CN205620672U - Plate rack on litho machine - Google Patents
Plate rack on litho machine Download PDFInfo
- Publication number
- CN205620672U CN205620672U CN201620426620.6U CN201620426620U CN205620672U CN 205620672 U CN205620672 U CN 205620672U CN 201620426620 U CN201620426620 U CN 201620426620U CN 205620672 U CN205620672 U CN 205620672U
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- plate
- litho machine
- guide rail
- connecting plate
- slide block
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Abstract
The utility model relates to a plate rack on litho machine for bear the mask version, include: bottom plate, at least two set up in the guide rail of bottom plate top surface parallelly, arrange in the slidable slider on the guide rail, removable ground lock solid in the connecting plate of slider top surface, with removable ground of connecting plate fixed connection's former material load -bearing platform and establish the dog that is used for injecing the stroke scope that the connecting plate removed along with the slider in the one end department of leaning on the guide rail, plate rack on litho machine is including at least two connecting plates that supply the alternative to use, and the width diverse along the guide rail length direction on of each connecting plate. The utility model discloses plate rack on litho machine only needs to change in a flexible way the mask version product that wherein this subassembly of connecting plate can be applicable to different specifications, and through setting up many sets of connecting plates, the processing that can let a litho machine can be applicable to the mask version product of multiple specification can effectively reduce equipment cost, and the dismouting adjustment is nimble convenient, can effectively promote machining efficiency.
Description
Technical field
This utility model relates to plate rack on litho machine, particularly relates to plate rack on a kind of litho machine exposed on a large scale.
Background technology
In the manufacturing process of mask, need that mask is delivered to litho machine and process.Existing litho machine the most all can be configured with the upper plate rack of correspondence so that the loading and unloading of mask.Owing to the size of mask plate can change along with the difference of product specification, existing litho machine generally the most only applies to the product of certain specific standard, it main reason is that existing upper plate rack size is relatively fixed, the use demand of the mask plate of plurality of specifications cannot be met, if the product for each specification all prepares the upper plate rack of corresponding size, cost is of a relatively high, and in the whole series that change the outfit, plate rack is wasted time and energy, productivity ratio is low, is also easy to cause plate rack impaired.
Utility model content
Technical problem to be solved in the utility model is, it is provided that plate rack on a kind of litho machine, can be adjusted adapting to the process demand of many specifications mask plate quickly.
For solving above-mentioned technical problem, this utility model adopts the following technical scheme that plate rack on a kind of litho machine, for carrying mask, including: base plate, article at least two, it is arranged at the guide rail of plate top surface abreast, it is slidably positioned at the slide block on described guide rail, detachably it is locked in the connecting plate of slide block end face, detachably fix the former material bearing platform being connected with described connecting plate and be located at the end by guide rail for limiting the block of the stroke range that connecting plate moves with slide block, on described litho machine, plate rack includes at least two pieces for the connecting plate selecting, and the width along rail length direction of each piece of connecting plate is different.
Further, described plate top surface is provided with the groove that quantity is identical with guide rail quantity and is parallel to each other, and described guide rail one_to_one corresponding is arranged in the groove of correspondence, and the end face of guide rail is higher than the end face of described base plate.
Further, described slider bottom is provided with the chute matched with guide rail, and described slide block is sleeved on guide rail by means of described slide.
Further, described connecting plate is fixed on described slide block by means of screw.
Further, described former material bearing platform is fixed to the side of connecting plate by means of screw.
Further, the bottom of former material bearing platform arranges the draw-in groove matched with slide block, and described draw-in groove correspondence is fastened on described slide block.
Further, described base plate is provided with several for the carrier block carrying mask.
Further, described contiguous block is two pieces, and the width along rail length direction of two pieces of contiguous blocks is respectively 45mm, 95mm.
After using technique scheme, this utility model at least has the advantages that on this utility model litho machine that plate rack only need to change this assembly of connecting plate therein neatly and is i.e. applicable to the mask plate product of different size, overlap connecting plate by arranging more, a litho machine can be allowed to can be suitably used for the processed of mask plate product of plurality of specifications, can effectively reduce equipment cost, and dismounting adjusts flexible, can effectively promote working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is the perspective view of plate rack on this utility model litho machine.
Fig. 2 is the decomposing schematic representation of plate rack on this utility model litho machine.
Detailed description of the invention
It should be noted that in the case of not conflicting, the embodiment in the application and the feature in embodiment can be combined with each other, and are described in further detail the application with specific embodiment below in conjunction with the accompanying drawings.
As shown in Figures 1 and 2, this utility model provides plate rack on a kind of litho machine, for carrying mask, it is arranged at the guide rail 13 of base plate 11 end face, the slide block 14 being slidably positioned on described guide rail 13 abreast including: base plate 11, at least two, is detachably locked in the connecting plate 15 of slide block 14 end face and the described connecting plate 15 detachably fixing former material bearing platform 16 being connected and is located at the end by guide rail 13 for limiting the block 17 of the stroke range that connecting plate 15 moves with slide block 14.
