CN205175941U - Accurate metal zero -initial -length spring temperature coefficient measuring apparatu based on electric capacity micrometer - Google Patents

Accurate metal zero -initial -length spring temperature coefficient measuring apparatu based on electric capacity micrometer Download PDF

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Publication number
CN205175941U
CN205175941U CN201521026777.1U CN201521026777U CN205175941U CN 205175941 U CN205175941 U CN 205175941U CN 201521026777 U CN201521026777 U CN 201521026777U CN 205175941 U CN205175941 U CN 205175941U
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China
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initial
zero
unit
length spring
thermostatic tank
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Expired - Fee Related
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CN201521026777.1U
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Chinese (zh)
Inventor
汪龙
邹舟
吴鹏飞
柳林涛
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Institute of Geodesy and Geophysics of CAS
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Institute of Geodesy and Geophysics of CAS
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Abstract

The utility model discloses an accurate metal zero -initial -length spring temperature coefficient measuring apparatu based on electric capacity micrometer relates to the performance detection technique of physical geography instrument core component. This measuring apparatu is: in containing unit, from outside to inside, outer heat insulation layer, outer constant temperature jar, interior heat insulation layer, metal dewar bottle and interior constant temperature jar have been set gradually, set up and be connected with outer constant temperature jar and interior constant temperature jar respectively in the outside temperature control system of containing unit, machinery sensing probe unit sets up in interior constant temperature jar, and zero -initial -length spring sets up in mechanical sensing probe unit. Zero -initial -length spring's service environment can be simulated really to the measuring apparatu to temperature coefficient more accurate, measuring spring really, the repeatability is high, stability is good, and it is minimum disturbed by the external environment condition, human intervention is less, has improved measurement of efficiency, be applicable to accurate metal zero -initial -length spring temperature coefficient's measurement.

Description

A kind of precision metallic zero-initial-length spring temperature coefficient measuring instrument based on capacitance measurement
Technical field
The utility model learns the Performance Detection technology of instrument core component with relating to, and particularly relates to a kind of precision metallic zero-initial-length spring temperature coefficient measuring instrument based on capacitance measurement.
Background technology
Measurement accuracy acceleration of gravity and change thereof have vital role in fields such as resource exploration, national defense construction and geoscience researchs.And nowadays high precision elastic element is widely used in exact instrument, instrument and precision optical machinery, wherein metal zero-length spring is successfully applied to gravity meter and goes accurately to measure acceleration of gravity.To have relative size little, highly sensitive for the metal distance of zero mark volute spring made through special processing process, and can overcome the horizontal disturbance of kinetic measurement, creep relaxation amount is minimum, is gravimetric ideal elasticity element.The sensitivity of metal zero-length spring is 0.1 micron/milligal (1 micro-gal=10 -6gal, 1 milligal=10 -3gal, 1 gal=1cm/s -2), resolution is 0.01 milligal, and gravity meter requires that the resolution of spring is 0.001 micron.Such accuracy requirement, its length variations of temperature influence is considerable in use certainly will to cause zero-initial-length spring, even much larger than the measuring accuracy of instrument, and then error is caused to the measurement of instrument, therefore the temperature coefficient of accurately measuring spring is needed to go the temperature-controlled precision level calculated exactly required for gravity meter, thus the change of more accurate and effective measurement acceleration of gravity, react A/W value or change more realistically.
At present about metal distance of zero mark volute spring investigation and application comparatively ripe be also only limitted to more American-European developed countries, and the domestic development to this kind of spring and performance study are also in starting and developing stage.China in Recent Years academy of sciences measures and has done systematic research work with the development of scientific research personnel to metal zero-length spring of Geophysics Institute, its combination property such as creep and drift also reach designing requirement, but about the measurement of zero-initial-length spring temperature coefficient is in more original level all the time, its measuring method is also only limitted to utilize airconditioning control temperature variation, the optics chathetometer utilizing reading accuracy to be micron level reads its length change, then to obtaining data least square method result of calculation, though the method is simple, but measuring error is larger, randomness is higher, the shortcomings such as measurement data is unreliable, it is the weak link limiting its widespread use to the measurement mechanism of zero-initial-length spring temperature coefficient and measuring method at home at present.
Summary of the invention
The purpose of this utility model is the shortcoming and defect overcoming prior art existence, there is provided a kind of more high precision, more reliable and more stable a kind of precision metallic zero-initial-length spring temperature coefficient measuring instrument based on capacitance measurement, in its temperature coefficient, the measuring error of length variations is minimum.This measuring instrument compact conformation, temperature be convenient to control, function modoularization, reading calculate convenient and swift, make domestic to zero-initial-length spring accurate performance detect more comprehensively, more efficient, also improve the measuring accuracy of relevant gravity meter simultaneously.
The purpose of this utility model is achieved in that
Adopting the spring vertical hanging structure of similar relative gravity instrument, for the performance that precision metallic zero-initial-length spring one is important---temperature coefficient is measured, and makes the screening of zero-initial-length spring more targeted, makes the performance of relevant gravity meter more excellent.
One, precision metallic zero-initial-length spring temperature coefficient measuring instrument (abbreviation measuring instrument)
This measuring instrument comprises measurand---zero-initial-length spring;
Be provided with housing unit, mechanical sensitivity contact unit, temperature control unit and level regulation unit;
Described housing unit comprises the cover, shell, base for supporting and the holding nut that connect successively from top to bottom;
Described temperature control unit comprise temperature control system, interior thermostatic tank, outer thermostatic tank, outer heat insulation layer,
Internal insulation and metallic Dewar flask;
At housing unit, from outside to inside, outer heat insulation layer, outer thermostatic tank, internal insulation, metallic Dewar flask and interior thermostatic tank is disposed with; The temperature control system being arranged at housing unit outside is connected with outer thermostatic tank and interior thermostatic tank respectively;
Mechanical sensitivity contact unit is arranged in interior thermostatic tank, and zero-initial-length spring is arranged in mechanical sensitivity contact unit;
Level regulation unit is arranged on base for supporting.
Two, measuring method
1. by precision metallic zero-initial-length spring two ends respectively by connect silk and under connect silk and hang, above connect silk and be pressed on and connect in silk seat, under connect silk and be pressed on down and connect in silk seat; First Level tune instrument of three holding nuts distributed by bottom symmetrical and observation two vertical placement each other and the second Level tune instrument bubble position, adjustment base is in horizontality;
2. capacitive displacement sensor-based system is energized, rotary fine adjustment screw rod and fine setting balancing weight, observe simultaneously and improve circuit signal to noise ratio (S/N ratio) by AC amplifier, the size of the differential capacitance signal of the low-frequency range required for extracting through detuner and low-pass filter, until exporting is 0, now electric capacity moving plate is accurately positioned at upper static capacitance sheet and lower static capacitance sheet centre position;
3. successively interior thermostatic tank, metallic Dewar flask, internal insulation, outer thermostatic tank, outer heat insulation layer, shell are assembled together respectively again, and are fixed on base;
4. in measuring process by change temperature control unit parameter change in thermostatic tank internal temperature, temperature regulating range is at 42-60 DEG C, the control temperature of outer thermostatic tank is lower than interior thermostatic tank 5 DEG C, the signal of simultaneous observation capacitive displacement sensor-based system exports, and can show that corresponding temperature changes the length change of the precision metallic zero-initial-length spring caused.
The utility model has following advantages and good effect:
1. measuring instrument compact overall structure, can simulate the environment for use of zero-initial-length spring truly, thus more accurately, the temperature coefficient of measuring spring truly;
2. temperature control unit can provide the isoperibol of 0.01 DEG C for measuring process, the electric capacity fixed and moving sheet material temperature coefficient of micrometer is simultaneously minimum, stability is high, micrometer precision reaches nanoscale, therefore high, the good stability of this measuring instrument multiplicity, minimum by external environment condition interference;
3. in measuring process, temperature and displacement measurement are all automatically carry out, and human intervention is less, improves measurement efficiency;
4. the measurement of precision metallic zero-initial-length spring temperature coefficient is applicable to.
Accompanying drawing explanation
Fig. 1 is the structural representation of this measuring instrument;
Fig. 2 is the block diagram of capacitive displacement sensor-based system;
Fig. 3 is the block diagram of temperature control system;
In figure:
000-zero-initial-length spring;
100-housing unit,
101-cover, 102-shell, 103-holding nut, 104-base for supporting;
200-mechanical sensitivity contact unit,
201-above connect silk, 202-upper static capacitance sheet, 203-electric capacity moving plate, 204-lower static capacitance sheet,
205-tubulose quality put, 206-under connect silk, 207-under connect silk seat, 208-fine setting balancing weight,
209-capacitive displacement sensor-based system,
2091-preamplifier, 2092-AC amplifier, 2093-detuner,
2094-low-pass filter, 2095-carrier offset voltage generating unit;
210-hang screw rod,
211-low swollen housing,
212-fine setting screw rod,
213-compressing tablet, 214-above connect silk seat, 215-stator joint pin;
300-temperature control unit,
301-temperature control system,
3011-temperature sensor, 3012-PI controller, 3013-current converter,
3014-resistance heating wire;
302-interior thermostatic tank, 303-outer thermostatic tank, 304-outer heat insulation layer,
305-internal insulation; 306-metallic Dewar flask;
400-level regulation unit,
401-the 1 Level tune instrument, the 402-the 2 Level tune instrument.
Embodiment
The utility model is the precision metallic zero-initial-length spring temperature coefficient measuring instrument based on capacitance measurement and double-deck temperature control, does not need the displacement measurement means such as optics chathetometer just reliably, accurately can calculate the temperature coefficient of high-accuracy flexible member.Its principle of work utilizes double-deck temperature control accurately to control step temperature change, use capacitance measurement sensor-based system to measure the displacement information of electric capacity moving plate relative to capacitor fixed plate simultaneously, both be equal to the length variations of spring between adjacent temperature variation, then the temperature expansion coefficient calculated can represent (X represents length, T representation temperature).Measure relative to traditional temperature coefficient, this measuring instrument digitized degree is higher, measures more accurate, is more suitable for the performance measurement of precision element temperature influence in exact instrument.
Describe in detail below in conjunction with drawings and Examples:
One, measuring instrument
1, overall
As Fig. 1, this measuring instrument comprises measurand---zero-initial-length spring 000;
Be provided with housing unit 100, mechanical sensitivity contact unit 200, temperature control unit 300 and level regulation unit 400;
Described housing unit 100 comprises the cover 101, shell 102, base for supporting 104 and the holding nut 103 that connect successively from top to bottom;
Described temperature control unit 300 comprises temperature control system 301, interior thermostatic tank 302, outer thermostatic tank 303, outer heat insulation layer 304, internal insulation 305 and metallic Dewar flask 306;
In housing unit 100, from outside to inside, outer heat insulation layer 304, outer thermostatic tank 303, internal insulation 305, metallic Dewar flask 306 and interior thermostatic tank 302 is disposed with; The temperature control system 301 being arranged at housing unit 100 outside is connected with outer thermostatic tank 303 and interior thermostatic tank 302 respectively;
Mechanical sensitivity contact unit 200 is arranged in interior thermostatic tank 302, and zero-initial-length spring 000 is arranged in mechanical sensitivity contact unit 200;
Level regulation unit 400 is arranged on base for supporting 104.
2, functional part
0) zero-initial-length spring 000
As Fig. 2, precision metallic zero-initial-length spring 000 is measurand;
Be suspended on connect silk 201 and under connect between silk 206.
1) housing unit 100
Described housing unit 100 comprises the cover 101, shell 102, base for supporting 104 and the holding nut 103 that connect successively from top to bottom, forms a closed container;
Its function is the supporter with horizontalization function.
Base for supporting 104 can be circular or triangle, upper surface is processed with the groove with shell 102 outside diameter size, in order to apparatus for placing main body, left end face fixes vertical the first level meter, the second level meter placed each other by screw simultaneously, three support foot pad and are circumferentially symmetrically fixed on base lower surface, and stretching out highly can free adjustment.Thus for measuring instrument housing provides the duty of a level.
2) mechanical sensitivity contact unit 200
Mechanical sensitivity contact unit 200 comprise connect silk 201, upper static capacitance sheet 202, electric capacity moving plate 203, lower static capacitance sheet 204, tubulose quality pendulum 205, under connect silk 206, under connect silk seat 207, fine setting balancing weight 208, capacitive displacement sensor-based system 209, hang screw rod 210, low swollen housing 211, fine setting screw rod 212, compressing tablet 213, on connect silk seat 214 and stator joint pin 215;
Its position and annexation are:
Low swollen housing 211 comprises the upper cover 211A and cylindrical vessel 211B that are connected by screw; Be installed on below cover 101 by circumferentially hanging screw rod 210 by three of 120 ° of distributions;
The upper cover 211A of low swollen housing 211 is provided with screwed hole of centre, the bottom of fine setting screw rod 212 through the central through hole of compressing tablet 213 and the screwed hole of centre of upper cover 211A and on connect silk seat 214 and be connected, above connect silk seat 214, on connect silk 201, zero-initial-length spring 000, under connect silk 206, under connect silk seat 207, tubulose quality pendulum 205 and finely tune balancing weight 208 and be connected successively;
Electric capacity moving plate 203 is connected with the upper end of tubulose quality pendulum 205;
In the space up and down of electric capacity moving plate 203, be respectively arranged with upper static capacitance sheet 202 and lower static capacitance sheet 204, upper static capacitance sheet 202 and lower static capacitance sheet 204 are fixed on the cylindrical vessel 211B of low swollen housing 211 respectively by stator joint pin 215.
As Fig. 2, capacitive displacement sensor-based system 209 comprises preamplifier 2091, AC amplifier 2092, detuner 2093, low-pass filter 2094 and carrier offset voltage generator 2095;
Upper static capacitance sheet 202 is connected by shielded conductor with preamplifier 2091 respectively with lower static capacitance sheet 204, and preamplifier 2091, AC amplifier 2092, detuner 2093, low-pass filter 2094 are connected successively with recording unit;
Carrier offset voltage generator 2095 is connected with electric capacity moving plate 203, provides frequency to be the DC offset voltage of 10-100kHz.
Modulation signal by the differential capacitance signal madulation of low-frequency range to high-frequency carrier signal, circuit signal to noise ratio (S/N ratio) is improved by AC amplifier 2092, the differential capacitance signal of required low-frequency range is extracted through detuner 2093 and low-pass filter 2094, through follow-up data processing, be shown as the length varying value of zero-initial-length spring 000.
(2-1) upper static capacitance sheet 202, electric capacity moving plate 203, lower static capacitance sheet 204,
Material adopts devitrified glass, corrosion stability and good insulating, and temperature coefficient is low;
Upper and lower capacitor fixed plate 202,204 is processed into the glass sheet of diameter 70cm, thickness 3mm, and has three through holes of circumferentially 120 ° of distributions, so that stator joint pin 215 passes through, stator gap is regulated by cushion block;
Electric capacity moving plate 203 is processed into diameter 52mm, thickness is the glass sheet of 1.5mm, and centre has the through hole putting 205 diameter with tubulose quality;
Glass sheet adopts coating technique, and plate the gold film that one deck 0.1mm is thick, craft of gilding not only can ensure the depth of parallelism of capacitance sheet, also can greatly strengthen its electric conductivity;
The function of upper and lower capacitor fixed plate 202,204 receives capacitance signal and provides induced signal for moving plate 203, and electric capacity moving plate 203 function is the temperature variant corresponding length variations of induction spring;
(2-2) screw rod 210 is hung
Hang screw rod 210 and have three, along the circumferential direction 120 ° of distributing installations are in the end-face hole of cover 101 respectively, and nut stem material is duralumin, and on precision machine tool, turning forms;
Its function hangs fixing low swollen housing 211.
(2-3) low swollen housing 211
As Fig. 1, low swollen housing 211 comprises the upper cover 211A and cylindrical vessel 211B that are connected by screw; Be installed on below cover 101 by circumferentially hanging screw rod 210 by three of 120 ° of distributions;
Low swollen housing 211 is formed by the hard steel materials processing that temperature coefficient is very low, and inside and outside surface scribbles resistant to elevated temperatures coating for EMI shielding, ensures that inner micrometer circuit has safety, stable electromagnetic environment.
(2-4) upper and lowerly silk seat 214,207 is connect
As Fig. 1, the upper and lower silk seat 214,207 that connects is processed by tin bronze, and the roughness requirements of silk pressing end face is Ra0.4;
On connect silk seat 214 top be connected with fine setting screw rod 212, the bottom above connecing silk seat 214 with on connect silk 201 and be connected;
Under connect silk seat 207 bottom be fixed on tubulose quality and put 205 interior lower end faces, under connect silk seat 207 top with under connect silk 206 and be connected;
Its function has been connection function.
(2-5) upper and lowerly silk 201,206 is connect
As Fig. 1, above connect silk 201 and under to connect silk 206 are a kind of diameters is the partinium silk of 0.07mm through heat treatment;
Under connect the upper end upper end of silk 206 and precision metallic distance of zero mark connecing silk 201 and be fixed on and connect on silk seat 214, the upper end semicircle shackle of the lower end and precision metallic zero-initial-length spring 000 that above connect silk 201 is connected;
Under connect silk 206 the lower end semicircle shackle of upper end and precision metallic zero-initial-length spring 000 be connected, under connect silk 206 lower end be fixed on down and connect on silk seat 207.
Its function has been connection function.
(2-6) screw rod 212, fine setting balancing weight 208 is finely tuned
As Fig. 2, rotate fine setting screw rod 212 and adjustment fine setting balancing weight 208 (have the multiple specification of quality optional), realize the fine setting of moving plate 203 upper and lower displacement, make it remain in the middle of upper static capacitance sheet 202 and lower static capacitance sheet 204.
(2-7) capacitive displacement sensor-based system 209
As Fig. 2, capacitive displacement sensor-based system (209) comprises detuner (2003), low-pass filter (2004), the carrier offset voltage generating unit (2005) of preamplifier (2001), the AC amplifier (2002) of decay loan external noise, the amplitude of extraction high-frequency signal;
Upper static capacitance sheet (202), lower static capacitance sheet (204) are connected by shielded conductor with preamplifier (2001);
Carrier offset voltage generating unit (2005) provides frequency to be the DC offset voltage of 10KHz-100kHz for electric capacity moving plate (203), modulation signal by the differential capacitance signal madulation of low-frequency range to high-frequency carrier signal, circuit signal to noise ratio (S/N ratio) is improved by AC amplifier (2002), the differential capacitance signal of the low-frequency range required for extracting through detuner (2003) and low-pass filter (2004), through follow-up data processing, be shown as the length varying value of precision metallic zero-initial-length spring (00).
3) temperature control unit 300
Described temperature control unit 300 comprises temperature control system 301, interior thermostatic tank 302, outer thermostatic tank 303, outer heat insulation layer 304, internal insulation 305 and metallic Dewar flask 306;
In housing unit 100, from outside to inside, outer heat insulation layer 304, outer thermostatic tank 303, internal insulation 305, metallic Dewar flask 306 and interior thermostatic tank 302 is disposed with; The temperature control system 301 being arranged at housing unit 100 outside is connected with outer thermostatic tank 303 and interior thermostatic tank 302 respectively;
As Fig. 3, described temperature control system 301 comprise connect successively temperature sensor 3011, PI controller 3012, current converter 3013 and resistance heating wire 3014;
The temperature of temperature sensor 3011 Real-Time Monitoring mechanical sensitivity contact unit 200, temperature sensor signal is converted to feedback voltage signal by PI controller 3012, current converter 3013 applies suitable electric current according to feedback voltage signal in resistive heater 3014, produces heat and inside and outside thermostatic tank 302,303 is heated to predetermined temperature and is incubated.
(3-1) thermostatic tank 302, outer thermostatic tank 303 in
Make by excellent thermal conductivity, machining property is good, density is less duralumin, the equal coiling heater strip of its outer wall, provides thermal source by temperature control system 301, and temperature range is 42-60 DEG C.
Outer thermostatic tank 303 and filling with the hard polyaminoester of excellent heat insulating performance between shell 102 and metallic Dewar flask 306, can continue when making heat insulation tank be warmed up to predetermined temperature to be incubated, and guarantees the length variations amount that accurately measuring spring causes due to temperature variation.
4) level regulation unit 400
Level regulation unit 400 comprises the 1st Level tune instrument 401 and the 2nd Level tune instrument 402, is in horizontality for adjusting base (104).
In sum, this measuring instrument simply can be summed up as the function of two aspects, and one is temp. control function, and another is detection springs length variations function.First function is primarily of the associated mechanical of temperature control unit and circuit realiration, second function is primarily of the machinery of mechanical sensitivity contact unit and circuit realiration, and the shell of periphery, cover, suspender, base, levelling device, to connect a system be the prerequisite and basis of guaranteeing that these two major function tasks normally work.
Those skilled in the art will readily understand, the foregoing is only preferred embodiment of the present utility model and, not in order to limit the utility model; Every do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.

Claims (3)

1., based on a precision metallic zero-initial-length spring temperature coefficient measuring instrument for capacitance measurement, comprise detected object zero-initial-length spring (000); It is characterized in that:
Be provided with housing unit (100), mechanical sensitivity contact unit (200), temperature control unit (300)
With level regulation unit (400);
Described housing unit (100) comprise connect successively from top to bottom cover (101), shell (102),
Base for supporting (104) and holding nut (103);
Described temperature control unit (300) comprise temperature control system (301), interior thermostatic tank (302),
Outer thermostatic tank (303), outer heat insulation layer (304), internal insulation (305) and metallic Dewar flask (306);
In housing unit (100), from outside to inside, outer heat insulation layer (304), outer thermostatic tank (303), internal insulation (305), metallic Dewar flask (306) and interior thermostatic tank (302) is disposed with; The temperature control system (301) being arranged at housing unit (100) outside is connected with outer thermostatic tank (303) and interior thermostatic tank (302) respectively;
Mechanical sensitivity contact unit (200) is arranged at interior thermostatic tank (in 302), and zero-initial-length spring (000) is arranged in mechanical sensitivity contact unit (200);
Level regulation unit (400) is arranged on base for supporting (104).
2., by detector according to claim 1, it is characterized in that:
Described mechanical sensitivity contact unit (200) comprise connect silk (201), upper static capacitance sheet (202), electric capacity moving plate (203), lower static capacitance sheet (204), tubulose quality pendulum (205), under connect silk (206), under connect silk seat (207), fine setting balancing weight (208), capacitive displacement sensor-based system (209), hang screw rod (210), low swollen housing (211), fine setting screw rod (212), compressing tablet (213), on connect silk seat (214) and stator joint pin (215);
Its position and annexation are:
Low swollen housing (211) comprises the upper cover (211A) and cylindrical vessel (211B) that are connected by screw; Be installed on below cover (101) by circumferentially hanging screw rod (210) by three of 120 ° of distributions;
The upper cover (211A) of low swollen housing (211) is provided with screwed hole of centre, the bottom of fine setting screw rod (212) through the central through hole of compressing tablet (213) and the screwed hole of centre of upper cover 211A and on connect silk seat (214) and be connected, above connect silk seat (214), on connect silk (201), zero-initial-length spring (000), under connect silk (206), under connect silk seat (207), tubulose quality puts (205) and finely tunes balancing weight (208) and be connected successively;
Electric capacity moving plate (203) is connected with the upper end of tubulose quality pendulum (205);
In the space up and down of electric capacity moving plate (203), be respectively arranged with upper static capacitance sheet (202) and lower static capacitance sheet (204), upper static capacitance sheet (202) and lower static capacitance sheet (204) are fixed on the cylindrical vessel (211B) of low swollen housing (211) respectively by stator joint pin (215);
Capacitive displacement sensor-based system (209) comprises preamplifier (2091), AC amplifier (2092), detuner (2093), low-pass filter (2094) and carrier offset voltage generator (2095); Upper static capacitance sheet (202) is connected by shielded conductor with preamplifier (2091) respectively with lower static capacitance sheet (204), and preamplifier (2091), AC amplifier (2092), detuner (2093), low-pass filter (2094) are connected successively with recording unit; Carrier offset voltage generator (2095) is connected with electric capacity moving plate (203), provides frequency to be the DC offset voltage of 10-100kHz.
3., by detector according to claim 1, it is characterized in that:
Described temperature control system (301) comprise connect successively temperature sensor (3011), PI controller (3012), current converter (3013) and resistance heating wire (3014).
CN201521026777.1U 2015-12-10 2015-12-10 Accurate metal zero -initial -length spring temperature coefficient measuring apparatu based on electric capacity micrometer Expired - Fee Related CN205175941U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105510377A (en) * 2015-12-10 2016-04-20 中国科学院测量与地球物理研究所 Precise metal zero-length spring temperature coefficient measuring instrument and method thereof
CN109085196A (en) * 2018-10-30 2018-12-25 西南大学 Single capacitor expansion indicator
CN114850352A (en) * 2022-05-30 2022-08-05 中国科学院精密测量科学与技术创新研究院 High-precision metal zero-length spring reverse rotation device
CN109085196B (en) * 2018-10-30 2024-05-14 西南大学 Single-capacitor thermal expansion measuring instrument

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105510377A (en) * 2015-12-10 2016-04-20 中国科学院测量与地球物理研究所 Precise metal zero-length spring temperature coefficient measuring instrument and method thereof
CN109085196A (en) * 2018-10-30 2018-12-25 西南大学 Single capacitor expansion indicator
CN109085196B (en) * 2018-10-30 2024-05-14 西南大学 Single-capacitor thermal expansion measuring instrument
CN114850352A (en) * 2022-05-30 2022-08-05 中国科学院精密测量科学与技术创新研究院 High-precision metal zero-length spring reverse rotation device
CN114850352B (en) * 2022-05-30 2023-05-30 中国科学院精密测量科学与技术创新研究院 High-precision metal zero-length spring reverse rotation device

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