser E202, on-condensible gas condenser E203 and diluted acid tank V201, separator S201
Steam (vapor) outlet be connected with the air inlet of condenser E202, the outlet of the fixed gas of condenser E202 and on-condensible gas condenser E203
Air inlet be connected, the condensate outlet of condenser E202 is connected with the inlet of diluted acid tank V201, the gas of diluted acid tank V201
Outlet is connected with the air inlet of condenser E202, and the liquid outlet of diluted acid tank V201 is cold with on-condensible gas respectively by thin acid pump P204
The mouth spray of condenser E203 and diluted acid collecting tank are connected, and the liquid outlet of on-condensible gas condenser E203 enters with diluted acid tank V201's
Liquid mouth is connected.
Negative-pressure vacuum unit includes knockout drum V202 and vacuum pump set P205, the gas of on-condensible gas condenser E203
Outlet is connected with vacuum pump set P205 by knockout drum V202.
Cooling water circulation unit includes cooling tower C201 and cooling water pump P206, and cooling tower C201 passes through cooling water pump P206
Shell side with the shell side of condenser E202 and concentrated solution cooler E204 is formed cooling water circulation respectively;Specifically, condenser
For connecting the circulating cooling water inlet of cooling tower C201 below the box hat of E202 and concentrated solution cooler E204, it is arranged above connecting cold
But the circulating cooling water out of tower C201.
A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present embodiment, utilizes single-action fine vacuum low-temperature evaporation
The method concentrated realizes the concentration of electron-level phosphoric acid, and steam consumption is low, saves the energy, and evaporating temperature is low, to equipment pipe
Material corrosivity reduce, and due to negative-pressure vacuum state be evaporated concentrate, operating temperature reduce so that equipment is being chosen
Material aspect has a lot of advantage and extensive probability, effectively reduces project investment;Further, processing procedure is all in negative pressure state
Under complete, sour gas leaks minimizing, improves operating environment.
A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present embodiment, vaporizer E201 and preheater E205
Use politef high temperature impregnated graphite vaporizer;Separator S201 uses steel lining tetrafluoro separator, on this separator S201
There is independent inlet and observation port, be used for observing and controlling feed rate.Vaporizer E201 and separator S201 is this reality
Execute the equipment of most critical in the electron-level phosphoric acid recycling and processing device of example, be that the feature according to external circulation evaporation concentration operation is special
Well-designed product, has feature high temperature resistant, corrosion resistant.The evaporation element of vaporizer E201 and separator S201 composition closes
Reason arranged, shortens the total length of device, the most convenient to operate, decreases again floor space.Vaporizer in the present embodiment
E201 and separator S201 has extremely strong corrosion resistance for strong acid mediums such as hydrochloric acid, phosphoric acid, Fluohydric acid., acetic acid, nitric acid
Can be with good heat conductivility, reliable working performance, length in service life, simple and convenient operation and maintenance.Contain in electronics acid pickle
Nitric acid and acetic acid, it is contemplated that the safety and reliability in actual production, reduce the evaporating temperature of waste liquid, true in the present embodiment
Empty unit P205 uses Roots's twin-stage Water-ring vacuum unit, it is ensured that device low-temperature evaporation, also ensure that the stable of vacuum and
Equipment is substantially without maintenance.Additionally.Thin acid pump P204 uses the F46 fluoroplastics chemical industry that favorable sealing property, decay resistance are extremely strong
Centrifugal pump, can work under negative pressure state continuously, it is ensured that device steady running and have longer service life.Feed pump
P201, circulating pump P202 and discharging pump P203 use high temperature resistant, corrosion-resistant, the No leakage clamping plate type fluorine of Dupont PFA material
Alloy centrifugal pump, under negative pressure state, can make high concentration material or the work of crystallized stock continuous discharge;And use the rich lattice of Germany
The SiC Double End integrated mechanical sealing that graceful technology is special, it is ensured that the safe operation of pump and longer time between overhauls(TBO).Diluted acid tank
The material of V201 and knockout drum V202 is TRPP (FRPP), can meet the requirement of corrosion resistance, again than
Less expensive is reasonable, reduces equipment cost.
A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present embodiment, is according to phosphoric acid, nitric acid and acetic acid
Physical characteristic and phosphoric acid, nitric acid and the acetic acid rule of dissolubility in water, use steam indirectly heat, negative pressure evaporation concentrate work
Skill, the gas condensed device condensation that evaporation produces becomes mixed acid return workshop and reuses;Waste liquid makes through evaporation and concentration
Phosphorus acid content reaches electron level concentration (85%);Its technological process is as follows:
1), material flow:
The phosphate discharge liquid of room temperature by feed pump P201 by the stock solution in original fluid container V101 through preheater E205, preheater
The pre-heat death theory of steam condensate (SC) of the waste water utilization vaporizer E201 in E205 laggard enter separator S201, after circulating and evaporating concentrates
Reach the concentrated solution of discharging standard (phosphorus acid content >=85%), then squeeze into finished acid tank by discharging pump P203;Passage in transit
Concentrated solution is cooled down by concentrated solution cooler E204.
2) vapours and condensed water flow process, are added:
Raw steam from boiler enters vaporizer E201 shell side, through drain valve, preheater E205 shell after heat exchange condensation
Arrange outside after journey heat energy utilization or return in boiler;
The indirect steam of separator S201 enters condenser E202, enters diluted acid tank V201 after condensation;Pass through thin acid pump
P204 gets to waste water processing center;Part diluted acid enters on-condensible gas condenser E203 and cools down on-condensible gas, cooling
After diluted acid return to diluted acid tank V201.
3), vacuum system flow process:
Vacuum system is by condenser E202, on-condensible gas condenser E203, vacuum pump set P205, vapor-liquid separation tank V202 group
Become, the fixed gas in system is extracted out, maintain vapo(u)rization system vacuum, it is achieved negative pressure low-temperature evaporation.
A kind of electronics acid pickle electron-level phosphoric acid recycling and processing device of the present utility model, utilizes fine vacuum low-temperature evaporation dense
The method of contracting realizes the concentration of electron-level phosphoric acid, and evaporating temperature is low, reduces the material corrosivity of equipment pipe, and due to
Operating temperature reduces so that equipment has a lot of advantage and extensive probability in terms of choosing material, effectively reduces project and throws
Money;Further, processing procedure all completes under negative pressure state, and sour gas leaks minimizing, improves operating environment;Meanwhile, this dress
Put and also there is the plurality of advantages such as evaporation efficiency height, energy continuous and stable production, simple to operate, processing cost is low, environmental benefit is obvious.
Below being schematically described this utility model and embodiment thereof, this description does not has restricted, accompanying drawing
Shown in be also one of embodiment of the present utility model, actual structure is not limited thereto.So, if this area
Those of ordinary skill enlightened by it, creating in the case of objective without departing from this utility model, without creatively designing
The frame mode similar to this technical scheme and embodiment, all should belong to protection domain of the present utility model.