CN205491411U - 一种动态平行板等离子体发生器 - Google Patents
一种动态平行板等离子体发生器 Download PDFInfo
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- CN205491411U CN205491411U CN201620100937.0U CN201620100937U CN205491411U CN 205491411 U CN205491411 U CN 205491411U CN 201620100937 U CN201620100937 U CN 201620100937U CN 205491411 U CN205491411 U CN 205491411U
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105555002A (zh) * | 2016-02-01 | 2016-05-04 | 江苏微导纳米装备科技有限公司 | 一种动态平行板等离子体发生器 |
CN109355635A (zh) * | 2018-12-15 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | 一种连续镀膜生产线中基片框架偏压引入装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105555002A (zh) * | 2016-02-01 | 2016-05-04 | 江苏微导纳米装备科技有限公司 | 一种动态平行板等离子体发生器 |
CN109355635A (zh) * | 2018-12-15 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | 一种连续镀膜生产线中基片框架偏压引入装置 |
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Address after: 214028 No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Jiangsu micro nano technology Co.,Ltd. Address before: 214028, No. four, No. 7 Road, Wuxi New District, Jiangsu Patentee before: JIANGSU LEADMICRO NANO-EQUIPMENT TECHNOLOGY Ltd. |
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Address after: No. 27 Changjiang South Road, Xinwu District, Wuxi City, Jiangsu Province, China Patentee after: Jiangsu micro nano technology Co.,Ltd. Country or region after: China Address before: No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee before: Jiangsu micro nano technology Co.,Ltd. Country or region before: China |