CN205332686U - Dry replacement system of clean equipment - Google Patents

Dry replacement system of clean equipment Download PDF

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Publication number
CN205332686U
CN205332686U CN201521108282.3U CN201521108282U CN205332686U CN 205332686 U CN205332686 U CN 205332686U CN 201521108282 U CN201521108282 U CN 201521108282U CN 205332686 U CN205332686 U CN 205332686U
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CN
China
Prior art keywords
pipeline
container
valve
clean
replacement
Prior art date
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Active
Application number
CN201521108282.3U
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Chinese (zh)
Inventor
陶弦
沈应中
汤清云
沈克成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIANGSU MO OPTO-ELECTRONIC MATERIAL Co Ltd
Original Assignee
JIANGSU MO OPTO-ELECTRONIC MATERIAL Co Ltd
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Priority to CN201521108282.3U priority Critical patent/CN205332686U/en
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Publication of CN205332686U publication Critical patent/CN205332686U/en
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Abstract

The utility model provides a dry replacement system of clean container, including first pipeline, second pipeline, third pipeline, treat container, tourie and the buffer tank of clean dry replacement, each subassembly passes through the valve and links to each other with connecting, the end of second pipeline is equipped with gaseous replacement container, the end -to -end connection of third pipeline has a vacuum pump, tourie and buffer tank be through passing in and out trachea A, B and third pipe connection, the utility model discloses simple structure, reasonable in design takes out and directly carries out the gas replacement behind the vacuum drying, has realized the integration operation of the dry replacement process of clean container, can improve operating efficiency, avoids operation process secondary pollution, can carry out drying replacement as required according to container quantity, shape moreover, energy saving and cost, the simplified operation flow is alternatively operated manyly, has protected the environment.

Description

The dry exchange system of a kind of cleaning apparatus
Technical field
This utility model relates to a kind of dry exchange system, particularly relates to the dry and exchange system of a kind of special container tank being applicable to have clean requirement。
Background technology
In transport, handling, production, use, storage, management process; there are blast, spontaneous combustion, murder by poisoning, burn into sensitive chemicals such as empty gas and waters, are required for being stored in the generation being just avoided that harm under a good noble gas of seal or other special protective atmospheres or the rotten damage of material。The container that major part metallo-organic compound (presoma) is all used for has the demand of cleanliness factor, so in the dry and operating process of displacement that container is after having cleaned, be highly susceptible to pollute, and operation and equipment requirements is harsher, time cycle is long, wastes time and energy。
Dry and the replacement process of this type of container is usually separately performed operation, or is integrally placed in clean room or container, and at volume of a container, when modeling structure changes, corresponding drying equipment or space are also required to do corresponding replacing。Causing the wasting of resources, efficiency is greatly reduced。
Utility model content
This utility model, for solving the problems referred to above, overcomes the deficiency that prior art exists, it is provided that the dry exchange system of a kind of clean container, it is intended to also ensure that clean container does not pollute while realizing dry replacement process integration, saves the energy and cost。
For solving above technical problem, the technical scheme that this utility model provides is:
The dry exchange system of a kind of clean container, it is characterized in that, including the first pipeline, second pipe, 3rd pipeline, treat the container that clean dried is replaced, tourie and surge tank, the quantity of described container is at least 1, container is connected by joint and the 4th pipeline, container place is provided with heating equipment, described 4th pipeline is provided with the valve a corresponding with container, described 4th pipeline and the first pipeline connect, the end of described second pipe is provided with gas displacement container, second pipe is provided with valve b, it is injected with gas to be replaced in described gas displacement container, the end of described 3rd pipeline is connected to vacuum pump, valve c and valve d it is provided with in the middle part of it, first pipeline, second pipe and the 3rd pipeline are connected by three-way pipe joint;
The upper end of described tourie is provided with 2 turnover trachea A, described 2 turnover trachea A are provided with valve e and f, 2 turnover trachea A and the three pipeline communications, and lay respectively at the two ends of valve c, the upper end of described surge tank is provided with 2 turnover trachea B, described 2 turnover trachea B are provided with valve g and h, 2 turnover trachea B and the three pipeline communications, and lay respectively at the two ends of valve d;
Further, described heating equipment is the fixed firing equipment mated with volume of a container size or the hot blanket with flexibility;
Further, described heating equipment is provided with temperature controller。
Utility model works principle:
(1) during dry evacuation, connect one or more containers as required, and close be not connected with the valve a:(1 of container) there is particular matter in container, close valve c, open valve e and valve f, enable tourie, throw in the absorption material corresponding with particular matter in tourie or tourie is carried out cooling process;(2) container is absent from particular matter, then opens valve c, close valve e and valve f;
The effect of surge tank is to ensure that system pressure is stable and prevents suck-back, it is possible to uses according to actually used situation selectivity, it is necessary to during use, closes valve d, open valve g and h;When need not use, close valve g and h, open valve d;
Now open heating equipment, and open vacuum pump, container can be carried out evacuation and dry。
(2) during gas displacement, close vacuum pump and valve c, d, e, f, g, h, open valve b, use substitution gas that container is replaced, it is then turned off valve b, again carries out vacuum pumping (heating equipment is not turned on), followed by gas displacement, repeatedly several times, the displacement completely of gas is completed。
The beneficial effects of the utility model are:
A kind of clean container that the utility model proposes dries exchange system, including the first pipeline, second pipe, 3rd pipeline, treat the container that clean dried is replaced, tourie and surge tank, each assembly is connected with joint by valve, the end of second pipe is provided with gas displacement container, the end of the 3rd pipeline is connected to vacuum pump, tourie and surge tank are by passing in and out trachea A, B and the three pipeline connects, this utility model simple in construction, reasonable in design, evacuation is made directly gas displacement after drying, achieve the integration operation of the dry replacement process of clean container, operating efficiency can be improved, avoid operating process secondary pollution, and can according to number of containers, shape is on-demand is dried displacement, save the energy and cost, streamline operation, alternative operation is many, protect environment。
Accompanying drawing explanation
Fig. 1 this utility model schematic diagram。
Detailed description of the invention
The dry exchange system of a kind of clean container as depicted, it is characterized in that, including the first pipeline 1, second pipe 2, 3rd pipeline 3, treat the container 4 that clean dried is replaced, tourie 5 and surge tank 6, the quantity of described container 4 most 3, 3 containers 4 are parallel relationship, container 4 is connected with the 4th pipeline 8 by joint 7, container 4 place is provided with heating equipment 9, described 4th pipeline 8 is provided with the valve a corresponding with container 4, described 4th pipeline 8 is connected with the first pipeline 1, the end of described second pipe 2 is provided with gas displacement container 10, second pipe 2 is provided with valve b, it is injected with gas to be replaced in described gas displacement container 10, the end of described 3rd pipeline 3 is connected to vacuum pump 11, valve c and valve d it is provided with in the middle part of it, first pipeline 1, second pipe 2 is connected by three-way pipe joint 12 with the 3rd pipeline 3;
The upper end of described tourie 5 is provided with 2 turnover trachea A, described 2 turnover trachea A are provided with valve e and f, 2 turnover trachea A and the three pipelines 3 connect, and lay respectively at the two ends of valve c, the upper end of described surge tank 6 is provided with 2 turnover trachea B, described 2 turnover trachea B are provided with valve g and h, and 2 turnover trachea B and the three pipelines 3 connect, and lay respectively at the two ends of valve d;
Further, described heating equipment 9 is and container 4, volume size size coupling fixed firing equipment or have flexibility hot blanket;
Further, described heating equipment 9 is provided with temperature controller 13。
A kind of clean container that the utility model proposes dries exchange system, including the first pipeline, second pipe, 3rd pipeline, treat the container that clean dried is replaced, tourie and surge tank, each assembly is connected with joint by valve, the end of second pipe is provided with gas displacement container, the end of the 3rd pipeline is connected to vacuum pump, tourie and surge tank are by passing in and out trachea A, B and the three pipeline connects, this utility model simple in construction, reasonable in design, evacuation is made directly gas displacement after drying, achieve the integration operation of the dry replacement process of clean container, operating efficiency can be improved, avoid operating process secondary pollution, and can according to number of containers, shape is on-demand is dried displacement, save the energy and cost, streamline operation, alternative operation is many, protect environment。
The above; it is only this utility model preferably detailed description of the invention; but protection domain of the present utility model is not limited thereto; any those familiar with the art is in the technical scope that this utility model discloses; the change that can readily occur in or replacement, all should be encompassed in protection domain of the present utility model。Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims。

Claims (3)

1. the dry exchange system of clean container, it is characterized in that, including the first pipeline, second pipe, 3rd pipeline, treat the container that clean dried is replaced, tourie and surge tank, the quantity of described container is at least 1, container is connected by joint and the 4th pipeline, container place is provided with heating equipment, described 4th pipeline is provided with the valve a corresponding with container, described 4th pipeline and the first pipeline connect, the end of described second pipe is provided with gas displacement container, second pipe is provided with valve b, it is injected with gas to be replaced in described gas displacement container, the end of described 3rd pipeline is connected to vacuum pump, valve c and valve d it is provided with in the middle part of it, first pipeline, second pipe and the 3rd pipeline are connected by three-way pipe joint;
The upper end of described tourie is provided with 2 turnover trachea A, described 2 turnover trachea A are provided with valve e and f, 2 turnover trachea A and the three pipeline communications, and lay respectively at the two ends of valve c, the upper end of described surge tank is provided with 2 turnover trachea B, described 2 turnover trachea B are provided with valve g and h, 2 turnover trachea B and the three pipeline communications, and lay respectively at the two ends of valve d。
2. the dry exchange system of a kind of clean container as claimed in claim 1, it is characterised in that described heating equipment is the fixed firing equipment mated with volume of a container size or the hot blanket with flexibility。
3. the dry exchange system of a kind of clean container as claimed in claim 1, it is characterised in that described heating equipment is provided with temperature controller。
CN201521108282.3U 2015-12-29 2015-12-29 Dry replacement system of clean equipment Active CN205332686U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201521108282.3U CN205332686U (en) 2015-12-29 2015-12-29 Dry replacement system of clean equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201521108282.3U CN205332686U (en) 2015-12-29 2015-12-29 Dry replacement system of clean equipment

Publications (1)

Publication Number Publication Date
CN205332686U true CN205332686U (en) 2016-06-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201521108282.3U Active CN205332686U (en) 2015-12-29 2015-12-29 Dry replacement system of clean equipment

Country Status (1)

Country Link
CN (1) CN205332686U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105605886A (en) * 2015-12-29 2016-05-25 江苏爱姆欧光电材料有限公司 Drying and replacing system of cleaning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105605886A (en) * 2015-12-29 2016-05-25 江苏爱姆欧光电材料有限公司 Drying and replacing system of cleaning device

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