CN205373884U - Vacuum ultraviolet spectroscopy collection system - Google Patents
Vacuum ultraviolet spectroscopy collection system Download PDFInfo
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- CN205373884U CN205373884U CN201620005367.7U CN201620005367U CN205373884U CN 205373884 U CN205373884 U CN 205373884U CN 201620005367 U CN201620005367 U CN 201620005367U CN 205373884 U CN205373884 U CN 205373884U
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- gas circuit
- light room
- constant voltage
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- pressure
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Abstract
The utility model relates to a vacuum ultraviolet spectroscopy collection system, including measuring light room, spectrum collection system further include: the circulation unit, the circulation unit is linked together with measurement light room, and with it constitutes the circulation gas circuit to measure light room, gas circuit selected cell, gas circuit selected cell sets up circulating air makes on the road measure light room optionally intercommunication circulation gas circuit and/or constant voltage unit, the constant voltage unit, the constant voltage unit set up with the gas that the circulation gas circuit links to each other props up on the road, pressure sensor, pressure sensor is used for the monitoring to measure light room's pressure, a control unit, the the control unit basis the pressure variation who measures light room adjusts gas circuit selected cell. The utility model has the advantages of accurate, automatic constant voltage are stabilized, are measured to with low costs, device.
Description
Technical field
This utility model relates to spectra collection, particularly to the harvester of the vacuum ultraviolet spectrometry that the pressure measuring light room automatically controls.
Background technology
When the spectrum (below wavelength 200nm) of VUV wave band is propagated in atmosphere, cannot being propagated by material absorbings such as the oxygen in air, steam, it gathers, measures and must carry out under vacuum system or inert gas environment.Spectrum is acquired, measures by the mode adopting vacuum system, it is necessary to by system evacuation, this allows for spectrogrph must have significantly high structural strength, and also can bring the inconvenience part such as power consumption, noise.According to inert gas environment, being generally adopted the mode purging or circulating, purging is to use inert gas purge optical path space, this mode to need substantial amounts of noble gas in spectrogrph work process always, wastes many, cost height, and purge time is long, starts slow；Circulation is to be full of noble gas and so as to circulate in light chamber interior, but this mode changes easily caused by pressure, and then causes the change of refractive index, causes that instrument spectral drift is serious, and stability reduces, and measurement result accuracy reduces.For solving instrument internal pressure variation issue, it is generally adopted pressure compensation mode, namely when internal pressure declines, supplements external air source；When internal pressure raises, open relief valve, discharge excessive gas.This kind of mode is limited by external air source and outer described external air source is highly prone to pollute.
Utility model content
In order to solve the deficiency in above-mentioned prior art, this utility model provides that a kind of cost is low, device is stable, measurement is accurate, the vacuum ultraviolet spectrometry harvester of automatic constant-pressure.
The purpose of this utility model is achieved through the following technical solutions:
A kind of vacuum ultraviolet spectrometry harvester, including measuring light room, described spectra collection device farther includes:
Cycling element, described cycling element is connected with measuring light room, and constitutes circulation gas circuit with described measurement light room；
Gas circuit selects unit, and described gas circuit selects unit to be arranged in described circulation gas circuit, makes described measurement light room selectively communicate with circulation gas circuit and/or constant voltage unit；
Constant voltage unit, described constant voltage unit is arranged on the gas branch road being connected with described circulation gas circuit；
Pressure transducer, described pressure transducer measures the pressure of light room for monitoring；
Control unit, described control unit changes the described gas circuit of adjustment according to the pressure of described measurement light room and selects unit.
According to above-mentioned spectra collection device, it is preferable that described cycling element is transfer unit.
According to above-mentioned spectra collection device, it is preferable that described spectra collection device also includes: adsorbent, described adsorbent is arranged in described circulation gas circuit.
According to above-mentioned spectra collection device, alternatively, described adsorbent is arranged in described circulation gas circuit by self sealss snap joint.
According to above-mentioned spectra collection device, alternatively, described constant voltage unit is buffering cavity.
According to above-mentioned spectra collection device, it is preferable that the pressure that the pressure of described constant voltage unit is indoor higher than described measurement light.
Compared with prior art, this utility model has the beneficial effect that
1, this utility model adopts inert gas environment to realize the collection of vacuum ultraviolet spectrometry, and noble gas consumption is few, cost is low, startup is fast.
2, this utility model adopts the mode that gas circulation and pressure are automatically adjusted, get rid of the interference easily absorbing the materials such as the oxygen of VUV band spectrum, steam, simultaneously without by external force, being automatically obtained the constant pressure measuring light room, prevent spectral drift, it is ensured that the accuracy of measurement result.
3, this utility model is automatically obtained constant pressure in instrument internal, it is not necessary to introduces external air source or carries out gas exchange with external environment condition, effectively prevent the introducing of external disturbance gas, improves the service life of adsorbent.
Accompanying drawing explanation
With reference to accompanying drawing, disclosure of the present utility model will be easier to understand.Skilled addressee readily understands that: these accompanying drawings are used only for illustrating the technical solution of the utility model, and are not intended to protection domain of the present utility model is construed as limiting.In figure:
Fig. 1 is the structural representation of the vacuum ultraviolet spectrometry harvester of this utility model embodiment 1.
Detailed description of the invention
Fig. 1 and following description describe optional embodiment of the present utility model to instruct how those skilled in the art implement and reproduce this utility model.In order to instruct technical solutions of the utility model, simplify or eliminated some conventional aspects.Those skilled in the art should understand that the modification being derived from these embodiments or replacement will in scopes of the present utility model.Those skilled in the art should understand that following characteristics can combine to form multiple modification of the present utility model in every way.Thus, this utility model is not limited to following embodiment, and is only limited by claim and their equivalent.
Embodiment 1
Fig. 1 schematically illustrates the structural representation of the vacuum ultraviolet spectrometry harvester of the present embodiment, as it is shown in figure 1, described vacuum ultraviolet spectrometry harvester includes measuring light room, described spectra collection device farther includes:
Cycling element, described cycling element is connected with measuring light room, and constitutes circulation gas circuit with described measurement light room；
Gas circuit selects unit, and described gas circuit selects unit to be arranged in described circulation gas circuit, makes described measurement light room selectively communicate with circulation gas circuit and/or constant voltage unit；
Constant voltage unit, described constant voltage unit is arranged on the gas branch road being connected with described circulation gas circuit；
Pressure transducer (not shown), described pressure transducer measures the pressure of light room for monitoring, and pressure information is sent to control unit；
Control unit, described control unit changes the described gas circuit of adjustment according to the pressure of described measurement light room and selects unit.
Further, described cycling element is transfer unit, drives noble gas to circulate.
In order to get rid of noble gas is likely to containing oxygen, the material absorbing VUV band spectrum such as steam and affect the collection of spectrum, measurement, therefore:
Further, described spectra collection device also includes adsorbent, and described adsorbent is arranged in described circulation gas circuit, is removed the material easily absorbing vacuum ultraviolet spectrometry while gas circulating flow by adsorbent.
Spectra collection device is in use, the factors such as the gas exchange of a small amount of leakage of gas, variations in temperature and external environment all can cause pressure to change and derivative spectomstry drift, in order to ensure the air-tightness of device, the gas exchange of remover and external environment, therefore:
Further, described constant voltage unit is buffering cavity, is noble gas, it is to avoid the gas exchange of device and external environment in cavity.
In order to ensure that the noble gas in constant voltage unit enters measurement light room smoothly, therefore:
Further, the pressure that the pressure of described constant voltage unit is indoor higher than described measurement light.
The present embodiment also provides for a kind of vacuum ultraviolet spectrometry acquisition method, and described spectra collection method comprises the steps of
(A1) the vacuum ultraviolet spectrometry harvester of this enforcement is provided；
(A2) it is filled with noble gas to measurement light indoor and (does not absorb the gas of ultraviolet spectra, such as nitrogen, argon etc.), cycling element drives noble gas to circulate between light room in cycling element, measurement, forming circulation gas circuit, the material easily absorbing ultraviolet waves in noble gas is adsorbed in cyclic process；
(A3) control unit receives the pressure change measuring light room, selects the switching of unit to make constant voltage unit connect described circulation gas circuit, constant voltage unit and the noble gas directed flow measured between light room by gas circuit；
(A4) pressure measuring light room recovers normal value, is selected the connection switching off constant voltage unit and described circulation gas circuit of unit by gas circuit, and noble gas circulates in circulation gas circuit.
Measuring the pressure of light room described in pressure sensor monitoring, gas circuit is selected unit to be adjusted according to the pressure change measuring light room by control unit, therefore:
Further, step (A3) including:
If control unit receives the pressure measuring light room and raises, regulating gas circuit and select unit, disconnect circulation gas circuit, the gas circuit of light room and constant voltage unit is measured in connection, and the noble gas measuring light indoor enters described constant voltage unit under the effect of transfer unit；
Reducing if control unit receives the pressure measuring light room, regulate gas circuit and select unit, constant voltage unit connects described circulation gas circuit, and the noble gas in constant voltage unit enters described measurement light room because of differential pressure action.
Embodiment 2
The vacuum ultraviolet spectrometry harvester of this utility model embodiment 1 and the application of method.In this application examples, cycling element is membrane pump, adsorbent by self sealss snap joint be arranged on circulation gas circuit on so that follow-up change adsorbent time will not on measure light room pressure produce impact.Gas circuit selects unit to include two electromagnetic valves, i.e. be arranged on the first electromagnetic valve in circulation gas circuit, is arranged on the second electromagnetic valve on the gas branch road that constant voltage unit is connected with circulation gas circuit.Constant voltage unit is buffering cavity, is full of noble gas in cushion chamber body.
The automatic pressure regulating method measuring light room of vacuum ultraviolet spectrometry harvester is as follows: pressure sensor monitoring measures the pressure of light room, and control unit regulates gas circuit according to pressure change and selects two electromagnetic valves of unit.When vacuum ultraviolet spectrometry harvester is properly functioning, the first electromagnetic valve being arranged in circulation gas circuit is opened, connect the second closed electromagnetic valve of buffering cavity, membrane pump is utilized to extract out measuring the indoor noble gas of light and after adsorbent, to easily absorb the material absorbing of VUV band spectrum, it is ensured that measure light indoor gas pure.When pressure transducer detects that the pressure measuring light room raises, control unit controls the first closed electromagnetic valve, and the second electromagnetic valve is opened, and light room is measured in buffering cavity connection, utilize membrane pump to be extracted out by the gas measuring light chamber interior and enter buffering cavity, reduce the pressure measuring light room；Pressure transducer is closed the second electromagnetic valve, is opened the first electromagnetic valve after detecting that the pressure measuring light room recovers setting value, and noble gas continues cycling through absorption in circulation gas circuit.When pressure transducer detects that the pressure measuring light room reduces, control unit controls the second electromagnetic valve and opens, gas in cushion chamber body is brought into measurement light room after entering circulation gas circuit because of differential pressure action, pressure transducer closes the second electromagnetic valve after detecting that the pressure measuring light room is increased to setting value.
In the present embodiment, measuring the gas of light chamber interior by cycling element, namely the effect of membrane pump enters buffering cavity, in this way, when the gas measuring light room is cushioned cavity by membrane pump suction, it is necessary to disconnect circulation gas circuit.It is of course also possible to by additionally arranging air pump on the gas branch road that buffering cavity is connected with circulation gas circuit, the gas suction buffering cavity of light indoor so can will be measured when not turning off circulation gas circuit.
Embodiment 3
The present embodiment provides a kind of vacuum ultraviolet spectrometry harvester, as different from Example 2, described vacuum ultraviolet spectrometry harvester is provided with flow controlling unit on the gas branch road of circulation gas circuit, circulation gas circuit and buffering cavity, adjusting gas flow, it is to avoid in pressure adjustment process, the change of the pressure in gas circuit is excessive；Described flow controlling unit can be ball valve or flow-limiting valve.
Embodiment 4
The present embodiment provides a kind of vacuum ultraviolet spectrometry harvester, as different from Example 1, in order to reduce the volume of constant voltage unit, extends the maintenance period of constant voltage unit simultaneously, therefore:
Further, described vacuum ultraviolet spectrometry harvester also includes noble gas source, and described noble gas source is connected with constant voltage unit, provides noble gas for described constant voltage unit.
Above-mentioned embodiment should not be construed as the restriction to this utility model protection domain.Of the present utility model it is crucial that: adopt cycling element and constant voltage unit, obtain, by automatically controlling, the high purity inert gas environment and constant voltage environment measuring light room, ultraviolet spectra is acquired.When without departing from this utility model spirit, any type of change that this utility model is made all should fall within protection domain of the present utility model.
Claims (6)
1. a vacuum ultraviolet spectrometry harvester, including measuring light room, it is characterised in that: described spectra collection device farther includes:
Cycling element, described cycling element is connected with measuring light room, and constitutes circulation gas circuit with described measurement light room；
Gas circuit selects unit, and described gas circuit selects unit to be arranged in described circulation gas circuit, makes described measurement light room selectively communicate with circulation gas circuit and/or constant voltage unit；
Constant voltage unit, described constant voltage unit is arranged on the gas branch road being connected with described circulation gas circuit；
Pressure transducer, described pressure transducer measures the pressure of light room for monitoring；
Control unit, described control unit changes the described gas circuit of adjustment according to the pressure of described measurement light room and selects unit.
2. spectra collection device according to claim 1, it is characterised in that: described cycling element is transfer unit.
3. spectra collection device according to claim 1, it is characterised in that: described spectra collection device also includes: adsorbent, and described adsorbent is arranged in described circulation gas circuit.
4. spectra collection device according to claim 3, it is characterised in that: described adsorbent is arranged in described circulation gas circuit by self sealss snap joint.
5. spectra collection device according to claim 1, it is characterised in that: described constant voltage unit is buffering cavity.
6. spectra collection device according to claim 1, it is characterised in that: the pressure that the pressure of described constant voltage unit is indoor higher than described measurement light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620005367.7U CN205373884U (en) | 2016-01-04 | 2016-01-04 | Vacuum ultraviolet spectroscopy collection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620005367.7U CN205373884U (en) | 2016-01-04 | 2016-01-04 | Vacuum ultraviolet spectroscopy collection system |
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| Publication Number | Publication Date |
|---|---|
| CN205373884U true CN205373884U (en) | 2016-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620005367.7U Active CN205373884U (en) | 2016-01-04 | 2016-01-04 | Vacuum ultraviolet spectroscopy collection system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509887A (en) * | 2016-01-04 | 2016-04-20 | 聚光科技(杭州)股份有限公司 | Vacuum ultraviolet spectrum collection device and method |
| CN111257596A (en) * | 2020-02-25 | 2020-06-09 | 西南交通大学 | Scanning probe microscope narrow and small experiment chamber environment atmosphere accurate control device |
-
2016
- 2016-01-04 CN CN201620005367.7U patent/CN205373884U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509887A (en) * | 2016-01-04 | 2016-04-20 | 聚光科技(杭州)股份有限公司 | Vacuum ultraviolet spectrum collection device and method |
| CN111257596A (en) * | 2020-02-25 | 2020-06-09 | 西南交通大学 | Scanning probe microscope narrow and small experiment chamber environment atmosphere accurate control device |
| CN111257596B (en) * | 2020-02-25 | 2021-09-14 | 西南交通大学 | Scanning probe microscope narrow and small experiment chamber environment atmosphere accurate control device |
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