CN205177768U - Permanent -magnetic lens formula condensing lens and use its desktop type scanning electron microscope - Google Patents
Permanent -magnetic lens formula condensing lens and use its desktop type scanning electron microscope Download PDFInfo
- Publication number
- CN205177768U CN205177768U CN201520947043.0U CN201520947043U CN205177768U CN 205177768 U CN205177768 U CN 205177768U CN 201520947043 U CN201520947043 U CN 201520947043U CN 205177768 U CN205177768 U CN 205177768U
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- Prior art keywords
- permanent
- magnetic lens
- condenser
- lens
- desktop type
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a permanent -magnetic lens formula condensing lens and use its desktop type scanning electron microscope, including the condensing lens casing, run through the electron beam passageway of condensing lens casing, be equipped with in the condensing lens casing the process the electron beam of electron beam passageway carries out the permanent -magnetic lens that focuses on, the permanent -magnetic lens is for adopting the neodymium iron boron material, it includes to provide one kind simultaneously the desktop type scanning electron microscope of permanent -magnetic lens formula condensing lens. The utility model discloses desktop type scanning electron microscope is applied to with permanent -magnetic lens formula condensing lens in initiative ground, utilizes the normality magnetic lens characteristics of permanent -magnetic lens, can forever be in operating condition and remain stationary reduce the multiple, improve work efficiency, need not to set up the circuit and provide the electric current, alleviateed weight, reduced the volume, can reach the requirement that desktop type workstation was used.
Description
Technical field
The utility model relates to Electron Microscopy field, is specifically related to a kind of permanent-magnetic lens formula condenser and applies its desktop type scanning electron microscopy.
Background technology
The electron-optical system of desktop type scanning electron microscopy is made up of two condensers, object lens, and electron optics is different from geometric optics, employing be magnetic lens instead of glass lens.Tradition magnetic lens becomes pole shoe by pure iron material by technical requirement retrofit, and as shown in Figure 1, comprise the line bag 1 turned to by enamelled wire in pole shoe, line bag is electrified stream and namely forms magnetic lens; Enamelled wire packet mode condenser produces magnetic field after being electrified stream, electron beam by condenser is reduced, adopt the magnetic lens of said structure that circuit must be coordinated to produce magnetic field, and produce different magnetic field along with the change of size of current, affect scan efficiency; The desktop type scanning electron microscopy volume of employing magnetic lens is large, Heavy Weight, is unfavorable for that it is to development that is miniaturized, convenience direction.
Summary of the invention
Goal of the invention: for the deficiencies in the prior art, the utility model provides a kind of permanent-magnetic lens formula condenser and applies its desktop type scanning electron microscopy, can increase work efficiency, and reduces structural volume.
Technical scheme: permanent-magnetic lens formula condenser described in the utility model, comprises condenser housing, runs through the electron beam channel of condenser housing, be provided with the permanent-magnetic lens focused on the electron beam through described electron beam channel in described condenser housing.
Improve technique scheme further, described permanent-magnetic lens is for adopting rare earth permanent magnet material.
Further, described permanent-magnetic lens is for adopting neodymium iron boron material.
Further, described permanent-magnetic lens is two groups, is spaced apart in described condenser housing by dividing plate in longitudinal.
Further, described condenser housing comprises shell, the upper cover covered on shell, and described shell, upper cover, dividing plate are provided with corresponding through hole and form described electron beam channel.
Above-mentioned permanent-magnetic lens formula condenser is applied to desktop type scanning electron microscopy as its first condenser, second condenser lens still adopts traditional magnetic lens, object lens also adopt traditional object lens, adopt the first condenser of permanent-magnetic lens formula condenser can be forever in running order and keep fixing minification, while increasing work efficiency, decrease overall volume.
Beneficial effect: compared with prior art, advantage of the present utility model: permanent-magnetic lens formula condenser is applied to desktop type scanning electron microscopy by the utility model in a creative way, utilize the normality magnetic lens feature of permanent-magnetic lens, can be forever in running order and keep fixing minification, improve operating efficiency, electric current is provided without the need to arranging circuit, simplifies overall structure; Adopt the desktop type scanning electron microscopy of permanent-magnetic lens formula condenser relative to the traditional magnetic lens of employing, alleviate weight, reduce volume, the requirement of table-top type table application can be reached.
Accompanying drawing explanation
Fig. 1 is the structural representation of traditional magnetic lens in background technology.
Fig. 2 is structural representation of the present utility model.
Embodiment
Below by accompanying drawing, technical solutions of the utility model are described in detail.
embodiment 1:permanent-magnetic lens formula condenser as shown in Figure 2, comprise the condenser housing of shell 21, upper cover 22 composition, be provided with dividing plate 23 in condenser housing, shell 21, dividing plate 23, upper cover 22 center are provided with corresponding through hole and form electron beam channel 25; In condenser housing, dividing plate 23 upper and lower sides is provided with and adopts the permanent-magnetic lens 24 made of NdFeB material, the trade mark N40 of NdFeB material.Neodymium iron boron is as the one of rare earth permanent-magnetic material, there is high magnetic energy product, coercive force and high-energy-density, Nd-Fe-Bo permanent magnet material is made first condenser of permanent-magnetic lens as desk top scanning with hand electron microscope, thus make it possess the advantage of miniaturization, lightweight, slimming, permanent-magnetic lens is normality magnetic lens simultaneously, forever in running order, without the need to arranging external circuit, reduce device fabrication cost; And during work, the minification of electron beam is fixed, ensure the lasting efficient, stable of work.
As mentioned above, although represented with reference to specific preferred embodiment and described the utility model, it shall not be construed as the restriction to the utility model self.Under the spirit and scope prerequisite of the present utility model not departing from claims definition, various change can be made in the form and details to it.
Claims (6)
1. a permanent-magnetic lens formula condenser, comprises condenser housing, runs through the electron beam channel of condenser housing, it is characterized in that: be provided with the permanent-magnetic lens focused on the electron beam through described electron beam channel in described condenser housing.
2. permanent-magnetic lens formula condenser according to claim 1, is characterized in that: described permanent-magnetic lens is for adopting rare earth permanent magnet material.
3. permanent-magnetic lens formula condenser according to claim 2, is characterized in that: described permanent-magnetic lens is for adopting neodymium iron boron material.
4. permanent-magnetic lens formula condenser according to claim 1, is characterized in that: described permanent-magnetic lens is two groups, is spaced apart in described condenser housing by dividing plate in longitudinal.
5. permanent-magnetic lens formula condenser according to claim 4, is characterized in that: described condenser housing comprises shell, the upper cover covered on shell, and described shell, upper cover, dividing plate are provided with corresponding through hole and form described electron beam channel.
6. comprise a desktop type scanning electron microscopy for the arbitrary described permanent-magnetic lens formula condenser of claim 1 to 5, it is characterized in that: the first condenser of described desktop type scanning electron microscopy is described permanent-magnetic lens formula condenser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520947043.0U CN205177768U (en) | 2015-11-25 | 2015-11-25 | Permanent -magnetic lens formula condensing lens and use its desktop type scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520947043.0U CN205177768U (en) | 2015-11-25 | 2015-11-25 | Permanent -magnetic lens formula condensing lens and use its desktop type scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205177768U true CN205177768U (en) | 2016-04-20 |
Family
ID=55741724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520947043.0U Expired - Fee Related CN205177768U (en) | 2015-11-25 | 2015-11-25 | Permanent -magnetic lens formula condensing lens and use its desktop type scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205177768U (en) |
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2015
- 2015-11-25 CN CN201520947043.0U patent/CN205177768U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160420 Termination date: 20191125 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |