CN205556774U - A gas access equipment for fluidized bed chemical vapor deposition reactor - Google Patents
A gas access equipment for fluidized bed chemical vapor deposition reactor Download PDFInfo
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- CN205556774U CN205556774U CN201620140257.1U CN201620140257U CN205556774U CN 205556774 U CN205556774 U CN 205556774U CN 201620140257 U CN201620140257 U CN 201620140257U CN 205556774 U CN205556774 U CN 205556774U
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- vapor deposition
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 49
- 239000010439 graphite Substances 0.000 claims abstract description 49
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 49
- 238000001816 cooling Methods 0.000 claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims description 40
- 239000002184 metal Substances 0.000 claims description 40
- 125000004122 cyclic group Chemical group 0.000 claims description 37
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims 1
- 238000005336 cracking Methods 0.000 abstract description 6
- 230000007774 longterm Effects 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 148
- 238000004062 sedimentation Methods 0.000 description 20
- 238000000151 deposition Methods 0.000 description 16
- 230000008021 deposition Effects 0.000 description 13
- 239000002245 particle Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 239000003758 nuclear fuel Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- 241000013033 Triso Species 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000005055 methyl trichlorosilane Substances 0.000 description 3
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005243 fluidization Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000004992 fission Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002915 spent fuel radioactive waste Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Abstract
An embodiment of the utility model discloses a gas access equipment for fluidized bed chemical vapor deposition reactor. Equipment includes: porous gas access of graphite and middle way gas pipeline, middle way gas pipeline's one end set up in reactor for to treat that cracked gas lets in in the reactor, main part inner loop water jacket is used for the cooling middle way gas pipeline, wherein, gas pipeline interlude in middle way is passed through main part inner loop water jacket. The embodiment of the utility model provides a through adequate cooling middle way gas pipeline for treat that the gaseous temperature of schizolysis is less than the cracking temperature, thereby eliminated the deposit result of middle way gas pipeline pipe wall basically, also reduced the deposit result of treating the gaseous entrance of schizolysis, can adapt to the long -term and stable operation of fluidized bed chemical vapor deposition reactor under the high temperature condition.
Description
Technical field
The utility model relates to gas access design field, in particular it relates to a kind of for fluidized-bed chemical vapor deposition
The gas inlet device of reactor.
Background technology
The ceramic mould fuel element that China's high temperature pebble-bed gas-cooled reactor is used, structure is spherical coated particle (TRISO),
And disperse is in the graphite matrix of fuel region.The first of the inherent safety of HTGR Nuclear Power Plant ensures to be exactly to be used
Nuclear fuel be TRISO type coated particle, diameter is about 0.92mm, and it is by nuclear fuel nuclear core, loose pyrolytic carbon layer, interior fine and close heat
Solve carbon-coating, silicon carbide layer and outer fine and close pyrolytic carbon layer composition.This particles of nuclear fuel with four layers of composite construction is in fluidisation
The method cladding using chemical gaseous phase deposition in Chuan prepares.Wherein, the most key one layer is silicon carbide layer, has resistance
The only important function of fission product release, this silicon carbide layer mainly by methyl trichlorosilane (MTS) at the high temperature of 1600 degrees Celsius
Under the conditions of be cracked to form.The stable operation ensureing this cracking-depositing operation is the key that TRISO type coated particle is successfully prepared.
The feature of fluidized-bed chemical vapor deposition cladding process is grain fluidized and gas cracking deposits under the high temperature conditions
Carrying out, current Gas inlet systems is will to treat that cracked gas is directly passed through reactor by one channel, and shortcoming is brighter simultaneously
Aobvious, specifically include:
(1) while coated particle surface deposits, the deposition at gas access is also inevitable, in the mistake of deposition reaction
Cheng Zhong, treats that cracked gas constantly deposits at gas access, and the internal diameter of the pipeline of gas access constantly reduces, coated particle fluidisation shape
State is difficult to stable maintenance, and causing deposition process is not the process of a steady and continuous, thus causes the character of sedimentary in deposition
Heterogeneity before and after during；The when of serious, gas access even can be blocked by sedimentation products completely, causes gas to enter
Entering, deposition reaction is interrupted, and causes deposit thickness cannot meet technological design index, thus product cancels；
(2) even if the most complete deposition reaction completes, prepared density and thickness has all met the carbonization that design requires
Silicon layer.After reaction terminates, a large amount of sedimentation products are attached to gas access, and sedimentation products is difficult to remove completely, directly affects next
The process of secondary deposition reaction；
(3) if the sedimentation products at gas access cannot be removed completely, need when upper once deposition reaction more to renew
Pipeline.In particular it is required that the single hole metallic conduit of Gas inlet systems is removed, change extremely difficult, and cost is higher.
For ensureing the stable operation of fluidized-bed chemical vapor deposition technique, specifically need:
(1) during fluidisation-cracking-deposition reaction, the sedimentation products at gas access is reduced to greatest extent；
(2) after primary depositing reaction terminates, next time before deposition reaction, need to get rid of easily gas access
The sedimentation products at place；
(3) if aperture damages wound when the sedimentation products at gas access is removed completely, need with less cost and relatively
Readily replaceable gas access.
It is accordingly required in particular to a kind of gas inlet device being adapted to fluidized-bed chemical vapor deposition reactor.
Utility model content
The purpose of the utility model embodiment is to provide a kind of gas for fluidized-bed chemical vapor deposition reactor and enters
Jaws equipment.Described equipment passes through sufficiently cool Road gas pipeline so that treat that the temperature of cracked gas is less than cracking temperature, thus
Essentially eliminate the sedimentation products of Road gas pipeline tube wall, decrease the sedimentation products treating cracked gas porch, it is possible to
Adapt to the long-term and stable operation of hot conditions fluidized bed at elevated CVD reactor.
To achieve these goals, the utility model embodiment provides one for fluidized-bed chemical vapor deposition reactor
Gas inlet device.Described equipment includes: Road gas pipeline, and one end of described Road gas pipeline is arranged at described reaction
In device, for gas to be cracked is passed through in described reactor；Cyclic water jacket in main body, is used for cooling down described Road flue
Road, wherein, described Road gas pipeline is inserted through cyclic water jacket in described main body.
Alternatively, in described main body, cyclic water jacket is cylindrically, and be provided with in cyclic water jacket in described main body current every
Plate so that cold water is flow to by the inner side of cyclic water jacket in described main body, and the top of cyclic water jacket is by described master in described main body
The outside of body-internal-circulation water jacket is flowed out.
Alternatively, it is provided with interval between cyclic water jacket and described Road gas pipeline in described main body, to form loop
Gas cooling duct.
Alternatively, described Road gas pipeline includes Road gas supervisor and short metal pipe, described Road gas supervisor and
Use between described short metal pipe and be threaded togather, and one end of described short metal pipe is arranged in described reactor.
Alternatively, gas supervisor in described Road is made of stainless steel.
Alternatively, described short metal pipe is made up of metal molybdenum or tungsten.
Alternatively, described Road gas supervisor and the threaded connection place of described short metal pipe are less than recirculated water in described main body
The top of set.
Alternatively, described equipment also includes: graphite collet, with cyclic water jacket in described reactor and described main body even
Connect, for isolating in described reactor and described main body the thermal source around cyclic water jacket.
Alternatively, described equipment also includes: porous graphite gas distributor, is arranged at the bottom of described reactor, is used for
Described loop gas cooling duct is connected with described reactor with described Road gas pipeline.
Alternatively, described porous graphite gas distributor is provided with multiple equally distributed loop duct and central duct,
Described loop duct connects with described loop gas cooling duct, and described central duct connects with described Road gas pipeline, and
Described loop duct is round phase with the outer side surface of the Road gas pipeline being inserted described porous graphite gas distributor by extruding
Cut or intersect.
By technique scheme, sufficiently cool Road gas pipeline so that treat that the temperature of cracked gas is less than cracking temperature
Degree, thus essentially eliminate the sedimentation products of Road gas pipeline tube wall, decrease and treat that the deposition of cracked gas porch is produced
Thing, it is possible to adapt to the long-term and stable operation of hot conditions fluidized bed at elevated CVD reactor.
Accompanying drawing explanation
In order to be illustrated more clearly that the utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only
It is embodiments more of the present utility model, for those of ordinary skill in the art, in the premise not paying creative work
Under, it is also possible to other accompanying drawing is obtained according to these figures.
Fig. 1 is the generalized section of the gas inlet device of the utility model one embodiment；
Fig. 2 is the section signal of the porous graphite gas distributor of the gas inlet device of the utility model one embodiment
Figure；
Fig. 3 is the Fig. 2 generalized section along upper end A-A ' place；
Fig. 4 is the Fig. 2 generalized section along B-B ' place, lower end；
Fig. 5 is the section signal of the porous graphite gas distributor of the gas inlet device of another embodiment of the utility model
Figure；
Fig. 6 is the Fig. 5 generalized section along upper end A-A ' place；
Fig. 7 is the Fig. 5 generalized section along B-B ' place, lower end.
Description of reference numerals
Cyclic water jacket 2 water flow partition board 3 loop gas cooling duct in 1 main body
4 Road gases are responsible for 5 graphite collet 6 porous graphite gas distributors
7 spouted fluidized bed 8 short metal pipe 9 central duct 10 loop ducts
11 protruding 12 threaded connection places
Detailed description of the invention
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of the utility model protection.
Fig. 1 is the generalized section of the gas inlet device of the utility model one embodiment.As it is shown in figure 1, this practicality is new
The gas inlet device of type one embodiment includes: Road gas pipeline, one end of described Road gas pipeline be arranged at described instead
In answering device, for gas to be cracked is passed through in described reactor；Cyclic water jacket 1 in main body, is used for cooling down described Road gas
Body pipeline, wherein, described Road gas pipeline is inserted through cyclic water jacket 1 in described main body.Specifically, described reactor is spray
Fluidized bed 7.The present embodiment passes through sufficiently cool Road gas pipeline so that treat that the temperature of cracked gas is less than cracking temperature,
Thus essentially eliminate the sedimentation products of Road gas pipeline tube wall, decrease the sedimentation products treating cracked gas porch,
Can adapt to the long-term and stable operation of hot conditions fluidized bed at elevated CVD reactor.
Wherein, in described main body, the cross section of cyclic water jacket 1 is annular, and more specifically, in main body, cyclic water jacket 1 is in circle
Tubular, and in described main body, in cyclic water jacket 1, it is provided with water flow partition board 2 so that cold water is by cyclic water jacket 1 in described main body
Inner side flows to, and in described main body, the top of cyclic water jacket 1 is flowed out, such as Fig. 1 institute by the outside of cyclic water jacket 1 in described main body
Show.In the design of such structure makes main body, cyclic water jacket 1 has two-layer water-cooled, i.e. inner side water-cooled and outside water-cooled, thus protects
Demonstrate,prove the overall cooling effect of described Road gas pipeline.
In a particular embodiment, described Road gas pipeline includes Road gas supervisor 4 and short metal pipe 8, described
Use between Road gas supervisor 4 and described short metal pipe 8 and be threaded togather, and one end of described short metal pipe 8 is arranged
In described reactor.Specifically, described Road gas pipeline is divided into two sections, i.e. Road gas supervisor 4 and short metal pipe 8, and
The internal diameter of described Road gas pipeline 4 is identical with the internal diameter of described short metal pipe 8, without being responsible for 4 Hes at described Road gas
The inwall of the threaded connection place 12 of described short metal pipe 8 forms concavo-convex place.Preferably, gas supervisor 4 in described Road is by stainless steel
Make, it is easy to processing.Preferably, described short metal pipe 8 is made up of metal molybdenum or tungsten.Thereby, described short metal pipe can
Use and will not deform under long-term higher temperature in spouted fluidized bed.
Preferably, described Road gas supervisor 4 follows less than in described main body with the threaded connection place 12 of described short metal pipe 8
The top of ring water jacket 1.Thereby, it can be ensured that supervisor is sufficiently cooled for Road gas, thus decrease Road gas supervisor's tube wall
Sedimentation products.
Preferably, described equipment also includes: graphite collet 5, with cyclic water jacket 1 in described reactor and described main body even
Connect, for isolating in described reactor and described main body the thermal source around cyclic water jacket.Specifically, described graphite collet 5
Two ends are provided with screw thread, and described graphite collet 5 is by screw thread and cyclic water jacket 1 in described spouted fluidized bed 7 and described main body
Connect, thus in spouted fluidized bed 7, graphite collet 5 and main body cyclic water jacket 1 can be formed connection solid and gastight
Overall.Additionally, graphite collet 5 has resistant to elevated temperatures characteristic, it is possible to isolate described spouted fluidized bed 7 and described main body-internal-circulation
Thermal source around water jacket 1, it is ensured that the overall cooling effect of described Road gas pipeline.
Preferably, it is provided with interval between cyclic water jacket 1 and described Road gas pipeline in described main body, to form loop
Gas cooling duct 3.Specifically, described loop gas cooling duct 3 can be used for auxiliary gas is passed through described spouted fluidized bed
7.Thereby, Road gas pipeline can not only be cooled down further, but also the particles of nuclear fuel in spouted fluidized bed can be fluidized.
Preferably, described equipment also includes: porous graphite gas distributor 6, is arranged at the bottom of described reactor, is used for
Described loop gas cooling duct is connected with described reactor with described Road gas pipeline.Specifically, described spouted stream
The bottom changing bed 7 is provided with duct and protruding 11 so that described porous graphite gas distributor 6 can be placed in tune with and block.
More specifically, described porous graphite gas distributor 6 is directly in close contact and by card by extruding with described spouted fluidized bed 7
Live.Threaded between described spouted fluidized bed 7 and described graphite collet 5 of source of strength of extruding.Porous graphite gas
The sedimentation products in the aperture of body distributor 6 is easily polished removal, and described porous graphite gas distributor 6 is changed easily, very
Economical.Additionally, porous graphite gas distributor 6 has resistant to elevated temperatures characteristic, it is adapted to the hot conditions of spouted fluidized bed 7.
In concrete application, described porous graphite gas distributor 6 is provided with multiple equally distributed loop duct 10
And central duct 9, described loop duct 10 connects with described loop gas cooling duct 3, described central duct 9 and described Road
Gas pipeline connects.Wherein, described loop duct 10 connects with described loop gas cooling duct 3, it is possible to make by described ring
The auxiliary gas that gas cooling duct, road 3 is passed through passes through porous graphite gas distributor 6, thus cools down described porous graphite gas
Distributor 6.
Fig. 2 is the section signal of the porous graphite gas distributor of the gas inlet device of the utility model one embodiment
Figure.Fig. 3 is the Fig. 2 generalized section along upper end A-A ' place.Fig. 4 is the Fig. 2 generalized section along B-B ' place, lower end.Such as Fig. 2, figure
Shown in 3 and Fig. 4, described porous graphite gas distributor 6 is provided with 8 equally distributed loop ducts 10 and 1 centre bore
Road 9, wherein, the outlet in 8 loop ducts can constitute a circle, 8 loop ducts and described loop gas cooling duct 3
Connection, the internal diameter of the central duct 9 of described porous graphite gas distributor 6 is identical with the internal diameter of short metal pipe 8, short metal pipe 8
Described porous graphite gas distributor 6 is inserted by extruding.Additionally, described porous is inserted with by extruding in described loop duct 10
The outer side surface circle of the short metal pipe 8 of graphite gas distributor 6 is tangent.Thereby, it is possible to ensure by the cooling of described loop gas logical
The auxiliary gas that road 3 is passed through directly contacts with short metal pipe, thus ensures the cooling effect of short metal pipe.
Fig. 5 is the section signal of the porous graphite gas distributor of the gas inlet device of another embodiment of the utility model
Figure.Fig. 6 is the Fig. 5 generalized section along upper end A-A ' place.Fig. 7 is the Fig. 5 generalized section along B-B ' place, lower end.Such as Fig. 5, figure
Shown in 6 and Fig. 7, described porous graphite gas distributor 6 is provided with 8 equally distributed loop ducts 10 and 1 centre bore
Road 9, wherein, the outlet in 8 loop ducts can constitute a circle, 8 loop ducts and described loop gas cooling duct 3
Connection, the internal diameter of the central duct 9 of described porous graphite gas distributor 6 is identical with the internal diameter of short metal pipe 8, short metal pipe 8
Described porous graphite gas distributor 6 is inserted by extruding.Additionally, described porous is inserted with by extruding in described loop duct 10
The outer side surface circle of the short metal pipe 8 of graphite gas distributor 6 intersects.Thereby, it is possible to ensure by the cooling of described loop gas logical
The auxiliary gas that road 3 is passed through directly contacts with short metal pipe, thus ensures the cooling effect of short metal pipe.
Pass through above-described embodiment so that Road gas supervisor and short metal pipe are sufficiently cooled, Road gas pipeline
Tube wall sedimentation products substantially eliminates, and the sedimentation products treating cracked gas of porous graphite gas distributor porch drops significantly simultaneously
Low, and clear up and change easily, very economical, it is possible to adapt to hot conditions fluidized bed at elevated CVD reactor long-term
Needs with stable operation.
In concrete application process, the gas that operating the utility model embodiment by following operating procedure provides enters
Jaws equipment, so that the surface of the particles of nuclear fuel of spouted fluidized bed is formed by deposition meets the carborundum that design requires
Layer:
1, check whether porous graphite gas distributor, short metal pipe have sedimentation products, if any, then remove, clear up or
It is replaced with new element；
2, short metal pipe is installed on the gas supervisor of Road；
3, graphite collet is installed, confirms that graphite collet is connected with cyclic water jacket in main body solid air tight；
4, porous graphite gas distributor is arranged on short metal pipe, it is ensured that Road gas pipeline is unobstructed；
5, spouted fluidized bed is slowly screwed into from surface, is connected solid with graphite collet, simultaneously by spouted stream
Change bed, porous graphite gas distributor, short metal pipe three extrude solid；
6, checking connection, Road gas pipeline is the most unobstructed；
7, gas inlet device is installed to high-temperature heater, cyclic water jacket is passed through in main body cooling water, at ring
Gas cooling duct, road is passed through auxiliary gas, heats, and is passed through to design temperature Hou Cong Road gas pipeline and treats cracked gas, starts
Deposition process；
8, treat particles of nuclear fuel deposition terminate, by the gas pipeline of Road treat cracked gas switch to assist gas, fall
Temperature, cooling, until room temperature, take out particles of nuclear fuel, dismantle gas inlet device；
9, spouted fluidized bed, porous graphite gas distributor, graphite collet, short metal pipe are dismantled successively from surface,
Check deposition conditions, cleaning, wait sedimentation experiment next time.
The effect being finally reached for the gas inlet device of clearer and more definite the utility model embodiment offer is new by this practicality
Carborundum is prepared in the gas inlet device that type embodiment provides methyl trichlorosilane gas cracking under 1600 degrees celsius
The sedimentation experiment of layer, has been carried out 2 hours altogether, and experimentation is steady, and Road gas pipeline stable supplying treats cracked gas, without blocking
Phenomenon occurs.After experiment terminates, the gas inlet device that removing the utility model embodiment provides finds that short metal pipe is intact, heavy
Lamination is substantially not present, and clears up the most reusable a little, and there is a little sedimentation products the porch of porous graphite gas distributor,
Can polish easily removal, such that it is able to recycling.Miscellaneous part is the most intact, repeatable utilization.
Preferred embodiment of the present utility model is described in detail above in association with accompanying drawing, but, the utility model does not limit
Detail in above-mentioned embodiment, in technology concept of the present utility model, can be to skill of the present utility model
Art scheme carries out multiple simple variant, and these simple variant belong to protection domain of the present utility model.
It is further to note that each the concrete technical characteristic described in above-mentioned detailed description of the invention, at not lance
In the case of shield, can be combined by any suitable means, in order to avoid unnecessary repetition, the utility model is to respectively
Plant possible combination to illustrate the most separately.
Additionally, can also be combined, as long as it is not disobeyed between various different embodiment of the present utility model
Carrying on the back thought of the present utility model, it should be considered as content disclosed in the utility model equally.
Claims (10)
1. the gas inlet device for fluidized-bed chemical vapor deposition reactor, it is characterised in that described equipment includes:
Road gas pipeline, one end of described Road gas pipeline is arranged in described reactor, for by gas to be cracked
It is passed through in described reactor；
Cyclic water jacket in main body, is used for cooling down described Road gas pipeline,
Wherein, described Road gas pipeline is inserted through cyclic water jacket in described main body.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 1, its feature exists
In, in described main body, cyclic water jacket is cylindrically, and is provided with water flow partition board in cyclic water jacket in described main body so that cold water by
In described main body, the inner side of cyclic water jacket flows to, and in described main body, the top of cyclic water jacket is by cyclic water jacket in described main body
Outside is flowed out.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 1, its feature exists
In, it is provided with interval between cyclic water jacket and described Road gas pipeline in described main body, to form loop gas cooling duct.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 1, its feature exists
In, described Road gas pipeline includes Road gas supervisor and short metal pipe, described Road gas supervisor and described short metal pipe
Between use and be threaded togather, and one end of described short metal pipe is arranged in described reactor.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 4, its feature exists
In, described Road gas supervisor be made of stainless steel.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 4, its feature exists
In, described short metal pipe is made up of metal molybdenum or tungsten.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 4, its feature exists
In, the threaded connection place of described Road gas supervisor and described short metal pipe is less than the top of cyclic water jacket in described main body.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 3, its feature exists
In, described equipment also includes:
Graphite collet, is connected with cyclic water jacket in described reactor and described main body, is used for isolating described reactor and described
Thermal source around cyclic water jacket in main body.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 8, its feature exists
In, described equipment also includes:
Porous graphite gas distributor, is arranged at the bottom of described reactor, be used for so that described loop gas cooling duct and
Described Road gas pipeline connects with described reactor.
Gas inlet device for fluidized-bed chemical vapor deposition reactor the most according to claim 9, its feature exists
In, described porous graphite gas distributor is provided with multiple equally distributed loop duct and central duct, described loop duct
Connecting with described loop gas cooling duct, described central duct connects with described Road gas pipeline, and described loop duct
Justify tangent with the outer side surface of the Road gas pipeline being inserted described porous graphite gas distributor by extruding or intersect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620140257.1U CN205556774U (en) | 2016-02-24 | 2016-02-24 | A gas access equipment for fluidized bed chemical vapor deposition reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620140257.1U CN205556774U (en) | 2016-02-24 | 2016-02-24 | A gas access equipment for fluidized bed chemical vapor deposition reactor |
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| Publication Number | Publication Date |
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| CN205556774U true CN205556774U (en) | 2016-09-07 |
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| CN201620140257.1U Active CN205556774U (en) | 2016-02-24 | 2016-02-24 | A gas access equipment for fluidized bed chemical vapor deposition reactor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568254A (en) * | 2016-02-24 | 2016-05-11 | 清华大学 | Gas inlet equipment for chemical vapor deposition reactor of fluidized bed |
| CN108675300A (en) * | 2018-06-15 | 2018-10-19 | 清华大学 | A kind of nuclear shell structure nano composite particles and preparation method thereof, its preparation facilities |
-
2016
- 2016-02-24 CN CN201620140257.1U patent/CN205556774U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568254A (en) * | 2016-02-24 | 2016-05-11 | 清华大学 | Gas inlet equipment for chemical vapor deposition reactor of fluidized bed |
| CN105568254B (en) * | 2016-02-24 | 2018-10-30 | 清华大学 | A kind of gas inlet device for fluidized-bed chemical vapor deposition reactor |
| CN108675300A (en) * | 2018-06-15 | 2018-10-19 | 清华大学 | A kind of nuclear shell structure nano composite particles and preparation method thereof, its preparation facilities |
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