On this utility model litho machine plate rack include at least two pieces for select one connecting plate 15, and the width along guide rail 13 length direction of each piece of connecting plate 15 is different.In one embodiment, described contiguous block is two pieces, the width along rail length direction of two pieces of contiguous blocks is respectively 45mm, 95mm, in the case of the physical dimension and invariant position of other assemblies, the connecting plate of above-mentioned two width can product to the product and 800mm*800mm that should apply to 800mm*960mm respectively.
For convenience of dismounting connecting plate 15, described connecting plate 15 is designed as being fixed on described slide block 14 by means of screw.Described former material bearing platform 16 people are fixed to the side of connecting plate 15 by means of screw.It is thus possible to conveniently by tightening or back out screw to realize the replacing of connecting plate 15.
Slide along guide rail 13 for convenience of slide block 14, bottom described slide block 14, be provided with the chute 141 matched with guide rail 13, described slide block 14 by means of described chute 141 slip cap together on guide rail 13.
And be to avoid the slide block 14 interference to former material bearing platform 16 when assembling, the draw-in groove 161 matched with slide block 14 is set in the bottom of former material bearing platform 16, described draw-in groove 161 correspondence is fastened on described slide block 14.
Described guide rail 13 is installed for convenience on base plate 11 and carrying mask plate will not be interfered by guide rail 13, described base plate 11 end face is provided with the groove 12 that quantity is identical with guide rail 13 quantity and is parallel to each other, described guide rail 13 one_to_one corresponding is arranged in the groove 12 of correspondence, and the end face of guide rail 13 is higher than the end face of described base plate 11.It addition, be additionally provided with on described base plate 11 several for the carrier block 18 carrying mask, can preferably carry support mask.
On this utility model litho machine, plate rack only need to be changed this assembly of connecting plate 15 therein neatly and i.e. be applicable to the mask plate product of different size, by arranging many set connecting plates 15, a litho machine can be allowed to can be suitably used for the processed of mask plate product of plurality of specifications, can effectively reduce equipment cost, and dismounting adjusts flexible, can effectively promote working (machining) efficiency.
Embodiment the most of the present utility model, for the ordinary skill in the art, being appreciated that in the case of without departing from principle of the present utility model and spirit and these embodiments can carry out multiple change, revise, replace and modification, scope of the present utility model is limited by claims and equivalency range thereof.
Claims (8)
1. plate rack on a litho machine, for carrying mask, it is characterized in that, on described litho machine, plate rack includes: base plate, article at least two, it is arranged at the guide rail of plate top surface abreast, it is slidably positioned at the slide block on described guide rail, detachably it is locked in the connecting plate of slide block end face, detachably fix the former material bearing platform being connected with described connecting plate and be located at the end by guide rail for limiting the block of the stroke range that connecting plate moves with slide block, on described litho machine, plate rack includes at least two pieces for the connecting plate selecting, and the width along rail length direction of each piece of connecting plate is different.
2. plate rack on litho machine as claimed in claim 1, it is characterised in that described plate top surface is provided with the groove that quantity is identical with guide rail quantity and is parallel to each other, and described guide rail one_to_one corresponding is arranged in the groove of correspondence, and the end face of guide rail is higher than the end face of described base plate.
3. plate rack on litho machine as claimed in claim 1, it is characterised in that described slider bottom is provided with the chute matched with guide rail, and described slide block is sleeved on guide rail by means of described slide.
4. plate rack on litho machine as claimed in claim 1, it is characterised in that described connecting plate is fixed on described slide block by means of screw.
5. plate rack on litho machine as claimed in claim 1, it is characterised in that described former material bearing platform is fixed to the side of connecting plate by means of screw.
6. plate rack on the litho machine as described in claim 1 or 5, it is characterised in that the bottom of former material bearing platform arranges the draw-in groove matched with slide block, and described draw-in groove correspondence is fastened on described slide block.
7. plate rack on litho machine as claimed in claim 1, it is characterised in that be provided with several on described base plate for the carrier block carrying mask.
8. plate rack on litho machine as claimed in claim 1, it is characterised in that described contiguous block is two pieces, and the width along rail length direction of two pieces of contiguous blocks is respectively 45mm, 95mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620426620.6U CN205620672U (en) | 2016-05-12 | 2016-05-12 | Plate rack on litho machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620426620.6U CN205620672U (en) | 2016-05-12 | 2016-05-12 | Plate rack on litho machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205620672U true CN205620672U (en) | 2016-10-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620426620.6U Active CN205620672U (en) | 2016-05-12 | 2016-05-12 | Plate rack on litho machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205620672U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111965953A (en) * | 2020-09-01 | 2020-11-20 | 江苏九迪激光装备科技有限公司 | Upper plate frame of photoetching machine |
| CN117826546A (en) * | 2024-02-28 | 2024-04-05 | 无锡迪思微电子有限公司 | Mask plate bearing mechanism and mask plate measuring machine |
-
2016
- 2016-05-12 CN CN201620426620.6U patent/CN205620672U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111965953A (en) * | 2020-09-01 | 2020-11-20 | 江苏九迪激光装备科技有限公司 | Upper plate frame of photoetching machine |
| CN117826546A (en) * | 2024-02-28 | 2024-04-05 | 无锡迪思微电子有限公司 | Mask plate bearing mechanism and mask plate measuring machine |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |