CN205211725U - Fixed silicon chip of graphite boat is with pin - Google Patents
Fixed silicon chip of graphite boat is with pin Download PDFInfo
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- CN205211725U CN205211725U CN201521033842.3U CN201521033842U CN205211725U CN 205211725 U CN205211725 U CN 205211725U CN 201521033842 U CN201521033842 U CN 201521033842U CN 205211725 U CN205211725 U CN 205211725U
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- silicon chip
- graphite boat
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Abstract
The utility model discloses a fixed silicon chip of graphite boat is with pin, include the middle part cylindrical section with the cotter hole interference fit of graphite boat, the both ends of middle part cylindrical section are provided with the bearing section that is used for the bearing silicon chip respectively, the outer terminal surface of bearing section is provided with the adjustment tank. Contacting area with the silicon chip great wearing and tearing appear and influences normal during operation when the bearing section, utilizes a regulating part to insert adjustment tank, rotation regulation spare for middle part cylindrical section and bearing section turn over certain angle, and the bearing section was harmless position with the contacting area of silicon chip this moment, can normally work. Of a specified duration when the live time, the contacting area of bearing section and silicon chip appears great wearing and tearing once more and influences normal during operation, repeat above -mentioned adjust the step can, need not to change the pin in a short time, just need change the pin when the all unable normal use of the outer peripheral face of bearing section, has simplified the change work of pin, and has improved the life who pins.
Description
Technical field
The utility model relates to graphite boat accessory field, and particularly a kind of graphite boat fixes silicon chip pin.
Background technology
Graphite boat is to the silicon chip film-coated carrier in solar battery sheet, when carrying out plated film, to be sent into by the graphite boat being inserted with uncoated silicon chip in PECVD vacuum coating equipment cavity and to utilize pecvd process to carry out electric discharge plated film.After plated film terminates, take out graphite boat, silicon chip is unloaded from graphite boat and takes off.
And in silicon chip film-coated production, need to use the pin through graphite boat to be fixed in graphite boat by silicon chip, because pin often contacts with silicon chip, it is easily worn part, for semiconductor and solar energy graphite boat, it is more difficult for needing after using wearing and tearing to change pin, and easily damages graphite boat boat body.The graphite boat used in having the disclosed a kind of silicon chip of Chinese patent Authorization Notice No. CN101008081B (authorized announcement date 2010.5.19) to produce at present, fixture in this patent accompanying drawing 4 is the pin of existing conventional fixing silicon chip, although this pin is to replace with relatively traditional pin easier, but still need to change, increase labour intensity, reduce operating efficiency.
Utility model content
The purpose of this utility model is above-mentioned deficiency for prior art and defect, provides a kind of and fixes silicon chip pin, to solve the problem without the need to changing and improving the graphite boat in useful life.
The technical problem that the utility model solves can realize by the following technical solutions:
Graphite boat fixes silicon chip pin, comprises the middle part cylindrical section with the pin hole interference fit of graphite boat, and the two ends of described middle part cylindrical section are respectively arranged with the support section for support silicon chip, it is characterized in that, the outer face of described support section is provided with regulating tank.
In a preferred embodiment of the present utility model, middle part cylindrical section described in described support Duan Weiyu coaxially arranges and external diameter is less than the roundlet shell of column of described middle part cylindrical section external diameter, and the inner side outer peripheral face of described roundlet shell of column is provided with and inserts fixing wedge-shaped slot with for silicon chip.
In a preferred embodiment of the present utility model, the outer face perimeter treatment of described roundlet shell of column is fillet structure.
In a preferred embodiment of the present utility model, middle part cylindrical section described in described support Duan Weiyu coaxially arranges and external diameter is less than the little prism section of described middle part cylindrical section external diameter.
In a preferred embodiment of the present utility model, the outer face perimeter treatment of described little prism section is fillet structure.
In a preferred embodiment of the present utility model, described regulating tank is kidney slot.
In a preferred embodiment of the present utility model, described regulating tank runs through described middle part cylindrical section and support section.
In a preferred embodiment of the present utility model, the both ends of the surface perimeter treatment of described middle part cylindrical section is 45 ° of chamfering structures.
Owing to have employed technical scheme as above, when the contact site of support section and silicon chip there are larger wearing and tearing and affect normally work time, a regulating part is utilized to insert regulating tank, rotate regulating part, middle part cylindrical section and support section is made to turn over certain angle, now the contact site of support section and silicon chip is harmless position, can normally work.Of a specified duration when deployed, again there are larger wearing and tearing and affect when normally working in the contact site of support section and silicon chip, repeat above-mentioned regulating step, in a short time without the need to changing pin, until just need pin be changed when the outer peripheral face of support section all cannot normally use, simplify more changing jobs of pin, and improve the useful life of pin.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the front view of embodiment 1 of the present utility model.
Fig. 2 is the end view of Fig. 1.
Fig. 3 is the front view of embodiment 2 of the present utility model.
Fig. 4 is the end view of Fig. 3.
Embodiment
The technological means realized to make the utility model, creation characteristic, reaching object and effect is easy to understand, setting forth the utility model further below.
Embodiment 1
Silicon chip pin is fixed see the graphite boat shown in Fig. 1 and Fig. 2, comprise the middle part cylindrical section 100 with the pin hole interference fit of graphite boat, conveniently middle part cylindrical section 100 inserts the pin hole of graphite boat, and both ends of the surface 110 perimeter treatment of middle part cylindrical section 100 is 45 ° of chamfering structures 111.The two ends one-body molded support section 200 had for support silicon chip respectively of middle part cylindrical section 100, the outer face of support section 200 is provided with regulating tank 300, and regulating tank 300 is mounting hole, and regulating tank 300 also can run through middle part cylindrical section 100 and support section 200.
Support section 200 in the present embodiment is arranges and external diameter be less than the roundlet shell of column 210 of middle part cylindrical section external diameter coaxial with middle part cylindrical section 100, and the inner side outer peripheral face of roundlet shell of column 210 is provided with and inserts fixing wedge-shaped slot 211 with for silicon chip.Outer face 212 perimeter treatment of roundlet shell of column 210 is fillet structure 213.
Embodiment 2
Silicon chip pin is fixed see the graphite boat shown in Fig. 3 and Fig. 4, the graphite boat of the present embodiment fixes silicon chip pin and the graphite boat of embodiment 1, and to fix silicon chip pin feature roughly similar, its difference is, support section 200 is arranges and external diameter be less than the little prism section 210a of middle part cylindrical section external diameter coaxial with middle part cylindrical section 100.Little prism section 210a is six prism sections, can certainly be eight prism sections.The outer face 212a perimeter treatment of little prism section 210a is fillet structure 213a.
The operation principle of above-mentioned two embodiments is the same:
When support section 200 and the contact site of silicon chip there are larger wearing and tearing and affect normally work time, a regulating part is utilized to insert regulating tank 300, rotate regulating part, middle part cylindrical section 100 and support section 200 is made to turn over certain angle, now support section 200 is harmless position with the contact site of silicon chip, can normally work.Of a specified duration when deployed, again there are larger wearing and tearing and affect when normally working in support section 200 and the contact site of silicon chip, repeat above-mentioned regulating step, in a short time without the need to changing pin, until just need pin be changed when the outer peripheral face of support section 200 all cannot normally use, simplify more changing jobs of pin, and improve the useful life of pin.
More than show and describe general principle of the present utility model and principal character and advantage of the present utility model.The technical staff of the industry should understand; the utility model is not restricted to the described embodiments; what describe in above-described embodiment and specification just illustrates principle of the present utility model; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (8)
1. graphite boat fixes silicon chip pin, comprises the middle part cylindrical section with the pin hole interference fit of graphite boat, and the two ends of described middle part cylindrical section are respectively arranged with the support section for support silicon chip, it is characterized in that, the outer face of described support section is provided with regulating tank.
2. graphite boat as claimed in claim 1 fixes silicon chip pin, it is characterized in that, middle part cylindrical section described in described support Duan Weiyu coaxially arranges and external diameter is less than the roundlet shell of column of described middle part cylindrical section external diameter, and the inner side outer peripheral face of described roundlet shell of column is provided with and inserts fixing wedge-shaped slot with for silicon chip.
3. graphite boat as claimed in claim 2 fixes silicon chip pin, and it is characterized in that, the outer face perimeter treatment of described roundlet shell of column is fillet structure.
4. graphite boat as claimed in claim 1 fixes silicon chip pin, it is characterized in that, middle part cylindrical section described in described support Duan Weiyu is coaxially arranged and external diameter is less than the little prism section of described middle part cylindrical section external diameter.
5. graphite boat as claimed in claim 4 fixes silicon chip pin, and it is characterized in that, the outer face perimeter treatment of described little prism section is fillet structure.
6. graphite boat as claimed in claim 1 fixes silicon chip pin, and it is characterized in that, described regulating tank is kidney slot.
7. graphite boat as claimed in claim 1 fixes silicon chip pin, and it is characterized in that, described regulating tank runs through described middle part cylindrical section and support section.
8. graphite boat as claimed in claim 1 fixes silicon chip pin, and it is characterized in that, the both ends of the surface perimeter treatment of described middle part cylindrical section is 45 ° of chamfering structures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521033842.3U CN205211725U (en) | 2015-12-11 | 2015-12-11 | Fixed silicon chip of graphite boat is with pin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521033842.3U CN205211725U (en) | 2015-12-11 | 2015-12-11 | Fixed silicon chip of graphite boat is with pin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205211725U true CN205211725U (en) | 2016-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201521033842.3U Active CN205211725U (en) | 2015-12-11 | 2015-12-11 | Fixed silicon chip of graphite boat is with pin |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114540798A (en) * | 2022-03-03 | 2022-05-27 | 江西汉可泛半导体技术有限公司 | Anti-falling device for silicon wafer coating |
| CN115072120A (en) * | 2022-06-22 | 2022-09-20 | 河北白沙烟草有限责任公司保定卷烟厂 | Reusable label paper adsorption system air release stop block |
-
2015
- 2015-12-11 CN CN201521033842.3U patent/CN205211725U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114540798A (en) * | 2022-03-03 | 2022-05-27 | 江西汉可泛半导体技术有限公司 | Anti-falling device for silicon wafer coating |
| CN115072120A (en) * | 2022-06-22 | 2022-09-20 | 河北白沙烟草有限责任公司保定卷烟厂 | Reusable label paper adsorption system air release stop block |
| CN115072120B (en) * | 2022-06-22 | 2024-02-27 | 河北白沙烟草有限责任公司保定卷烟厂 | Reusable label paper adsorption system air release stop block |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |