CN205529152U - High pressure prevents structure that thermocouple is corroded or fuses in single crystal growing furnace - Google Patents
High pressure prevents structure that thermocouple is corroded or fuses in single crystal growing furnace Download PDFInfo
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- CN205529152U CN205529152U CN201620334756.4U CN201620334756U CN205529152U CN 205529152 U CN205529152 U CN 205529152U CN 201620334756 U CN201620334756 U CN 201620334756U CN 205529152 U CN205529152 U CN 205529152U
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Abstract
The utility model discloses a high pressure prevents structure that thermocouple is corroded or fuses in single crystal growing furnace relates to semi conducting material preparation technical field. The utility model discloses a heater, crucible, crucible hold in the palm, go up crucible pole, crucible pole down, and crucible and crucible hold in the palm places the heater thermal field in, go up the crucible pole and are hollow structure with crucible pole down, and crucible pole lower extreme is equipped with seal structure, and the well cavity of going up the crucible pole passes seal structure and makes the top of thermocouple measurement end position in the sealed chamber of last crucible pole for sealed chamber, thermocouple, the last port of crucible pole and the lower port of last crucible pole are detachable fastening connection structure down. The utility model discloses can effective separation under the high temperature high pressure condition corrosivity or the gaseous infiltration of volatility go up crucible pole intracavity, prevent that thermocouple measurement end alloy probe from being corroded absolutely or leading to its fusing owing to reduce the fusing point with infiltration gas reaction, guarantee whole synthesis and crystal growth in -process temperature accurate feedback and demonstration, improvement crystalline material yield.
Description
Technical field
This utility model relates to technical field of semiconductor material preparation, the structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace.
Background technology
Crystalline material occupies the highest deal in modern industry is applied, and thermal field controls the quality in Opacity in lens and growth course and yield rate important.And by the accurate feedback of thermocouple, regulate and control heating power in time, form good thermal field, produce rational thermograde, residual stress can be grown little, dislocation density is low, the crystalline material that electrical parameter is excellent.Therefore, configuring optimal thermal field, the monitoring in real time to thermal field is extremely important.
Detection thermocouple penetrates the upper crucible pole top to hollow in the lower crucible pole of hollow.Upper crucible pole top is connected to be inserted in bottom the crucible tray of crucible.Owing to lower crucible pole and upper crucible pole lock (or other mechanical type fastening structure such as flange screw or clamping) by threading, can there is gap in mechanical fastening, and the condition of crystal growth is in high temperature and high pressure environment unavoidably.Upper crucible pole inside and outside of cavity, certain temperature difference can be there is and gas concentration is poor, thus the corrosivity of trace or escaping gas can be made to penetrate into from snap close gap (or other mechanical type fastening gap), as measured the alloy probe reaction of end with platinum rhodium thermocouple, often it is blown when hundreds of degree Celsius.(platinum rhodium thermocouple normally measures temperature up to 1,700 degrees Celsius).Alloy probe reaction with chromel-alumel thermocouple measures end, is often blown when hundreds of degree Celsius.(the even normal temperature of measuring of nichrome alumino-nickel is up to 1,300 degrees Celsius).Greatly reduce its measurement performance, it is impossible to complete the Temperature Feedback in subsequent crystallographic growth course, make operator have no way of to the thermal field in high pressure single crystal growing furnace and regulate and control and operate, have a strong impact on the yield rate of crystal growth.Even cause temperature control, it is possible to create serious potential safety hazard.Once tried the protection of armored thermocouple; i.e. sleeve protective cap at thermocouple measurement end probe; but protective cap has certain thermal insulation; it is substantially reduced the Temperature Feedback precision of thermocouple measurement end; make temperature adjusting when synthesis and crystal growth more complicated, affect the yield rate of technological operation and crystalline material equally.And owing to armored thermocouple is overall sleeve protection, when thermocouple damages, it is impossible to change the thermocouple wire in protection set, a whole set of can only update, complex operation, be greatly increased cost.It is also not suitable in this approach requiring accurate thermometric synthesis and crystal growth technique.And there is no other armouring mode of discovery at present and be suitable for this technique.
Utility model content
The structure that technical problem to be solved in the utility model prevents thermocouple to be corroded or fuses in being to provide a kind of high pressure single crystal growing furnace, can effectively intercept corrosivity or escaping gas in the case of High Temperature High Pressure and penetrate into crucible pole intracavity, thermocouple measurement end alloy probe is prevented to be corroded disconnected or cause it to fuse owing to reducing fusing point with infiltration gas reaction, ensure that in whole synthesis and crystal growing process, temperature is fed back accurately and shows, improve crystalline material yield rate and productivity ratio.
For solving above-mentioned technical problem, technical solution adopted in the utility model is: the structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace, including heater, crucible, crucible tray, upper crucible pole, the crucible tray of nested crucible is placed in heater thermal field, upper crucible pole is located at the bottom of crucible tray, upper crucible pole is hollow structure, the lower end of crucible pole is provided with sealing structure, the cavity of upper crucible pole forms annular seal space, and thermocouple makes thermocouple measurement end be positioned at the top of annular seal space of crucible pole through sealing structure；Being additionally provided with the lower crucible pole of hollow, the upper port of lower crucible pole and the lower port of upper crucible pole are detachable fastening structure.
Further preferred technical scheme, is additionally provided with the lower crucible pole of hollow, and the upper port of lower crucible pole and the lower port of upper crucible pole are detachable fastening structure.
Further preferred technical scheme, described detachable fastening structure is, the bottom of upper crucible pole is provided with female thread, and the upper end of lower crucible pole is provided with external screw thread, and upper crucible pole is threadeded with lower crucible pole.
Further preferred technical scheme, described sealing structure is: upper crucible pole bottom is provided with the internal diameter that the aperture of internal thread segment is installed with the cavity of thermocouple more than upper crucible pole top, upper limit shoulder is formed on the top making this internal thread segment, this upper limit shoulder carbon fiber felt packing ring is arranged below, thermocouple passes from described carbon fiber felt packing ring, when lower crucible pole and upper crucible pole screw thread screw, carbon fiber felt packing ring is pressed between crucible pole and lower crucible pole.
Further preferred technical scheme, detachable fastening structure can be also flange screw or clamping, sealing structure is: be provided with carbon fiber felt packing ring between the lower surface of the upper surface of lower crucible pole and upper crucible pole, thermocouple passes from described carbon fiber felt packing ring, when lower crucible pole and upper crucible pole flange screw or clamping, carbon fiber felt packing ring is pressed between crucible pole and lower crucible pole.
Further preferred technical scheme, described thermocouple is the thermocouple with protecting tube, and thermocouple measurement end is positioned at the outside of protecting tube.
Further preferred technical scheme, protecting tube is two-way cavity earthenware.
Further preferred technical scheme, thermocouple measurement end is the alloy contact after thermocouple wire welding.
Use and have the beneficial effects that produced by technique scheme: this utility model thermocouple is in the upper crucible pole sealed, corrosivity or escaping gas in the case of High Temperature High Pressure can be intercepted and penetrate into crucible pole intracavity, the thermocouple measurement end avoiding crucible pole intracavity is corroded, reacts, fuses, thus obtain Temperature Feedback accurately, operator are made to regulate and control thermal field in time, process for stabilizing, it is ensured that synthesis and the yield rate of crystal growth.
Accompanying drawing explanation
Fig. 1 is the structural representation of one embodiment of this utility model；
Fig. 2 is the partial enlarged drawing in Fig. 1 at A；
In figure: 1, heater, 2, crucible, 3, measured material, 4, crucible tray, 5, upper crucible pole, 6, thermocouple, 7, thermocouple measurement end, 8, carbon fiber felt packing ring, 9, lower crucible pole.
Detailed description of the invention
With detailed description of the invention, this utility model is described in further detail below in conjunction with the accompanying drawings.
See shown in Fig. 1, Fig. 2, this utility model includes heater 1, crucible 2, crucible tray 4, upper crucible pole 5, the crucible tray 4 of nested crucible 2 is placed in heater 1 thermal field, upper crucible pole 5 is located at the bottom of crucible tray 4, upper crucible pole 5 is hollow structure, the lower end of crucible pole 5 is provided with sealing structure, and the cavity of upper crucible pole 5 forms annular seal space, and thermocouple 6 makes thermocouple measurement end 7 be positioned at the top of annular seal space of crucible pole 5 through sealing structure；Being additionally provided with the lower crucible pole 9 of hollow, the upper port of lower crucible pole 9 is detachable fastening structure with the lower port of upper crucible pole 5.
Wherein, detachable fastening structure is, the bottom of upper crucible pole 5 is provided with female thread, and the upper end of lower crucible pole 9 is provided with external screw thread, and upper crucible pole 5 is threadeded with lower crucible pole 9；Detachable fastening structure can be also with other mechanical type fastening structure such as flange screw or clamping.And seal washer is set between upper crucible pole 5 and lower crucible pole 9 can play the effect of sealing.
Further sealing structure is described as follows, sealing structure is, upper crucible pole 5 bottom is provided with the internal diameter that the aperture of internal thread segment is installed with the cavity of thermocouple 6 more than upper crucible pole 5 top, upper limit shoulder is formed on the bottom making this internal thread segment, this upper limit shoulder carbon fiber felt packing ring 8 is arranged below, thermocouple 6 passes from described carbon fiber felt packing ring 8, and when lower crucible pole 9 screws with upper crucible pole 5 screw thread, carbon fiber felt packing ring 8 is pressed between crucible pole 5 and lower crucible pole 9.Wherein, another kind of structure is that lower crucible pole 9 arranges female thread, and upper crucible pole 5 arranges external screw thread, lower limit shoulder is set at female thread, when upper and lower crucible pole screws, carbon fiber felt packing ring is extruded deformation expansion between upper and lower crucible pole, blocks gap small at locking.
Detachable fastening structure can be also with other mechanical type fastening structure such as flange screw or clamping, carbon fiber felt packing ring 8 is located between upper surface and the lower surface of upper crucible pole 5 of lower crucible pole 9, thermocouple 6 passes from described carbon fiber felt packing ring 8, when lower crucible pole 9 and upper crucible pole 5 flange screw or clamping or other mechanical type are fastenedly connected, carbon fiber felt packing ring 8 is pressed between crucible pole 5 and lower crucible pole 9, block gap small at fastening, play the effect of sealing.
Thermocouple 6 is the thermocouple with protecting tube, and thermocouple measurement end 7 is positioned at the outside of protecting tube, and protecting tube is two-way cavity earthenware, can penetrate thermocouple wire, and thermocouple wire plays the effect of protection.Thermocouple measurement end 7 is the alloy contact after thermocouple wire welding.
In this utility model, upper crucible pole 5 and lower crucible pole 9 screw-threaded coupling, or during with the fastening locking of other mechanical type such as flange screw or clamping, carbon fiber felt packing ring 8 is pressed wherein with lower crucible pole 9 by upper crucible pole 5, and role is as follows:
The first, (or the fastening of other mechanical type such as flange screw or clamping) when upper crucible pole 5 and lower crucible pole 9 screw-threaded coupling, carbon fiber felt packing ring 8 is pressed locking wherein, the carbon fiber felt packing ring 8 of gap compacted rear deformation expansion small at upper crucible pole 5 and the locking of lower crucible pole 9 is blocked, can effectively prevent from major part corrosivity or escaping gas from penetrating in upper crucible pole 5 inner chamber to react with thermocouple measurement end 7, accordingly it is possible to prevent thermocouple wire reacts in aggressive atmosphere or volatility atmosphere or fuses.
The second, after compressing locking due to carbon fiber felt packing ring 8, there is good sealing.In the heater of high temperature, the air pressure in upper crucible pole 5 cavity, higher than outside stove internal gas pressure, owing to inner and outer air pressure is poor, makes external corrosive or escaping gas cannot penetrate in crucible pole 5 cavity.
3rd, carbon fiber felt packing ring 8 is due to its special physical characteristic, carbon fiber felt itself has the most flourishing microcellular structure, have and well adsorb broad spectrum activity, it it is several times even tens times of activated carbon, adsorption capacity is big, corrosivity or the escaping gas of upper crucible pole 5 inner chamber can be penetrated in advance with active adsorption, stop corrosivity or escaping gas make after penetrating into upper crucible pole 5 inner chamber thermocouple measurement end 7 be corroded completely disconnected or and its react after make thermocouple measurement end 7 fusing point reduce, cause thermocouple measurement end 7 to fuse the generation of phenomenon under the integrated condition of high-temperature heating.Corrosivity or escaping gas include: the gas such as acid, alkaline or group-v element is such as easily and in the periodic table of chemical element that reacts of high temperature noble metal thermocouple wire (such as platinum Pt Rh, platinum Pt Rh rhodium, chromel-alumel etc.): the gases such as P, As.
4th, carbon fiber felt itself has thermal insulation, the feature such as high temperature resistant, acidproof, alkaline-resisting, is hardly damaged corrosion in the heating field of High Temperature High Pressure.
Summary, it is provided with carbon fiber felt packing ring at lower crucible pole and upper crucible pole locking, it is extruded when locking at lower crucible pole and upper crucible pole, the expansion deformation of carbon fiber felt packing ring, locking, fill the gap at lower crucible pole and upper crucible pole faying face, the gap existed between faying face after efficiently solving mechanical lock, owing to carbon fiber felt itself has good thermal insulation, adsorptivity and corrosion resistance, can effectively intercept the infiltration of corrosivity or escaping gas, well protect the thermocouple measurement end of crucible pole inner chamber not to be corroded fusing, thus obtain Temperature Feedback accurately, operator are made to regulate and control thermal field in time, process for stabilizing, ensure that the yield rate of Opacity in lens and growth.
Additionally, in no matter thermocouple is in stove where, the mode of thermocouple assembling described by this utility model, method can effectively prevent thermocouple from reacting in aggressive atmosphere or volatility atmosphere and fusing, and can feed back accurately measuring temperature.
Claims (7)
1. the structure preventing thermocouple to be corroded or fusing in a high pressure single crystal growing furnace, including heater (1), crucible (2), crucible tray (4), upper crucible pole (5), the crucible tray (4) of nested crucible (2) is placed in heater (1) thermal field, upper crucible pole (5) is located at the bottom of crucible tray (4), it is characterized in that, upper crucible pole (5) is hollow structure, the lower end of crucible pole (5) is provided with sealing structure, the cavity of upper crucible pole (5) forms annular seal space, thermocouple (6) makes thermocouple measurement end (7) be positioned at the top of annular seal space of crucible pole (5) through sealing structure；Being additionally provided with the lower crucible pole (9) of hollow, the upper port of lower crucible pole (9) and the lower port of upper crucible pole (5) are detachable fastening structure.
The structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace the most according to claim 1, it is characterized in that, described detachable fastening structure is, the lower end of upper crucible pole (5) is provided with female thread, the upper end of lower crucible pole (9) is provided with external screw thread, and upper crucible pole (5) is connected with lower crucible pole (9) screw threads for fastening.
The structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace the most according to claim 2, it is characterized in that, described sealing structure is: upper crucible pole (5) bottom is provided with the internal diameter that the aperture of internal thread segment is installed with the cavity of thermocouple (6) more than upper crucible pole (5) top, upper limit shoulder is formed on the top making this internal thread segment, this upper limit shoulder carbon fiber felt packing ring (8) is arranged below, thermocouple (6) passes from described carbon fiber felt packing ring (8), when lower crucible pole (9) and upper crucible pole (5) screw thread screw, carbon fiber felt packing ring (8) is pressed between crucible pole (5) and lower crucible pole (9).
The structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace the most according to claim 1, it is characterized in that, detachable fastening structure can be also flange screw or clamping, sealing structure is: be provided with carbon fiber felt packing ring (8) between the lower surface of the upper surface of lower crucible pole (9) and upper crucible pole (5), thermocouple (6) passes from carbon fiber felt packing ring (8), when lower crucible pole (9) and upper crucible pole (5) flange screw or clamping, carbon fiber felt packing ring (8) is pressed between crucible pole (5) and lower crucible pole (9).
The structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace the most according to claim 1, it is characterised in that described thermocouple (6) is the thermocouple with protecting tube, thermocouple measurement end (7) is positioned at the outside of protecting tube.
The structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace the most according to claim 5, it is characterised in that protecting tube is two-way cavity earthenware.
The structure preventing thermocouple to be corroded or fusing in a kind of high pressure single crystal growing furnace the most according to claim 1, it is characterised in that thermocouple measurement end (7) is the alloy contact after thermocouple wire welding.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620334756.4U CN205529152U (en) | 2016-04-20 | 2016-04-20 | High pressure prevents structure that thermocouple is corroded or fuses in single crystal growing furnace |
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| CN201620334756.4U CN205529152U (en) | 2016-04-20 | 2016-04-20 | High pressure prevents structure that thermocouple is corroded or fuses in single crystal growing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105696086A (en) * | 2016-04-20 | 2016-06-22 | 中国电子科技集团公司第十三研究所 | Structure for preventing thermocouple in high-pressure single crystal furnace from being corroded or fused |
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2016
- 2016-04-20 CN CN201620334756.4U patent/CN205529152U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105696086A (en) * | 2016-04-20 | 2016-06-22 | 中国电子科技集团公司第十三研究所 | Structure for preventing thermocouple in high-pressure single crystal furnace from being corroded or fused |
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