CN205263468U9 - Rotary UV-LED light-source structure for exposure machine - Google Patents
Rotary UV-LED light-source structure for exposure machine Download PDFInfo
- Publication number
- CN205263468U9 CN205263468U9 CN201521082893.5U CN201521082893U CN205263468U9 CN 205263468 U9 CN205263468 U9 CN 205263468U9 CN 201521082893 U CN201521082893 U CN 201521082893U CN 205263468 U9 CN205263468 U9 CN 205263468U9
- Authority
- CN
- China
- Prior art keywords
- housing
- fixed
- cooling bath
- exposure machine
- rotating mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
Description
Claims (10)
- null1. the rotary UV-LED light-source structure for exposure machine,It is characterized in that: include light gathering reflective housing、Vacuum (-tight) housing、UV-LED lamp plate、Cooling bath、Rotating mechanism、Conductive mechanism、Cooling body、And bracing frame,Support frame as described above is L-shaped,Described cooling body and rotating mechanism are installed in the left side of support frame as described above L-type,Described conductive mechanism is arranged on described cooling body,Described light gathering reflective housing、Vacuum (-tight) housing、UV-LED lamp plate、With the right side that cooling bath is respectively positioned on support frame as described above L-type,Described cooling body is in transmission connection with described rotating mechanism,Described cooling bath is fixed on described cooling body,Described vacuum (-tight) housing is fixed on described cooling bath,Described UV-LED lamp plate is fixed between described vacuum (-tight) housing and cooling bath,Described light gathering reflective housing is fixed on the right flank of support frame as described above L-type and covers described vacuum (-tight) housing、UV-LED lamp plate and cooling bath.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 1, it is characterised in that: described light gathering reflective housing in outer gibbosity, the light-emitting window of described light gathering reflective housing is square or circular.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 2, it is characterised in that: described UV-LED lamp plate includes circuit board and UV-LED chipset.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 3, it is characterized in that: described UV-LED chipset comprise five kinds of wave-length coverages, be respectively as follows: 365~370nm, 380~390nm, 390~410nm, 420~430nm, 430~450nm.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 4, it is characterized in that: described cooling body includes case body, rotating shaft, water inlet axle and water outlet shaft, described axis of rotation is positioned in described case body, described water inlet axle and the equal fixed cover of water outlet shaft are located in described rotating shaft, described water outlet shaft is connected with described water inlet sealing, described water outlet shaft stretch in described cooling bath through support frame as described above, described rotating shaft is fixed through support frame as described above and described cooling bath and is connected.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 5, it is characterized in that: described cooling bath includes connection dish, water-poking sheet and hydraulic pressure plate, described connection dish fixed cover is located on described water outlet shaft, described hydraulic pressure plate is rounded and is fixed on the inside of described connection dish, and described water-poking sheet is fixed on the two ends of described hydraulic pressure plate.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 6, it is characterized in that: described conductive mechanism includes conducting ring and carbon brush, described conducting ring and carbon brush are respectively positioned in described case body, described conducting ring fixed cover is located on described water outlet shaft, described carbon brush is fixedly connected on described conducting ring, and the lateral wall of described conducting ring is fixed with insulator.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 7, it is characterized in that: described cooling body is gear drive with the mode of being in transmission connection of described rotating mechanism, described rotating mechanism be arranged in parallel with described cooling body, fixing connection one first gear on described rotating mechanism, sheathed one second gear is fixed on described water outlet shaft, described first and second gear is respectively positioned on the left side of support frame as described above L-type, described first and second gear engages each other, and described second gear is between described cooling bath and support frame as described above.
- Rotary UV-LED light-source structure for exposure machine the most according to claim 7, it is characterized in that: described cooling body is shaft coupling transmission with the mode of being in transmission connection of described rotating mechanism, described rotating mechanism is located along the same line with the water inlet axle of described cooling body, also include a shaft coupling, described shaft coupling is positioned at the rear side of described water inlet axle, described shaft coupling one end is fixedly connected in described rotating shaft, and the other end is fixedly connected on described rotating mechanism.
- The rotary UV-LED light-source structure for exposure machine the most according to claim 8 or claim 9, it is characterised in that: described rotating mechanism is motor, and described vacuum (-tight) housing is quartz glass vacuum cover.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201521082893.5U CN205263468U9 (en) | 2015-12-21 | 2015-12-21 | Rotary UV-LED light-source structure for exposure machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201521082893.5U CN205263468U9 (en) | 2015-12-21 | 2015-12-21 | Rotary UV-LED light-source structure for exposure machine |
Publications (2)
Publication Number | Publication Date |
---|---|
CN205263468U CN205263468U (en) | 2016-05-25 |
CN205263468U9 true CN205263468U9 (en) | 2016-08-24 |
Family
ID=56004988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201521082893.5U Expired - Fee Related CN205263468U9 (en) | 2015-12-21 | 2015-12-21 | Rotary UV-LED light-source structure for exposure machine |
Country Status (1)
Country | Link |
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CN (1) | CN205263468U9 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108490745B (en) * | 2018-06-27 | 2020-12-22 | 合肥泰沃达智能装备有限公司 | Rotary ultraviolet exposure machine |
CN117518741B (en) * | 2023-12-01 | 2024-06-18 | 东莞锐视光电科技有限公司 | LED light source for direct-writing lithography |
-
2015
- 2015-12-21 CN CN201521082893.5U patent/CN205263468U9/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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CN205263468U (en) | 2016-05-25 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CGPU | Change to patent or to utility model | ||
CU01 | Correction of utility model patent |
Correction item: Abstract|Description Correct: Correct False: Error Number: 21 Page: full text Volume: 32 |
|
CU03 | Correction of utility model patent gazette |
Correction item: Abstract Correct: Correct False: Error Number: 21 Volume: 32 |
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ERR | Gazette correction | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160525 Termination date: 20181221 |
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CF01 | Termination of patent right due to non-payment of annual fee |