CN205526376U - A protection type conveying mechanism for high cleanliness operation space - Google Patents
A protection type conveying mechanism for high cleanliness operation space Download PDFInfo
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- CN205526376U CN205526376U CN201620282670.1U CN201620282670U CN205526376U CN 205526376 U CN205526376 U CN 205526376U CN 201620282670 U CN201620282670 U CN 201620282670U CN 205526376 U CN205526376 U CN 205526376U
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Abstract
The utility model provides a protection type conveying mechanism for high cleanliness operation space, has overcome current cartesian robot can't satisfy the defect that is used for high cleanliness operation space requirement, and its technical essential is: the sealed unique structure that combines with the negative pressure adsorbed phase has been adopted, promptly in case the dust lane seals the passage orifice that linear electric motor's the external reserve fixed plate motion that the active cell reached and the locating support connecting plate fits together needs, form sealed cavity to the base member inner chamber, to drive the whole encapsulation of main part in the base member cavity, through the negative pressure adsorption in the sealed cavity with outside negative pressure source intercommunication, make the air current that produces flow in an orderly manner, discharge through gas vent corresponding in the sealed cavity, the sealed cavity of base member is not revealed out to the produced micronic dust of unit of ensureing respectively to move. Its structural design is equitable, and the micronic dust that the motion unit produced is not excessive, has avoided pollution surrounding environment and material, and gathering range is wide, and functioning speed is fast, positioning accuracy is high, can satisfy the requirement in various high cleanliness operation spaces.
Description
Technical field
This utility model relates to a kind of conveying mechanism being applicable to the material such as quasiconductor and solar energy industry chips, silicon wafer, a kind of protection type conveying mechanism for high-cleanness, high working space, industry requirement job area is wide, the speed of service is fast, positioning precision is high to be also applied for other, and cleaniliness classs specifies the Work places at more than Class10.
Background technology
In quasiconductor or solar energy industry, it is often necessary to transmit material in high-cleanness, high working space, it is desirable to the speed of service is fast, positioning precision is high.In order to keep the cleanliness factor of whole working space, it is desirable to conveying mechanism will meet the purity requirements of regulation, such as Class100, even Class10.
To this end, a lot of lustration type motions arise at the historic moment.As patent documentation is reported: application publication number is " a kind of both arms transferring robot being applied under high-cleanness, high environment " of CN 101908497 A, application publication number is " clean-room robot " of CN 103085058A, Authorization Notice No. is " planar multiple-articulation robot " of CN 200970769Y, " a kind of purifying robot " of Publication No. CN1935469A etc., disclosed in be all the robot of same class structure, i.e. revolute robot.Revolute robot has many good qualities, and wherein the important point is more easily done clean operation exactly, and therefore, almost all of clean-room robot is all revolute robot.But, due to the restriction of self structure, revolute robot there is also a lot of shortcoming, as little in working range, undertake that little, the applicating maintenance difficulty of load is high, high in cost of production.
Comparing revolute robot, Cartesian robot possesses a lot of unique advantage so that it is become a kind of robot that application is the most universal.Its Heterosis exists: super large working range, and load capacity is strong, Operation and Maintenance is simple, can be arbitrarily made with many axle construction etc..But, if used in high-cleanness, high working space, this kind of mechanism is not easily achieved the shortcoming of clean operation and just comes out.Linear motion device conventional in industry, as: the linear motion device etc. that the linear motion device of screw rod transmission, the linear motion device of belt transport, the linear motion device of rack pinion, linear electric motors drive, all there is a common problem in these linear motion devices, it is exactly in motor process, can there is mechanical friction in the range of the total travel of each axle, mechanical friction generation micronic dust disperses in air and can pollute surrounding.Some designers require to propose new technical scheme also for cleaning, such as " ultrathin glass cleaning carrying robot " that Authorization Notice No. is CN 200974243 Y, the architectural feature recorded is: uses X-axis and the Cartesian robot of Z axis composition of frame structure, adds that the terminal-collecting machine bottom Z axis can realize pickup and the linear transmission of material.It is in order to prevent the grease in kinematic axis excessive, and robot offers fat melting groove in the both sides of crossbeam, makes unnecessary grease stay in fat melting groove, it is to avoid to drip on glass, meets the clean requirement that ultra-thin glass produces.This mode offering fat melting groove in crossbeam both sides, the excessive of grease can only be avoided, the micronic dust not taking any measure to produce during preventing mechanism kinematic is excessive, it is impossible to reach to meet Class100 and the requirement of above cleanliness factor, it is impossible to apply in the higher working space of cleanliness factor.
Application publication number is " for the method and apparatus of perpendicular positioning substrate processing equipment in clean room " of CN 102986016A, merely disclose a kind of method producing substrate in clean room, and produce the device requirement of this substrate, and the not mentioned detailed construction carrying this chip device in clean room.
Authorization Notice No. is " a kind of double carrier motion platforms based on linear electric motors " of CN 201918376 U, disclose Long travel X axle linear electric motors, two short stroke Y axle linear electric motors can be simultaneously driven, i.e. on a linear motor stator electric, run two electric movers simultaneously.But do not propose the ability that mechanism runs in clean room, there is no the cleaniliness classs that clear and definite mechanism can reach, it is impossible to determine and may be used for high-cleanness, high working space.
Authorization Notice No. is " the IC material strip conveyer device of a kind of full-automatic laser marking machine " of CN 201438455 U, its technical scheme is: utilize linear electric motors to drive two electric mover segmentations to move, pneumatic tong is installed on electric mover, makes two tongs clamp material strip relay conveying.It designs also without proposing any mechanism for clean room, does not has the cleaniliness classs that clear and definite mechanism can reach, it is impossible to determine and may be used for high-cleanness working space.
Described on end, it is possible to the linear motion device that can reach Class10 lustration class requirement for high-cleanness space does not appear in the newspapers.
Utility model content
The purpose of this utility model is to provide a kind of protection type conveying mechanism for high-cleanness, high working space, overcome existing Cartesian robot and cannot meet the defect for high-cleanness, high working space requirement, its reasonable in design, the micronic dust that moving cell produces is the most excessive, avoid pollution surrounding and material, job area is wide, and the speed of service is fast, positioning precision is high, can meet the requirement of various high-cleanness, high working space.
This utility model be the technical scheme is that this conveying mechanism for high-cleanness, high space includes by substrate and is provided with, lower backplate and upper, the matrix that the side plate of lower cover plate is constituted, the linear motion device matched with line slideway by linear electric motors being assembled in matrix, that be arranged on side plate with the matrix inner space gas outlet for being connected outside negative pressure source, it is characterized in that: the stator of described linear electric motors and line slideway are separately fixed on substrate, the slide block of the mover of linear electric motors and linearly slide is separately fixed on positioning support connecting plate, follow the passway encapsulation dust-proof belt of the mover synchronization-moving positioning support connecting plate of linear electric motors；Matrix inner chamber is formed the two ends of the dust-proof belt of closed cavity, the both ends of the surface of side plate it are separately fixed at by end clamp plate, the periphery of dust-proof belt has microgap with contacting of the upper and lower backplate being arranged on side plate between end face, the upper and lower pressure roller of tensioning dust-proof belt is bearing in the external standby fixed plate being coated with shield plate, external standby fixed plate fits together with positioning support connecting plate, and makes the seat that connects of external standby fixed plate expose the upper surface of shield plate；Closed cavity in matrix is separated into the guide rail cavity and drag chain cavity being interconnected, guide rail cavity and the two ends of drag chain cavity and is respectively provided with the rail cavity gas outlet connected with negative pressure source and gas outlet, drag chain chamber by substrate.
The described linear motion device matched with line slideway by linear electric motors uses the linear motion device of screw driven linear motion device, the linear motion device of belt transport or rack-and-pinion transmission to substitute.
It is arranged between the upper and lower cover plate of described matrix side plate and upper and lower backplate the position docked, the position docked between upper and lower cover plate and substrate, the seal groove of mounting O-shaped sealing ring is all set.
Start the orderly negative-pressure air-flow that outside negative pressure source produces in the described guide rail cavity being interconnected and drag chain cavity, the clean gas of working space is sucked matrix inner chamber by being fixed on the microgap of the dust-proof belt periphery of side plate both ends of the surface, the micronic dust that rolling friction between upper and lower pressure roller and dust-proof belt produces is sucked in rail cavity body by the negative-pressure air-flow sucking matrix inner chamber simultaneously, discharge via rail cavity gas outlet, the micronic dust that the cable of the mover of linear electric motors is produced by drag chain motion is all sucked in drag chain cavity, discharges via gas outlet, drag chain chamber.
This utility model has the advantage that and good effect is: owing to this utility model uses the conventional linear motion device matched with line slideway by linear electric motors as the driving main body of conveying mechanism, may be used without other conventional linear motion device, the linear motion device etc. transmitted such as screw driven linear motion device, the linear motion device of belt transport or rack-and-pinion, so manufacture difficulty and production cost will not be increased considerably.The unique texture combined only with sealing and negative-pressure adsorption because of this utility model, the access portal that the mover i.e. closing linear electric motors with dust-proof belt and the external standby fixed plate motion fitted together with positioning support connecting plate need, matrix inner chamber is formed closed cavity, driving main body is entirely encapsulated in matrix cavity, by the negative-pressure adsorption effect in the closed cavity that connects with outside negative pressure source, the air-flow making generation flows in an orderly manner, the air vent being interconnected by matrix closed cavity and negative pressure source is discharged, guarantee that produced by each moving cell, micronic dust does not leak out the closed cavity of matrix, therefore its reasonable in design, working environment has only to provide vacuum source, it is easily met the requirement of cleanliness factor Class10.The micronic dust that each moving cell of said structure produces is the most excessive, it is to avoid pollution surrounding and material.Therefore, this utility model overcomes existing Cartesian robot and cannot meet the defect for high-cleanness, high working space requirement.
It addition, the unique texture that this conveying mechanism have employed above-mentioned sealing and negative-pressure adsorption combines, it is not limited by mounting means, can level, vertical and be mounted laterally, the requirement that can meet cleanliness factor Class10 is installed in any way.Meanwhile, can increase according to mover quantity, it is provided that plural completely self-contained motion, meet multi-functional requirement.Because its external standby fixed plate exposes the upper surface of shield plate, can also be used by the conveying mechanism that the combination of external standby fixed plate is other, therefore it is not limited to the use of single shaft linear motion, the multiaxis compound movement such as 2 axles, 3 axles can be derived on the basis of this conveying mechanism.Therefore, job area of the present utility model is wide, and the speed of service is fast, positioning precision is high, can meet the requirement of various high-cleanness, high working space.
In order to improve the sealing property of matrix inner chamber further, it is also possible to the position docked, the position docked between upper and lower cover plate and substrate will be arranged between the upper and lower cover plate of matrix side plate and upper and lower backplate, all arrange the seal groove of mounting O-shaped sealing ring.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, this utility model is further described.
Fig. 1 is a kind of structural representation of the present utility model；
Fig. 2 is the Fig. 1 sectional structure enlarged drawing along line A-A；
Fig. 3 is the Fig. 1 sectional structure enlarged drawing along line B-B；
Fig. 4 be this utility model negative-pressure adsorption closed cavity in air-flow olderly flowage principle schematic；
Fig. 5 is the Fig. 4 sectional view along line C-C；
Fig. 6 is the Fig. 4 sectional view along line D-D.
Sequence number explanation in figure: 1 shield plate, 2 dust-proof belts, 3 stators, 4 drag chains, 5 movers, 6 gas outlets, drag chain chamber, 7 rail cavity gas outlets, 8 positioning support connecting plates, 9 line slideways, 10 external standby fixed plates, 11 end clamp plates, 12 side plates, 13 substrates, 14 lower compression rollers, pressure roller, 16 times backplates, 17 upper guard boards, 18 slide blocks, 19 O RunddichtringOs, 20 upper cover plates, 21 drag chain cavitys, 22 guide rail cavitys, 23 times cover plates on 15.
Detailed description of the invention
Concrete structure of the present utility model is described in detail according to Fig. 1～6.This conveying mechanism being used in high-cleanness, high space include by substrate 13 and be provided with upper guard board 17, lower backplate 16 and upper cover plate 20, matrix that the side plate 12 of lower cover plate 23 is constituted, the linear motion device matched with line slideway 9 by linear electric motors being assembled in matrix, be arranged on side plate 12 with matrix inner space for being connected the parts such as the outside gas outlet, drag chain chamber 6 of negative pressure source (not shown), rail cavity gas outlet 7.The present embodiment uses linear electric motors as driving main body, with substrate 13 and the side plate 12 basic framework for linear motion device matrix that is arranged on substrate 13 both sides.The stator 3 of linear electric motors and line slideway 9 are separately fixed on substrate 13, and the mover 5 of linear electric motors and the slide block 18 of linearly guide rail 9 slip are separately fixed on positioning support connecting plate 8, and mover 5 coordinates the top being suspended in stator 3 with stator 3.When mover 5 moves, positioning support connecting plate 8 is moved along a straight line along line slideway 9 by slide block 18.Being more than that linear electric motors coordinate the linear motion device realized with line slideway 9, this part-structure is the structure of standard common, describes the most in detail.The linear motion device matched with line slideway 9 by linear electric motors can also use screw driven linear motion device, the linear motion dress of belt transport or rack-and-pinion to pass and put defeated linear motion device replacement.
Almost all of motion, as long as there being friction, all can produce micronic dust.Friction between the moving cell of the linear motion device of conveying mechanism matrix inner chamber easily produces micronic dust, if overflowing matrix outside micronic dust produced by each moving cell, will produce the environment around conveying mechanism and polluting.The not outer matrix that overflows of micronic dust how making linear motion device produce at the volley is emphasis of the present utility model.
Below as a example by linear electric motors coordinate, with line slideway 9, the linear motion device realized, this utility model is described.The stator 3 of these linear electric motors and line slideway 9 are separately fixed on substrate 13, the slide block 18 that mover 5 and linearly guide rail 9 slide is separately fixed on positioning support connecting plate 8, and the passway of the mover 5 synchronization-moving positioning support connecting plate 8 following linear electric motors is packaged with dust-proof belt 2.Matrix inner chamber is formed the two ends of the dust-proof belt 2 of closed cavity, is separately fixed at the both ends of the surface of side plate 12 by end clamp plate 11.The periphery of dust-proof belt 2 has microgap with the contacting of upper and lower backplate 17,16 being arranged on side plate 12 between end face.The upper and lower pressure roller 15,14 of tensioning dust-proof belt 2 is bearing in the external standby fixed plate 10 being coated with shield plate 1, the external standby fixed plate 10 installing other conveying mechanism as combination utilizes bolt to fit together with positioning support connecting plate 8, and makes the seat that connects of external standby fixed plate 10 expose the upper surface of shield plate 1.Lower compression roller 14 and upper pressure roller 15 can rotate around the mandrel of self.Upper pressure roller 15 is pressed in dust-proof belt 2 upper surface, the top making dust-proof belt 2 width is adjacent to upper guard board 17, is adjacent to lower backplate 16 below, ensureing along with the motion of external standby fixed plate 10, the microgap between the contact end face of upper and lower backplate 17,16 following closely, is sealed by dust-proof belt 2 periphery.Lower compression roller 14 torr, at the lower surface of dust-proof belt 2, makes dust-proof belt 2 lower surface have a microgap with the upper surface of external standby fixed plate 10, it is ensured that external standby fixed plate 10 does not produces friction with dust-proof belt 2 when motion.Shield plate 1 is arranged on outside external standby fixed plate 10, it would be possible to covered by the micronic dust overflowed in microgap.
Closed cavity in matrix is separated into the guide rail cavity 22 and drag chain cavity 21 being interconnected, guide rail cavity 22 and the two ends of drag chain cavity 21 by substrate 13 and is respectively provided with the rail cavity gas outlet 7 and gas outlet, drag chain chamber 6 connected with outside negative pressure source.Upper guard board 17, lower backplate 16 are arranged on side plate 12, with the cavity that substrate 13 and side plate 12 form a semi-surrounding, lower cover plate 23 is arranged on the bottom of linear motion device, dock with substrate 13 and lower backplate 16, enclose the space between substrate 13 and lower backplate 16, lower cover plate 23 can dismount at any time, convenient to the position adjustment of parts in telecontrol equipment.Upper cover plate 20 is arranged on the top of linear motion device, docks with upper guard board 17 and substrate 13, encloses the space on top.It is arranged between the upper and lower cover plate 20,23 of side plate 12 and upper and lower backplate 17,16 position docked, the position docked between upper and lower cover plate 20,23 and substrate 13, is all provided with the seal groove of mounting O-shaped sealing ring 19.Make to seal between lower cover plate 23 and substrate 13 and lower backplate 16 by O RunddichtringO 19, seal between upper cover plate 20 and substrate 13 and upper guard board 17.
In order to more effectively prevent micronic dust excessive, such as Fig. 4, 5, shown in 6, start negative pressure source, the orderly negative-pressure air-flow produced in the guide rail cavity 22 being interconnected and drag chain cavity 21, rail cavity gas outlet 7 and gas outlet, drag chain chamber 6 is flowed to along shown by arrow direction, the clean gas of working space is sucked matrix inner chamber by being fixed on the microgap of dust-proof belt 2 periphery of side plate 12 both ends of the surface, suck the negative-pressure air-flow of matrix inner chamber simultaneously by upper, lower compression roller 15, the micronic dust that between 14 and dust-proof belt 2, rolling friction produces sucks in guide rail cavity 22, discharge via rail cavity gas outlet 7, the micronic dust that the cable of mover 5 is produced by drag chain motion is all sucked in drag chain cavity 21, discharge via gas outlet, drag chain chamber 6.
Specific works process is as follows: the mover 5 of linear electric motors moves along a straight line along stator 3 and line slideway 9 under the instruction of control system, the positioning support connecting plate 8 being assembled on mover 5 and external standby fixed plate 10 is driven to move along a straight line along line slideway 9, owing to have employed high-precision line slideway 9 and linear electric motors, thereby ensure that the high speed of linear motion unit and high accuracy.In external standby fixed plate 10 motor process, upper pressure roller 15 rolls at dust-proof belt 2 upper surface, is pressed in by dust-proof belt 2 on upper guard board 17 and lower backplate 16, seals the opening that the motion of external standby fixed plate 10 produces, it is to avoid internal micronic dust is excessive.Lower compression roller 14 torr, below dust-proof belt 2, makes dust-proof belt 2 lower surface have a microgap with the upper surface of external standby fixed plate 10, it is ensured that external standby fixed plate 10 does not produces friction with dust-proof belt 2 when motion.Substrate 13, side plate 12, lower backplate 16, upper guard board 17, upper cover plate 20, lower cover plate 23 and dust-proof belt 2 form a controlled closed cavity of air-flow, and the pipeline in external connecting negative pressure source is connected with gas outlet, drag chain chamber 6, rail cavity gas outlet 7.Open vacuum, make guide rail cavity 22 and drag chain cavity 21 produce orderly negative-pressure air-flow.Clean gas in environment enters in guide rail cavity 22 by the microgap of dust-proof belt 2 periphery, in bringing the micronic dust that rolling friction between upper pressure roller 15, lower compression roller 14 and dust-proof belt 2 produces into guide rail cavity 22 the most excessive, in guide rail cavity 22, air-flow is discharged by rail cavity gas outlet 7.The mover 5 of the linear electric motors cable used that moves move by drag chain 4 in drag chain cavity 21, and the micronic dust of motion generation is all closed in drag chain cavity 21, and in drag chain cavity 21, air-flow is discharged by gas outlet, drag chain chamber 6.The micronic dust making linear motion unit produce because of orderly air-flow will not be excessive, but is discharged by specific air vent, therefore avoids pollution surrounding and material.
Claims (4)
1. the protection type conveying mechanism for high-cleanness, high working space, including by substrate and be provided with, lower backplate and upper, the matrix that the side plate of lower cover plate is constituted, the linear motion device matched with line slideway by linear electric motors being assembled in matrix, that be arranged on side plate with the matrix inner space gas outlet for being connected outside negative pressure source, it is characterized in that: the stator of described linear electric motors and line slideway are separately fixed on substrate, the slide block of the mover of linear electric motors and linearly slide is separately fixed on positioning support connecting plate, follow the passway encapsulation dust-proof belt of the mover synchronization-moving positioning support connecting plate of linear electric motors；Matrix inner chamber is formed the two ends of the dust-proof belt of closed cavity, the both ends of the surface of side plate it are separately fixed at by end clamp plate, the periphery of dust-proof belt has microgap with contacting of the upper and lower backplate being arranged on side plate between end face, the upper and lower pressure roller of tensioning dust-proof belt is bearing in the external standby fixed plate being coated with shield plate, external standby fixed plate fits together with positioning support connecting plate, and makes the seat that connects of external standby fixed plate expose the upper surface of shield plate；Closed cavity in matrix is separated into the guide rail cavity and drag chain cavity being interconnected, guide rail cavity and the two ends of drag chain cavity and is respectively provided with the rail cavity gas outlet connected with negative pressure source and gas outlet, drag chain chamber by substrate.
Protection type conveying mechanism for high-cleanness, high working space the most according to claim 1, it is characterised in that: the described linear motion device matched with line slideway by linear electric motors uses the linear motion device of screw driven linear motion device, the linear motion device of belt transport or rack-and-pinion transmission to substitute.
Protection type conveying mechanism for high-cleanness, high working space the most according to claim 1, it is characterized in that: be arranged between the upper and lower cover plate of described matrix side plate and upper and lower backplate the position docked, the position docked between upper and lower cover plate and substrate, all arranges the seal groove of mounting O-shaped sealing ring.
Protection type conveying mechanism for high-cleanness, high working space the most according to claim 1, it is characterized in that: start the orderly negative-pressure air-flow that outside negative pressure source produces in the described guide rail cavity being interconnected and drag chain cavity, the clean gas of working space is sucked matrix inner chamber by being fixed on the microgap of the dust-proof belt periphery of side plate both ends of the surface, suck the negative-pressure air-flow of matrix inner chamber simultaneously by upper, the micronic dust that between lower compression roller and dust-proof belt, rolling friction produces sucks in rail cavity body, discharge via rail cavity gas outlet, the micronic dust that the cable of the mover of linear electric motors is produced by drag chain motion is all sucked in drag chain cavity, discharge via gas outlet, drag chain chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620282670.1U CN205526376U (en) | 2016-04-07 | 2016-04-07 | A protection type conveying mechanism for high cleanliness operation space |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620282670.1U CN205526376U (en) | 2016-04-07 | 2016-04-07 | A protection type conveying mechanism for high cleanliness operation space |
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| Publication Number | Publication Date |
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| CN205526376U true CN205526376U (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620282670.1U Withdrawn - After Issue CN205526376U (en) | 2016-04-07 | 2016-04-07 | A protection type conveying mechanism for high cleanliness operation space |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105731014A (en) * | 2016-04-07 | 2016-07-06 | 富创得科技（沈阳）有限公司 | Protective conveying mechanism for high-cleanliness working spaces |
| CN107053007A (en) * | 2017-01-23 | 2017-08-18 | 宁波敏实汽车零部件技术研发有限公司 | A kind of mould changing device |
-
2016
- 2016-04-07 CN CN201620282670.1U patent/CN205526376U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105731014A (en) * | 2016-04-07 | 2016-07-06 | 富创得科技（沈阳）有限公司 | Protective conveying mechanism for high-cleanliness working spaces |
| CN107053007A (en) * | 2017-01-23 | 2017-08-18 | 宁波敏实汽车零部件技术研发有限公司 | A kind of mould changing device |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160831 Effective date of abandoning: 20170915 |
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| AV01 | Patent right actively abandoned |