CN205435200U - A gas -liquid separation for wet process manufacturing equipment - Google Patents
A gas -liquid separation for wet process manufacturing equipment Download PDFInfo
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- CN205435200U CN205435200U CN201620226168.9U CN201620226168U CN205435200U CN 205435200 U CN205435200 U CN 205435200U CN 201620226168 U CN201620226168 U CN 201620226168U CN 205435200 U CN205435200 U CN 205435200U
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- gas
- liquid separation
- separation device
- liquid
- axostylus axostyle
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Abstract
The utility model provides a gas -liquid separation for wet process manufacturing equipment contains: an input channel is connected with a wet process manufacturing equipment, be used for with wet process manufacturing equipment's chemistry nature gas -liquid mixture thing input gas -liquid separation, a hob sets up gas -liquid separation's inside, be used for with the separation of chemistry nature gas -liquid mixture thing is a waste gas and a chemical liquid, a flowing back passageway is located wet process manufacturing equipment's bottom and one is used for collecting chemical liquid's liquor recovery device is connected, and an exhaust passage, be used for with waste gas is discharged.
Description
Technical field
This utility model relates to a kind of gas-liquid separation device, particularly relates to a kind of gas-liquid separation device for wet processing device.
Background technology
Wet processing device is widely used in the manufacture of semiconductor element.In wet processing, wet processing device must use substantial amounts of chemical liquid, and it is mostly has corrosive material such as acidity or alkalescence.Therefore, often with having corrosive chemical liquid the chemical gas-liquid mixture flowed out in wet processing device.Consider with safe based on environmental conservation, it is necessary to just can discharge after being acted upon the chemical gas-liquid mixture in wet processing device separating the chemical liquid in chemical gas-liquid mixture.
Refer to Fig. 1, it shows the schematic diagram of a kind of existing gas-liquid separation device 10.Described gas-liquid separation device 10 comprises input channel P1, an apocenosis passage P2 in bottom and an exhaust passage P3 up, and described input channel P1 and a wet processing device 20 of wherein said gas-liquid separation device 10 connect, a described apocenosis passage P2 and liquid withdrawal system 30 connects and described exhaust passage P3 and a gas treatment equipment 40 connect.In use, the chemical gas-liquid mixture 50 in described wet processing device 20 is entered in described gas-liquid separation device 10 by described input channel P1.After described chemical gas-liquid mixture 50 enters described gas-liquid separation device 10, chemical liquid 51 in described chemical gas-liquid mixture 50 can drip downwards, and is collected in described liquid withdrawal system 30 by the described apocenosis passage P2 bottom described gas-liquid separation device 10.On the other hand, remaining waste gas 52 then can be collected to described gas treatment equipment 40 by the position described exhaust passage P3 above described gas-liquid separation device 10.
But, due to the limited space in described gas-liquid separation device 10, be susceptible to chemical gas-liquid mixture 50 the most not by gas-liquid separation complete time just have been brought in described exhaust passage P3, make to enter in the waste gas 52 of described gas treatment equipment 40 still with substantial amounts of chemical liquid, and then cause the element in described gas treatment equipment 40 to be corroded and damage.On the other hand, after the chemical liquid 51 in chemical gas-liquid mixture 50 is separated and be collected into described liquid withdrawal system 30, the chemical liquid 51 reclaimed can be reused after treatment in described liquid withdrawal system 30.If it is to say, the usefulness that can increase the gas-liquid separation of described gas-liquid separation device 10 can efficiently reduce production cost.Therefore, in order to strengthen the usefulness of the gas-liquid separation of described gas-liquid separation device 10, existing way is by arranging Raschig ring or dishcloth in described gas-liquid separation device 10 ... wait element, to increase the chemical gas-liquid mixture 50 path of passing through in described gas-liquid separation device 10.But, said method is limited for the effect increasing gas-liquid separation, is in view of this necessary to provide a kind of gas-liquid separation device, to solve the problem existing for prior art.
Utility model content
For solving above-mentioned technical problem, the purpose of this utility model is to provide a kind of gas-liquid separation device, and it is internally provided with screw rod, and position is between the input channel and exhaust passage of described gas-liquid separation device.Therefore, when chemical gas-liquid mixture is by described screw rod, described chemical liquids in described chemical gas-liquid mixture is known from experience condensation and is attached on described screw rod, make described screw rod can effectively increase chemical gas-liquid mixture path of passing through in described gas-liquid separation device, and then strengthen effect of gas-liquid separation.
For reaching above-mentioned purpose, this utility model provides a kind of gas-liquid separation device for wet processing device, comprise: an input channel, be connected with a wet processing device, for a chemical gas-liquid mixture of described wet processing device is inputted in described gas-liquid separation device；One screw rod, is arranged on the inside of described gas-liquid separation device, for described chemical gas-liquid mixture is separated into a waste gas and a chemical liquid；One apocenosis passage, is positioned at the bottom of described wet processing device, is connected for collecting the liquid withdrawal system of described chemical liquid with one；And an exhaust passage, for described waste gas is discharged.
In the middle of one of them preferred embodiment of this utility model, described screw rod is arranged on described chemical gas-liquid mixture and goes to the passing through between path of described exhaust passage from described input channel.
In the middle of one of them preferred embodiment of this utility model, described screw rod comprises an axostylus axostyle and multiple blade being formed on described axostylus axostyle.
In the middle of one of them preferred embodiment of this utility model, the described axostylus axostyle of described screw rod and a motor connect to receive the driving of described motor so that the plurality of blade rotates together with described axostylus axostyle.
In the middle of one of them preferred embodiment of this utility model, the described axostylus axostyle of described screw rod comprises a center cavity and multiple perforate being communicated to outside described axostylus axostyle from described center cavity, and described axostylus axostyle and an extraneous gas supply equipment connect, in the described center cavity that a gas is inputted described axostylus axostyle.
In the middle of one of them preferred embodiment of this utility model, the described axostylus axostyle of described screw rod is parallel with the sidewall of described gas-liquid separation device.
In the middle of one of them preferred embodiment of this utility model, described gas-liquid separation device also comprises a multihole device, is arranged on the sidewall of described gas-liquid separation device.
In the middle of one of them preferred embodiment of this utility model, described multihole device is wire netting.
In the middle of one of them preferred embodiment of this utility model, described multihole device is wire gauze.
This utility model also provides for a kind of gas-liquid separation device for wet processing device, comprise: an input channel is located at a sidewall of described gas-liquid separation device, it is connected with a wet processing device, for a chemical gas-liquid mixture of described wet processing device is inputted in described gas-liquid separation device；Another sidewall and the gas treatment equipment connection of described gas-liquid separation device is located in one exhaust passage；One screw rod has blade, it is arranged on the inside of described gas-liquid separation device, with described two sidewalls be arranged in parallel and between described input channel and described exhaust passage, for described chemical gas-liquid mixture is separated into a waste gas and a chemical liquid, described waste gas is entered in described gas treatment equipment by described exhaust passage；One apocenosis passage, is positioned at the bottom of described wet processing device, is connected for collecting the liquid withdrawal system of described chemical liquid with one.
In the middle of one of them preferred embodiment of this utility model, described gas-liquid separation device further includes a motor in order to drive the rotation of described screw rod.
In the middle of one of them preferred embodiment of this utility model, described gas-liquid separation device further includes an extraneous gas supply equipment and can provide gas in described gas-liquid separation device, makes it move towards the described sidewall of described gas-liquid separation device in order to blow the described chemical liquid being attached on described blade.
In the middle of one of them preferred embodiment of this utility model, described screw rod comprises an axostylus axostyle, described axostylus axostyle comprises a center cavity and multiple perforate being communicated to outside described axostylus axostyle from described center cavity, and described axostylus axostyle is connected with described extraneous gas supply equipment, for by described gas input described axostylus axostyle described center cavity in and blown the described chemical liquid being attached on described blade by described perforate.
Accompanying drawing explanation
Fig. 1 shows the schematic diagram of a kind of existing gas-liquid separation device；
Fig. 2 shows the schematic diagram of the gas-liquid separation device of a kind of this utility model the first preferred embodiment；And
Fig. 3 shows the schematic diagram of the gas-liquid separation device of a kind of this utility model the second preferred embodiment.
Detailed description of the invention
In order to above-mentioned and other purpose of the present utility model, feature, advantage can be become apparent, hereafter especially exemplified by this utility model preferred embodiment, and accompanying drawing will be coordinated, be described in detail below.
Refer to Fig. 2, the schematic diagram of the gas-liquid separation device 100 of its a kind of this utility model the first preferred embodiment of display.Described gas-liquid separation device 100 comprises input channel P1 being arranged on a side, is arranged on an apocenosis passage P2 of bottom and the exhaust passage P3 of another side being arranged on relative described input channel P1.Described input channel P1 and a wet processing device 20 of described gas-liquid separation device 100 connect, and the chemical gas-liquid mixture 50 in described wet processing device 20 is entered in described gas-liquid separation device 100 by described input channel P1.Described apocenosis passage P2 and a liquid withdrawal system 30 of described gas-liquid separation device 100 connect, and described exhaust passage P3 and a gas treatment equipment 40 connect.When running, after described chemical gas-liquid mixture 50 enters described gas-liquid separation device 100, described gas-liquid separation device 100 is for being chemical liquid 51 and waste gas 52 by the gas-liquid separation of described chemical gas-liquid mixture 50, and by described apocenosis passage P2, described chemical liquid 51 is collected in described liquid withdrawal system 30, and by described exhaust passage P3, described waste gas 52 is entered in described gas treatment equipment 40.
As in figure 2 it is shown, described gas-liquid separation device 100 also comprises a screw rod 110, it is arranged on the inside of described gas-liquid separation device 100, and is in described chemical gas-liquid mixture 50 and goes to the passing through between path of described exhaust passage P3 from described input channel P1.When described chemical gas-liquid mixture 50 is by described screw rod 110, described chemical liquid 51 in described chemical gas-liquid mixture 50 can condense and be attached on described screw rod 110 so that it is described chemical liquid 51 and effect of described waste gas 52 that described screw rod 110 reaches the gas-liquid separation of described chemical gas-liquid mixture 50.Axostylus axostyle 111 that described screw rod 110 comprises central authorities and multiple blade 112 being formed on described axostylus axostyle 111, wherein said axostylus axostyle 111 is parallel with the sidewall 102 of described gas-liquid separation device 100, and and the upper wall of described gas-liquid separation device 100 and lower wall be mutually perpendicular to.Preferably, the plurality of blade 112 is one-body molded with described axostylus axostyle 111, and it is designed as extending close to the described sidewall 102 of described gas-liquid separation device 100 and described upper wall and lower wall so that described screw rod 110 forms sufficiently large total surface area in the confined space in described gas-liquid separation device 100.Therefore, occur can have with described screw rod 110 during described input channel P1 goes to the passing through of described exhaust passage P3 sufficiently to contact at described chemical gas-liquid mixture 50, and then effectively achieve described gas-liquid separation device 100 and have the usefulness of enhancing gas-liquid separation.
On the other hand, after the described chemical liquid 51 in described chemical gas-liquid mixture 50 is separated and be collected into described liquid withdrawal system 30, the described chemical liquid 51 reclaimed can be reused after treatment in described liquid withdrawal system 30.Accordingly, because the setting of the described screw rod 110 of described gas-liquid separation device 100, effectively strengthen the usefulness of gas-liquid separation, and then increase the amount of the described chemical liquid 51 of recyclable recycling, so that production cost is effectively reduced.
Refer to Fig. 3, the schematic diagram of the gas-liquid separation device 200 of its a kind of this utility model the second preferred embodiment of display.Described gas-liquid separation device 200 comprises input channel P1 being arranged on a side, is arranged on an apocenosis passage P2 of bottom and the exhaust passage P3 of another side being arranged on relative described input channel P1.Described input channel P1 and a wet processing device 20 of described gas-liquid separation device 200 connect, and the chemical gas-liquid mixture 50 in described wet processing device 20 is entered in described gas-liquid separation device 200 by described input channel P1.Described apocenosis passage P2 and a liquid withdrawal system 30 of described gas-liquid separation device 200 connect, and described exhaust passage P3 and a gas treatment equipment 40 connect.When running, after described chemical gas-liquid mixture 50 enters described gas-liquid separation device 200, described gas-liquid separation device 200 is for being chemical liquid 51 and waste gas 52 by the gas-liquid separation of described chemical gas-liquid mixture 50, and by described apocenosis passage P2, described chemical liquid 51 is collected in described liquid withdrawal system 30, and by described exhaust passage P3, described waste gas 52 is entered in described gas treatment equipment 40.
As it is shown on figure 3, described gas-liquid separation device 200 also comprises a screw rod 210, it is arranged on the inside of described gas-liquid separation device 200, and is in described chemical gas-liquid mixture 50 and goes to the passing through between path of described exhaust passage P3 from described input channel P1.When described chemical gas-liquid mixture 50 is by described screw rod 210, described chemical liquid 51 in described chemical gas-liquid mixture 50 can condense and be attached on described screw rod 210 so that it is described chemical liquid 51 and effect of described waste gas 52 that described screw rod 210 reaches the gas-liquid separation of described chemical gas-liquid mixture 50.Furthermore, axostylus axostyle 211 that described screw rod 210 comprises central authorities and multiple blade 212 being formed on described axostylus axostyle 211, wherein said axostylus axostyle 211 is parallel with the sidewall 202 of described gas-liquid separation device 200, and and the upper wall of described gas-liquid separation device 200 and lower wall be mutually perpendicular to.Preferably, the plurality of blade 212 is one-body molded with described axostylus axostyle 211, and it is designed as extending close to the described sidewall 202 of described gas-liquid separation device 200 and described upper wall and lower wall so that described screw rod 210 forms sufficiently large total surface area in the confined space in described gas-liquid separation device 200.Therefore, can have with described screw rod 210 during described input channel P1 goes to the passing through of described exhaust passage P3 at described chemical gas-liquid mixture 50 and sufficiently contact, and then effectively achieve described gas-liquid separation device 200 and have the usefulness strengthening gas-liquid separation.
As it is shown on figure 3, described gas-liquid separation device 200 also comprises a motor 60, it is connected to drive described axostylus axostyle 211 to rotate with the described axostylus axostyle 211 of described screw rod 210, and then drives the plurality of blade 212 to rotate together with described axostylus axostyle 211.Order about described screw rod 210 by described motor 60 to rotate, the described chemical liquid 51 being condensed on described screw rod 210 is made to produce a centrifugal force, described chemical liquid 51 is made to get rid of the direction of the sidewall 202 to described gas-liquid separation device 200, the most described chemical liquid 51 can flow downward along vertical sidewall 202, and then increases the efficiency that described chemical liquid 51 is collected in described liquid withdrawal system 30.
As it is shown on figure 3, the described sidewall 202 of described gas-liquid separation device 200 is provided with a multihole device 220, wherein said multihole device 220 is preferably wire netting, e.g. wire gauze.Arranging on the one hand can effectively catch and arrive the described chemical liquid 51 of described sidewall 202 by described multihole device 220, on the other hand also can increase described chemical gas-liquid mixture 50 along described sidewall 202 move time path of passing through, and then strengthen the effect of gas-liquid separation.Additionally, the described axostylus axostyle 211 of described screw rod 210 comprises a center cavity 213 and multiple perforate 214 being communicated to outside described axostylus axostyle 211 from described center cavity 213.The described center cavity 213 of described axostylus axostyle 211 is communicated to an extraneous gas supply equipment 70.When running, in described extraneous gas supply equipment 70 can provide the described center cavity 213 of a gas extremely described axostylus axostyle 211, and described gas is by the outside of the plurality of perforate 214 eruption to described axostylus axostyle 211.Therefore, the described chemical liquid 51 being originally attached on described axostylus axostyle 211 and described blade 212 is understood the active force because producing during described gas eruption and described chemical liquid 51 is blown to the sidewall 202 of described gas-liquid separation device 200, and then effectively increases the efficiency that described chemical liquid 51 is collected in described liquid withdrawal system 30.Furthermore, the described chemical gas-liquid mixture 50 in described gas-liquid separation device 200 can be made to flow towards the described multihole device 220 being positioned at described sidewall 202 by the effect of described gas, and then described chemical liquid 51 is condensed on described multihole device 220, therefore can further increase the efficiency of gas-liquid separation.
Although this utility model is disclosed above with preferred embodiment; so it is not limited to this utility model; this utility model art has usually intellectual; without departing from spirit and scope of the present utility model; when being used for a variety of modifications and variations, protection domain the most of the present utility model is when being as the criterion depending on the defined person of appended claims.
Claims (15)
1. the gas-liquid separation device for wet processing device, it is characterised in that described gas-liquid separation device comprises:
One input channel, is connected with a wet processing device, for being inputted in described gas-liquid separation device by a chemical gas-liquid mixture of described wet processing device；
One screw rod, is arranged on the inside of described gas-liquid separation device, for described chemical gas-liquid mixture is separated into a waste gas and a chemical liquid；
One apocenosis passage, is positioned at the bottom of described wet processing device, is connected for collecting the liquid withdrawal system of described chemical liquid with one；And
One exhaust passage, for discharging described waste gas.
2. the gas-liquid separation device as described in claim the 1, it is characterised in that described screw rod is arranged on described chemical gas-liquid mixture and goes to the passing through between path of described exhaust passage from described input channel.
3. the gas-liquid separation device as described in claim the 1, it is characterised in that described screw rod comprises an axostylus axostyle and multiple blade being formed on described axostylus axostyle.
4. the gas-liquid separation device as described in claim the 3, it is characterised in that the described axostylus axostyle of described screw rod and a motor connect to receive the driving of described motor so that the plurality of blade rotates together with described axostylus axostyle.
5. the gas-liquid separation device as described in claim the 3, it is characterized in that, the described axostylus axostyle of described screw rod comprises a center cavity and multiple perforate being communicated to outside described axostylus axostyle from described center cavity, and described axostylus axostyle and an extraneous gas supply equipment connect, in the described center cavity that a gas is inputted described axostylus axostyle.
6. the gas-liquid separation device as described in claim the 3, it is characterised in that the described axostylus axostyle of described screw rod is parallel with the sidewall of described gas-liquid separation device.
7. the gas-liquid separation device as described in claim the 1, it is characterised in that described gas-liquid separation device also comprises a multihole device, is arranged on the sidewall of described gas-liquid separation device.
8. the gas-liquid separation device as described in claim the 7, it is characterised in that described multihole device is wire gauze.
9. the gas-liquid separation device for wet processing device, it is characterised in that described gas-liquid separation device comprises:
One input channel is located at a sidewall of described gas-liquid separation device, is connected with a wet processing device, for being inputted in described gas-liquid separation device by a chemical gas-liquid mixture of described wet processing device；
Another sidewall and the gas treatment equipment connection of described gas-liquid separation device is located in one exhaust passage；
One screw rod has blade, it is arranged on the inside of described gas-liquid separation device, with described two sidewalls be arranged in parallel and between described input channel and described exhaust passage, for described chemical gas-liquid mixture is separated into a waste gas and a chemical liquid, described waste gas is entered in described gas treatment equipment by described exhaust passage；And
One apocenosis passage, is positioned at the bottom of described wet processing device, is connected for collecting the liquid withdrawal system of described chemical liquid with one.
10. the gas-liquid separation device as described in claim the 9, it is characterised in that described gas-liquid separation device also comprises a multihole device, is arranged on the sidewall of described gas-liquid separation device.
11. gas-liquid separation devices as described in claim the 10, it is characterised in that described multihole device is wire netting.
12. gas-liquid separation devices as described in claim the 11, it is characterised in that described wire netting is wire gauze.
13. gas-liquid separation devices as described in claim the 9, it is characterised in that described gas-liquid separation device further includes a motor in order to drive the rotation of described screw rod.
14. gas-liquid separation devices as described in claim the 9, it is characterized in that, described gas-liquid separation device further includes an extraneous gas supply equipment and can provide gas in described gas-liquid separation device, makes it move towards the described sidewall of described gas-liquid separation device in order to blow the described chemical liquid being attached on described blade.
15. gas-liquid separation devices as described in claim the 14, it is characterized in that, described screw rod comprises an axostylus axostyle, described axostylus axostyle comprises a center cavity and multiple perforate being communicated to outside described axostylus axostyle from described center cavity, and described axostylus axostyle is connected with described extraneous gas supply equipment, for by described gas input described axostylus axostyle described center cavity in and blown the described chemical liquid being attached on described blade by described perforate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620226168.9U CN205435200U (en) | 2016-03-23 | 2016-03-23 | A gas -liquid separation for wet process manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620226168.9U CN205435200U (en) | 2016-03-23 | 2016-03-23 | A gas -liquid separation for wet process manufacturing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN205435200U true CN205435200U (en) | 2016-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620226168.9U Withdrawn - After Issue CN205435200U (en) | 2016-03-23 | 2016-03-23 | A gas -liquid separation for wet process manufacturing equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107224785A (en) * | 2016-03-23 | 2017-10-03 | 盟立自动化股份有限公司 | Gas-liquid separation device for wet processing device |
| CN108977246A (en) * | 2018-08-03 | 2018-12-11 | 蚌埠市昊源压缩机制造有限公司 | The method that a kind of pair of natural gas is compressed |
| CN111632435A (en) * | 2020-06-13 | 2020-09-08 | 江苏启景环保技术有限公司 | Method for purifying waste gas containing liquid hazardous chemicals |
-
2016
- 2016-03-23 CN CN201620226168.9U patent/CN205435200U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107224785A (en) * | 2016-03-23 | 2017-10-03 | 盟立自动化股份有限公司 | Gas-liquid separation device for wet processing device |
| CN107224785B (en) * | 2016-03-23 | 2019-09-10 | 盟立自动化股份有限公司 | Gas-liquid separation device for wet processing device |
| CN108977246A (en) * | 2018-08-03 | 2018-12-11 | 蚌埠市昊源压缩机制造有限公司 | The method that a kind of pair of natural gas is compressed |
| CN108977246B (en) * | 2018-08-03 | 2021-10-12 | 蚌埠市昊源压缩机制造有限公司 | Method for compressing natural gas |
| CN111632435A (en) * | 2020-06-13 | 2020-09-08 | 江苏启景环保技术有限公司 | Method for purifying waste gas containing liquid hazardous chemicals |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160810 Effective date of abandoning: 20190910 |
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| AV01 | Patent right actively abandoned |