CN205236514U - Silicon chip raw materials pickling acidification circulation system - Google Patents
Silicon chip raw materials pickling acidification circulation system Download PDFInfo
- Publication number
- CN205236514U CN205236514U CN201521048306.0U CN201521048306U CN205236514U CN 205236514 U CN205236514 U CN 205236514U CN 201521048306 U CN201521048306 U CN 201521048306U CN 205236514 U CN205236514 U CN 205236514U
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- circulating line
- acid solution
- acid
- acidizing fluid
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to a silicon chip raw materials pickling acidification circulation system, acid pump on arrange in the acidizing fluid of pickling incasement entry and acidizing fluid export, the circulating line of connection between acidizing fluid entry and acidizing fluid export of locating the pickling case outside, locating the circulating line, its characterized in that: the acidizing fluid exit is connected with the PP -R hot melt pipe of one section front end shutoff, the periphery of PP -R hot melt pipe evenly is covered with flexible hole, one section filtering duct has been add on the circulating line before the entry of acid pump, filtering duct form is like the three -way pipe, and it is by constituteing with the hypsokinesis section of being connected below the horizontally connect section with the parallel horizontally connect section of acidizing fluid flow direction, the hypsokinesis section is equipped with the capping to the direction slope and the end of acid pump, the horizontally connect section embeds near the acid pump side end has the filter screen. Its structural design is reasonable, uses reliably, and the filter effect is good, has prolonged the life of acid pump.
Description
Technical field
The utility model relates to silicon wafer raw material pickler, and particularly a kind of silicon wafer raw material pickling adds acid circulation system.
Background technology
What at present, silicon chip processing enterprise carried out pickling processes to silicon wafer raw material adds acid circulation system by being arranged in acid cleaning tankThe outlet of acid solution entrance and acid solution, be located at being connected in circulating line between acid solution entrance and acid solution outlet, being located at of acid cleaning tank outsideSour pump composition on circulating line makes acid circulation under the effect of sour pump, causes sour disturbance in sour case, reaches the order of pickling. The existing material end to end that adds acid circulation system and be applicable to process more polycrystalline silicon material and whole section, therefore, acid solution outlet is conventionally straight-throughMouthful, also inapplicable for processing the very various and complicated enterprise of raw material type, main cause is, processes raw material alwaysHave some particles to produce, be easy to enter sour pump extracting particle in sour process by pipeline, entering of particle can be to sour pumpInternal structure causes great damage, the service life of serious impact acid pump. In order to prevent that particle from entering sour pump, makes conventionallyUser locates to install screen pack in acid solution outlet (straightthrough port), to prevent that particle from entering circulating line, but its still there are the following problems:1, the use of screen pack reduces flow treating capacity in the sour infusion pump unit time, causes acid solution disturbance weak effect in sour case; 2, mistakeFilter screen is shorter service life, need to frequently change, and is unfavorable for continuous production.
Summary of the invention
The purpose of this utility model is for a kind of reasonable in design addressing the above problem, service-strong silicon wafer raw material are providedPickling adds acid circulation system.
The technical solution of the utility model is:
A kind of silicon wafer raw material pickling adds acid circulation system, comprises that the acid solution entrance and the acid solution that are arranged in acid cleaning tank export, are located at acidBeing connected in circulating line between acid solution entrance and acid solution outlet, being located at the sour pump on circulating line of tank-washer outside, its feature existsIn: described acid solution exit is connected with the PP-R tempreature bulb of one section of front end shutoff, and the periphery of described PP-R tempreature bulb is evenly covered withRound tube hole, has additional one section of filter pipe on the circulating line before the entrance of described sour pump, and described filter pipe shape is three-way pipe seemingly,It is made up of the level connection joint section parallel with acid solution flow direction and the hypsokinesis section that is connected in level connection joint section below, described hypsokinesis sectionDirection inclination and end to sour pump are provided with capping, and described level connection joint section is built-in with screen pack near sour pump side end.
Above-mentioned silicon wafer raw material pickling adds acid circulation system, before being respectively equipped with on the circulating line of the forward and backward side of described filter pipe,Rear control valve, is connected with by-pass line between the circulating line of described front control valve front side and the circulating line of rear control valve rear side,Described by-pass line is provided with bypass control valve (BCV). Cleaning filtration in the situation that not stopping pickling operation is convenient in the design of by-pass linePipeline.
The beneficial effects of the utility model are: to realizing twice protection in the process of sour pump suction acid, ground floor protection is to utilize clothThe PP-R tempreature bulb of full round tube hole replaces original straight-through entrance, and effectively prevent from taking out particle in sour process and be drawn in sour pump, withTime ensured the unit interval flow of sour pump, long service life; Second layer protection is the filter pipe utilizing before sour pump, screen pipeThe screen pack of the horizontal segment in road filters again to acid solution, and hypsokinesis section is used for collecting particle, can regularly process the particle being filtered.To sum up 2 filter effects that significantly improved particle, have extended service life of sour pump.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model;
In figure: 1.PP-R tempreature bulb, 2. round tube hole, 3. circulating line, 4. front control valve, 5. level connection joint section, 6. hypsokinesis section,7. capping, 8. screen pack, 9. rear control valve, 10. sour pump, 11. by-pass lines, 12. bypass control valve (BCV)s, 13. acid cleaning tanks.
Detailed description of the invention
As shown in the figure, this silicon wafer raw material pickling adds acid circulation system, comprises that the acid solution entrance and the acid solution that are arranged in acid cleaning tank 13 go outMouthful, be located at being connected in circulating line 3 between the outlet of acid solution entrance and acid solution, being located on circulating line 3 of acid cleaning tank 13 outsidesSour pump 10. Described acid solution exit is connected with the PP-R tempreature bulb 1 of one section of front end shutoff, outside described PP-R tempreature bulb 1Week is evenly covered with round tube hole 2. On circulating line before the entrance of described sour pump 10, have additional one section of filter pipe, described filtrationPipe-like is like three-way pipe, its by the level connection joint section parallel with acid solution flow direction 5 and be connected in level connection joint section 5 belows afterThe section of inclining 6 compositions, described hypsokinesis section 6 is provided with capping 7 to direction inclination and the end of sour pump 10, and described level connection joint section 5 is leaned onNearly sour pump 10 side ends are built-in with screen pack 8. On the circulating line of the forward and backward side of described filter pipe, be respectively equipped with forward and backward controlValve 4,9, is connected with by-pass line between the circulating line of described front control valve 4 front sides and the circulating line of rear control valve 9 rear sides11, described by-pass line 11 is provided with bypass control valve (BCV) 12, and the design of by-pass line is convenient in the situation that does not stop pickling operationLower cleaning filter pipe.
Claims (2)
1. silicon wafer raw material pickling adds an acid circulation system, comprises that the acid solution entrance and the acid solution that are arranged in acid cleaning tank export, are located atBeing connected in circulating line between acid solution entrance and acid solution outlet, being located at the sour pump on circulating line, its feature of acid cleaning tank outsideBe: described acid solution exit is connected with the PP-R tempreature bulb of one section of front end shutoff the even cloth of periphery of described PP-R tempreature bulbFull round tube hole, has additional one section of filter pipe on the circulating line before the entrance of described sour pump, and described filter pipe shape is like threewayPipe, it is made up of the level connection joint section parallel with acid solution flow direction and the hypsokinesis section that is connected in level connection joint section below, described afterThe section of inclining is provided with capping to direction inclination and the end of sour pump, and described level connection joint section is built-in with screen pack near sour pump side end.
2. silicon wafer raw material pickling according to claim 1 adds acid circulation system, it is characterized in that: before described filter pipe,On the circulating line of rear side, be respectively equipped with forward and backward control valve, the circulating line of described front control valve front side and rear control valve rear sideBetween circulating line, be connected with by-pass line, described by-pass line is provided with bypass control valve (BCV).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521048306.0U CN205236514U (en) | 2015-12-16 | 2015-12-16 | Silicon chip raw materials pickling acidification circulation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521048306.0U CN205236514U (en) | 2015-12-16 | 2015-12-16 | Silicon chip raw materials pickling acidification circulation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205236514U true CN205236514U (en) | 2016-05-18 |
Family
ID=55935593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521048306.0U Expired - Fee Related CN205236514U (en) | 2015-12-16 | 2015-12-16 | Silicon chip raw materials pickling acidification circulation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205236514U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110067029A (en) * | 2019-06-03 | 2019-07-30 | 西安奕斯伟硅片技术有限公司 | The working method of Etaching device and Etaching device |
-
2015
- 2015-12-16 CN CN201521048306.0U patent/CN205236514U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110067029A (en) * | 2019-06-03 | 2019-07-30 | 西安奕斯伟硅片技术有限公司 | The working method of Etaching device and Etaching device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160518 Termination date: 20211216 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |