CN205450432U - Super diffraction limit's structured light lighting device , optics template and optical system - Google Patents
Super diffraction limit's structured light lighting device , optics template and optical system Download PDFInfo
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- CN205450432U CN205450432U CN201620076089.4U CN201620076089U CN205450432U CN 205450432 U CN205450432 U CN 205450432U CN 201620076089 U CN201620076089 U CN 201620076089U CN 205450432 U CN205450432 U CN 205450432U
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Abstract
The utility model is suitable for an optics field discloses a super diffraction limit's structured light lighting device, including optics template and lens, the two interval equals the focus of lens, the optics template is equipped with to adjust the parallel light and makes its a plurality of linear light zone who locates to form super diffraction limit's structured light behind lens at the focal plane of lens, the equal difference of linear light zone parallel configuration and transmissivity and thickness, a plurality of linear light zone are about the axis symmetry of optics template, super diffraction limit's structure light shape becomes the middle part of the focal plane department of lens and presents the hyperoscillating grating form intensity distribution for sinusoidal wave state, the frequency of super diffraction limit's structured light is greater than the spatial frequency that the diffraction limit of system corresponds. The utility model discloses a spatial frequency of super diffraction limit structured light is greater than the spatial frequency that the diffraction limit of system corresponds, and high resolution has important meaning only for the half the bottleneck of diffraction limit to the micro - formation of image of structured light illumination when having broken through the illumination of traditional structured light.
Description
Technical field
This utility model belongs to optical information technology field, particularly relates to the Structured Illumination device of a kind of super diffraction limit, optics template and optical system.
Background technology
At present, information technology comes into nanometer era, and wherein the development of nanocomposite optical and photonic propulsion is particularly important, such as, in the information technologys such as nano-photoetching, nanometer imaging and nanometer information storage, have critically important application.But nanocomposite optical and the minimum feature size of photonic device and machining resolution and the resolution of optical microphotograph imaging, be all limited to the diffraction of light limit.Theoretical according to the diffraction limit that Abbe proposes, what people can do at present the most only manages to use shorter wavelengths of light and the optical system of more large-numerical aperture, but it now appear that wavelength and numerical aperture have arrived the limit, still can not meet the demand of Information Technology Development.Therefore, the research breaking through diffraction limit is the most necessary, US Congress just proposed in 2009, diffraction limit is broken through exactly first of the big project of the five of 21 century optics, also refer to super-resolution problem in 100 problem in science of the 21st century that " Nature " lists, the Chinese Academy of Sciences it is also proposed China for 2011 should strengthen the research of super resolution technology.Since century more than one, scientists is all for surmounting diffraction limit and effort, the method creating many super-resolution.
Structured Illumination micro-imaging is current Application comparison one of method widely, can easier realize wide field high time-space resolution imaging, but the resolution limit of the method is the half (under the conditions of unsaturation) of optical system diffraction limit, this bottleneck affects the further development of the method always.Accordingly, it would be desirable to a kind of new technical scheme is to solve the problems referred to above.
Utility model content
The purpose of this utility model is to provide the Structured Illumination device of a kind of super diffraction limit, it is intended to obtain super diffraction structured light, breaks through the resolution limit of structure light imaging, improves the resolution of optical system.
nullThis utility model is realized in，A kind of Structured Illumination device of super diffraction limit，Including optics template and lens，The spacing of described optics template and described lens is equal to the focal length of described lens，Described optics template is provided with the linear transparent area that transmitance is different and thickness is different of multiple laid out in parallel，Multiple described linear transparent areas are symmetrical about the axis being parallel to linear transparent area of described optics template，Directional light forms the first transmission light after described optics template，Described first transmission light forms the second transmission light after described lens，Described second transmission light low energy area of middle part at the focal plane of described lens forms the structure light of super diffraction limit，The structure light of described super diffraction limit is rendered as the hyperoscillating raster-like intensity distributions of sinusoidal wave state，The spatial frequency that the frequency of the structure light of described super diffraction limit is corresponding more than system diffraction limit.
As optimal technical scheme of the present utility model:
The Fourier spectrum composition of the structure light of described super diffraction limit is the part higher than optical system diffraction limit respective frequencies.
The minimum feature size of the structure light of described super diffraction limit is less than the diffraction limit of optical system.
Described optics template is the modulation panel that amplitude adds phase place.
The surface of the modulation panel that described amplitude adds phase place is provided with the linear plated film for forming described linear transparent area.
The cycle of the structure light of described super diffraction limit is by the amplitude of described linear transparent area and phase-modulation scale effect.
Described directional light is monochromatic light or quasi-monochromatic light.
nullAnother object of the present utility model is to provide a kind of optics template，For constituting the Structured Illumination device of super diffraction limit with lens combination，The spacing of described optics template and described lens is equal to the focal length of described lens，Described optics template is provided with and can be adjusted directional light making it form the multiple linear transparent area of the structure light of super diffraction limit after described lens at the focal plane of described lens，The plurality of linear transparent area laid out in parallel and transmitance and thickness are the most different，Multiple described linear transparent areas are symmetrical about the axis being parallel to linear transparent area of described optics template，The structure light of described super diffraction limit is formed at the middle part at the focal plane of described lens，And it is rendered as the hyperoscillating raster-like intensity distributions of sinusoidal wave state，The spatial frequency that the frequency of the structure light of described super diffraction limit is corresponding more than system diffraction limit.
Another object of the present utility model is to provide a kind of optical system, including the Structured Illumination device of described super diffraction limit.
The Structured Illumination device of the super diffraction limit that this utility model provides uses optics template to process parallel input light, and be run through lens and carry out Fourier transformation, zone line in the focal plane of lens generates the structure light of the sine wave of super diffraction limit, the spatial frequency that the spatial frequency of this structure light is corresponding more than system diffraction limit, make this structure light when Structured Illumination micro-imaging, in the case of other conditions are identical, the imaging resolution limit can be less than the half of system diffraction limit, when i.e. breaching traditional structure optical illumination, highest resolution is only the bottleneck of diffraction limit half, Structured Illumination micro-imaging is had great importance.
Accompanying drawing explanation
Fig. 1 is the structural representation of the Structured Illumination device of the super diffraction limit that this utility model embodiment provides；
Fig. 2 is the structural representation of the optics template of the Structured Illumination device of the super diffraction limit that this utility model embodiment provides；
Fig. 3 is the Moire fringe schematic diagram that this utility model embodiment provides；
Fig. 4 is the vector correlation between spatial frequency Km that sample spatial frequency k, structure light spatial frequency k0 and the Moire fringe that comprise that this utility model embodiment provides are corresponding；
Fig. 5 is the intensity distribution at the lens focal plane that this utility model embodiment provides；
Fig. 6 is the spectrum component of the whole waveform at the lens focal plane that this utility model embodiment provides；
Fig. 7 is the Fourier transformation result figure of elliptical region in Fig. 5.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, this utility model is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain this utility model, is not used to limit this utility model.
Refer to Fig. 1, this utility model provides the Structured Illumination device of a kind of super diffraction limit, including optics template 01 and lens 02, the spacing of optics template 01 and lens 02 is equal to the focal distance f of lens 02, as shown in Figure 2, optics template 01 is provided with the linear transparent area 011 that transmitance is different and thickness is different of multiple laid out in parallel, multiple linear transparent areas 011 are symmetrical about the axis L of optics template 01, this axis L refers to be parallel to the axis that optics template 01 is divided equally two parts of linear transparent area 011, different transmitances and the different-thickness of this linear transparent area 011 add the modulation of phase place in order to the amplitude realizing light, to change the characteristic of incident illumination.Directional light S (monochromatic or quasi monochromatic directional light) forms the first transmission light after optics template 01, first transmission light forms the second transmission light after the Fourier transformation of lens 02, this the second transmission light form at the focal plane of lens 02 is as shown in Figure 1, the low energy area of position, intermediate portion forms the structure light S ' of super diffraction limit, the structure light of this super diffraction limit is rendered as the hyperoscillating raster-like intensity distributions of sinusoidal wave state, the spatial frequency that the frequency of the structure light of super diffraction limit is corresponding more than system diffraction limit.The structure light of this super diffraction limit being used for illumination light when carrying out imaging, its resolution can break through the half of optical system diffraction limit.
In the present embodiment, the Fourier spectrum composition of the structure light S ' of this super diffraction limit is the part higher than optical system diffraction limit respective frequencies, the characteristic size of hyperoscillating grating and the size of grating region can be adjusted by design transmitance template, its minimum feature size is less than the diffraction limit of optical system, this feature size refers to the full width at half maximum at the narrowest peak of structure light intensity distributions, and this optical system then refers to optical system based on said lens 02.
Further, this optics template 01 preferably amplitude adds the modulation panel of phase place, and its surface is provided with the linear plated film for forming linear transparent area 011.The cycle of hyperoscillating grating is by the amplitude of linear transparent area 011 and phase-modulation scale effect.Multiple linear plated films are divided into two parts that structure is identical with characteristic, and these two parts are symmetrical, the corresponding frequency band of each linear plated film.
Further the operation principle of this device is illustrated below in conjunction with accompanying drawing, optical wavelength and system value aperture determine can be by the Spatial bandwidth of this system, i.e. in any one common optical system, all can be filtered by system higher than the spatial frequency composition of frequency limitation, thus cause Optical Resolution of Imaging System limited.In Structured Illumination micro imaging method, just because of this reason, the distinguishable size of minimum that result in structure light is restricted so that the resolution pole of this formation method is limited to the half of common imaging system diffraction limit.
Structured Illumination micro-imaging inherently can improve transverse spatial resolution, and its principle can be explained by Moire effect.A certain spatial frequency k (representing with grating fringe) that such as sample is comprised, can produce Moire effect, Moire fringe the most as shown in Figure 3 under the conditions of the Structured Illumination that frequency is k0.Vector correlation between them can represent with Fig. 4, Km represents the spatial frequency that Moire fringe is corresponding, owing to illumination path and imaging optical path are all limited (corresponding spatial frequency kmax) by system diffraction limit, i.e. k0≤kmax, km≤kmax, so the maximum of spatial frequency k is 2kmax, say, that the highest half that can reach diffraction limit of resolution.The structure light of super diffraction limit is used for illuminating, it is simply that realize k0 in local > kmax, such spatial frequency k just can be more than 2kmax, and namely resolution limit can be less than the half of diffraction limit.
The device of the present embodiment is i.e. the Structured Illumination device that such a surpasses diffraction limit, it utilizes hyperoscillating phenomenon, so-called hyperoscillating refers to that what band-limited function can be the fastest vibrates on arbitrarily large interval, local frequencies exceedes its maximal Fourier transform component, the most above-mentioned k0 > kmax, this device can obtain the structure light of profit k0 > kmax, i.e. surpass the structure light of diffraction limit, and this structure light is different with traditional structure light relating to hyperoscillating, it uses hyperoscillating waveform that the method for zero point optimization designs as shown in Figure 5.It it is the intensity distributions of the structure light of this super diffraction limit shown in Fig. 5, in elliptical region, each zero distance is equal, when the value approximately equal of each crest, this partial waveform just can regard sinusoidal wave form as, and this waveform has super diffraction structure, its minimum feature size, less than the diffraction limit of optical system, can be referred to as hyperoscillating grating.Certainly, this waveform is not likely to be strict sinusoidal wave form, but is sufficiently close to sine-shaped form, can be referred to as " quasi-sine-wave ".The limiting resolution of traditional structure photoimaging is the half of diffraction limit, main cause is exactly receiving light path and illumination path is all limited by diffraction limit, the Structured Illumination using this super diffraction limit just can break through the distinguishable size limitation of minimum of structure light, and namely resolution limit can be less than the half of diffraction limit.
Fig. 5 show the intensity distribution at lens 02 focal plane, elliptical region is a sinusoidal wave form (in its Fourier spectrum, a certain frequency accounts for main component), and this waveform has super diffraction structure, i.e. its major frequency components and is greater than kmax's above-mentioned.Fig. 6 is the spectrum component of whole waveform at lens 02 focal plane, and wherein both sides chain-dotted line represents the highest frequency that diffraction limit is determined.Fig. 7 is the result that elliptical region individually does Fourier transformation, and solid line represents the frequency corresponding to hyperoscillating grating of equivalence, and Fig. 7 proves that the waveform in elliptical region is strictly super diffraction limit, and is a certain frequency quasi sine light that accounts for main component.The structure light of this super diffraction limit can serve as structure light micro-imaging, and makes resolution limit can be less than the half of diffraction limit.
The Structured Illumination device of the super diffraction limit that this utility model embodiment provides uses optics template 01 to process parallel input light, and be run through lens 02 and carry out Fourier transformation, zone line in the focal plane of lens 02 generates the structure light of the sine wave of super diffraction limit, the spatial frequency that the spatial frequency of this structure light is corresponding more than system diffraction limit, make this structure light when Structured Illumination micro-imaging, in the case of other conditions are identical, the imaging resolution limit can be less than the half of system diffraction limit, when i.e. breaching traditional structure optical illumination, highest resolution is only the bottleneck of diffraction limit half, and owing to it is sinusoidal light or quasi sine light, there is no stronger secondary lobe, optical system is made to have preferably dynamic range and signal to noise ratio at receiving terminal.
The optics template 01 used in this utility model embodiment is the major optical parts of the structure light generating super diffraction limit, has the optics template 01 of said structure feature and optical signature also in protection domain of the present utility model.Further, use the optical system of Structured Illumination device of above-mentioned super diffraction limit also in protection domain of the present utility model.
This utility model further provides for the acquisition methods of a kind of super diffraction limit structure light, and it comprises the steps:
First, directional light is made to pass optics template 01, form the first transmission light, this optics template 01 has the structure of above-mentioned optics template 01, i.e. being provided with the transmitance of multiple laid out in parallel and the linear transparent area 011 that thickness is different, multiple linear transparent areas 011 are symmetrical about the axis being parallel to linear transparent area 011 of optics template 01；
Then, make the first transmission light through the lens 02 of distance 01 1 times of focal lengths of optics template, form the second transmission light, second transmission light middle part at the focal plane of lens 02 forms the structure light of super diffraction limit, the light intensity distributions of the structure light of super diffraction limit is rendered as the hyperoscillating raster-like intensity distributions of sinusoidal wave state, the spatial frequency that the frequency of the structure light of super diffraction limit is corresponding more than system diffraction limit.
In the present embodiment, the area size of the structure light of this super diffraction limit determines the visual field size of final structure photoimaging, actual can adjust as requested.
The method is that the Structured Illumination device of super diffraction limit based on this utility model offer is implemented, and its principle and effect are same as above, and the present embodiment is not repeated explanation.
These are only preferred embodiment of the present utility model, not in order to limit this utility model, all any amendment, equivalent or improvement etc. made within spirit of the present utility model and principle, within should be included in protection domain of the present utility model.
Claims (9)
1. the Structured Illumination device of a super diffraction limit, it is characterized in that, including optics template and lens, the spacing of described optics template and described lens is equal to the focal length of described lens, described optics template is provided with and can be adjusted directional light making it form the multiple linear transparent area of the structure light of super diffraction limit after described lens at the focal plane of described lens, the plurality of linear transparent area laid out in parallel and transmitance and thickness are the most different, multiple described linear transparent areas are symmetrical about the axis being parallel to linear transparent area of described optics template, the structure light of described super diffraction limit is formed at the middle part at the focal plane of described lens, and it is rendered as the hyperoscillating raster-like intensity distributions of sinusoidal wave state, the spatial frequency that the frequency of the structure light of described super diffraction limit is corresponding more than system diffraction limit.
2. the Structured Illumination device of super diffraction limit as claimed in claim 1, it is characterised in that the Fourier spectrum composition of the structure light of described super diffraction limit is the part higher than optical system diffraction limit respective frequencies.
3. the Structured Illumination device of super diffraction limit as claimed in claim 1, it is characterised in that the minimum feature size of the structure light of described super diffraction limit is less than the diffraction limit of optical system.
4. the Structured Illumination device of super diffraction limit as claimed in claim 1, it is characterised in that described optics template is the modulation panel that amplitude adds phase place.
5. the Structured Illumination device of super diffraction limit as claimed in claim 4, it is characterised in that the surface of the modulation panel that described amplitude adds phase place is provided with the linear plated film for forming described linear transparent area.
6. the Structured Illumination device of super diffraction limit as claimed in claim 1, it is characterised in that the cycle of the structure light of described super diffraction limit is by the amplitude of described linear transparent area and phase-modulation scale effect.
7. the Structured Illumination device of super diffraction limit as claimed in claim 1, it is characterised in that described directional light is monochromatic light or quasi-monochromatic light.
8. an optics template, it is characterized in that, for constituting the Structured Illumination device of super diffraction limit with lens combination, the spacing of described optics template and described lens is equal to the focal length of described lens, described optics template is provided with and can be adjusted directional light making it form the multiple linear transparent area of the structure light of super diffraction limit after described lens at the focal plane of described lens, the plurality of linear transparent area laid out in parallel and transmitance and thickness are the most different, multiple described linear transparent areas are symmetrical about the axis being parallel to linear transparent area of described optics template, the structure light of described super diffraction limit is formed at the middle part at the focal plane of described lens, and it is rendered as the hyperoscillating raster-like intensity distributions of sinusoidal wave state, the spatial frequency that the frequency of the structure light of described super diffraction limit is corresponding more than system diffraction limit.
9. an optical system, it is characterised in that include the Structured Illumination device of super diffraction limit described in any one of claim 1～8.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105549192A (en) * | 2016-01-26 | 2016-05-04 | 深圳大学 | Super-diffraction limit structured light illumination device, optical template, optical system and acquisition method of super-diffraction limit structured light |
| CN109188669A (en) * | 2018-10-09 | 2019-01-11 | 重庆大学 | Non-marked far field super-resolution microscopic system and method based on salt free ligands super-resolution beam lighting |
| DE102018108657A1 (en) | 2018-04-12 | 2019-10-17 | Jenoptik Optical Systems Gmbh | Microscope with structured illumination |
| CN113189603A (en) * | 2021-04-27 | 2021-07-30 | 南昌虚拟现实研究院股份有限公司 | Method and system for designing parameters of structured light depth camera |
-
2016
- 2016-01-26 CN CN201620076089.4U patent/CN205450432U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105549192A (en) * | 2016-01-26 | 2016-05-04 | 深圳大学 | Super-diffraction limit structured light illumination device, optical template, optical system and acquisition method of super-diffraction limit structured light |
| DE102018108657A1 (en) | 2018-04-12 | 2019-10-17 | Jenoptik Optical Systems Gmbh | Microscope with structured illumination |
| DE102018108657B4 (en) | 2018-04-12 | 2024-03-28 | Jenoptik Optical Systems Gmbh | Device for recording at least one microscopic image and method for recording a microscopic image |
| CN109188669A (en) * | 2018-10-09 | 2019-01-11 | 重庆大学 | Non-marked far field super-resolution microscopic system and method based on salt free ligands super-resolution beam lighting |
| CN113189603A (en) * | 2021-04-27 | 2021-07-30 | 南昌虚拟现实研究院股份有限公司 | Method and system for designing parameters of structured light depth camera |
| CN113189603B (en) * | 2021-04-27 | 2023-05-12 | 南昌虚拟现实研究院股份有限公司 | Method and system for designing parameters of structured light depth camera |
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Granted publication date: 20160810 Effective date of abandoning: 20171031 |