CN205247061U - Cooling water circulation system - Google Patents
Cooling water circulation system Download PDFInfo
- Publication number
- CN205247061U CN205247061U CN201521099531.7U CN201521099531U CN205247061U CN 205247061 U CN205247061 U CN 205247061U CN 201521099531 U CN201521099531 U CN 201521099531U CN 205247061 U CN205247061 U CN 205247061U
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- Prior art keywords
- valve
- cooling water
- filter
- pipe
- flowmeter
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Abstract
The utility model provides a cooling water circulation system for cooling system to photoetching built -in portion provides recirculated cooling water, including water intaking valve, pipe connector the flowmeter of water intaking valve one end, pipe connector the filter of the flowmeter other end and pipe connector at the outlet valve of the filter other end, still include the solenoid valve, the solenoid valve pipe connector is in the other end of water intaking valve. The utility model discloses a normal during operation of cooling water circulation system, the cooling water passes through solenoid valve, water intaking valve, flowmeter, filter, relief valve and outlet valve in proper order, forms whole cooling water circulation, and when any emergence was leaked in this system, it leaks just to trigger examined the knowledge relay, and then closes the solenoid valve, shutting -off system's water source, this system can effectively timely cutting off the water supply, and it is long -pending more to avoid leaking, and then the emergence of the equipment of the damage circumstances, the security that has improved equipment greatly.
Description
Technical field
The utility model relates to water circulation technical field, especially a kind of cooling water recirculation system.
Background technology
In semiconductor processes factory, the inner need of litho machine keeps accurate temperature constant state, and it is by coolingThe air-conditioning system of water realizes. Existing cooling water recirculation system mainly comprises water intaking valve, flowmeter, mistakeThe composition such as filter and outlet valve, in a whole set of pipeline, leaking appears in any one link, all can trigger air-conditioning insideLeak and detect relay, thereby cut off air conditioner power source, air-conditioning is quit work, but leakage point mayContinue to leak, if find not in time, along with ponding is more and more, air-conditioning inside such as compressor, transformerTo be damaged Deng Important Components, device security can not get ensureing, brings about great losses.
Utility model content
Technical problem to be solved in the utility model is: in order to overcome above-mentioned defect, the utility model providesA kind ofly can effectively prevent that internal system from leaking, avoiding loss and improving the cooling water recirculation system of security.
The utility model solves the technical scheme that its technical problem will adopt: a kind of cooling water recirculation system,For providing recirculated cooling water to the cooling system of litho machine inside, comprise that water intaking valve, pipe are connected on water intaking valve oneFlowmeter, the pipe of end is connected on the filter of the flowmeter other end and pipe and is connected on the outlet valve of the filter other end,Also comprise magnetic valve, described magnetic valve pipe is connected on the other end of described water intaking valve.
Further, this system also comprises that leaking of being electrically connected with magnetic valve detects relay, when the pipe of systemIn road, any one leaks, and all can triggering leaks detects relay, thereby cuts off the power supply of magnetic valve.
Further, this system also comprises by-passing valve, and one end pipe of described by-passing valve is connected on the water outlet of magnetic valveMouthful, the other end pipe of by-passing valve is connected on the delivery port of outlet valve.
Further, between described filter and outlet valve, also pipe is connected to relief valve, and described relief valve can dischargePipeline pressure, is convenient to change filter.
The beneficial effects of the utility model are: a kind of cooling water recirculation system that the utility model provides, workTime, cooling water passes through magnetic valve, water intaking valve, flowmeter, filter, relief valve and outlet valve, shape successivelyBecome whole cooling water circulation, in the time that any one leaks in this system, just trigger to leak detecting relay,And then shut electromagnetic valve, the water source of cutting system. Cooling water recirculation system of the present utility model is being leakedTime, can cut off the water supply effectively and timely, avoid leaking cumulative, and then the generation of damage equipment situation,Greatly improve the security of equipment.
Brief description of the drawings
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Fig. 1 is the structural representation in the embodiment mono-of the circulatory system of a kind of cooling water of the present utility model;
Fig. 2 is the structural representation in the embodiment bis-of the circulatory system of a kind of cooling water of the present utility model.
In figure: 1, water intaking valve, 2, flowmeter, 3, filter, 4, outlet valve, 5, magnetic valve, 6,By-passing valve, 7, leaking detects relay, 8, relief valve.
Detailed description of the invention
By reference to the accompanying drawings the utility model is described in detail now. This figure is the schematic diagram of simplifying, only to showMeaning mode illustrates basic structure of the present utility model, and therefore it only shows the formation relevant with the utility model.
Embodiment mono-
Please refer to shown in Fig. 1, the circulatory system of a kind of cooling water of the present utility model, in litho machineThe cooling system of portion provides recirculated cooling water, comprise water intaking valve 1, pipe be connected on the flowmeter 2 of water intaking valve 1 one end,Pipe is connected on the filter 3 of flowmeter 2 other ends and pipe and is connected on the outlet valve 4 of filter 3 other ends, also comprisesMagnetic valve 5, described magnetic valve 5 pipes are connected on the other end of described water intaking valve 1.
This system also comprises that leaking of being electrically connected with magnetic valve 5 detects relay 7, when any in the pipeline of systemOne place leaks, and all can triggering leaks detects relay 7, thereby the power supply of shut electromagnetic valve 5 is cut off the water supply.
The course of work of the circulatory system of a kind of cooling water of the present utility model is described: when this below in conjunction with Fig. 1While not leaking situation in system, magnetic valve 5, water intaking valve 1 and outlet valve 4 are normally open, now,Cooling water is successively by magnetic valve 5, water intaking valve 1, flowmeter 2, filter 3 and outlet valve 4, ZhongdaoReach the cooling system of air-conditioning, form the water cycle process of this system; When any one in this system leaksWhen water, now leaking detects relay and just can be triggered, the power supply of shut electromagnetic valve 5, and then cut off and enterWater source in this system, the guarantee equipment destruction of not leaked. When breaking down, filter 3 needs to change, againCan not arrestment when operation, now by-passing valve 6 is opened, and water intaking valve 1 is closed, and cooling water is from bypassValve 6 enters the cooling system of air-conditioning.
Embodiment bis-
Please refer to shown in Fig. 2, the present embodiment and embodiment once the main distinction be, in order to discharge pipelinePressure, is convenient to change filter 3, and between described filter 3 and outlet valve 4, also pipe is connected to relief valve 8, toolBody, discharge the pressure in pipeline by relief valve 8, thereby change filter 3.
This system also comprises by-passing valve 6, and one end pipe of described by-passing valve 6 is connected on the delivery port of magnetic valve 5, sideThe other end pipe of logical valve 6 is connected on the delivery port of outlet valve 4. When breaking down, filter 3 needs to change, againCan not arrestment when operation, now by-passing valve 6 is opened, and water intaking valve 1 is closed, and cooling water is from bypassValve 6 enters the cooling system of air-conditioning.
According to the above-mentioned course of work, a kind of cooling water recirculation system of the present utility model, in the time leaking,Can cut off the water supply effectively and timely, avoid leaking cumulative, and then the generation of damage equipment situation, largeImprove greatly the security of equipment.
Taking above-mentioned foundation desirable embodiment of the present utility model as enlightenment, by above-mentioned description, relevantStaff can, not departing from scope of the present utility model, carry out various change and amendment completely.The technical scope of this utility model is not limited to the content on description, must be according to claim modelEnclose and determine its technical scope.
Claims (4)
1. a cooling water recirculation system, for providing recirculated cooling water to the cooling system of litho machine inside,Comprise that flowmeter (2), pipe that water intaking valve (1), pipe are connected on water intaking valve (1) one end are connected on flowmeter (2)The filter (3) of the other end and pipe are connected on the outlet valve (4) of filter (3) other end, it is characterized in that:Also comprise magnetic valve (5), described magnetic valve (5) pipe is connected on the other end of described water intaking valve (1).
2. a kind of cooling water recirculation system as claimed in claim 1, is characterized in that: this system also comprisesLeaking of being electrically connected with magnetic valve (5) detects relay (7), when in the pipeline of system, any one leaksWater all can trigger to leak and detect relay (7), thereby cuts off the power supply of magnetic valve (5).
3. a kind of cooling water recirculation system as claimed in claim 2, is characterized in that: this system also comprisesBy-passing valve (6), one end pipe of described by-passing valve (6) is connected on the delivery port of magnetic valve (5), by-passing valve (6)Other end pipe be connected on the delivery port of outlet valve (4).
4. a kind of cooling water recirculation system as claimed in claim 3, is characterized in that: described filter (3)And between outlet valve (4) also pipe be connected to relief valve (8), described relief valve (8) can discharge pipeline pressure,Be convenient to change filter (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521099531.7U CN205247061U (en) | 2015-12-24 | 2015-12-24 | Cooling water circulation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521099531.7U CN205247061U (en) | 2015-12-24 | 2015-12-24 | Cooling water circulation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205247061U true CN205247061U (en) | 2016-05-18 |
Family
ID=55946144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521099531.7U Active CN205247061U (en) | 2015-12-24 | 2015-12-24 | Cooling water circulation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205247061U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112161751A (en) * | 2020-09-15 | 2021-01-01 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine and water leakage detection method |
-
2015
- 2015-12-24 CN CN201521099531.7U patent/CN205247061U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112161751A (en) * | 2020-09-15 | 2021-01-01 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine and water leakage detection method |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |