CN205347560U - Solar cell surface reaction chamber cavity shield door structure for coating process - Google Patents
Solar cell surface reaction chamber cavity shield door structure for coating process Download PDFInfo
- Publication number
- CN205347560U CN205347560U CN201620070161.2U CN201620070161U CN205347560U CN 205347560 U CN205347560 U CN 205347560U CN 201620070161 U CN201620070161 U CN 201620070161U CN 205347560 U CN205347560 U CN 205347560U
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- plate
- door
- door plant
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- sleeve
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
Abstract
The utility model provides a solar cell surface reaction chamber cavity shield door structure for coating process is including drive mechanism, tilting mechanism and sealed slewing mechanism, drive mechanism is connected with last door plant, and last door plant passes through tilting mechanism to be connected with lower door plant, go up door plant and lower door plant setting in the door frame. Elasticity and the big coefficient of elasticity of utilizing disc spring let down door plant and the laminating of wall body wall closely, even wholely turn over some deformation of board system, disc spring is equivalent to extensible housing screw, door plant compressing tightly lower door plant in the recovering, because the temperature is very high in the cavity, lead to the cooling mouth of a river, the door plant and the cooling pipe of door plant down in process cool off last door plant and door plant down, go up door plant, lower door plant, pivot, the special fluorine dragon of door frame surface coating or aluminium oxide coating, prevent the corruption of the interior high energy particle of cavity to the shield door, this solar cell surface reaction chamber cavity shield door structure for coating process easy operation, the practicality is strong, easily uses widely.
Description
Technical field
This utility model relates to solar battery sheet (including thin-film solar cells) and manufactures equipment, plasma etching, the airtight technical field of vacuum reaction chamber, especially a kind of solar cell surface coating process reaction chamber cavity shield door structure.
Background technology
Traditional reaction chamber cavity shield door door-plate is not tight with wall laminating, and reative cell is difficulty with vacuum warehouse, is unfavorable for solar cell surface plated film；Additionally traditional is not elastic construction, and door-plate seals does not have Self-resetting function, and upper door-plate, lower door-plate, rotating shaft, door frame surface are easily corroded, and the cooling effect of door-plate is poor；Cause service life reduction, increase production cost.
Utility model content
Prior art is difficult to meet the needs of people, in order to solve above-mentioned Problems existing, the utility model proposes a kind of solar cell surface coating process reaction chamber cavity shield door structure.
For realizing this technical purpose, the technical solution adopted in the utility model is: a kind of solar cell surface coating process reaction chamber cavity shield door structure, including drive mechanism, switching mechanism and sealing rotating mechanism；
Described drive mechanism includes cylinder, first connecting rod, second connecting rod, third connecting rod, fourth link and pivot pin；The catch bar of described cylinder is connected with fourth link, the bottom of fourth link is hinged with third connecting rod, the top of described third connecting rod is rotationally connected by pivot pin and second connecting rod, and the top of described first connecting rod and third connecting rod is rotationally connected, and the right-hand member of first connecting rod is connected with sealing rotating mechanism；
Described sealing rotating mechanism includes rotating shaft, right driving sleeve, right rotation shafts bearing, rotating seal ring, tensioning combination sleeve, tensioning combination inner sleeve, logical cooling nozzle, tensioning combination ring, rotating seal ring spacer, tensioning combined friction dish, left flap sliding shaft sleeve and end face seal gland；Described right driving sleeve is set in the right-hand member of rotating shaft, and described right driving sleeve is arranged in right rotation shafts bearing, and the internal right-hand member of described right rotation shafts bearing is provided with rotating seal ring and rotating seal ring spacer；Described tensioning combination sleeve, tensioning combination inner sleeve, tensioning combination ring and tensioning combined friction dish are set in rotating shaft, and are arranged on the right-hand member of right rotation shafts bearing；Described logical cooling nozzle is opened in the right-hand member of rotating shaft core position, and rotating shaft core place is provided with pipeline；Left end in rotating shaft is provided with left flap sliding shaft sleeve and end face seal gland, and described left flap sliding shaft sleeve is set in the left end of rotating shaft, and described end face seal gland is fastened on left flap sliding shaft sleeve；
Described switching mechanism drop in leaf link block, turnover panel water inlet module, nut, stud, packing ring, spheric washer, taper faced washer and butterfly spring；The left end with stud of described nut is connected, described Stud connection drop in leaf link block cover plate and lower door-plate；Right-hand member at stud is arranged with spheric washer, taper faced washer, butterfly spring and packing ring successively；
Described drive mechanism is connected with upper door-plate, and upper door-plate is connected with lower door-plate by switching mechanism, and described upper door-plate and lower door-plate are arranged in doorframe.
Further, described nut, stud, packing ring, spheric washer and taper faced washer all adopt stainless steel to make.
Further, the surface of described upper door-plate, lower door-plate, rotating shaft and doorframe all sprays Teflon or aluminum oxide coating layer.
Further, it is provided with cooling pipe in described upper door-plate and lower door-plate.
Further, described drop in leaf link block has dividing of size, is provided with turnover panel water inlet module, is connected to some little turnover panel link blocks two big drop in leaf link block both sides between two big drop in leaf link blocks.
Compared with prior art, this utility model has the advantages that the retractility utilizing butterfly spring and big coefficient of elasticity allow lower door-plate with the laminating of body of wall wall closely, even if whole plate turnover system has some to deform, butterfly spring is equivalent to tensile housing screw, the door-plate compression to lower door-plate in recovery；Because cavity inner temperature is significantly high, logical cooling nozzle, through the cooling pipe of upper door-plate and lower door-plate, upper door-plate and lower door-plate are cooled down；Upper door-plate, lower door-plate, rotating shaft, door frame surface spraying Teflon or aluminum oxide coating layer, it is prevented that the high energy particle corrosion to shield door in cavity；This solar cell surface coating process is simple with reaction chamber cavity shield door structure operation, practical, it is easy to promote the use of.
Accompanying drawing explanation
Fig. 1 is cylinder-driven structural scheme of mechanism of the present utility model；
Fig. 2 is second connecting rod structural representation of the present utility model；
Fig. 3 is drop in leaf link block scheme of installation of the present utility model；
Fig. 4 is door-plate connection diagram of the present utility model；
Fig. 5 is rotating shaft connection diagram of the present utility model；
Fig. 6 is switching mechanism schematic diagram of the present utility model；
Fig. 7 is the partial enlarged drawing of A in Fig. 5；
In accompanying drawing labelling: 1-cylinder, 11-first connecting rod, 12-second connecting rod, 13-third connecting rod, 14-fourth link, 121-pivot pin, the upper door-plate of 2-, door-plate under 3-, 4-doorframe, 5-drop in leaf link block, 51-turnover panel water inlet module, 52-nut, 53-stud, 54-packing ring, 55-spheric washer, 56-taper faced washer, 57-butterfly spring, 6-rotating shaft, the right driving sleeve of 61-, 62-right rotation shafts bearing, 63-rotating seal ring, 64-tensioning combination sleeve, 65-tensioning combination inner sleeve, 66-leads to cooling nozzle, 67-tensioning combination ring, 68-rotating seal ring spacer, 69-tensioning combined friction dish, the left flap sliding shaft sleeve of 610-, 611-end face seal gland.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is clearly and completely described, it is clear that described embodiment is only a part of embodiment of this utility model, rather than whole embodiments.Based on the embodiment in this utility model, all other embodiments that those of ordinary skill in the art obtain under not making creative work premise, broadly fall into the scope of this utility model protection.
Referring to Figure of description 1-7, in this utility model embodiment, a kind of solar cell surface coating process reaction chamber cavity shield door structure, including drive mechanism, switching mechanism and sealing rotating mechanism；
Described drive mechanism includes cylinder 1, first connecting rod 11, second connecting rod 12, third connecting rod 13, fourth link 14 and pivot pin 121；The catch bar of described cylinder 1 is connected with fourth link 14, the bottom of fourth link 14 is hinged with third connecting rod 13, the top of described third connecting rod 13 is rotationally connected by pivot pin 121 and second connecting rod 12, the top of described first connecting rod 11 and third connecting rod 13 is rotationally connected, and the right-hand member of first connecting rod 11 is connected with sealing rotating mechanism；
Described sealing rotating mechanism includes rotating shaft 6, right driving sleeve 61, right rotation shafts bearing 62, rotating seal ring 63, tensioning combination sleeve 64, tensioning combination inner sleeve 65, logical cooling nozzle 66, tensioning combination ring 67, rotating seal ring spacer 68, tensioning combined friction dish 69, left flap sliding shaft sleeve 610 and end face seal gland 611；Described right driving sleeve 61 is set in the right-hand member of rotating shaft 6, and described right driving sleeve 61 is arranged in right rotation shafts bearing 62, and the internal right-hand member of described right rotation shafts bearing 62 is provided with rotating seal ring 63 and rotating seal ring spacer 68；Described tensioning combination sleeve 64, tensioning combination inner sleeve 65, tensioning combination ring 67 and tensioning combined friction dish 69 are set in rotating shaft 6, and are arranged on the right-hand member of right rotation shafts bearing 62；Described logical cooling nozzle 66 is opened in the right-hand member of rotating shaft 6 shaft core position, and rotating shaft 6 axle center place is provided with pipeline；Left end in rotating shaft 6 is provided with left flap sliding shaft sleeve 610 and end face seal gland 611, and described left flap sliding shaft sleeve 610 is set in the left end of rotating shaft 6, and described end face seal gland 611 is fastened on left flap sliding shaft sleeve 610；
Described switching mechanism includes drop in leaf link block 5, turnover panel water inlet module 51, nut 52, stud 53, packing ring 54, spheric washer 55, taper faced washer 56 and butterfly spring 57；The left end with stud 53 of described nut 52 is connected, and described stud 53 connects drop in leaf link block 5 cover plate and lower door-plate 3；Right-hand member at stud 53 is arranged with spheric washer 55, taper faced washer 56, butterfly spring 57 and packing ring 54 successively；
Described drive mechanism is connected with upper door-plate 2, and upper door-plate 2 is connected with lower door-plate 3 by switching mechanism, and described upper door-plate 2 and lower door-plate 3 are arranged in doorframe 4.
To optimisation technique scheme of the present utility model: described nut 52, stud 53, packing ring 54, spheric washer 55 and taper faced washer 56 all adopt stainless steel to make.
To optimisation technique scheme of the present utility model: the surface of described upper door-plate 2, lower door-plate 3, rotating shaft 6 and doorframe 4 all sprays Teflon or aluminum oxide coating layer.
To optimisation technique scheme of the present utility model: be provided with cooling pipe in described upper door-plate 2 and lower door-plate 3.
To optimisation technique scheme of the present utility model: described drop in leaf link block 5 has dividing of size, between two big drop in leaf link blocks 5, it is provided with turnover panel water inlet module 51, is connected to some little turnover panel link blocks two big drop in leaf link block 5 both sides.
Operation principle:
This utility model cylinder 1 promotes the upset of door-plate by jointed gear unit, realization is opened, close vacuum cavity, it is mounted with two drop in leaf link blocks 5 in the middle of upper door-plate 2 and lower door-plate 3, the uniform some little turnover panel contiguous blocks in the left and right sides, turnover panel contiguous block passes through rustless steel nut 52, rustless steel stud 53, rustless steel plain washer 54, rustless steel spheric washer 55, rustless steel taper faced washer 56, rustless steel butterfly spring 57 is connected with lower door-plate 3, disk spring 57 is arranged between turnover panel contiguous block and lower door-plate 3, the retractility and the big coefficient of elasticity that utilize butterfly spring 57 allow lower door-plate with the laminating of body of wall wall closely, even if whole plate turnover system has some to deform, butterfly spring 57 is equivalent to tensile housing screw, the door-plate compression to lower door-plate in recovery；Because cavity inner temperature is significantly high, logical cooling nozzle 51, through the cooling pipe of upper door-plate 2 and lower door-plate 3, upper door-plate 2 and lower door-plate 3 are cooled down；Upper door-plate 2, lower door-plate 3, rotating shaft 6, doorframe 4 surface spraying Teflon or aluminum oxide coating layer, it is prevented that the high energy particle corrosion to shield door in cavity.
The above; it is only preferred embodiment of the present utility model; not in order to limit this utility model, every any trickle amendment, equivalent replacement and improvement above example made according to technical spirit of the present utility model, should be included within the protection domain of technical solutions of the utility model.
Claims (4)
1. a solar cell surface coating process reaction chamber cavity shield door structure, including drive mechanism, switching mechanism and sealing rotating mechanism；It is characterized in that:
Described drive mechanism includes cylinder (1), first connecting rod (11), second connecting rod (12), third connecting rod (13), fourth link (14) and pivot pin (121)；The catch bar of cylinder (1) is connected with fourth link (14), the bottom of fourth link (14) is hinged with third connecting rod (13), the top of described third connecting rod (13) is rotationally connected by pivot pin (121) and second connecting rod (12), the top of described first connecting rod (11) and third connecting rod (13) is rotationally connected, and the right-hand member of first connecting rod (11) is connected with sealing rotating mechanism；
Described sealing rotating mechanism includes rotating shaft (6), right driving sleeve (61), right rotation shafts bearing (62), rotating seal ring (63), tensioning combination sleeve (64), tensioning combination inner sleeve (65), logical cooling nozzle (66), tensioning combination ring (67), rotating seal ring spacer (68), tensioning combined friction dish (69), left flap sliding shaft sleeve (610) and end face seal gland (611)；Described right driving sleeve (61) is set in the right-hand member of rotating shaft (6), described right driving sleeve (61) is arranged in right rotation shafts bearing (62), and the internal right-hand member of described right rotation shafts bearing (62) is provided with rotating seal ring (63) and rotating seal ring spacer (68)；Described tensioning combination sleeve (64), tensioning combination inner sleeve (65), tensioning combination ring (67) and tensioning combined friction dish (69) are set in rotating shaft (6), and are arranged on the right-hand member of right rotation shafts bearing (62)；Described logical cooling nozzle (66) is opened in the right-hand member of rotating shaft (6) shaft core position, and rotating shaft (6) axle center place is provided with pipeline；Left end in rotating shaft (6) is provided with left flap sliding shaft sleeve (610) and end face seal gland (611), described left flap sliding shaft sleeve (610) is set in the left end of rotating shaft (6), and described end face seal gland (611) is fastened on left flap sliding shaft sleeve (610)；
Described switching mechanism includes drop in leaf link block (5), turnover panel water inlet module (51), nut (52), stud (53), packing ring (54), spheric washer (55), taper faced washer (56) and butterfly spring (57)；The left end with stud (53) of described nut (52) is connected, and described stud (53) connects drop in leaf link block (5) cover plate and lower door-plate (3)；Right-hand member at stud (53) is arranged with spheric washer (55), taper faced washer (56), butterfly spring (57) and packing ring (54) successively；
Described drive mechanism is connected with upper door-plate (2), and upper door-plate (2) is connected with lower door-plate (3) by switching mechanism, and described upper door-plate (2) and lower door-plate (3) are arranged in doorframe (4).
2. a kind of solar cell surface coating process reaction chamber cavity shield door structure according to claim 1, is characterized in that: described nut (52), stud (53), packing ring (54), spheric washer (55) and taper faced washer (56) all adopt stainless steel to make.
3. a kind of solar cell surface coating process reaction chamber cavity shield door structure according to claim 1, is characterized in that: the surface of described upper door-plate (2), lower door-plate (3), doorframe (4) and rotating shaft (6) all sprays Teflon or aluminum oxide coating layer.
4. a kind of solar cell surface coating process reaction chamber cavity shield door structure according to claim 1, is characterized in that: be provided with cooling pipe in described upper door-plate (2) and lower door-plate (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620070161.2U CN205347560U (en) | 2016-01-21 | 2016-01-21 | Solar cell surface reaction chamber cavity shield door structure for coating process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620070161.2U CN205347560U (en) | 2016-01-21 | 2016-01-21 | Solar cell surface reaction chamber cavity shield door structure for coating process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205347560U true CN205347560U (en) | 2016-06-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620070161.2U Expired - Fee Related CN205347560U (en) | 2016-01-21 | 2016-01-21 | Solar cell surface reaction chamber cavity shield door structure for coating process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205347560U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117864729A (en) * | 2024-03-07 | 2024-04-12 | 苏州诚拓智能装备有限公司 | Online battery piece overturning and conveying mechanism of coating film feeding and receiving system |
-
2016
- 2016-01-21 CN CN201620070161.2U patent/CN205347560U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117864729A (en) * | 2024-03-07 | 2024-04-12 | 苏州诚拓智能装备有限公司 | Online battery piece overturning and conveying mechanism of coating film feeding and receiving system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 Termination date: 20170121 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |