CN205184466U - Floating circular cone mirror burnishing device of generating line - Google Patents

Floating circular cone mirror burnishing device of generating line Download PDF

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Publication number
CN205184466U
CN205184466U CN201520867810.7U CN201520867810U CN205184466U CN 205184466 U CN205184466 U CN 205184466U CN 201520867810 U CN201520867810 U CN 201520867810U CN 205184466 U CN205184466 U CN 205184466U
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CN
China
Prior art keywords
polishing
bus
guide rail
floating
generating line
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Withdrawn - After Issue
Application number
CN201520867810.7U
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Chinese (zh)
Inventor
魏向荣
蒋权泉
黄克飞
李淑芝
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SHANGHAI MODERN ADVANCED ULTRA PRECISION MANUFACTURING CENTER Co Ltd
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SHANGHAI MODERN ADVANCED ULTRA PRECISION MANUFACTURING CENTER Co Ltd
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Priority to CN201520867810.7U priority Critical patent/CN205184466U/en
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Publication of CN205184466U publication Critical patent/CN205184466U/en
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Abstract

The utility model relates to a floating circular cone mirror burnishing device of generating line, including driving system, generating line floating system and polishing system, driving system include the power frame, the toper power shaft of power frame stretches out the mesa and connects the work piece carousel, it is rotatory that the toper power shaft drives the work piece carousel, generating line floating system include the floating disc of suspension on engine pallet face, there is the hole of dodging of dodging the toper power shaft at the floating disc center, the floating disc both sides set up the guide rail and support, and the generating line of fixed slope polished the guide rail between the guide rail supported, set up the generating line motion drive motor that is used for driving polishing system reciprocating motion on the generating line polishing guide rail, polishing system include one with generating line polishing guide rail vertically buff spindle, the terminal fixed polishing dish of buff spindle, the polishing dish drives rotatoryly by throwing the optical disk drive motor. The beneficial effects of the utility model are that the repeated installation of work piece location is accurate to improve production efficiency, simple structure, low in manufacturing cost, convenient to use.

Description

A kind of bus floating type circular axicon lens burnishing device
Technical field
The utility model relates to optical polish machinery device, is specifically related to a kind of bus floating type circular axicon lens burnishing device.
Background technology
Cone mirror is shape optical element as conical in standard, it is often applied to the beam shaping in optical system, a circular light beam can be shaped to annular light beam by it, such light beam is very useful in specific application scenario, such as can improve the resolution of photoetching lines in IC etching machine, then reach the key effect improving integrated circuit integrated level.
The manufacture of cone mirror especially polishing is very difficult, generally just can complete manufacture by the mode of turning or grinding for less demanding metal cone mirror.But concerning the cone mirror of the optical glass material for high-end applications, the mode of grinding only belongs to the roughing of this kind of part, and real manufacture difficult point is polishing process.
Traditional optical polish technique experienced by the development of a century, very ripe.It is to level crossing, spherical mirror, and the processing of prism is very applicable, technical maturity, and working (machining) efficiency is high, and machining accuracy is high.The processing of optical element closely depends on the process equipment manufacturing it, more than conventional optical element polissoir is generally the flat polisher of single shaft or multiaxis, spherical polishing machine, cylindrical surface polishing machine etc., these equipment are very ripe, price is low, stable performance, by the optical manufacturing enterprise of the overwhelming majority is adopted, but cone mirror is very special, traditional process equipment can not complete the polishing to this part, and current price is lower, and the cone mirror polishing machine being applicable to enterprise's production does not design list marketing.
One of polishing difficulty of cone mirror, be there is no special equipment, the shape that it comes from cone mirror is special. general optical element, as level crossing, its polishing axis of spherical mirror is many with or without limit, and the radius of curvature in any region is equal on part, its equipment of the processing that such characteristic makes is very simple, namely workpiece carries out rotation, polishing disk is with face shape mould (the level crossing plane polishing dish of the same radius of curvature of part, spherical mirror spherical polishing dish), swing on the surface of workpiece, add polishing fluid at surface of the work simultaneously and can carry out level crossing, the polishing of spherical mirror. but cone mirror only has an optical axis, and the radius of curvature of each point on surface is different along optical axis direction, namely its generatrix is straight line, but each point of adjacent bus is anchor ring, workpiece in polissoir is caused to rotate, and polishing disk can not swing, polishing disk can not be the problem of any fixing curvature.Just can deal with problems so the special burnishing device that can solve the problem must be designed and manufactured.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of conscope special-purpose polishing device, reduces centrum mirror polissoir cost, alleviates polishing labour intensity, improve polishing efficiency, be suitable for and produce in batches with centrum mirror.
For reaching above-mentioned utility model object, a kind of bus floating type circular axicon lens burnishing device is provided, comprise dynamical system, bus floating system and polishing system, described dynamical system comprises power rack, the taper line shaft of power rack spreads from the table connection Work piece rotary disc, and taper line shaft drives Work piece rotary disc to rotate; Described bus floating system comprises the floating disc be suspended on power rack table top, described floating disc center have dodge taper line shaft dodge hole; Floating disc both sides arrange guide supporting, the bus polishing guide rail of constant tilt between guide supporting; Bus polishing guide rail is arranged for driving polishing system reciprocating bus motion drive motors; Described polishing system comprises a buff spindle vertical with bus polishing guide rail, and buff spindle end fixing polishing dish, described polishing disk is by polishing disk drive motors driven rotary.
The power rack of its rotary power that provides passed through is transformed, only ensure the table top stretching out frame of taper line shaft, the dynamical system of taper rotating shaft is directly delivered on Work piece rotary disc, floating disc dodges hole, therefore floating disc and the miscellaneous part be arranged on above floating disc are not all subject to the impact of transfer motion power, when energy holding workpiece dial rotation, the dynamical system that floating disc does not follow workpiece and taper line shaft formation is rotated.Floating disc, guide supporting and bus polishing guide rail form bus floating system, guide rail left support, guide rail right support, for forming the support of bus polishing guide rail, determined by the angle of the upper surface of guide supporting with the angle of horizontal plane, the numerical value of angle equals the base angle number of degrees of workpiece.Due to buff spindle and bus polishing guide rail perpendicular, therefore polishing disk is finished to the generatrix direction of conscope workpiece, is moved reciprocatingly by motor belt motor polishing disk, makes polishing disk along bus polishing guide rail movement, and plane polishing dish simultaneously rotary motion carries out polishing.
Preferably, described polishing disk is installed on the bus guide rail slide block on buff spindle, and described bus guide rail slide block is socketed on bus polishing guide rail, and described bus motion drive motors promotes bus guide rail slide block and moves reciprocatingly on bus polishing guide rail.
Preferably, described polishing disk drive motors is arranged on bus guide rail slide block, drives synchronous pulley to be delivered on buff spindle by polishing disk.
Preferably, described floating disc and power rack have corresponding via hole, and floating disc is connected by floating position-limiting bolt with power rack.Via hole on floating disc and power rack are fixed, and when Work piece rotary disc is rotated, floating disc does not follow rotation.
Preferably, described via hole internal diameter is greater than diameter of bolt 1mm.To provide space for guide supporting swings, do not follow again working rotary table and rotate
Preferably, pressure counterweight buff spindle is equipped with.By the weight of adjustment pressure counterweight, the gravity that buff spindle is downward can be changed, thus reach change polishing disk to the effect of surface of the work polish pressure.
Improvement of the present utility model is, the polishing of axicon lens is by plane polishing rim bus polishing guide rail movement, and polishing is carried out in the rotary motion simultaneously of plane polishing dish; Bus polishing guide rail, the buff spindle that polishing moves up and down is installed on floating disc, floating disc and Work piece rotary disc rotary motion are isolated, each parts floating disc supporting installation integrally float and are arranged on Work piece rotary disc, make the swing play of diminished shaft seldom affect the relative position and attitude of workpiece and plane polishing dish, form floating type cone mirror polishing system.Floating disc is relative to Work piece rotary disc only trace swing, and do not follow rotation, floating position-limiting bolt is connected with power rack by via hole; The bus athletic posture of plane polishing rim workpiece is not followed surface of the work change and changes, and by the decision of bus guide rail rigidity.The attitude of polishing disk is determined by buff spindle rigidity, and can not change because of the contact situation of surface of the work, be rigid constraint.Below what time ensure that floating type polishing mechanism can float and can ensure the mechanism of high-precision motion of key position. reach the object of the buffing cone somascope of high-efficiency high-accuracy.
Bus floats polishing system integral installation on taper line shaft, circular runout when diminished shaft drives workpiece plate to rotate and axial float can drive whole bus to float, and to carry out floating type trace servo-actuated for polishing system, the relative position of polishing disk and polished workpiece is made to keep stable, have ignored the error that workpiece spindle rotates, reduce the requirement of whole polishing system to turning cylinder; Polishing disk is fixed the reciprocating translatory of angular pose under bus polishing guide rail guiding; Polishing disk carries out rotation makes polishing disk wear leveling; It is upper and lower steadily servo-actuated that buff spindle drives polishing disk to carry out while rotating; Whole mechanism ensure that the stationarity of each Polishing Motion, reduces the cost of cone mirror polissoir, alleviates polishing labour intensity, improves polishing efficiency, is suitable for and produces in batches with cone mirror.The beneficial effects of the utility model are 1, workpiece repeats to install accurate positioning, and enhances productivity; 2, structure is simple, and low cost of manufacture is easy to use.
Accompanying drawing explanation
Fig. 1 is the utility model bus floating type circular axicon lens burnishing device schematic diagram;
Wherein:
1-power rack 2-taper line shaft 3-floating disc
4-floating position-limiting bolt 5-Work piece rotary disc 6-centrum mirror
7-guide rail left support 8-guide rail right support 9-bus polishing guide rail
10-bus guide rail slide block 11-bus motion drive motors 12-polishing disk drive motors
13-polishing Timing Belt 14-buff spindle 15-pressure counterweight
16-polishing disk
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the utility model is described further.
A kind of bus floating type circular axicon lens burnishing device according to Fig. 1, comprise dynamical system, bus floating system and polishing system, described dynamical system comprises power rack 1, the taper line shaft 2 of power rack 1 spreads from the table and connects Work piece rotary disc 5, and taper line shaft 2 drives Work piece rotary disc 5 to rotate.To the power rack 1 of rotary power can be provided to transform, only ensure the table top stretching out frame of taper line shaft 2.
Bus floating system comprises the floating disc 5 be suspended on power rack table top, described floating disc 5 center have dodge taper line shaft 3 dodge hole; Floating disc 5 both sides arrange guide supporting, are respectively guide rail left support 7 and guide rail right support 8, the bus polishing guide rail 9 of constant tilt between guide supporting.The dynamical system that diminished shaft 2 rotates is directly delivered on Work piece rotary disc 5, floating disc 3 and the miscellaneous part be arranged on above it, and except getting centrum mirror 6, all not by the impact of transfer motion power, when energy holding workpiece rotating disk 5 rotates, floating disc 3 does not follow rotation.Described floating disc and power rack have corresponding via hole, and floating disc 3 is connected by floating position-limiting bolt 4 with power rack 1.Via hole on floating disc and power rack are fixed, and when Work piece rotary disc is rotated, floating disc does not follow rotation.Described via hole internal diameter is greater than diameter of bolt 1mm.To provide space for guide supporting swings, do not follow again working rotary table and rotate.Floating disc 3 is by floating position-limiting bolt 4, and the via hole on floating disc and power rack 1 are fixed, and when Work piece rotary disc 5 is rotated, floating disc 3 does not follow rotation.Guide rail left support 7, guide rail right support 8, for forming the support of bus polishing guide rail 9,9 are determined by the angle of the upper surface of guide rail left support 7, guide rail right support 8 with the angle of horizontal plane, and the numerical value of angle equals the base angle number of degrees of cone mirror 6.Cone mirror 6 bonding agent bonds on Work piece rotary disc 5, and ensures with one heart.Bus polishing guide rail 9 is arranged for driving polishing system reciprocating bus motion drive motors 11.
Described polishing system comprises a buff spindle 14 vertical with bus polishing guide rail 9, buff spindle 14 end fixing polishing dish 16, buff spindle 14 there is a bus guide rail slide block 10, described bus guide rail slide block 10 is socketed on bus guide rail 9, bus drive motors 11 drives bus guide rail slide block 10 to move reciprocatingly, described polishing disk drive motors 12 is also arranged on bus guide rail slide block 10, drives synchronous pulley 13 to be delivered on buff spindle 14 by polishing disk.Described polishing disk 16 is by polishing disk drive motors 12 driven rotary.Pressure counterweight 15 buff spindle 14 is equipped with.By the weight of adjustment pressure counterweight 15, the gravity that buff spindle 14 is downward can be changed, thus reach the effect changing polishing disk 16 pairs of surface of the work polish pressures.
Whole system is rotated by workpiece, and polishing disk 16 is along the bus rectilinear motion of centrum mirror 6, and self rotary motion of polishing disk 5 also with servo-actuated up and down, constitutes bus floating type circular axicon lens burnishing device.
Improvement of the present utility model is, the polishing of axicon lens is by plane polishing dish 16 along bus polishing guide rail movement, and polishing is carried out in plane polishing dish 16 rotary motion simultaneously; Bus polishing guide rail 9, the buff spindle 14 that polishing moves up and down is installed on floating disc 3, floating disc 3 and Work piece rotary disc 5 rotary motion are isolated, each parts floating disc 3 supporting installation integrally float and are arranged on Work piece rotary disc 5, make the swing play of diminished shaft 2 seldom affect the relative position and attitude of workpiece and plane polishing dish 16, form floating type cone mirror polishing system.Floating disc 3 swing micro-relative to Work piece rotary disc 5, do not follow rotation, floating position-limiting bolt 4 is connected with power rack 1 by via hole; Plane polishing dish 16 is not followed surface of the work change along the bus athletic posture of workpiece and changes, and by the decision of bus guide rail 9 rigidity.The attitude of polishing disk 16 is determined by buff spindle 14 rigidity, and can not change because of the contact situation on centrum mirror 6 surface, be rigid constraint.Below what time ensure that floating type polishing mechanism can float and can ensure the mechanism of high-precision motion of key position. reach the object of the buffing cone somascope of high-efficiency high-accuracy.
Bus floats polishing system integral installation on taper line shaft 14, circular runout when taper line shaft 14 drives Work piece rotary disc 5 to rotate and axial float can drive whole bus to float, and to carry out floating type trace servo-actuated for polishing system, the relative position of polishing disk 16 and polished workpiece is made to keep stable, have ignored the error that workpiece spindle rotates, reduce the requirement of whole polishing system to turning cylinder; Polishing disk 16 is fixed the reciprocating translatory of angular pose under bus polishing guide rail 9 guiding; Polishing disk 16 carries out rotation makes polishing disk wear leveling; It is upper and lower steadily servo-actuated that buff spindle 14 drives polishing disk 16 to carry out while rotating; Whole mechanism ensure that the stationarity of each Polishing Motion, reduces the cost of cone mirror polissoir, alleviates polishing labour intensity, improves polishing efficiency, is suitable for and produces in batches with cone mirror 6.The utility model utilizes and is arranged on Work piece rotary disc 5, be parallel to the polishing guide rail of circular cone somascope bus, load plane polishing disk 16, carry out toward renaturation polishing along bus. there is structure simple, easy manufacture, the polishing of the cone mirror of various cone angle can be carried out, avoid pure hand-polished efficiency low, the problem that yield rate is low and uncertainty is large, it also avoid the problem of the high cost purchasing dedicated numerical control polissoir, the polishing of the conical mirror of this achievement is not only suitable for the polishing of glass neck mirror, also can be used for metal, pottery grade for material.This achievement directly improves the surface figure accuracy of buffing cone somascope, production efficiency, reliability of technology stability.
Below the preferred embodiment that the utility model is created is illustrated, but the utility model is created and is not limited to described embodiment, those of ordinary skill in the art can also make all equivalent modification or replacement under the prerequisite without prejudice to the utility model creative spirit, and these equivalent modifications or replacement are all included in the application's claim limited range.

Claims (6)

1. a bus floating type circular axicon lens burnishing device, is characterized in that, comprises dynamical system, bus floating system and polishing system,
Described dynamical system comprises power rack (1), the taper line shaft (2) of power rack (1) spreads from the table and connects Work piece rotary disc (5), and taper line shaft (2) drives Work piece rotary disc (5) to rotate;
Described bus floating system comprises the floating disc (3) be suspended on power rack (1) table top, described floating disc (3) center have dodge taper line shaft (2) dodge hole; Floating disc (3) both sides arrange guide supporting, the bus polishing guide rail (9) of constant tilt between guide supporting; Bus polishing guide rail (9) is upper to be arranged for driving polishing system reciprocating bus motion drive motors (11);
Described polishing system comprises a buff spindle (14) vertical with bus polishing guide rail (9), buff spindle (14) end fixing polishing dish (16), described polishing disk (16) is by polishing disk drive motors (12) driven rotary.
2. bus floating type circular axicon lens burnishing device according to claim 1, it is characterized in that, described polishing disk (16) is installed on the bus guide rail slide block (10) on buff spindle (14), described bus guide rail slide block (10) is socketed on bus polishing guide rail (9), and described bus motion drive motors (11) promotes bus guide rail slide block (10) and moves reciprocatingly on bus polishing guide rail (9).
3. bus floating type circular axicon lens burnishing device according to claim 2, it is characterized in that, described polishing disk drive motors (12) is arranged on bus guide rail slide block (10), drives synchronous pulley (13) to be delivered on buff spindle (14) by polishing disk.
4. according to the arbitrary described bus floating type circular axicon lens burnishing device of claims 1 to 3, it is characterized in that, described floating disc (3) and power rack (1) have corresponding via hole, and floating disc (3) is connected by floating position-limiting bolt (4) with power rack (1).
5. bus floating type circular axicon lens burnishing device according to claim 4, it is characterized in that, described via hole internal diameter is greater than diameter of bolt 1mm.
6., according to the arbitrary described bus floating type circular axicon lens burnishing device of claims 1 to 3, it is characterized in that, buff spindle (14) is equipped with pressure counterweight (15).
CN201520867810.7U 2015-11-03 2015-11-03 Floating circular cone mirror burnishing device of generating line Withdrawn - After Issue CN205184466U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520867810.7U CN205184466U (en) 2015-11-03 2015-11-03 Floating circular cone mirror burnishing device of generating line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520867810.7U CN205184466U (en) 2015-11-03 2015-11-03 Floating circular cone mirror burnishing device of generating line

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CN205184466U true CN205184466U (en) 2016-04-27

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105252377A (en) * 2015-11-03 2016-01-20 上海现代先进超精密制造中心有限公司 Busbar floating type polishing device for conscope
CN109571173A (en) * 2017-05-07 2019-04-05 曹建新 A kind of surface evening machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105252377A (en) * 2015-11-03 2016-01-20 上海现代先进超精密制造中心有限公司 Busbar floating type polishing device for conscope
CN109571173A (en) * 2017-05-07 2019-04-05 曹建新 A kind of surface evening machine

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Granted publication date: 20160427

Effective date of abandoning: 20171107