CN205378134U - Spatial resolution measuring device of X ray plane detector - Google Patents
Spatial resolution measuring device of X ray plane detector Download PDFInfo
- Publication number
- CN205378134U CN205378134U CN201620041084.8U CN201620041084U CN205378134U CN 205378134 U CN205378134 U CN 205378134U CN 201620041084 U CN201620041084 U CN 201620041084U CN 205378134 U CN205378134 U CN 205378134U
- Authority
- CN
- China
- Prior art keywords
- ray
- resolving power
- test target
- power test
- planar detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model provides a spatial resolution measuring device of X ray plane detector, the device include and X ray generating device, resolving power test target, filter element and X ray plane detector be equipped with the pinhole between resolving power test target and the X ray plane detector, and the central light that X ray generating device sent passes the center of the photosurface of center, pinhole, the X ray plane detector of center, the filter element of resolving power test target in proper order. The motion of light path direction is followed along the motion of light path direction, translation platform II drive pinhole to translation platform I drive resolving power test target to adjust the the magnification of pinhole imaging system, make the resolving power test target form images on the photosurface of X ray plane detector, generate by the survey line halved tie. The utility model discloses a spatial resolution measuring device of X ray plane detector has improved spatial resolution and accuracy, has reduced the resolving power test target preparation degree of difficulty, and does not harm the photosurface of X ray plane detector.
Description
Technical field
This utility model belongs to image quality evaluation field, is specifically related to the spatial resolution measurement apparatus of a kind of X ray planar detector.
Background technology
Research in plasma diagnostics, Non-Destructive Testing, medical imaging etc. is with application, and the widely used X ray planar detector of people is as the record medium being x-ray imaging system.Spatial resolution is one of appraising X-ray most important index of planar detector imaging performance.The spatial resolution measurement apparatus of usual X ray planar detector includes: x-ray source, resolving power test target, filter disc and X ray planar detector, metering system has two kinds, first kind of way is: resolving power test target is close on X ray planar detector photosurface, can be obtained the spatial resolution of X ray planar detector by x-ray source irradiation resolving power test target.The method can accurately record spatial resolution, but because resolving power test target directly contacts with photosurface, it is easy to cause the photosurface permanent damage of X ray planar detector, particularly when X ray planar detector photosurface applies high pressure, sparking electric discharge very easily occurs；The second way is: described resolving power test target is away from X ray planar detector photosurface certain distance, this arranges lower resolving power test target and act as image-forming component, necessarily there is deviation with arranging value in spatial frequency on X ray planar detector photosurface, causes that the spatial resolution measurement result of X ray planar detector is inaccurate.Additionally, generally the spatial resolution measurement apparatus of X ray planar detector must use the high line resolving power test target to density, to obtain the limit space resolution of X ray planar detector.But, when the line of resolving power test target to density value more than 20Lp/mm time, lines and spacing width are only smaller than 25 μm, it is difficult to make.
Summary of the invention
The technical problems to be solved in the utility model is to provide the spatial resolution measurement apparatus of a kind of X ray planar detector.
A kind of spatial resolution measurement apparatus of X ray planar detector, including X-ray generator, resolving power test target, filter disc and X ray planar detector, it is characterized in, being provided with pin hole between resolving power test target and X ray planar detector, the central ray that X-ray generator sends sequentially passes through the center of the photosurface of the center of resolving power test target, the center of filter disc, pin hole, X ray planar detector.
Described resolving power test target is fixed on translation stage I by bridge I, and translation stage I is fixed on the lower surface of cavity, and translation stage I is along optical path direction rectilinear motion；Described filter disc is fixed on translation stage II by bridge II, and substrate has the pin hole of circle, and substrate is fixed on translation stage II by bridge III, and translation stage II is fixed on the lower surface of cavity, and translation stage II is along optical path direction rectilinear motion；One end of described cavity is connected with X-ray generator, and the other end is connected with X ray planar detector.
Described X-ray generator is the one in X-ray tube, Synchrotron Radiation, laser target shooting device, Z-pinch device.
The photosurface of described X ray planar detector is planar structure, and X ray planar detector is the one in streak camera, gate framing camera, image intensifier, scintillator radiation detector, ICCD, low-light level night vision device.
The line halved tie of density is made up of by described resolving power test target the transition line line halved tie to density or single line, and line is to density value less than or equal to 10.0Lp/mm, and wire member is the one in tantalum, tungsten, gold, platinum, lead.
Described filter disc material is the one in beryllium, carbon, magnesium, aluminum, titanium, vanadium, ferrum, nickel, copper, zinc.
Described baseplate material is the one in tantalum, tungsten, gold, platinum, lead.
Compared with prior art, this utility model has the advantage that
1. resolving power test target of the present utility model, pin hole, X ray planar detector constitute pin-hole imaging system, resolving power test target as " thing " by pin-hole imaging to the photosurface of X ray planar detector, generate " as " there is line halved tie structure, therefore resolving power test target is without directly contacting the photosurface of X ray planar detector, does not damage the photosurface of X ray planar detector；
2. due on the photosurface of X ray planar detector " as " line to density equal to the line of resolving power test target to the density amplification M divided by pin-hole imaging system, regulate translation stage I or translation stage II, M is set less than 1, namely available low line the resolving power test target of density is obtained high line to density " as ", therefore this utility model is without using the high line resolving power test target to density, reduces resolving power test target manufacture difficulty；
3. by regulating translation stage I, translation stage II, change the amplification M of pin-hole imaging system, or use the transition line resolving power test target to density, easily realize on the photosurface of X ray planar detector " as " line to density at the interval ascending consecutive variations of 0.5lp/mm ~ 50lp/mm, expand the line upper limit to density, can accurately judge that the lucky unresolvable line of X ray planar detector is to density, improves the accuracy of measurement of limit space resolution.
The spatial resolution measurement apparatus of X ray planar detector of the present utility model improves accuracy of measurement, reduces resolving power test target manufacture difficulty, and does not damage the photosurface of X ray planar detector.
Accompanying drawing explanation
Fig. 1 is the structural representation of the spatial resolution measurement apparatus of X ray planar detector of the present utility model；
Fig. 2 is the schematic diagram of 10.0Lp/mm resolving power test target；
Fig. 3 is the schematic diagram of fan-shaped resolving power test target；
In figure, 1.X ray tube 2. cavity 3. resolving power test target 4. bridge I 5. translation stage I 6. filter disc 7. bridge II 8. translation stage II 9. substrate 10. bridge III 11. pin hole 12. negative electrode micro-strip 13. framing image-converter tube 14.CCD camera 15. central ray.
Detailed description of the invention
This utility model is illustrated below in conjunction with drawings and Examples.
Embodiment 1
Fig. 1 is the structural representation of the spatial resolution measurement apparatus of X ray planar detector of the present utility model, and Fig. 2 is the schematic diagram of 10.0Lp/mm resolving power test target.In Fig. 1 ~ Fig. 2, the spatial resolution measurement apparatus of X ray planar detector of the present utility model, including X-ray tube 1, resolving power test target 3, filter disc 6 and X ray framing camera, X ray framing camera is made up of negative electrode micro-strip 12, framing image-converter tube 13 and CCD camera 14, negative electrode micro-strip 12 is coated on the microchannel plate of framing image-converter tube 13, and framing image-converter tube 13 and CCD camera 14 are closely pasted and be of coupled connections；Being provided with pin hole 11 between resolving power test target 3 and X ray framing camera, the central ray 15 that X-ray generator sends sequentially passes through the center of the center of resolving power test target 3, the center of filter disc 6, pin hole 11, negative electrode micro-strip 12；Its annexation is, resolving power test target 3 is fixed on translation stage I5 by bridge I4, and translation stage I5 is fixed on the lower surface of cavity 2；Filter disc 6 is fixed on translation stage II8 by bridge II 7, and substrate 9 has the circular pin hole 11 in 10 μm of aperture, and substrate 9 is fixed on translation stage II8 by bridge III10, and translation stage II8 is fixed on the lower surface of cavity 16；One end of cavity 2 is connected with X-ray generator, and the other end is connected with X ray framing image-converter tube 13.
Translation stage I 5, translation stage II 8 are all motorized precision translation stage, to facilitate people in the outer operation of cavity 2, change the amplification M of pin hole 11 imaging system.As in figure 2 it is shown, density is 10.0Lp/mm by the line of the present embodiment intermediate-resolution plate 3.Initial setting up amplification M=20, then in negative electrode micro-strip 12 " as " line be 10.0Lp/mm ÷ 20=0.5Lp/mm to density.Continuing to drive translation stage, make the descending change of amplification M of pin hole 11 imaging system, as amplification M=0.4, the line halved tie of CCD camera 9 record can not be differentiated just, then the spatial resolution gating framing camera is 10.0Lp/mm ÷ 0.4=25.0Lp/mm.
Filter disc 6 is the beryllium filter disc of 50 μ m-thick, and it can stop visible ray and through most X ray, and when X-ray energy is 1.3keV, transmitance reaches 10%, and X-ray energy is more high, and transmitance is more high.Substrate 9 is the tantalum substrate of 50 μ m-thick, and for the X ray of below 10keV, transmitance is less than 0.035%, and the pin hole 11 being therefore produced on substrate 9 can realize high-contrast image.The lines of resolving power test target 3 are by the plumbous making of 25 μ m-thick, and for the X ray of below 10keV, transmitance, less than 2.5%, therefore can provide the line halved tie of high-contrast.
Embodiment 2
Fig. 1 is the structural representation of the spatial resolution measurement apparatus of X ray planar detector of the present utility model, and Fig. 3 is the schematic diagram of fan-shaped resolving power test target.Removing resolving power test target 3 and be different from outside embodiment 1, other structures of the spatial resolution measurement apparatus of X ray planar detector are all identical.As it is shown on figure 3, the present embodiment intermediate-resolution plate 3 is fan-shaped resolving power test target, line to density by 1.0Lp/mm gradual change to 10.0LP/mm, denote corresponding scale value.Regulating translation stage I 5, translation stage II 8, be arranged to as amplification M=0.2, the line halved tie of CCD camera 9 record can not be differentiated just when 5.0Lp/mm scale value, then the spatial resolution gating framing camera is 5.0Lp/mm ÷ 0.2=25.0Lp/mm.
Density is gradual change value by the line being appreciated that embodiment 2 intermediate-resolution plate, the therefore resolving power test target of other gradual change forms, such as star, Geometric Sequence and arithmetic progression type, equally applicable.
Above-mentioned filter disc material is replaced by carbon, magnesium, aluminum, titanium, vanadium, ferrum, nickel, copper, zinc.
Above-mentioned baseplate material is replaced by tungsten, gold, platinum, lead.
Above-mentioned wire member is replaced by tantalum, tungsten, gold, platinum.
X ray planar detector in the above embodiments is gate framing camera, and other photosurface is the X ray planar detector of planar structure, such as streak camera, image intensifier, scintillator radiation detector, ICCD and low-light level night vision device, equally applicable.
X-ray generator in the above embodiments is X-ray tube, and other can produce the device of X ray, such as Synchrotron Radiation, laser target shooting device, Z-pinch device, equally applicable.
Above example is merely to illustrate this utility model, and is not limitation of the utility model.About person skilled in the art when without departing from spirit and scope of the present utility model; can also make a variety of changes, replace and modification; therefore equal technical scheme falls within category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (4)
1. the spatial resolution measurement apparatus of an X ray planar detector, including X-ray generator, resolving power test target (3), filter disc (6) and X ray planar detector, it is characterized in that, being provided with pin hole (11) between resolving power test target (3) and X ray planar detector, the central ray (15) that X-ray generator sends sequentially passes through the center of the photosurface of the center of resolving power test target (3), the center of filter disc (6), pin hole (11), X ray planar detector.
2. the spatial resolution measurement apparatus of X ray planar detector according to claim 1, described resolving power test target (3) is fixed on translation stage I (5) by bridge I (4), translation stage I (5) is fixed on the lower surface of cavity (2), and translation stage I (5) is along optical path direction rectilinear motion；Described filter disc (6) is fixed on translation stage II (8) by bridge II (7), substrate (9) has the pin hole (11) of circle, substrate (9) is fixed on translation stage II (8) by bridge III (10), translation stage II (8) is fixed on the lower surface of cavity (16), and translation stage II (8) is along optical path direction rectilinear motion；One end of described cavity (2) is connected with X-ray generator, and the other end is connected with X ray planar detector.
3. the spatial resolution measurement apparatus of X ray planar detector according to claim 1, described X-ray generator is the one in X-ray tube, Synchrotron Radiation, laser target shooting device, Z-pinch device.
4. the spatial resolution measurement apparatus of X ray planar detector according to claim 1, the photosurface of described X ray planar detector is planar structure, and X ray planar detector is the one in streak camera, gate framing camera, image intensifier, scintillator radiation detector, ICCD, low-light level night vision device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620041084.8U CN205378134U (en) | 2016-01-18 | 2016-01-18 | Spatial resolution measuring device of X ray plane detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620041084.8U CN205378134U (en) | 2016-01-18 | 2016-01-18 | Spatial resolution measuring device of X ray plane detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205378134U true CN205378134U (en) | 2016-07-06 |
Family
ID=56278728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620041084.8U Withdrawn - After Issue CN205378134U (en) | 2016-01-18 | 2016-01-18 | Spatial resolution measuring device of X ray plane detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205378134U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105516715A (en) * | 2016-01-18 | 2016-04-20 | 中国工程物理研究院激光聚变研究中心 | Spatial resolution measuring device of X-ray planar detector |
| CN109194953A (en) * | 2018-08-15 | 2019-01-11 | 瑞声科技(新加坡)有限公司 | Spatial color and resolution measurement device and measurement method |
| CN109239930A (en) * | 2018-10-10 | 2019-01-18 | 哈尔滨工业大学 | A kind of saturation type laser sheet beam apparatus for shaping |
-
2016
- 2016-01-18 CN CN201620041084.8U patent/CN205378134U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105516715A (en) * | 2016-01-18 | 2016-04-20 | 中国工程物理研究院激光聚变研究中心 | Spatial resolution measuring device of X-ray planar detector |
| CN105516715B (en) * | 2016-01-18 | 2018-01-12 | 中国工程物理研究院激光聚变研究中心 | The spatial resolution measurement apparatus of X ray planar detector |
| CN109194953A (en) * | 2018-08-15 | 2019-01-11 | 瑞声科技(新加坡)有限公司 | Spatial color and resolution measurement device and measurement method |
| CN109194953B (en) * | 2018-08-15 | 2021-03-02 | 瑞声光学解决方案私人有限公司 | Spatial color and resolution measuring device and measuring method |
| CN109239930A (en) * | 2018-10-10 | 2019-01-18 | 哈尔滨工业大学 | A kind of saturation type laser sheet beam apparatus for shaping |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205378134U (en) | Spatial resolution measuring device of X ray plane detector | |
| CN105516715B (en) | The spatial resolution measurement apparatus of X ray planar detector | |
| CN105784334B (en) | Optical-fiber laser beam quality measurement method based on photodetector and CCD camera | |
| CN108226120B (en) | Device and method for measuring size and energy distribution of sheet laser beam | |
| CN105204059A (en) | Device and method for quantitative measurement of soft X-ray radiant flows in local area | |
| CN107728191B (en) | Four-channel space localization X-ray radiation flow diagnosis device | |
| CN108012144A (en) | A kind of X-ray streak camera imaging performance tests system and method | |
| Grimes et al. | The influence of focal spot blooming on high‐contrast spatial resolution in CT imaging | |
| CN111983667B (en) | Micro-dose measuring method and measuring device based on scintillator | |
| Chapman et al. | Focusing and collimation of x rays using microchannel plates: an experimental investigation | |
| Van de Graaff et al. | Experiments on the Elastic Single Scattering of Electrons by Nuclei | |
| Allen | The X‐Ray Photon Efficiency of a Multiplier Tube | |
| CN207978063U (en) | A kind of X-ray streak camera static test system and dynamic test system | |
| Deslattes et al. | Noninvasive high‐voltage measurement in mammography by crystal diffraction spectrometry | |
| CN103235186A (en) | Method and system for measuring arc impedance by using spectrum | |
| Losovoi et al. | 200-femtosecond streak camera: development and dynamic measurements | |
| Howatson et al. | CXIV. The nuclear scattering of electrons and positrons in argon | |
| JPS6032243A (en) | Radiation detector | |
| Fürth et al. | The Fuerth microphotometer and its application in physics | |
| Jolly et al. | Beam diagnostics for the front end test stand at RAL | |
| KR102220947B1 (en) | Device of measuring fine weight without contact with the object to be measured and the method of measuring fine weight using it | |
| RU2462006C1 (en) | Measuring method of practical peak voltage | |
| Durand et al. | High-Fidelity Dynamic Neutron Imaging and Radiography for Subcritical Experiments and Other Applications | |
| Miller | Inelastic electron scattering at large angles. | |
| Watson | Progress in Medical Radiography |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160706 Effective date of abandoning: 20180112 |