CN205505966U - Thickness detecting device - Google Patents

Thickness detecting device Download PDF

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Publication number
CN205505966U
CN205505966U CN201620241535.2U CN201620241535U CN205505966U CN 205505966 U CN205505966 U CN 205505966U CN 201620241535 U CN201620241535 U CN 201620241535U CN 205505966 U CN205505966 U CN 205505966U
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China
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electrode
correction
detection apparatus
detecting electrode
public electrode
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CN201620241535.2U
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Chinese (zh)
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姜利
张凯
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Weihai Hualing Opto Electronics Co Ltd
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Weihai Hualing Opto Electronics Co Ltd
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Abstract

The utility model provides a thickness detecting device, include: a public electrode. Detection electrode corresponds and is mutual at a distance from the ground setting with NULL, forms monitoring channel between detection electrode and the NULL, revise the electrode, correspond and be mutual at a distance from the ground setting with NULL, revise the outside of electrode setting at monitoring channel, the control part is with NULL, detection electrode with revise the equal electricity of electrode and be connected for output according to reviseing the electrode is reviseed detection electrode's output. Owing to add and correct the electrode setting in monitoring channel's outside, not through adding and correcting the electrode when waiting to detect the thing through monitoring channel, consequently treat at detection electrode and detect the thing and examine time measuring, add and correct that the electrode can feed back because the electrical characteristics that external disturbance results in change, the control part adopts to be added and corrected the signal that the electrode detected and adds and corrects the signal that detection electrode detected to the signal of telecommunication of avoiding the reaction to wait to detect thing thickness receives external disturbance's influence, obtains exact du genggao's thickness value.

Description

Thickness detection apparatus
Technical field
This utility model relates to electro-mechanical arts, in particular to a kind of thickness detection apparatus.
Background technology
Thickness detection apparatus has a wide range of applications, such as to flake article such as paper, bill, plastic sheeting, textile fabrics Carry out continuous thickness measure, this producing, detect, process, be in increasingly consequence during recovery etc..
And in the prior art, favorably carrying out the detection technique of film thickness with the electrostatic induction between motor, one of which is to utilize The pole plate of capacity plate antenna, as the Sensitive Apparatus of Thickness sensitivity, makes thing to be detected by between two-plate, and the thickness of actual measurement object becomes Change the electric capacity movable polar plate caused and produce displacement, cause the capacity of plate condenser to change.Another kind of detection device is to use Relative public electrode and detection electrode form sense channel, when object to be measured is through sense channel, change between two electrodes The dielectric constant of medium, make the amount of charge of sensing on detecting electrode change the most therewith, the thickness of detection object is different, Two interelectrode dielectric constants also differ, and then on detecting electrode, the amount of charge of sensing also differs, therefore by detection The size of electrode telecommunication number, calculates the thickness of detection object.
But, the thickness detection apparatus utilizing electrical characteristics to carry out detecting of the prior art can be disturbed by external environment, such as Temperature, humidity and noise etc., interference can make the signal of telecommunication of detection change, the precision of destructive test.
Utility model content
Main purpose of the present utility model is to provide one, to solve the problems of the prior art.
To achieve these goals, this utility model provides a kind of thickness detection apparatus, including: public electrode;Detecting electrode, Corresponding with public electrode and arrange spaced reciprocally, form sense channel between detecting electrode and public electrode;Correction electrode, with Public electrode is corresponding and arranges spaced reciprocally, and correction electrode is arranged on the outside of sense channel;Control portion, with public electrode, Detecting electrode and correction electrode all electrically connect, for making corrections the output of detecting electrode according to the output of correction electrode.
Further, the electricity formed between the electrical characteristics and detecting electrode and the public electrode that are formed between correction electrode and public electrode Characteristic is identical.
Further, size and the detecting electrode of correction electrode equivalently-sized, correction electrode spaced apart with public electrode and Detecting electrode is spaced apart with public electrode equal.
Further, correction electrode is positioned apart from detecting electrode on the direction of bearing of trend being perpendicular to sense channel.
Further, detecting electrode is multiple, and multiple detecting electrodes are arranged side by side, and the bearing of trend of sense channel is multiple detection The orientation of electrode.
Further, thickness detection apparatus also includes the first protection portion being arranged on outside public electrode, and/or is arranged on detection electricity The second protection portion outside pole.
Further, thickness detection apparatus also includes the second protection portion being arranged on outside detecting electrode and is arranged on outside correction electrode 3rd protection portion of side, the thickness covering the second protection portion on the outer surface towards public electrode of detecting electrode exists with covering The thickness of the 3rd protection portion on the outer surface towards public electrode of correction electrode is equal.
Further, thickness detection apparatus also includes: the first conductive part, is arranged on the appearance towards detecting electrode of public electrode On face;Second conductive part, is arranged on the outer surface towards public electrode of detecting electrode;3rd conductive part, is arranged on correction On the outer surface towards public electrode of electrode;Wherein the second conductive part and the 3rd conductive part is equivalently-sized.
Further, control portion includes difference channel, and the input of difference channel electrically connects with detecting electrode and correction electrode respectively, Difference channel obtains output valve according to the difference between output and the output of correction electrode of detecting electrode.
Further, control portion includes: detection displacement output circuit, input electrically connects with detecting electrode, for output detections The signal of telecommunication produced between electrode and public electrode;Correction displacement output circuit, input electrically connects, for defeated with correction electrode Go out the signal of telecommunication produced between electrode and public electrode that makes corrections.
Application the technical solution of the utility model, thickness detection apparatus uses electrical property change to carry out Thickness sensitivity, i.e. in common electrical Form sense channel between pole and detecting electrode, thing to be detected from sense channel by changing between public electrode and detecting electrode Electrical characteristics, drawn the thickness of thing to be detected by the change of this electrical characteristics.Additionally, Thickness sensitivity of the present utility model dress Put and be additionally provided with correction electrode, owing to correction electrode is arranged on the outside of sense channel, thing to be detected by during sense channel not Through correction electrode, therefore detecting electrode treat detectable substance detect time, correction electrode can feed back owing to external interference is led The electrical property change caused, control portion use correction electrode detection to signal signal that detecting electrode is detected make corrections, from And avoid the signal of telecommunication reacting thing thickness to be detected to be affected by external interference, obtain the higher one-tenth-value thickness 1/10 of exact degree.
Accompanying drawing explanation
The Figure of description of the part constituting the application is used for providing being further appreciated by of the present utility model, of the present utility model Schematic description and description is used for explaining this utility model, is not intended that improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 shows the front view of an embodiment according to thickness detection apparatus of the present utility model;
Fig. 2 shows that schematic diagram is arranged in the plate face of the second substrate in Fig. 1;
Fig. 3 shows the logical relation schematic diagram in the control portion according to thickness detection apparatus of the present utility model;And
Fig. 4 shows the front view of another embodiment according to thickness detection apparatus of the present utility model.
Wherein, above-mentioned accompanying drawing includes the following drawings labelling:
100, public electrode;201, detecting electrode;202, correction electrode;11, the first framework;12, first substrate;14、 First protection portion;15, the first conductive part;21, the second framework;22, second substrate;23, circuit unit;24, second protect Protect portion;25, the second conductive part;26, the 3rd conductive part.
Detailed description of the invention
It should be noted that in the case of not conflicting, the embodiment in the application and the feature in embodiment can be mutually combined. Describe this utility model below with reference to the accompanying drawings and in conjunction with the embodiments in detail.
This utility model provides a kind of thickness detection apparatus, and as shown in Figures 1 to 4, this thickness detection apparatus includes: common electrical Pole 100;Detecting electrode 201, corresponding with public electrode 100 and arrange spaced reciprocally, detecting electrode 201 and public electrode 100 Between formed sense channel;Correction electrode 202, corresponding with public electrode 100 and arrange spaced reciprocally, the electrode 202 that makes corrections sets Put the outside at sense channel;Control portion, all electrically connects with public electrode 100, detecting electrode 201 and correction electrode 202, uses According to the output of correction electrode 202, the output of detecting electrode 201 being maked corrections.
Thickness detection apparatus of the present utility model uses electrical property change to carry out Thickness sensitivity, i.e. at public electrode 100 and detection electricity Form sense channel between pole 201, thing to be detected from sense channel by change public electrode 100 and detecting electrode 201 it Between electrical characteristics, drawn the thickness of thing to be detected by the change of this electrical characteristics.Additionally, Thickness sensitivity of the present utility model Device is additionally provided with correction electrode 202, and owing to correction electrode 202 is arranged on the outside of sense channel, thing to be detected is logical by detection During road not through correction electrode 202, therefore detecting electrode 201 treat detectable substance detect time, correction electrode 202 can The electrical property change that feedback causes due to external interference, the signal that control portion employing correction electrode 202 detects is to detecting electrode 201 The signal detected makes corrections, thus avoids the signal of telecommunication reacting thing thickness to be detected to be affected by external interference, obtains true The higher one-tenth-value thickness 1/10 of exactness.
Specifically, forming a plate condenser between detecting electrode 201 and public electrode 100, gap therebetween is The medium of capacitor, when thing to be detected is through this gap, is equivalent to thing to be detected and constitutes a part of medium of capacitor, because of The electrical characteristics of this capacitor change, if being now connected with electric charge on detecting electrode 201 and public electrode 100, then can show as The change of electric charge, in embodiment of the present utility model, control portion is used for detecting between detecting electrode 201 and public electrode 100 Voltage signal.And the interference in the external world is with changing by the capacity plate antenna constituted on detecting electrode 201 and public electrode 100 Electrical characteristics, such as temperature, humidity, vibrating noise and electromagnetic noise etc., formed between correction electrode 202 and public electrode 100 Capacity plate antenna can reflect the electrical property change that these external interference cause, i.e. utilize correction electrode 202 and public electrode 100 Between the signal of telecommunication output of capacity plate antenna that the formed electricity of capacity plate antenna to being formed between detecting electrode 201 and public electrode 100 Signal output makes corrections, and can realize removing the effect of at least some of external interference so that the thickness signal detected is more Accurately.
Preferably, the electrical characteristics formed between correction electrode 202 and public electrode 100 and detecting electrode 201 and public electrode 100 Between formed electrical characteristics identical.In order to reflect the extraneous interference impact on the signal of telecommunication of detecting electrode 201 output more accurately, Formed between the electrical characteristics and detecting electrode 201 and the public electrode 100 that are formed between correction electrode 202 and public electrode 100 Electrical characteristics are identical, the performance of the capacity plate antenna the most i.e. formed between correction electrode 202 and public electrode 100 and detection electricity The performance of capacity plate antenna formed between pole 201 with public electrode 100 is identical, under identical condition, detecting electrode 201 with The signal of telecommunication of correction electrode 202 output is identical.
In order to realize the effect above, more specifically, size and the detecting electrode 201 of correction electrode 202 is equivalently-sized, make corrections Electrode 202 is spaced apart with public electrode 100 spaced apart with public electrode 100 with detecting electrode 201 equal.Additionally, Correction electrode 202 is the most identical with the material of detecting electrode 201.
Preferably, as in figure 2 it is shown, correction electrode 202 on the direction of bearing of trend being perpendicular to sense channel with detecting electrode 201 are positioned apart from.Owing to forming sense channel between detecting electrode 201 and public electrode 100, therefore correction electrode 202 is wanted Shift to install with sense channel.
More specifically, detecting electrode 201 is multiple, multiple detecting electrodes 201 are arranged side by side, and the bearing of trend of sense channel is The orientation of multiple detecting electrodes 201.Multiple detecting electrodes 201 are arranged in long queue, and and public electrode 100 between shape Become sense channel, and the electrode 202 that makes corrections is along being perpendicular to the direction of sense channel with multiple detecting electrodes 201 separately, thus keep away Get out of the way sense channel.And in the embodiment illustrated in figure 2, on the length direction of sense channel, correction electrode 202 is also provided with Outside in the end of sense channel.More specifically, correction electrode 202 is arranged on substrate on the length direction of sense channel Edge.
In certain embodiments, the end face of detecting electrode 201 or public electrode 100 is exposed setting, i.e. detecting electrode 201 or Outside public electrode 100 and be not provided with protection portion, the such as embodiment shown in Fig. 1.
And in further embodiments, thickness detection apparatus also includes the first protection portion 14 being arranged on outside public electrode 100, And/or it is arranged on the second protection portion 24 outside detecting electrode 201.
Cause detection error in order to avoid electrode is worn, therefore protection portion can be set in the outside of electrode, to be checked to prevent Survey thing worn out electrode, improve the accuracy of Thickness sensitivity.Can be to need the electrode contacted with thing to be detected that protection portion is set, also Can be that two electrodes are respectively provided with protection portion.
And as shown in Figure 4 embodiment, it is provided with the first protection portion 14 in the outside of public electrode 100, at detecting electrode 201 Outside be provided with the second protection portion 24, the first protection portion 14 and the second protection portion 24 can be scumbling coating.
Preferably, thickness detection apparatus also includes the second protection portion 24 being arranged on outside detecting electrode 201 and is arranged on correction electricity The 3rd protection portion outside pole 202, covers the second protection on the outer surface towards public electrode 100 of detecting electrode 201 The thickness in portion 24 is equal with the thickness of the 3rd protection portion covered on the outer surface towards public electrode 100 of correction electrode 202.
Although correction electrode 202 will not occur abrasion condition, but owing to detecting electrode 201 is provided with the second protection portion 24, therefore So that correction electrode 202 is identical with the situation of detecting electrode 201, outside correction electrode 202, it is also provided with the 3rd protection portion, 3rd protection portion is the most identical with the thickness of the second protection portion 24 and material etc..In the embodiment show in figure 4, the second protection portion 24 It is same coat with the 3rd protection portion.
Preferably, in the embodiment show in figure 4, thickness detection apparatus also includes: the first conductive part 15, is arranged on common electrical On the outer surface towards detecting electrode 201 of pole 100;Second conductive part 25, be arranged on detecting electrode 201 towards common electrical On the outer surface of pole 100;3rd conductive part 26, is arranged on the outer surface towards public electrode 100 of correction electrode 202; Wherein the second conductive part 25 and the 3rd conductive part 26 is equivalently-sized.
In order to improve the sensitivity of the electrode of thickness detection apparatus so that have to be detected between public electrode 100 and detecting electrode 201 When thing passes through, detecting electrode 201 provides more sensitive reaction, specific in capacity plate antenna, i.e. and detecting electrode 201 and common electrical Charge inducing between pole 100 can accumulate rapidly so that output voltage can increase the most rapidly, thus improve whole thickness inspection Survey the sensitivity of device, embodiment as shown in Figure 4, the end face of public electrode 100 is provided with the first conductive part 15, detection electricity Being provided with the second conductive part 25 on the end face of pole 201, wherein conductive part is the conductive film that high conductive material is made, including gold or Silver etc..
In order to improve the sensitivity of thickness detection apparatus, the only end face at public electrode 100 and detecting electrode 201 just arranges conductive part Can realize.List in the embodiment show in figure 4, for the accuracy maked corrections, i.e. protect by correction electrode 202 and detecting electrode 201 Holding identical sensitivity and capacitance, therefore the end face at correction electrode 202 is also provided with the 3rd conductive part 26, and the 3rd leads Electricity portion 26 is identical with the specification of the second conductive part 25.
When a certain electrode of thickness detection apparatus is i.e. provided with conductive part, and when being additionally provided with protection portion, protection portion is positioned at conductive part Outside.
Preferably, as it is shown on figure 3, control portion includes difference channel, the input of difference channel respectively with detecting electrode 201 and Correction electrode 202 electrically connects, and difference channel is according to the difference between output and the output of correction electrode 202 of detecting electrode 201 Obtain output valve.It is pointed out that in certain embodiments, difference channel also has enlarging function, is therefore a kind of difference Amplifying circuit.
In this embodiment, control portion also includes: detection displacement output circuit, and input electrically connects with detecting electrode 201 respectively, For the signal of telecommunication produced between output detections electrode 201 and public electrode 100;Correction displacement output circuit, input and benefit Anelectrode 202 electrically connects, for exporting the signal of telecommunication produced between correction electrode 202 and public electrode 100.
For the embodiment of the such as thickness detection apparatus with multiple detecting electrode 201 shown in Fig. 2, detection displacement output electricity The input on road all electrically connects with the outfan of each detecting electrode 201, and multiple detecting electrodes 201 are sequentially arranged at intervals, and is formed Sense channel, in unit length, the quantity of electrode is the most, and the resolution of detection device is the highest, detection displacement output circuit Effect is by the signal of the multiple detecting electrodes 201 exported simultaneously, is arranged in order output out, in order to signal processing.
According to the embodiment shown in Fig. 1 and 2, second substrate 22 is additionally provided with circuit unit 23, i.e. includes detecting displacement defeated Go out circuit, correction displacement output circuit and the circuit unit of difference channel.
After electrically charged on public electrode 100, each detecting electrode 201 and correction electrode 202 just can induce electric charge, it is assumed that Charge inducing on detecting electrode 201 is Q201, and the charge inducing on correction electrodes is Q202, now detection displacement output The voltage output signal of circuit is V201, V201=Q201/C201, and the voltage output signal of correction displacement output circuit is V202, V202=Q202/C202, wherein C201 and C202 is detecting electrode 201 and the capacitance of correction electrode 202, at configuration electricity Detecting electrode 201 and the capacitance C201=C202=C of correction electrode 202 should be made during pole.So output V=G of difference channel × (V1-V2)=G × (Q201/C201-Q202/C202)=G × (Q201-Q202)/C, G are the times magnification of differential amplification Number.
Induce on detecting electrode 201 and correction electrode 202 electric charge number depend on the area of electrode and two kinds of electrodes and common electrical Pole 100 is separated by a distance, Jie between the quantity of electric charge and two kinds of electrodes and public electrode 100 entrained on public electrode 100 Electric constant.In the case of structure is certain, the quantity of electric charge that detecting electrode 201 and correction electrode 202 induce and detection electricity Pole 201, correction electrode 202 and public electrode 100 between dielectric constant relevant.When thing to be detected is through sense channel, change The dielectric constant of the medium between detecting electrode 201 and public electrode 100, makes the amount of charge of sensing on detecting electrode 201 send out Changing, it is assumed that change in electrical charge amount is a, now voltage output V201 '=(the Q201+a)/C201 of detection displacement output circuit. When thing to be detected is through sense channel, because correction electrode 202 is positioned at the region outside valid analysing range, make corrections electrode 202 And the dielectric constant of the medium between public electrode 100 does not change, on correction electrode 202, the quantity of the electric charge of sensing is the most not Becoming, the voltage output of correction displacement output circuit does not changes, the voltage output V202 ' of correction displacement output circuit =Q202/C202, C201=C202=C.Output the V '=G of difference channel × (V201 '-V202 ')=G × ((Q201+a) / C201-Q202/C202))=G × (Q201+a-Q202)/C, film to be measured can be calculated when passing through, detecting electrode 201 Change in electrical charge is V '-V=G × (Q201+a-Q202)/C-G × (Q201-Q202)/C=G × a/C, therefore by electricity How many changes extremely going up the quantity of electric charge can calculate the thickness of film to be measured.
When temperature, humidity change and noise effect, the sensitivity of correction electrode 202 is identical with detecting electrode 201 sensitivity, detection electricity Experiencing identical impact on pole 201 and correction electrode 202, change in electrical charge amount is the most identical, it is assumed that the electricity caused because of external interference Lotus variable quantity is all b, now the voltage output V201 of detection displacement output circuit "=(Q201+a+b)/C201, make corrections position Move the voltage output V202 of output circuit "=(Q202+b)/C202, C201=C202=C.The output V of difference channel "=G × (V201 "-V202 ")=G × ((Q201+a+b)/C201-(Q202+b)/C202))=G × (Q201+a-Q202) / C, can calculate in temperature, humidity change and during noise effect, thing to be detected by time detecting electrode 201 change in electrical charge be V "-V=G × (Q201+a-Q202)/C-G × (Q201-Q202)/C=G × a/C, this numerical value with there is no temperature, wet Value of calculation when degree and noise effect is identical, so can be subject to by detecting electrode 201 by correction electrode 202 and difference channel Temperature, humidity and noise effect eliminate, it is ensured that the accuracy of Thickness sensitivity.
You need to add is that, in embodiment as shown in Figure 1, thickness detection apparatus also includes: first substrate 12 and the second base Plate 22, public electrode 100 is arranged on first substrate 12, and detecting electrode 201 and correction electrode 202 are arranged on second substrate On 22.In addition thickness detection apparatus also includes: the first framework 11 and the second framework 21, wherein first substrate 12 is arranged on first In framework 11;Second framework 21 and the first framework 11 interval are arranged, and second substrate 22 is arranged in the second framework 21.
The foregoing is only preferred embodiment of the present utility model, be not limited to this utility model, for this area For technical staff, this utility model can have various modifications and variations.All within spirit of the present utility model and principle, institute Any modification, equivalent substitution and improvement etc. made, within should be included in protection domain of the present utility model.

Claims (10)

1. a thickness detection apparatus, it is characterised in that including:
Public electrode (100);
Detecting electrode (201) is corresponding with described public electrode (100) and arrange spaced reciprocally, described detecting electrode (201) And form sense channel between described public electrode (100);
Correction electrode (202), corresponding with described public electrode (100) and arrange spaced reciprocally, described correction electrode (202) It is arranged on the outside of described sense channel;
Control portion, equal with described public electrode (100), described detecting electrode (201) and described correction electrode (202) Electrical connection, for making corrections to the output of described detecting electrode (201) according to the output of described correction electrode (202).
Thickness detection apparatus the most according to claim 1, it is characterised in that described correction electrode (202) and described common electrical Formed between the electrical characteristics and described detecting electrode (201) and the described public electrode (100) that are formed between pole (100) Electrical characteristics are identical.
Thickness detection apparatus the most according to claim 1, it is characterised in that the size of described correction electrode (202) is with described Detecting electrode (201) equivalently-sized, described correction electrode (202) is spaced apart with described public electrode (100) Spaced apart equal with described public electrode (100) with described detecting electrode (201).
Thickness detection apparatus the most according to claim 1, it is characterised in that described correction electrode (202) be perpendicular to described It is positioned apart from described detecting electrode (201) on the direction of the bearing of trend of sense channel.
Thickness detection apparatus the most according to claim 1, it is characterised in that described detecting electrode (201) is multiple, multiple Described detecting electrode (201) is arranged side by side, and the bearing of trend of described sense channel is multiple described detecting electrodes (201) Orientation.
Thickness detection apparatus the most according to claim 1, it is characterised in that described thickness detection apparatus also includes being arranged on institute State first protection portion (14) in public electrode (100) outside, and/or be arranged on the of described detecting electrode (201) outside Two protection portion (24).
Thickness detection apparatus the most according to claim 1, it is characterised in that described thickness detection apparatus also includes being arranged on institute State second protection portion (24) in detecting electrode (201) outside and be arranged on the 3rd of described correction electrode (202) outside Protection portion, covers described the on the outer surface towards described public electrode (100) of described detecting electrode (201) The thickness of two protection portion (24) with cover described correction electrode (202) towards outside described public electrode (100) The thickness of described 3rd protection portion on surface is equal.
Thickness detection apparatus the most according to claim 1, it is characterised in that described thickness detection apparatus also includes:
First conductive part (15), is arranged on the appearance towards described detecting electrode (201) of described public electrode (100) On face;
Second conductive part (25), is arranged on the appearance towards described public electrode (100) of described detecting electrode (201) On face;
3rd conductive part (26), is arranged on the appearance towards described public electrode (100) of described correction electrode (202) On face;
Wherein said second conductive part (25) is equivalently-sized with described 3rd conductive part (26).
Thickness detection apparatus the most according to claim 1, it is characterised in that described control portion includes difference channel, described difference The input of parallel circuit electrically connects with described detecting electrode (201) and described correction electrode (202) respectively, described difference Circuit obtains defeated according to the difference between output and the output of described correction electrode (202) of described detecting electrode (201) Go out value.
Thickness detection apparatus the most according to claim 1, it is characterised in that described control portion includes:
Detection displacement output circuit, input electrically connects with described detecting electrode (201), is used for exporting described detecting electrode (201) signal of telecommunication and produced between described public electrode (100);
Correction displacement output circuit, input electrically connects with described correction electrode (202), is used for exporting described correction electrode (202) signal of telecommunication and produced between described public electrode (100).
CN201620241535.2U 2016-03-25 2016-03-25 Thickness detecting device Active CN205505966U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105806206A (en) * 2016-03-25 2016-07-27 威海华菱光电股份有限公司 Thickness detection device
CN107063068A (en) * 2017-02-28 2017-08-18 威海华菱光电股份有限公司 film thickness detecting device and method
CN109297397A (en) * 2018-10-25 2019-02-01 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) Method for measuring thickness, device and the system of electrostatic transducer movable electrode

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105806206A (en) * 2016-03-25 2016-07-27 威海华菱光电股份有限公司 Thickness detection device
WO2017161975A1 (en) * 2016-03-25 2017-09-28 威海华菱光电股份有限公司 Thickness detection device
CN105806206B (en) * 2016-03-25 2019-01-08 威海华菱光电股份有限公司 Thickness detection apparatus
CN107063068A (en) * 2017-02-28 2017-08-18 威海华菱光电股份有限公司 film thickness detecting device and method
CN109297397A (en) * 2018-10-25 2019-02-01 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) Method for measuring thickness, device and the system of electrostatic transducer movable electrode
CN109297397B (en) * 2018-10-25 2020-07-31 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) Method, device and system for measuring thickness of movable electrode of electrostatic transducer

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