CN205556845U - A end cover for single crystal growing furnace - Google Patents
A end cover for single crystal growing furnace Download PDFInfo
- Publication number
- CN205556845U CN205556845U CN201520789627.XU CN201520789627U CN205556845U CN 205556845 U CN205556845 U CN 205556845U CN 201520789627 U CN201520789627 U CN 201520789627U CN 205556845 U CN205556845 U CN 205556845U
- Authority
- CN
- China
- Prior art keywords
- end cover
- single crystal
- crystal growing
- growing furnace
- cover body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 31
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 238000007789 sealing Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 230000006870 function Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000001914 calming effect Effects 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to an end cover for single crystal growing furnace, including end cover main part and observation window, the end cover main part in be provided with seal chamber, the observation window install the center department in the end cover main part, the bottom of the end cover main part of observation window both sides is provided with a searchlight respectively, the bottom of end cover main part is provided with and overflows the passageway, overflow passageway and seal chamber be linked together, overflow and be provided with excess flow valve in the passageway, the top of end cover main part is provided with air outlet channel, air outlet channel and seal chamber be linked together, air outlet channel's exit is connected with gas filtering apparatus. This design plays the function of self -protection to the single crystal growing furnace through excess flow valve, prevents in the single crystal growing furnace that gas intensity of pressure is too big and causes the damage of self structure.
Description
Technical field
The utility model relates to single crystal furnace device technical field, a kind of end cap for single crystal growing furnace.
Background technology
The bell of currently used single crystal growing furnace is designed with observation window substantially, but observation window is all to be fixed on bell
Together, it is impossible to the growing state of the monocrystalline in observation single crystal growing furnace in all directions, if cannot adjust corresponding in time
Parameter, it will affect the quality of production of crystal.Therefore, how the list in single crystal growing furnace can comprehensively be observed
Brilliant complete generation situation is a problem merited attention.
Summary of the invention
Single crystal growing furnace is played self-protection by excess flow valve by the utility model technical issues that need to address
Function, prevents gas pressure intensity in single crystal growing furnace excessive and causes the damage of self structure;There is provided one for monocrystalline
The end cap of stove.
For solving above-mentioned technical problem, structure of the present utility model includes end cover body and observation window, described
End cover body in be provided with sealing cavity, described observation window is arranged on the center of end cover body, described
The bottom of the end cover body of observation window both sides is respectively arranged with a searchlight, and the bottom of described end cover body sets
Being equipped with flow channels, described flow channels is connected with sealing cavity, is provided with in described flow channels
Excess flow valve, the top of described end cover body is provided with outlet passageway, described outlet passageway and sealing cavity phase
Connection, the exit of described outlet passageway connects gas-filtering device.
Further: described excess flow valve includes that valve cylinder, valve gap, spring and spool, described valve cylinder were positioned at
In circulation road, described valve gap is connected to the side of valve cylinder, and it is another that described spool is movably connected in valve cylinder
Side, described spool is connected with valve gap by spring, the sidewall of described valve cylinder offers overflow ducts,
On described valve gap, the position relative to overflow ducts is provided with spout hole.
Further: described gas-filtering device includes active carbon filter and Storage Time in Gas Collecting Bag, described
Outlet passageway is connected with Storage Time in Gas Collecting Bag by active carbon filter.
After using said structure, single crystal growing furnace is played the function of self-protection by the utility model by excess flow valve,
Prevent gas pressure intensity in single crystal growing furnace excessive and cause the damage of self structure;And the design can also be giving off
Collect after the gas removal of impurities gone and reuse, thus decrease unnecessary loss;And originally set
Meter also has simple in construction, the easily fabricated and advantage of practicality and high efficiency.
Accompanying drawing explanation
With detailed description of the invention, the utility model is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of excess flow valve.
Detailed description of the invention
A kind of end cap for single crystal growing furnace as shown in Figure 1, including end cover body 1 and observation window 2, described
Being provided with sealing cavity 5 in end cover body 1, described observation window 2 is arranged on the center of end cover body 1,
The bottom of the end cover body 1 of described observation window 2 both sides is respectively arranged with a searchlight 4, described end cover body
The bottom of 1 is provided with flow channels 3, and described flow channels 3 is connected with sealing cavity 5, described mistake
Being provided with excess flow valve 8 in circulation road, the top of described end cover body 1 is provided with outlet passageway 6, and described goes out
Gas passage 6 is connected with sealing cavity 5, and the exit of described outlet passageway 6 connects gas-filtering device 7.
During work, when the air pressure in single crystal growing furnace is too high, excess flow valve 8 then can start voluntarily, the height in single crystal growing furnace
Body of calming the anger is delivered in sealing cavity 5 by flow channels, and then this portion gas is by outlet passageway 6
In inflow gas filter 7.Single crystal growing furnace is played the function of self-protection by the design by excess flow valve,
Prevent gas pressure intensity in single crystal growing furnace excessive and cause the damage of self structure;And the design is in end cover body 1
Center be provided with observation window 2, and also distinguish in the bottom of the end cover body 1 of observation window 2 both sides
Being provided with a searchlight 4, staff can open searchlight 4, then observes monocrystalline by observation window 2
Inner case in stove, this is designed to play is easy to staff and finds the effect of fault;And the design
Also there is simple in construction, the easily fabricated and advantage of practicality and high efficiency.
Excess flow valve 8 as shown in Figure 2 includes valve cylinder 9, valve gap 10, spring 12 and spool 11, described valve
Cylinder 9 is positioned at flow channels 3, and described valve gap 10 is connected to the side of valve cylinder 9, described spool 11
Being movably connected in the opposite side in valve cylinder 9, described spool 11 is connected with valve gap 10 by spring 12, institute
Overflow ducts 13 is offered, relative to overflow ducts 13 on described valve gap 10 on the sidewall of the valve cylinder 9 stated
Position be provided with spout hole 14.When the pressure in single crystal growing furnace is excessive, the gas in single crystal growing furnace can squeeze automatically
Pressure valve core 11, makes spool 11 extrusion spring 12 move upward along valve cylinder 9, along with spool 11 the most upwards
Motion, after overflow ducts 13 is connected with the inner space of single crystal growing furnace, the high pressure gas cognition in single crystal growing furnace depends on
Secondary inflow by overflow ducts 13 and spout hole 14 seals in cavity 5, is flowed by outlet passageway 6 the most again
Enter in gas-filtering device 7, thus the effect of pressure in playing reduction single crystal growing furnace.When the pressure in single crystal growing furnace
After reduction, during the pressure that the elastic force that now spring 12 improves improves more than gas, spring 12 can push spool
11 move to opposite direction, again blocking overflow ducts 13, and now the gas in single crystal growing furnace would not be at stream automatically
Go out.Single crystal growing furnace is played the function of self-protection by the design by excess flow valve, prevents monocrystalline furnace gas pressure
The most excessive and cause the damage of self structure.
Gas-filtering device 7 as shown in Figure 1 includes active carbon filter and Storage Time in Gas Collecting Bag, and described goes out
Gas passage 6 is connected with Storage Time in Gas Collecting Bag by active carbon filter.The design first passes through active carbon filter pair
Excessive effluent air carries out removal of impurities, then by Storage Time in Gas Collecting Bag the gas given off is collected doing and repeats to make
With, serve the effect reducing unnecessary loss.
Claims (3)
1. the end cap for single crystal growing furnace, it is characterised in that: include end cover body (1) and observation window (2),
Being provided with sealing cavity (5) in described end cover body (1), described observation window (2) is arranged on
The center of end cover body (1), the bottom of the end cover body (1) of described observation window (2) both sides sets respectively
Being equipped with a searchlight (4), the bottom of described end cover body (1) is provided with flow channels (3), described
Flow channels (3) is connected with sealing cavity (5), is provided with excess flow valve (8) in described flow channels,
The top of described end cover body (1) is provided with outlet passageway (6), described outlet passageway (6) and annular seal space
Body (5) is connected, and the exit of described outlet passageway (6) connects gas-filtering device (7).
A kind of end cap for single crystal growing furnace the most according to claim 1, it is characterised in that: described
Excess flow valve (8) includes valve cylinder (9), valve gap (10), spring (12) and spool (11), described valve cylinder (9)
Being positioned at flow channels (3), described valve gap (10) is connected to the side of valve cylinder (9), described spool
(11) being movably connected in the opposite side in valve cylinder (9), described spool (11) passes through spring (12) and valve gap
(10) it is connected, the sidewall of described valve cylinder (9) offers overflow ducts (13), described valve gap (10)
On the position of overflow ducts (13) is provided with spout hole (14).
A kind of end cap for single crystal growing furnace the most according to claim 1, it is characterised in that: described
Gas-filtering device (7) includes active carbon filter and Storage Time in Gas Collecting Bag, and described outlet passageway (6) leads to
Cross active carbon filter to be connected with Storage Time in Gas Collecting Bag.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520789627.XU CN205556845U (en) | 2015-10-13 | 2015-10-13 | A end cover for single crystal growing furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520789627.XU CN205556845U (en) | 2015-10-13 | 2015-10-13 | A end cover for single crystal growing furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205556845U true CN205556845U (en) | 2016-09-07 |
Family
ID=56822466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520789627.XU Expired - Fee Related CN205556845U (en) | 2015-10-13 | 2015-10-13 | A end cover for single crystal growing furnace |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN205556845U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109252210A (en) * | 2018-10-15 | 2019-01-22 | 徐州振丰原喷灌设备有限公司 | A kind of vent valve for single crystal growing furnace |
-
2015
- 2015-10-13 CN CN201520789627.XU patent/CN205556845U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109252210A (en) * | 2018-10-15 | 2019-01-22 | 徐州振丰原喷灌设备有限公司 | A kind of vent valve for single crystal growing furnace |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160907 |
|
CF01 | Termination of patent right due to non-payment of annual fee |