CN205508768U - Gaseous glow discharge device - Google Patents
Gaseous glow discharge device Download PDFInfo
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- CN205508768U CN205508768U CN201620314619.4U CN201620314619U CN205508768U CN 205508768 U CN205508768 U CN 205508768U CN 201620314619 U CN201620314619 U CN 201620314619U CN 205508768 U CN205508768 U CN 205508768U
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- spacer
- glow discharge
- aura
- magnet
- holding clamp
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Abstract
The utility model provides a gaseous glow discharge device, form including fixed fixture, locating piece, spacer, magnet, screw, fixed fixture and material processing equipment phase -match, fixed fixture pass the locating piece with the spacer by the screw and fix to make spacer and fixing clip have certain distance and fixed the spacer, magnet can move on the spacer in a flexible way, and the magnet magnetic field line can be used in near the region of assigned position for near the regional gas atom ionization efficiency in assigned position improves, can carry out the accurate control to the position of glow discharge in -process aura and the shape and the brightness light intensity of aura, has shortened the glow discharge time, the utility model discloses a not enough of prior art can be overcome to the technique effect, solves and implements difficult aura, the unstable problem of aura of forming of glow discharge process at specified region, required gas intensity of pressure and the voltage of aura obtains very big improvement, improve the success rate that part surface handled, the efficiency of work is improved and qualification rate.
Description
Technical field.
The utility model relates to a kind of gas glow discharge device, more precisely, relates to component surface and processes a kind of glow discharge sub controlling unit in technique.
Background technology.
In the production industry of photomultiplier, part early stage needs to use plasma and cleans appointment position material surface or make gas particle and the surfacing specifying position carry out the compound required for reaction is formed, and this process is referred to as glow discharge processing procedure.But it is as the shape that specific bit puts and changes the plasma shape after causing the formation of plasma and being formed and intensity is difficult to control to.
In conventional art, in parts thereof surface treatment process, when implementing the glow discharging process of certain gas, it is difficult to make aura be formed on the near zone of appointment position by single adjustment voltage swing and gas pressure intensity, aura shape can be easily varied aura intensity and is difficult to control to simultaneously, seriously constrains operating efficiency and qualification rate.
Utility model content.
The purpose of this utility model has been to provide for a kind of gas glow discharge device, solves specifying region enforcement glow discharging process not to be easily formed aura, the problem of aura instability；Gas pressure intensity and voltage required for aura are very significantly improved simultaneously；And then it is greatly improved the success rate that component surface processes；It is capable of specifying the surfacing glow discharge of position accurately to control parts, improves operating efficiency and qualification rate.
For realizing the purpose of this utility model, the utility model provides a kind of gas glow discharge device to include: holding clamp, locating piece, spacer, magnet, screw form.
Holding clamp matches with material processing apparatuses, and holding clamp is fixed through locating piece by screw with spacer, so that spacer and holding clamp have a certain distance and secure spacer.
Magnet can move on spacer flexibly, magnetic field of magnets line can act on the near zone specifying position, make to specify position near zone gas atom efficiency of ionization to improve, the intensity of the position of aura and the shape of aura and aura in glow discharging process accurately can be controlled, shorten glow discharge time.
Holding clamp material is that transparent plastic is made, and can effectively observe intensity and the glow discharge shape of glow discharge.
Locating piece material is that plastics are made.
Spacer material is can to make with the metal of magnetic conduction.
Compared with traditional gas glow discharge device, the utility model has the following advantages.
The utility model uses holding clamp to match with material processing apparatuses, magnetic field not only can be acted near zone accurately that specify position, and can well observe, by the special peep hole of holding clamp, the position that glow discharge is formed, the shape of aura and intensity；Spacer connects holding clamp and magnet, has good toughness, is difficult to loosen, is hardly damaged；The utility model is provided that the magnetic field line of proper strength, promotes that the near zone specifying position forms plasma, and then glow discharging process can be made to complete to automatically control, improve operating efficiency and qualification rate.
The utility model will combine accompanying drawing by preferred embodiment and be illustrated.
Accompanying drawing explanation.
Fig. 1. it is the utility model installation drawing.
Fig. 2. for utility model works Principle of Process figure.
Symbol description in accompanying drawing: 1, holding clamp；2, locating piece；3, screw；4, spacer；5, magnet；6, processing equipment window；7, processing equipment；8, potential plate；9, processed material；10, low potential plate；11, electric field line；12, magnetic field line；13, high potential plate.
Detailed description of the invention.
Will be described in detail specific embodiments of the present utility model referring to the drawings.
Such as Fig. 1, the utility model includes: holding clamp 1；Locating piece 2；Screw 3；Spacer 4；Magnet 5.
Holding clamp 1 is fixed on material processing apparatuses 7, and holding clamp 1 is fixed through locating piece 2 by screw 3 with spacer 4, and magnet 5 can move on spacer 4 flexibly；Magnet 5 is made to reach to specify position by suitably adjusting holding clamp 1, make the near zone that its magnetic field line can be distributed between processed material 9 and potential plate 8, with the common effect of electric field line, play the formation promoting plasma and shape and effect of intensity of controlling aura.
Such as Fig. 2: the operation principle process of gas ionization between processed material 9 and potential plate 8.Traditional handicraft make under the effect of electric field line 11 gas molecule A ionize, form positively charged particle and electronics, and then formation plasma, but owing to low potential plate 10 shape exists the reason that abnormity is possible, cause electric field line 11 between low potential plate 10 and high potential plate 13 uniform not, if only being difficult to make aura shape and aura intensity be stabilized by the pressure of regulation gas A and the intensity of electric field line 11.It is that between low potential plate 10 and high potential plate 13, the electromerism in region adds magnetic field line 12 by this practical device, and then promote the formation of area plasma body between low potential plate 10 and high potential plate 13, and indirectly controlled shape and the intensity of aura by the intensity controlling magnetic field line 11.
Certainly; the utility model also can have other embodiments; on the premise of the utility model essence, person skilled can make corresponding change or deformation according to the utility model, but these change and deformation all should belong to the utility model scope of the claims.
Claims (4)
1. a gas glow discharge device, it is characterised in that include that holding clamp, locating piece, spacer, magnet, screw form；Holding clamp matches with material processing apparatuses, and holding clamp is fixed through locating piece by screw with spacer, so that spacer and holding clamp have a certain distance and secure spacer；Magnet can move on spacer flexibly, magnetic field of magnets line can act on the near zone specifying position, make to specify position near zone gas atom efficiency of ionization to improve, the intensity of the position of aura and the shape of aura and aura in glow discharging process accurately can be controlled, shorten glow discharge time.
A kind of gas glow discharge device the most according to claim 1, it is characterised in that holding clamp material is that transparent plastic is made, and can effectively observe intensity and the glow discharge shape of glow discharge.
A kind of gas glow discharge device the most according to claim 1, it is characterised in that locating piece material is that plastics are made.
A kind of gas glow discharge device the most according to claim 1, it is characterised in that spacer material is can to make with the metal of magnetic conduction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620314619.4U CN205508768U (en) | 2016-04-15 | 2016-04-15 | Gaseous glow discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620314619.4U CN205508768U (en) | 2016-04-15 | 2016-04-15 | Gaseous glow discharge device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205508768U true CN205508768U (en) | 2016-08-24 |
Family
ID=56713661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620314619.4U Active CN205508768U (en) | 2016-04-15 | 2016-04-15 | Gaseous glow discharge device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205508768U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108615668A (en) * | 2018-04-04 | 2018-10-02 | 中国科学院上海硅酸盐研究所 | Enhance the device and method of radio frequency glow discharge mass ions signal strength with toroidal magnetic field |
-
2016
- 2016-04-15 CN CN201620314619.4U patent/CN205508768U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108615668A (en) * | 2018-04-04 | 2018-10-02 | 中国科学院上海硅酸盐研究所 | Enhance the device and method of radio frequency glow discharge mass ions signal strength with toroidal magnetic field |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Jie Zhangyi Inventor after: Huo Yukai Inventor after: Liu Haihui Inventor after: Gao Xiaoxiang Inventor before: Xie Zhangyi Inventor before: Huo Yukai Inventor before: Liu Haihui Inventor before: Gao Xiaoxiang |
|
| CB03 | Change of inventor or designer information |