CN205190507U - Vacuum chuck construction improvement - Google Patents

Vacuum chuck construction improvement Download PDF

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Publication number
CN205190507U
CN205190507U CN201520819739.5U CN201520819739U CN205190507U CN 205190507 U CN205190507 U CN 205190507U CN 201520819739 U CN201520819739 U CN 201520819739U CN 205190507 U CN205190507 U CN 205190507U
Authority
CN
China
Prior art keywords
vacuum chuck
main body
suction cup
multihole device
cup main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520819739.5U
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Chinese (zh)
Inventor
张日升
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yefeng Technology Co Ltd
Original Assignee
Yefeng Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yefeng Technology Co Ltd filed Critical Yefeng Technology Co Ltd
Priority to CN201520819739.5U priority Critical patent/CN205190507U/en
Application granted granted Critical
Publication of CN205190507U publication Critical patent/CN205190507U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Manipulator (AREA)

Abstract

The utility model relates to a vacuum chuck construction improvement, including a sucking disc main part, a joint and a multihole device, wherein, an accommodation space has been seted up in the sucking disc main part, the root edge of sucking disc main part with wait to move the thing surface and can laminate and make the accommodation space form an air chamber, sucking disc main part upholstery is equipped with a multihole device, it arranges this accommodation space in to make this multihole device inlay, connect along locating sucking disc main part upper end and having seted up through -hole downwardly extending a to accommodation space, when absorption is waited to move the thing, connect in the joint through a vacuum apparatus connecting pipe driving fit, it forms a negative pressure with the inside deflation of air chamber to bleed through the vacuum apparatus, the messenger waits to move thing absorption and laminates in this sucking disc main part and avoid inhaling the production of the trace condition through this multihole device resistance, it has powerful adsorption affinity and can avoid inhaling the vacuum chuck construction improvement that the trace situation produced to form one.

Description

Vacuum chuck structure improvement
Technical field
The utility model is relevant a kind of vacuum chuck structure improvement, the vacuum chuck structure improvement of espespecially a kind of inside installing one concrete dynamic modulus element.
Background technique
Current many industries are quite large for the demand of vacuum chuck, in TFT LCD industry, area of solar cell, electronics and semi-conductor industry, wafer or glass industries ... material, the carrying of semifinished or finished goods and movement is carried out Deng all often using vacuum chuck; Generally speaking, vacuum chuck connects a vacuum equipment by joint, then with thing to be moved as glass, panel, wafer ... Deng contact, then start vacuum equipment and inner air suction is formed negative pressure, and then thing to be moved is sucked by this vacuum chuck internal negative pressure, make it be fixed on vacuum chuck surface, can start to transport thing to be moved; When thing to be moved is moved to destination, then provide stable gas to enter in vacuum chuck by this vacuum equipment, make to become positive air pressure by negative air pressure in vacuum chuck, thing to be moved can depart from this vacuum chuck, completes the process of carrying.
Existing vacuum chuck is by a conical disc or corrugated dish, a bleeder hole is offered in top, bleed to compress by vacuum equipment and suction cup interior is formed a negative pressure, thing to be moved is adsorbed in this chuck surface via external atmospheric pressure overhead, and then by manipulator or this sucker of a dead lift to reach the object of this thing to be moved mobile; But, along with the development of scientific and technological progress and materials science, the very thin thickness of many things to be moved, when vacuum equipment bleed compression absorption this in time moving thing, cause thing adsorption site to be moved to form depression, cause absorption vestige, even cause thing to be moved to break; Sucker improvement common at present comprises a conical disc, multiple convex grain be evenly distributed is provided with inside it, this conical disc cone tip part includes an exhaust tube, during use, by closely sealed for the air absorbing mouth of a vacuum equipment this exhaust tube of apical grafting, the conical disc of sucker is contacted formed plenum interior air to detach with thing to be moved, make this air chamber form a negative pressure state, will thing absorption be moved by atmospheric pressure.
So, just there is relevant dealer to adjust and revise rear research and development sucker improvement structure, refer to Fig. 1, this sucker is a conical disc, extend in cone tip part and be provided with a bleeder hole, this conical disc will form an air chamber with in time moving thing and contact and fit in this conical disc, this bleeder hole is the cone tip part running through this conical disc, make conical disc and after moving thing and contacting, connect this bleeder hole by a vacuum equipment gas discharged make this air chamber form a negative pressure state, wherein, this conical disc is a taper comparatively delayed, and the edge of card, then make it thinning; And be provided with multiple being evenly distributed and the larger projection of area of contact inside this conical disc, and projection because area contact with polarizer comparatively greatly, therefore relative the diminishing of its air chamber formed; By above-mentioned tectonic sieving, when sucker will in time moving thing absorption and fix, can first by the closely sealed apical grafting of vacuum equipment when the conical disc of sucker contacts with polarizer by bleeder hole the air in the air chamber that formed detach, make this air chamber be a negative pressure state, and then thing to be moved is adsorbed in this sucker by atmospheric pressure; So, because conical disc system is a taper comparatively delayed, and taper card edge is thinner yielding, when making to contact with polarizer inside conical disc, the air chamber produced is less, make vacuum equipment only need some suction, just polarizer can be held, and then reach the effect that can not stay on thing to be moved and inhale trace.
Current, can adsorb thing to be moved easily by this sucker, but in taper card edge due to thinner yielding, easily cause bending tilting spoilage high, and in this sucker projection and surface of contact touch rear easily cause and between air chamber groove gap and leave slight absorption vestige, if adsorb more slim thing to be moved, namely likely form the deep damage of inhaling trace or causing thing to be moved.
Model utility content
In view of above-mentioned disappearance and demand, this case creator grinds think of with great concentration, and design is founded, and tests again and again, revises, and is create a kind ofly have strong adsorption ability and can not leave in thing to be moved surface the vacuum chuck structure improvement inhaling trace.
Therefore, for reaching above-mentioned enforcement object, this creator discusses and formulates the improvement of associated vacuum sucker structure to make mode of execution, includes a suction cup main body, a joint and a multihole device; Wherein, offering a containing space in this suction cup main body, can fit to make this containing space form an air chamber in root edge and the thing surface to be moved of this suction cup main body; This joint extends downward this containing space along being located at this suction cup main body upper end and offering a through hole, during absorption, be connected to this joint by a vacuum equipment, bleed this plenum interior gas extraction formation one negative pressure state by this vacuum equipment, outside atmospheric pressure compacting, to this thing to be moved of pulling, makes thing to be moved adsorb and fits in this suction cup main body; Be equiped with a multihole device in this suction cup main body, this multihole device inlayed and is placed in this containing space.
Current, the technological means that the utility model is used in order to reach the goal and structure characteristics thereof are: this suction cup main body, in the accommodating shape of a hollow, upper end extendedly has a joint, a multihole device is equipped with in this suction cup main body inside edge, this multihole device lower end is a smooth surface, and is parallel to this suction cup main body bottom margin.
By tectonic sieving of the present utility model, when sucker will by time moving thing absorption and be mobile, first be connected to this joint by the exhaust tube of a vacuum equipment is closely sealed, and by the through hole that is communicated in this containing space sucker extracted by the plenum interior air that this multihole device inner open hole and thing surface contact to be moved are formed and makes it form negative pressure state, make this thing surface to be moved be smooth in this multihole device surperficial and this suction cup main body bottom margin; This multihole device surface is comparatively smooth flat, be attached at thing surface to be moved and can not produce indenture or absorption vestige, via inner open hole, plenum interior air can be extracted out when vacuum equipment is bled, and this suction cup main body is an airtight material, during absorption, this plenum interior forms a negative pressure state, outside atmospheric pressure is inwardly exerted pressure simultaneously, and this multihole device is, by inside, surface resistance is avoided the formation of suction trace, has stronger adsorption force simultaneously.
Wherein, it is preferred that this suction cup main body is an airtight elastic material.
Wherein, it is preferred that this suction cup main body is corrugated disk body.
Wherein, it is preferred that be the smooth flat bottom this suction cup main body parallel bottom this multihole device.
Wherein, it is preferred that this suction cup main body material is silica gel, rubber, polyurethane, the combination of nitrile butadiene rubber one of them or its.
Wherein, it is preferred that this multihole device material is high molecular foam material.
Wherein, it is preferred that this multihole device material is high density polyethylene (HDPE), pottery, porous carbon, the combination of porous silica one of them or its.
Wherein, it is preferred that this multihole device inlays in integrally formed mode to be placed in this containing space.
Wherein, it is preferred that bottom this sucker be a square aperture, circular open, triangle open mouth, polygonal-shaped openings one of them.
Accompanying drawing explanation
Fig. 1: the structure improved isometric front view of the utility model case vacuum chuck.
Fig. 2: the structure improved bottom isometric view of the utility model case vacuum chuck.
Fig. 3: the utility model case vacuum chuck structure improvement is in conjunction with schematic diagram.
Fig. 4: the utility model case vacuum chuck structure improvement adsorbs thing schematic diagram to be moved.
Fig. 5: the schematic diagram that another embodiment of the utility model case vacuum chuck structure improvement combines.
Fig. 6: another embodiment of the utility model case vacuum chuck structure improvement adsorbs thing schematic diagram to be moved.
Primary component symbol description:
1 suction cup main body
11 containing spaces
2 joints
21 through holes
3 multihole devices
4 things to be moved
5 vacuum equipment connecting tubes
Embodiment
As Fig. 1, shown in Fig. 2 and Fig. 3, for the structure improved isometric front view of vacuum chuck of the present utility model, bottom isometric view and in conjunction with schematic diagram, this suction cup main body is in a corrugated disk body, there is a joint 2 this corrugated disk body upper end is extended, the through hole 21 that one is communicated in this suction cup main body accommodated inside space 11 is offered at this joint 2 middle position, wherein, this suction cup main body accommodated inside space 11 edge is provided with a multihole device 3, this multihole device 3 coordinates this suction cup main body to form a corrugated sidepiece, be a smooth surface bottom this multihole device 3 and be parallel to this suction cup main body 1 bottom margin.
As shown in Figure 4, vacuum chuck structure improvement for the utility model case adsorbs thing schematic diagram to be moved, by above-mentioned tectonic sieving, when sucker will by time moving thing 4 and adsorb fixing, by this joint 2 of the closely sealed linking of a vacuum equipment connecting tube 5 and by this through hole 21, this multihole device 3 is inlayed and is placed in this suction cup main body 1 accommodated inside space 11, this multihole device 3 bottom surface is made to be parallel to this suction cup main body 1 bottom margin, this thing 4 surface to be moved is contacted by this suction cup main body 1, open this vacuum equipment (not shown), internal gas is extracted out via this through hole 21 and vacuum equipment connecting tube 5 by gas by the open hole of the air chamber formed between suction cup main body 1 and thing to be moved 4 by this multihole device 3 inside, form a negative pressure state, outside atmospheric pressure is inwardly pressed into the huge adsorption force of generation one, the multihole device 3 being set at smooth surface in this containing space 11 by this outwards resists the generation of avoiding inhaling trace, and powerful adsorption force can be had avoid thing 4 to be moved drop in the process of movement or damage.
As shown in Figures 5 and 6, vacuum chuck structure improvement for the utility model case adsorbs another embodiment of thing schematic diagram to be moved, this sucker is the corrugated disk body of a square bottom opening, this multihole device 3 is a bottom surface is the corrugated disk body that square meets suction cup main body 1 accommodated inside space 11, inlay to be placed in this suction cup main body 1 accommodated inside space 11, this multihole device 3 bottom surface is made to be parallel to this suction cup main body 1 bottom margin, when sucker will adsorb fixedly in time moving thing 4, be this joint 2 via a closely sealed linking upper end of vacuum equipment connecting tube 5 and by this through hole 21, this thing 4 surface to be moved is contacted by this suction cup main body 1, open vacuum equipment (not shown), internal gas is extracted out via this through hole 21 and vacuum equipment connecting tube 5 by gas by the open hole of the air chamber formed between suction cup main body 1 and thing to be moved 4 by this multihole device 3 inside, form a negative pressure state, thing 4 to be moved is adsorbed in bottom this suction cup main body 1, and by the multihole device 3 of this bottom surface this suction cup main body 1 opening parallel outwards to this thing 4 to be moved of pulling to avoid inhaling the generation of trace, and there is the advantage of powerful adsorption force.
Learn that advantage of the present utility model is as follows by this case embodiment and different implementation methods:
One, the utility model is placed in this suction cup main body accommodated inside space by a multihole device edge, makes vacuum equipment form the vacuum chuck with powerful adsorption force by the open hole gas bleeding of this multihole device inside.
Two, the utility model can resist thing surface to be moved when the sucker suction by smooth surface bottom this multihole device, avoids the situation of inhaling trace to produce.
The embodiment shown in diagram is addressed known on comprehensive, the utility model can reach a kind of to be had powerful adsorption force and not easily drops and avoid inhaling the function that trace situation produces, the above, be only a possible embodiments of the present utility model, this embodiment is mainly only to illustrate that the utility model is for used technological means and the structure thereof of achieving the goal, and therefore can not limit protection domain of the present utility model with it; And, the utility model embodiment really can reach desired use effect, and disclosed concrete structure, not only be not seen in like product, before not also being disclosed in application, met regulation and the requirement of Patent Law really completely, whence proposes the application of new patent in accordance with the law, earnestly ask and give examination, and grant quasi patent, then true feeling moral just.

Claims (9)

1. a vacuum chuck structure improvement, comprises:
One suction cup main body, offers a containing space in this suction cup main body;
One joint, this joint extends downward this containing space along being located at this suction cup main body upper end and offering a through hole;
It is characterized in that, in this suction cup main body, be equiped with a multihole device, this multihole device is inlayed and is placed in this containing space.
2. vacuum chuck structure improvement as claimed in claim 1, it is characterized in that, this suction cup main body is an airtight elastic material.
3. vacuum chuck structure improvement as claimed in claim 1, it is characterized in that, this suction cup main body is corrugated disk body.
4. vacuum chuck structure improvement as claimed in claim 1, it is characterized in that, be the smooth flat bottom this suction cup main body parallel bottom this multihole device.
5. vacuum chuck structure improvement as claimed in claim 1, is characterized in that, this suction cup main body material is silica gel, rubber, polyurethane, nitrile butadiene rubber one of them or its combination.
6. vacuum chuck structure improvement as claimed in claim 1, it is characterized in that, this multihole device material is high molecular foam material.
7. vacuum chuck structure improvement as claimed in claim 1, is characterized in that, this multihole device material is high density polyethylene (HDPE), pottery, porous carbon, porous silica one of them or its combination.
8. vacuum chuck structure improvement as claimed in claim 1, it is characterized in that, this multihole device inlays in integrally formed mode to be placed in this containing space.
9. vacuum chuck structure improvement as claimed in claim 1, is characterized in that, bottom this sucker be a square aperture, circular open, triangle open mouth, polygonal-shaped openings one of them.
CN201520819739.5U 2015-10-22 2015-10-22 Vacuum chuck construction improvement Expired - Fee Related CN205190507U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520819739.5U CN205190507U (en) 2015-10-22 2015-10-22 Vacuum chuck construction improvement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520819739.5U CN205190507U (en) 2015-10-22 2015-10-22 Vacuum chuck construction improvement

Publications (1)

Publication Number Publication Date
CN205190507U true CN205190507U (en) 2016-04-27

Family

ID=55783501

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520819739.5U Expired - Fee Related CN205190507U (en) 2015-10-22 2015-10-22 Vacuum chuck construction improvement

Country Status (1)

Country Link
CN (1) CN205190507U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108861596A (en) * 2018-08-30 2018-11-23 佛山职业技术学院 A kind of sucker clamp structure for solar silicon wafers detection robot
CN109048884A (en) * 2018-08-30 2018-12-21 佛山职业技术学院 A kind of monocrystalline silicon piece detection robot workstation
CN110203468A (en) * 2019-05-28 2019-09-06 汉瓦真空技术(无锡)有限公司 A kind of vacuum chuck device
CN112110323A (en) * 2020-08-04 2020-12-22 大族激光科技产业集团股份有限公司 Vacuum adsorption device and system
CN112599280A (en) * 2020-12-18 2021-04-02 杭州景业智能科技股份有限公司 Bag changing system and automatic packaging system for radioactive materials

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108861596A (en) * 2018-08-30 2018-11-23 佛山职业技术学院 A kind of sucker clamp structure for solar silicon wafers detection robot
CN109048884A (en) * 2018-08-30 2018-12-21 佛山职业技术学院 A kind of monocrystalline silicon piece detection robot workstation
CN110203468A (en) * 2019-05-28 2019-09-06 汉瓦真空技术(无锡)有限公司 A kind of vacuum chuck device
CN112110323A (en) * 2020-08-04 2020-12-22 大族激光科技产业集团股份有限公司 Vacuum adsorption device and system
CN112599280A (en) * 2020-12-18 2021-04-02 杭州景业智能科技股份有限公司 Bag changing system and automatic packaging system for radioactive materials
CN112599280B (en) * 2020-12-18 2023-08-18 杭州景业智能科技股份有限公司 Bag changing system for radioactive materials and automatic packaging system

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160427

Termination date: 20181022