CN205566676U - Rotatory contact heating device - Google Patents
Rotatory contact heating device Download PDFInfo
- Publication number
- CN205566676U CN205566676U CN201620215893.6U CN201620215893U CN205566676U CN 205566676 U CN205566676 U CN 205566676U CN 201620215893 U CN201620215893 U CN 201620215893U CN 205566676 U CN205566676 U CN 205566676U
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- hot plate
- even hot
- heater
- heater strip
- contact type
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Abstract
The utility model discloses a rotatory contact heating device, including power and heating circuit and heater strip, the heater strip is connected with two copper conductors, and a wire is connected at the positive pole, and other one is connected to the negative pole, wherein, heating circuit is connected with the motor, heater strip upper end sets up first even heat dish, sets up the even heat dish of second at the lower extreme of heater strip, first even heat dish is cheng integrative through fixed connection with the even heat dish of second, the even heat dish of second links together with the heating main part. Compared with the prior art, this device is through quill shaft internal connection wire, and the mode of external connection brush makes heating and rotary combined to together, can obtain higher temperature.
Description
Technical field
This utility model relates to Machining Technology field, is specially a kind of rotary contact type heater.
Background technology
Temperature is one of technique for vacuum coating underlying parameter, and the height of temperature and stability directly affect the quality of film layer.
Heat transfer has three kinds of modes, and one is conduction: the heat that directly object of the different temperatures of contact is carried out by contact surface transmits；Two is convection current: the flowing by means of certain fluid is conducted heat, and needs fluid just can carry out, and does not has fluid so the most this mode in vacuum；Three is radiation: heat transmits by the way of radiation, and the most any place has, and this mode is relevant with the temperature of thermal source, and the heat of temperature more high pass radiation transmission is the most, and in vacuum environment, main thermaltransmission mode radiates exactly.
Present filming equipment is nearly all that armouring Resistant heating part maintains static, and relies on heat radiation heating substrate, and for homogeneous heating, substrate can rotate.But the radiation efficiency in vacuum is relatively low, under this mode of heating, the temperature of substrate is difficult to more than 400 DEG C.In order to obtain higher temperature, this programme proposes the method for contact heating, heats substrate by conduction of heat, in order to obtain 800 DEG C or higher temperature.
To this end, for above-mentioned technical problem, the utility model proposes a kind of rotary contact type heater, practical, solve above-mentioned technical problem to a certain extent.
Utility model content
The purpose of this utility model is to provide a kind of rotary contact type heater, including power supply and heater circuit and heater strip, heater strip connects two copper conductors, a piece wire is connected to positive pole, other one is connected to negative pole, it is characterized in that: described heater circuit connects motor, described heater strip upper end arranges the first even hot plate, second even hot plate is set in the lower end of heater strip, described first even hot plate and the second even hot plate are by being fixedly connected into one, and described second even hot plate links together with Heating body.
Preferably, described heater strip is double-deck plate-like.
Preferably, described first even hot plate and the second even hot plate are bolted.
A kind of rotary contact type heater, wherein, the first even hot plate be provided above add thermal shield.
Preferably, in the both sides of the first even hot plate and the second even hot plate, setting adds thermal shield.
Preferably, adding thermal shield described in is five-layer structure.
Preferably, being provided with double-deck brush in the outside of positive pole and cathode traces, described first brush is connected with negative pole, and described second brush is connected with positive pole.
Accompanying drawing explanation
Fig. 1 is rotatable heater sectional view；
Fig. 2 is the sectional view of double-deck brush；
Fig. 3 is Heating body axonometric chart；
Fig. 4 is Heating body sectional view.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is clearly and completely described, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole embodiments.Based on the embodiment in this utility model, the every other embodiment that those of ordinary skill in the art are obtained under not making creative work premise, broadly fall into the scope of this utility model protection.
A kind of rotary contact type heater, including power supply and heater circuit and heater strip, heater strip 28 connects two copper conductors 22, a piece wire is connected to positive terminal 16, other one is connected to negative terminal 30, wherein, described heater circuit connects motor, described heater strip 28 upper end arranges the first even hot plate 27, second even hot plate 29 is set in the lower end of heater strip 28, described first even hot plate 27 and the second even hot plate 29 are by being fixedly connected into one, and described second even hot plate 29 links together with Heating body 6.
Preferably, described heater strip 28 is double-deck plate-like.
Preferably, described first even hot plate 27 and the second even hot plate 29 are bolted.
A kind of rotary contact type heater, wherein, the first even hot plate 27 be provided above add thermal shield 23.
Preferably, in the both sides of the first even hot plate 27 and the second even hot plate 29, setting adds thermal shield 23.
Preferably, thermal shield 23 is added described in for five-layer structure.
Preferably, being provided with double-deck brush in the outside of positive terminal 16 and negative terminal 30, described first brush 2 is connected with negative pole terminal 30, and described second brush 3 is connected with positive terminal 16.
Two conducting slip rings 14 are enclosed within insulating sleeve 13 outer wall, and between two slip rings, put into dead ring 15, then connecting tube 17 is put into insulating sleeve 13 internal, and separate conducting slip ring 14 and connecting tube 17 with dead ring 15.Also insulation board is had, by these measures, it can be ensured that rotating shaft 11 and to add heat shield assembly not charged with cavity between brush 3 and flange 4.
As it is shown on figure 3, heater strip 28 uses Fe-Cr-Al wire, Fe-Cr-Al wire has the advantages that resistivity is high, temperature-coefficient of electrical resistance is little, use temperature is high.Heater strip 28 is processed into double-deck plate-like, is placed between the first even hot plate 27 and the second even hot plate 29, and with bolt fixing after be integrally placed in ceramics seat 25.By pottery bolt 21 through heating mounting flange 20, add thermal shield 23 and ceramics seat 25, be finally fixed in the first even hot plate 27.Second even hot plate 29 of lower section is threaded hole, can be fixed in the second even hot plate 29 by substrate with bolt.Owing to heating-up temperature is 800 DEG C, the thermal shield 23 that adds of top have chosen 5 layers, has pad spaced apart between layers.The shielding of side, also have chosen 5 layers.
In fig. 2, the terminals stretched out heater strip 28 both sides are connected with two copper conductors 22 respectively, copper conductor 22 is outside is cased with ceramic bowl pearl, and two copper conductors 22 are passed the quill shaft 26 above Heating body 6, through the through hole at flange 4 center together with quill shaft 26, then it is connected with two binding posts 16 in Fig. 3, at link position circular hole in the diagram.
After completing the assembling of above step, as depicted in figs. 1 and 2, the connecting tube 17 in double-deck slip ring assembly 2 is fixed with rotating shaft 11 screw mandrel 12 putting in inside cavity, then with bolt, flange 4 is fastened on fixing bar.At this moment, side shield assembly 5, flange 4 and brush assembly of electric 3 maintain static；Heating body 6, brush 2 and rotating shaft 11 are connected together, when rotating shaft 11 rotates under the driving of external motor, Heating body 6 can be with synchronous axial system together with substrate, owing to the first brush 2 contacts with the second brush 3, when, after external heat electric power starting, the heater strip 28 in Heating body 6 just can normally work.Owing to being the heat exchange pattern that contacts with even hot plate of substrate, the efficiency of heating surface of this programme is higher than traditional heat radiation, it is thus achieved that temperature the highest.
It is obvious to a person skilled in the art that this utility model is not limited to the details of above-mentioned one exemplary embodiment, and in the case of without departing substantially from spirit or essential attributes of the present utility model, it is possible to realize this utility model in other specific forms.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, scope of the present utility model is limited by claims rather than described above, it is intended that all changes fallen in the implication of equivalency and scope of claim included in this utility model.Should not be considered as limiting involved claim by any reference in claim.
In addition, it is to be understood that, although this specification is been described by according to embodiment, but the most each embodiment only comprises an independent technical scheme, this narrating mode of description is only for clarity sake, description should can also be formed, through appropriately combined, other embodiments that it will be appreciated by those skilled in the art that as an entirety, the technical scheme in each embodiment by those skilled in the art.
Claims (7)
1. a rotary contact type heater, including power supply and heater circuit and heater strip, heater strip connects has two copper to lead
Line, a wire is connected to positive pole, and other one is connected to negative pole, it is characterised in that: described heater circuit connects motor,
Described heater strip upper end arranges the first even hot plate, arranges the second even hot plate, described first even hot plate and in the lower end of heater strip
Two even hot plate are by being fixedly connected into one, and described second even hot plate links together with Heating body.
A kind of rotary contact type heater the most according to claim 1, it is characterised in that heater strip is dual layer discs
Shape.
A kind of rotary contact type heater the most according to claim 1, it is characterised in that the first even hot plate and the
Two even hot plate are bolted.
A kind of rotary contact type heater the most according to claim 1, it is characterised in that in the first even hot plate
It is provided above adding thermal shield.
A kind of rotary contact type heater the most according to claim 1, it is characterised in that in the first even hot plate and
The both sides of the second even hot plate arrange and add thermal shield.
6. according to a kind of rotary contact type heater described in claim 4-5 any one, it is characterised in that described in add
Thermal shield is five-layer structure.
A kind of rotary contact type heater the most according to claim 1, it is characterised in that at positive pole and negative electricity
The outside on road is provided with double-deck brush, and described first brush is connected with negative pole, and described second brush is connected with positive pole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620215893.6U CN205566676U (en) | 2016-03-21 | 2016-03-21 | Rotatory contact heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620215893.6U CN205566676U (en) | 2016-03-21 | 2016-03-21 | Rotatory contact heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205566676U true CN205566676U (en) | 2016-09-07 |
Family
ID=56815020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620215893.6U Active CN205566676U (en) | 2016-03-21 | 2016-03-21 | Rotatory contact heating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205566676U (en) |
-
2016
- 2016-03-21 CN CN201620215893.6U patent/CN205566676U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |