CN205170969U - Graphite boat stuck point for PECVD - Google Patents
Graphite boat stuck point for PECVD Download PDFInfo
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- CN205170969U CN205170969U CN201520815458.2U CN201520815458U CN205170969U CN 205170969 U CN205170969 U CN 205170969U CN 201520815458 U CN201520815458 U CN 201520815458U CN 205170969 U CN205170969 U CN 205170969U
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- cylinder
- access division
- graphite boat
- stuck point
- fixed part
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Abstract
The utility model discloses a graphite boat stuck point for PECVD, set up the cylinder joint portion in cylinder fixed part both sides including cylinder fixed part and symmetry, cylinder joint portion includes the second cylinder joint portion that first cylinder joint portion and both ends are connected with first cylinder joint portion and cylinder fixed part respectively, first cylinder joint portion, second cylinder joint portion and the cylinder fixed part is coaxial arranges that the diameter of first cylinder joint portion is 5.6mm, and the diameter of second cylinder joint portion is 4.3mm. The application provides a life extension of graphite boat stuck point.
Description
Technical field
The utility model relates to silicon chip film-coated technical field, particularly a kind of PECVD graphite boat stuck point.
Background technology
PECVD (PlasmaEnhancedChemicalVaporDeposition, plasma enhanced chemical vapor deposition method) its principle is the ionization of gas making containing film composed atom by the method such as microwave or radio frequency, be partially formed plasma body, due to plasma, to put forward chemical very strong, be easy to react, therefore go out expected film at deposition on substrate.The graphite boat containing silicon slice that PECVD utilizes graphite to prepare for material in coating process, in order to be fixed in graphite boat by stable for silicon chip, graphite boat wall is provided with the graphite boat stuck point for fixing silicon chip.
As depicted in figs. 1 and 2, graphite boat stuck point comprises cylinder fixed part 03 and is symmetricly set on the cylinder Access Division of cylinder fixed part 03 both sides, wherein cylinder Access Division comprise the second cylinder Access Division 02, cylinder Access Division 01, second, cylinder Access Division 02, first that the first cylinder Access Division 01 and two ends are connected with the first cylinder Access Division 01 and cylinder fixed part 03 respectively and cylinder fixed part 03 coaxially arranged.Concrete, the diameter of the first cylinder Access Division 01 is 7.5mm, and the diameter of the second cylinder Access Division 02 is 6.3mm, and the thickness of cylinder fixed part 03 is 9.03mm.
But, although the contact area of silicon chip and the first cylinder Access Division 01 is theoretical enough, but edge location contacts that is near due to silicon chip major part area and the first cylinder Access Division 01, and contact instability with silicon chip due to position, edge, effective contact area of silicon chip and graphite boat stuck point is less, causes silicon chip and the edge loose contact of graphite boat stuck point, and graphite boat stuck point and silicon chip contact position temperature raise, the situation easily causing graphite boat stuck point to burn, makes shorten the work-ing life of graphite boat stuck point.
Therefore, how extending the work-ing life of graphite boat stuck point, is those skilled in the art's technical problems urgently to be resolved hurrily.
Utility model content
The purpose of this utility model is to provide a kind of PECVD graphite boat stuck point, and the work-ing life of this graphite boat stuck point extends.
For achieving the above object, the utility model provides a kind of PECVD graphite boat stuck point, comprise cylinder fixed part and be symmetricly set on the cylinder Access Division of cylinder fixed part both sides, described cylinder Access Division comprises the second cylinder Access Division that the first cylinder Access Division is connected with described first cylinder Access Division and described cylinder fixed part respectively with two ends, described first cylinder Access Division, described second cylinder Access Division and described cylinder fixed part are coaxially arranged, the diameter of described first cylinder Access Division is 5.6mm, and the diameter of described second cylinder Access Division is 4.3mm.
Preferably, the end of described first cylinder Access Division is provided with chamfering.
Preferably, the end of described cylinder fixed part is provided with chamfering.
Preferably, the diameter of described cylinder fixed part is 6.03mm.
Preferably, the thickness of described second cylinder Access Division is 0.37mm.
Preferably, the thickness of described first cylinder Access Division is 1.3mm.
Preferably, the thickness of described cylinder fixed part is 2.78mm.
Preferably, described cylinder Access Division and described cylinder fixed part are integral type structure.
In technique scheme, the PECVD graphite boat stuck point that the utility model provides comprises cylinder fixed part and is symmetricly set on the cylinder Access Division of cylinder fixed part both sides, cylinder Access Division comprises the second cylinder Access Division that the first cylinder Access Division is connected with the first cylinder Access Division and cylinder fixed part respectively with two ends, first cylinder Access Division, the second cylinder Access Division and cylinder fixed part are coaxially arranged, the diameter of the first cylinder Access Division is 5.6mm, and the diameter of the second cylinder Access Division is 4.3mm.
Known by foregoing description, in the PECVD graphite boat stuck point that the utility model provides, diameter due to the first cylinder Access Division is 5.6mm, the diameter of the second cylinder Access Division is 4.3mm, diametrically the first cylinder Access Division is 0.65mm relative to the second cylinder Access Division exsertion part length, relative to the first cylinder Access Division in background technology relative to span access location length 0.6mm outside the second cylinder Access Division, increase the contact degree of depth of silicon chip and graphite boat stuck point, reduce the diameter of the first cylinder Access Division and the second cylinder Access Division simultaneously, reduce the contact at silicon chip and graphite boat stuck point edge, and then reduce the situation of silicon chip and the loose contact of graphite boat stuck point, therefore, the work-ing life of the graphite boat stuck point that the application provides extends.
Accompanying drawing explanation
Fig. 1 is the structural representation of traditional graphite boat stuck point;
The side-view of Fig. 2 to be Fig. 1 be shown graphite boat stuck point;
The structural representation of the graphite boat stuck point that Fig. 3 provides for the utility model embodiment;
Fig. 4 is the side-view of the stuck point of graphite boat shown in Fig. 3.
Wherein in Fig. 1-4: 01-first cylinder Access Division, 02-second cylinder Access Division, 03-cylinder fixed part;
1-first cylinder Access Division, 2-second cylinder Access Division, 3-cylinder fixed part.
Embodiment
Core of the present utility model is to provide a kind of PECVD graphite boat stuck point, and the work-ing life of this graphite boat stuck point extends.
In order to make those skilled in the art understand the technical solution of the utility model better, below in conjunction with drawings and embodiments, the utility model is described in further detail.
Please refer to Fig. 3 and Fig. 4, in a kind of embodiment, the PECVD graphite boat stuck point that the utility model provides comprises cylinder fixed part 3 and is symmetricly set on the cylinder Access Division of cylinder fixed part 3 both sides, and wherein, cylinder fixed part 3 can be connected with cylinder Access Division by bonding.Cylinder Access Division comprises the second cylinder Access Division 2 that the first cylinder Access Division 1 is connected with the first cylinder Access Division 1 and cylinder fixed part 3 respectively with two ends, first cylinder Access Division 2, cylinder Access Division 1, second and cylinder fixed part 3 coaxially arranged, the diameter of the first cylinder Access Division 1 is 5.6mm, the diameter of the second cylinder Access Division 2 is 4.3mm, and the diameter of cylinder fixed part 3 can be identical with the diameter of traditional cylinder fixed part.
Known by foregoing description, in the PECVD graphite boat stuck point that the utility model specific embodiment provides, diameter due to the first cylinder Access Division 1 is 5.6mm, the diameter of the second cylinder Access Division 2 is 4.3mm, diametrically the first cylinder Access Division 1 is 0.65mm relative to the second cylinder Access Division 2 exsertion part length, relative to the first cylinder Access Division in background technology relative to the second outer span access location length 0.6mm in cylinder Access Division 2, increase the contact degree of depth of silicon chip and graphite boat stuck point, when the virtual contact width of silicon chip and graphite boat stuck point is 1mm, effective contact area of graphite boat stuck point and silicon chip is similar to 0.65mm
2, and traditional effective contact area is 0.60mm
2wherein area formula is the first cylinder Access Division 1 relative to the product of the second cylinder Access Division 2 protruded length and virtual contact width 1mm, ensure that the efficiency of conversion of battery, reduce the diameter of the first cylinder Access Division 1 and the second cylinder Access Division 2 simultaneously, reduce the contact at silicon chip and graphite boat stuck point edge, and then reduce the situation of silicon chip and the loose contact of graphite boat stuck point, therefore, the work-ing life of the graphite boat stuck point that the application provides extends.
For the ease of staff's processing graphite boat stuck point, preferably, the end of the first cylinder Access Division 1 is provided with chamfering.More preferred, the end of cylinder fixed part 3 is also provided with chamfering.By arranging chamfering, being convenient to the first cylinder Access Division 1 and the shaping rear taking-up of cylinder fixed part 3, the situation avoiding knuckle place, end to damage, avoiding external substance to damage the situation of the first cylinder Access Division 1 and cylinder fixed part 3 simultaneously.
Further, the diameter of cylinder fixed part 3 is 6.00mm-6.06mm, and preferably, the diameter of cylinder fixed part 3 is 6.03mm.Due to the diameter of the first cylinder Access Division 1 and the reduced of the second cylinder Access Division 2, the diameter reducing cylinder fixed part 3 makes graphite boat stuck point overall ratio coordinate, reduce the overall weight of graphite boat stuck point simultaneously, reduce the manufacturing cost of graphite boat stuck point.
Further, the thickness of the second cylinder Access Division 2 is 0.37mm.The thickness of the first cylinder Access Division 1 is 1.3mm.The thickness of cylinder fixed part 3 is 2.78mm.Certainly according to real work situation, the thickness of the first cylinder Access Division 2, cylinder Access Division 1, second and cylinder fixed part 3 can be regulated.
On the basis of above-mentioned each scheme, for the ease of staff's processing graphite boat stuck point, preferably, cylinder Access Division and cylinder fixed part 3 are integral type structure.When processing graphite boat stuck point, can by one-body molded for graphite boat stuck point.
In this specification sheets, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein when not departing from spirit or scope of the present utility model, can realize in other embodiments.Therefore, the utility model can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (8)
1. a PECVD graphite boat stuck point, comprise cylinder fixed part (3) and be symmetricly set on the cylinder Access Division of cylinder fixed part (3) both sides, described cylinder Access Division comprises the second cylinder Access Division (2) that the first cylinder Access Division (1) is connected with described first cylinder Access Division (1) and described cylinder fixed part (3) respectively with two ends, described first cylinder Access Division (1), described second cylinder Access Division (2) and described cylinder fixed part (3) coaxially arranged, it is characterized in that, the diameter of described first cylinder Access Division (1) is 5.6mm, the diameter of described second cylinder Access Division (2) is 4.3mm.
2. PECVD graphite boat stuck point according to claim 1, is characterized in that, the end of described first cylinder Access Division (1) is provided with chamfering.
3. PECVD graphite boat stuck point according to claim 1, is characterized in that, the end of described cylinder fixed part (3) is provided with chamfering.
4. PECVD graphite boat stuck point according to claim 1, is characterized in that, the diameter of described cylinder fixed part (3) is 6.00mm-6.06mm.
5. PECVD graphite boat stuck point according to claim 4, is characterized in that, the thickness of described second cylinder Access Division (2) is 0.37mm.
6. PECVD graphite boat stuck point according to claim 5, is characterized in that, the thickness of described first cylinder Access Division (1) is 1.3mm.
7. PECVD graphite boat stuck point according to claim 6, is characterized in that, the thickness of described cylinder fixed part (3) is 2.78mm.
8. the graphite boat stuck point of the PECVD according to any one of claim 1-7, is characterized in that, described cylinder Access Division and described cylinder fixed part (3) are integral type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520815458.2U CN205170969U (en) | 2015-10-20 | 2015-10-20 | Graphite boat stuck point for PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520815458.2U CN205170969U (en) | 2015-10-20 | 2015-10-20 | Graphite boat stuck point for PECVD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205170969U true CN205170969U (en) | 2016-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520815458.2U Active CN205170969U (en) | 2015-10-20 | 2015-10-20 | Graphite boat stuck point for PECVD |
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| Country | Link |
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| CN (1) | CN205170969U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018209728A1 (en) * | 2017-05-18 | 2018-11-22 | 广东爱康太阳能科技有限公司 | Tubular perc single-sided photovoltaic cell and method for fabrication thereof and dedicated device |
-
2015
- 2015-10-20 CN CN201520815458.2U patent/CN205170969U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018209728A1 (en) * | 2017-05-18 | 2018-11-22 | 广东爱康太阳能科技有限公司 | Tubular perc single-sided photovoltaic cell and method for fabrication thereof and dedicated device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |