CN2055944U - Optical precision translation device - Google Patents
Optical precision translation device Download PDFInfo
- Publication number
- CN2055944U CN2055944U CN 89213057 CN89213057U CN2055944U CN 2055944 U CN2055944 U CN 2055944U CN 89213057 CN89213057 CN 89213057 CN 89213057 U CN89213057 U CN 89213057U CN 2055944 U CN2055944 U CN 2055944U
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- Prior art keywords
- displacement
- translation
- balance
- driver
- optics
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 230000003287 optical effect Effects 0.000 title claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 210000000056 organ Anatomy 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000008901 benefit Effects 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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Abstract
The utility model relates to an accurate translation ware of optics, can be used for in the optical instrument who takes closed-loop control actually, promote optical element or mechanical element to make micron order and submicron order accurate translation. The displacement balance adjusting control circuit is adopted, and the deformation of the three laminated micro-displacement driving elements can be changed by adjusting the external voltage on the driver, so that the displacement of the three laminated micro-displacement driving elements has high-precision balance and required translation range. The translation precision is high, the inclination error is less than 0.1', the translation range is 0.01 mu m to +/-20 mu m, and the response speed is less than 1 ms.
Description
The utility model is a kind of optical Precision Translational Device, mainly be applicable in the optical instrument that adopts closed-loop control, promote optical element or mechanical organ and do the accurate translation of micron order and submicron order, for example: make Fabry-Perot Lip river interferometer, need to produce the etalon of accurate translation in laser cavity interior focusing distance and any interferometer and the optical instrument.It comprises Piezoelectric Ceramic element and two optical sheets with holes.
It is reported that the domestic people of having once developed optical Precision Translational Device in the laboratory at present, the piezoelectric ceramics that they attempt to adopt a tubulose drives the optical sheet generation and moves, but exist a lot of problem and shortage as driving element under impressed voltage:
1. single piezoelectric ceramic tube under impressed voltage, when driving optical sheet and moving, the optical sheet run-off the straight, its droop error does not reach the purpose of accurate translation up to classification.
2. the piezoelectric ceramic tube response speed is slow, does not reach Millisecond, is not suitable for closed-loop control system.
3. the non-linear hysteresis of piezoelectric ceramic tube is big, is ± 20%, apply external voltage after, though bigger deflection is arranged, can not make zero.
4. owing to device translation instability, make closed-loop control system produce vibration when working, can't operate as normal.
This series products of present domestic nothing is sold, and does not also meet relevant documents and materials report.
The inventor once proposed 89212086, No. 2 patented claims, it is the stacked micro-displacement driver that adopts piezoelectric ceramic piece to do, accurate translation can reach accurate translation, but weak point is this single driver, in the time that will be realized, still want run-off the straight, distortion, the precision of translation is low, and practical application effect is not very desirable.
The purpose of this utility model be to avoid above-mentioned deficiency of the prior art and a kind of translation precision height is provided, range of translation is wide, response speed is fast, can be applied to the optical Precision Translational Device of closed-loop control system.
The purpose of this utility model can reach by following measure: adopt three stacked micro-displacement drivers 1 to make driving element, and uniform by equilateral triangle, be bonded between optics upper substrate 2 and the optics infrabasal plate 3, adopt one can realize that the single supply multichannel is controlled, the while can be by regulating the impressed voltage on the driver 1, change the deflection of driver 1, thereby the displacement balance of realizing its displacement fine balance and needed range of translation is regulated control circuit.
The purpose of this utility model can also reach by following measure: optics infrabasal plate 3 can be fixed on the instrument, need to produce accurate translation optical element (as lens, catoptron all can) or mechanical organ, sticking
The purpose of this utility model can also reach by following measure: optics infrabasal plate 3 can be fixed on the instrument, need to produce accurate translation optical element (as lens, catoptron all can) or mechanical organ, be bonded on the optical substrate 2.Each driver 1 all is parallel with a displacement balance resistance R, and a displacement balance variable resistor R again connects
*, and then be connected in parallel on direct current be output as ± the control power supply of 400V～600V on.The resistance of displacement balance resistance R is generally below the 2M Ω, displacement balance variable resistor R
*Resistance be generally 1000K Ω～5000K Ω.
Description of drawings: Fig. 1: the utility model embodiment optical Precision Translational Device.
Fig. 2: the utility model embodiment circuit diagram.
The utility model is described in further detail below in conjunction with embodiment:
As Fig. 1: the stacked micro-displacement driver element of selecting three deflection basically identicals for use, and uniform by equilateral triangle, be bonded between upper and lower two optical substrates with holes 2 and 3, according to 3 principles of determining a plane, can make the translation precision of three drivers obtain certain guarantee.
As Fig. 2: because the deflection of each driver 1 there is no fear of in full accord, adopt an external voltage that can impose on driver 1 by adjusting, change the deflection of driver 1, thereby can realize three driver displacement fine balances, guarantee that accurate translation device has the displacement balance of sufficiently high translation precision to regulate control circuit, each driver 1 all is parallel with a displacement balance resistance R, is in series with a displacement balance variable resistor R again
*, and then be connected in parallel on simultaneously the direct current that can realize single supply multichannel control be output as ± the control power supply of 400V～600V on.After energized, can regulate resistance R
*Resistance regulate impressed voltage on the driver 1, thereby change the deflection of driver 1, have high-precision balance and desired range of translation with the displacement that reaches three drivers.Droop error is less than 0.1 ", displacement resolution is 0.01 μ m, and range of translation can reach 0.01 μ m～± 20 μ m, and response speed can be actually used in the closed-loop control system less than 1ms.
The utility model is compared prior art and is had following advantage:
1. optical Precision Translational Device is simple and reasonable for structure, economical, uses range of choice wide, and adjustable optical elements (or mechanical organ) is done the accurate translation of micron order or submicron order.
2. precision height, heeling error is less than 0.1 ", displacement resolution 0.01 μ m.
3. the driving element linearity is good, lags behind less than ± 4%, and the displacement scope is big, is ± 0.01 μ m～± 20 μ m.
4. working stability, the response speed height, (＜1ms), be applicable to than the ring control system.
5. broken foreign country to blockade and the embargo of China, also saved foreign exchange simultaneously, bigger social benefit has been arranged with regard to this technology, product.
Claims (4)
1, a kind of optical Precision Translational Device that comprises Piezoelectric Ceramic part and two optical substrates with holes, it is characterized in that adopting three stacked micro-displacement drivers 1 to make driving element, and distribute, be bonded between optics upper substrate 2 and the optics infrabasal plate 3 by equilateral triangle, adopt one can realize single supply multichannel control and can be by regulating the impressed voltage on the driver 1, thereby the deflection that changes driver 1 is realized the displacement balance that its displacement has high-precision balance and a desired range of translation and is regulated control circuit.
2, translation device as claimed in claim 1 is characterized in that optics infrabasal plate 3 can be fixed on the instrument, need to produce accurate translation optical element (as lens, catoptron all can) or mechanical organ, can be bonded on the optics upper substrate 2.
3, translation device as claimed in claim 1 is characterized in that each driver 1 all can displacement balance resistance R in parallel, and a displacement balance variable resistor R again connects
*, and then be connected in parallel on direct current be output as ± the control power supply of 400V～600V on.
4,, it is characterized in that the resistance of displacement resistance R is generally below the 2M Ω, displacement balance variable resistor R as claim 1 or 3 described translation devices
*Resistance be generally below the 5K Ω.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89213057 CN2055944U (en) | 1989-07-11 | 1989-07-11 | Optical precision translation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89213057 CN2055944U (en) | 1989-07-11 | 1989-07-11 | Optical precision translation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2055944U true CN2055944U (en) | 1990-04-11 |
Family
ID=4869110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 89213057 Expired - Lifetime CN2055944U (en) | 1989-07-11 | 1989-07-11 | Optical precision translation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2055944U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102390045A (en) * | 2011-07-01 | 2012-03-28 | 南京航空航天大学 | Grinding tool capable of actively compensating surface shape abrasion errors and compensating method thereof |
| CN102121120B (en) * | 2010-01-11 | 2015-07-22 | 贵阳铝镁设计研究院有限公司 | Electrolytic cell cradle frame in aluminium electrolysis |
-
1989
- 1989-07-11 CN CN 89213057 patent/CN2055944U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102121120B (en) * | 2010-01-11 | 2015-07-22 | 贵阳铝镁设计研究院有限公司 | Electrolytic cell cradle frame in aluminium electrolysis |
| CN102390045A (en) * | 2011-07-01 | 2012-03-28 | 南京航空航天大学 | Grinding tool capable of actively compensating surface shape abrasion errors and compensating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
| RN01 | Renewal of patent term | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |