CN205420541U

CN205420541U - A gas piping structure that is used for CVI densifying of opening container

Info

Publication number: CN205420541U
Application number: CN201521050180.0U
Authority: CN
Inventors: 杨云云; 左新章; 邬国平; 成来飞; 马玉洁
Original assignee: Xian Xinyao Ceramic Composite Material Co Ltd
Current assignee: Xian Xinyao Ceramic Composite Material Co Ltd
Priority date: 2015-12-15
Filing date: 2015-12-15
Publication date: 2016-08-03
Anticipated expiration: 2025-12-15

Abstract

The utility model discloses a gas piping structure that is used for CVI densifying of opening container, the complicated container of the little opening of specially adapted, insert an air duct at the little opening part of container itself, the air duct disect insertion is to the container bottom, it has even air vent to distribute on the air duct, an and embedded blast pipe in the air duct, as the tail gas passing away, there are a total air duct and total blast pipe, an air duct and a blast pipe of connecting a N container respectively, the intake pipe of the outer interface connection stove of total air duct, total blast pipe is connected to the vacuum pump, can a plurality of little opening containers of a melt deposit, the efficiency of densifying is improved.

Description

A kind of gas piping structure of the CVI densification for open containers

Technical field

This utility model relates to the gas piping structure of a kind of CVI densification for open containers, is specifically related to the gas piping structure of chemical vapor infiltration (CVI) process medium and small opening complexity container quick densifying.

Background technology

Ceramic matric composite is a kind of heat structure/function integration new material having metal material, ceramic material and material with carbon element feature performance benefit concurrently, there is high temperature resistant, low-density, Gao Biqiang, Gao Bimo, antioxidation, anti-yaw damper, insensitive to crackle, there is not the features such as calamitous damage, have a wide range of applications in fields such as machinery, Aero-Space, core, the energy, and CVI is a kind of common method preparing this material.CVI is to be placed in cvd furnace by the precast body of given shape, introduces inside precast body by presoma by modes such as diffusion convection current, reacts at a certain temperature, generate solid-state ceramic class material filling precast body, reach the effect of densification.The method is highly effective for thin-wall part such as flat-type or the big opening straight barrel type reactor of simple structure, and for some special containers, the opening that especially only one of which is little, or there is several opening, but poor effect prepared by the container that opening angle is acute angle, circulate in the space of the narrowest and small closing mainly due to reacting gas during CVI and spread not smooth caused.

Summary of the invention

For solving existing small-bore container, the technical deficiency that reacting gas penetration mass is the best in CVI preparation process, densification rate is slower, this utility model provides the gas piping structure of a kind of CVI densification for open containers

Technical solution of the present utility model is as follows:

The gas piping structure of the CVI densification for open containers that this utility model provides, it is characterized in that n airway and n the airway total air escape pipe that n exhaust branch pipe is connected one to one including that total inlet pipe is connected with total inlet pipe with n exhaust branch pipe, wherein n >=1

Described total inlet pipe introduces the partial reaction gas of cvd furnace, and described total air escape pipe discharges tail gas.

Improvement as this utility model structure, the bottom lock of airway of the present utility model, described airway is positioned at the sidewall of the part of open containers and passage is offered in bottom, and each passage makes reacting gas be diffused into container inner wall uniformly, prevents bottom over-deposit.

Further, exhaustor of the present utility model is positioned at one end of airway and penetrates airway.

The beneficial effects of the utility model:

(1) this utility model is for the CVI densification of little opening complexity container, by the inside and outside method permeated simultaneously, can significantly improve deposition velocity and deposition quality.

(2) this utility model is for the CVI quick densifying of little opening complexity container, uses surface to be uniformly distributed the airway of passage, is imported inside container by reacting gas, and is discharged by tail gas by embedded exhaustor, and equipment is simple, and densification is uniform.

(3) connecing N number of arm under total gas tube of the present utility model, in like manner, total air escape pipe connects vacuum pump, connects N number of arm under total air escape pipe, it is achieved a multiple little open containers of stove densification simultaneously, improves CVI efficiency of densification.

Accompanying drawing explanation

Fig. 1 is CVI process medium and small opening complexity container method for rapidly densifying schematic diagram；

Fig. 2 is airway inner port end view；

Fig. 3 is N number of little opening complexity container quick densifying preparation method schematic diagram simultaneously；

Fig. 4 is actual deposition schematic diagram in stove.

In figure, 1a-airway collar extension；1-airway；2-exhaustor；2a-exhaustor collar extension；3-container；2b-exhaustor internal orifice；1b-airway internal orifice；4-vessel port；5a-total airway external tapping；The total airway of 5-；6-A airway；7-A exhaustor；8-C exhaustor；9-A precast body；10-B exhaustor；11-total air escape pipe；11a-total air escape pipe external tapping；12-B precast body；13-C precast body；14-C airway；15-B airway；16-cvd furnace；17-adsorption tanks, 18-vacuum pump.

Detailed description of the invention

This utility model provides a kind of method that little opening complexity container accelerates densification during CVI, utilize a kind of airway, reacting gas is passed through the inside of little opening complexity container, airway is dispersed with uniform little passage in the part be passed through container inner wall, air-flow is made to be diffused into each wall portion of container uniformly, it is unlikely because the impact of air-flow causes deposition uneven, and this utility model can quick densifying with the little opening complexity container of high-volume, these airways and an exhaustor are connected on same total airway and total air escape pipe, realize a multiple little opening complexity container of stove densification simultaneously, improve the efficiency of little opening complex structural member densification.

Below in conjunction with accompanying drawing, this utility model is elaborated.

With reference to Fig. 1, an airway 1 is inserted at the opening 4 of container 3 itself, it is used for supply continuously, each passage it is uniform-distribution with on airway 1, it is blind end at the internal orifice 1b of airway, this end face is also uniform-distribution with each passage, as in figure 2 it is shown, each passage makes reacting gas be diffused into container inner wall uniformly.The inner embedded exhaustor 2 of airway 1, is used for discharging reaction end gas continuously, and the internal orifice 2b of exhaustor penetrates airway internal orifice 1b, directly reaches the lowermost end of container.

Fig. 2 is the end view of airway internal orifice 1b, and this end face is uniform-distribution with passage, makes reacting gas uniformly spread.

As shown in Figure 3, the C airway 14 of A the airway 6 and C precast body 13 of A precast body 9, and the B airway 15 of B precast body is connected on total airway 5, and always airway external tapping 5a directly connects with stove air inlet, reacting gas is directly communicated to A from stove air inlet by total airway 5, B, inside C precast body, the C exhaustor 8 of the exhaustor 7 and C precast body 13 of A precast body 9, and the B exhaustor 10 of B precast body is then connected on total air escape pipe 11, total air escape pipe external tapping 11a directly connects with vacuum pump, the tail gas that precast body internal-response generates is discharged by total air escape pipe 11.

This utility model can allow little opening complexity container realize inside and outside densification simultaneously during CVI, realizes quickly preparation CVI matrix while improving deposition quality.

Embodiment:

As a example by three difform complicated container CVI depositing silicon silicon, being coupled together according to the schematic diagram of Fig. 3 by three containers, put into cvd furnace, container is not directly contacted with sidewall of crucible.CVI preparation technology heats up routinely, it is passed through precursor (hydrogen, argon and MTS) reaction, the carborundum generated the most constantly can be deposited by interior, in like manner, outer surface deposits from outside to inside, the tail gas generated in container is discharged by total air escape pipe 11 via each exhaustor, and sedimentation time improves about 20% than the Common deposition time, and deposition effect is obviously improved.

Fig. 4 show actual deposition schematic diagram in stove.The air inlet pipe entrance of stove is divided into two, and one provides reacting gas to external container, and another terminates the total airway of container interior solidization, is passed through inside container by gas.Stove bottom surface is uniform-distribution with passage, the subsidiary adsorption tanks of furnace bottom extract the reaction end gas of stove interior out body of heater by these passages, exhaust pipe within container is buckled on the passage of furnace bottom, exhaust outlet area can be expanded, exhaust outlet is made to cover multiple passages, strengthening exhaust effect, the tail gas after container interior solid passes through exhaustor, is drawn in adsorption tanks.

CVI densification before is typically all for flat-type, reacting gas can be unimpeded spread in each face, but the container for little opening, because reacting gas is not easily accessible inside container, can only be diffused at vessel surface, CVI densification is carried out from outside, thus cause CVI densification uneven, and it is the most time-consuming, this utility model uses airway to be passed into inside container by a part of reacting gas, at high temperature, and densification while of inside and outside, the most not only densification is effective, and shortens the densification time to a certain extent.

Claims

1. the gas piping structure for the CVI densification of open containers, it is characterized in that: include n airway and n the airway total air escape pipe that n exhaust branch pipe is connected with n exhaust branch pipe one to one that total inlet pipe is connected with total inlet pipe, wherein n >=1

The gas piping structure of the CVI densification for open containers the most according to claim 1, it is characterised in that:

The bottom lock of described airway, described airway is positioned at the sidewall of the part of open containers and passage is offered in bottom, and each passage makes reacting gas be diffused into container inner wall uniformly, prevents bottom over-deposit.

The gas piping structure of the CVI densification for open containers the most according to claim 1 and 2, it is characterised in that:

Described exhaustor is positioned at one end of airway and penetrates airway.