CN205141361U - Exocoel tuned laser - Google Patents
Exocoel tuned laser Download PDFInfo
- Publication number
- CN205141361U CN205141361U CN201520777884.1U CN201520777884U CN205141361U CN 205141361 U CN205141361 U CN 205141361U CN 201520777884 U CN201520777884 U CN 201520777884U CN 205141361 U CN205141361 U CN 205141361U
- Authority
- CN
- China
- Prior art keywords
- laser
- speculum
- external cavity
- tunable lasers
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses an exocoel tuned laser, including laser gain chip, the collimating lens who carries out the collimation to laser beam, the grating that divides photo genesis one -level diffraction light and zero level diffraction light to the laser behind the collimation, the focusing lens who carries out the spotlight transmission to the one -level diffraction light that are used for carrying on wavelength gain to laser, be used for carrying out selective reflection's speculum and be used for driving the speculum carrying out rotatory motor to the one -level diffraction light after the spotlight transmission, wherein, still be provided with metallizing fine rule zone map on the speculum. The utility model discloses metallizing fine rule zone map includes through little processing technology that photoetching and thin film deposition realize the pattern preparation, and different pattern can realize different wavelength adjustment functions, for example single wavelength linearity is harmonious, dual wavelength tuned laser, multi -wavelength tuned laser etc. And then satisfies the application demand of tuned laser in different occasions.
Description
Technical field
The utility model relates to External cavity tunable lasers field, in particular a kind of high performance-price ratio External cavity tunable lasers that can be used for laser radar system.
Background technology
External cavity tunable lasers is the Primary Component in the fields such as optical communication, spectroscopy, laser radar, optical coherence tomography.The External cavity tunable lasers of based semiconductor chip gain is widely studied and application owing to having relatively high integrated level and relative simple Optical System Design, and its traditional structure mainly comprises Littman and Littrow two kinds design.Littrow design is that realize wavelength selectivity and feed back to laser gain chip, the shortcoming of this design is emergent light direction is not fixing, builds cause very big inconvenience to subsequent optical path by regulating grating and incident laser angle.And Littman structure is the relative angle by adjusting outer resonant reflec-tors and grating, select different wave length to feed back to laser gain district from one order diffracted spots, thus it is tuning to realize exocoel.Littman structure, because exit direction is pattern zero order diffraction direction, so wavelength tuning does not affect laser emitting direction, overcomes the problem in Littrow scheme.But Littman structure causes the discontinuous problem of wavelength regulation to overcome mode hopping in laser tuning process, the adjustment mechanical device of speculum, a long-armed motor is needed precisely to be positioned in light path, its error range can not more than 20-50 micron, therefore the stability meeting extreme influence tuning performance of mechanical system, particularly such as, at the application of some of complex environment, mobile lidar, vibrations, shock all likely change optical system parameter.Except these two kinds of laser tuning schemes, also have based on liquid crystal phase array plane, select printing opacity, based on optical crystal, based on tuning schemes of external cavity laser such as MEMS micro mirror arrays based on finedraw.These schemes are for all each own pluses and minuses of different application.Add the cavity loss of laser based on the introducing of liquid crystal in the tuning scheme of liquid crystal phase array plane, increase laser threshold.Based on the Wavelength selecting method of finedraw, precision is limited to the working width of finedraw, and can introduce loss when light is reflected back micro chink by the concave mirror after finedraw.Based on MEMS micro mirror array except with high costs, frame switch speed causes entire system speed low more slowly, cannot adapt to this application requiring rapid scanning acquisition cloud data of laser radar.
Therefore, prior art existing defects, needs to improve.
Utility model content
Technical problem to be solved in the utility model is: provide one to have very large design flexibility, higher, the lower-cost External cavity tunable lasers of speed.
Technical solutions of the utility model are as follows: a kind of External cavity tunable lasers, the laser light splitting after the collimating lens comprise the laser gain chip for carrying out wavelength gain to laser, laser beam being collimated, collimation produce first-order diffraction light and zero order diffracted light grating, first-order diffraction light carried out to poly-light transmissive condenser lens, for the speculum that reflects the first-order diffraction light after optically focused transmission and the motor for driving speculum to rotate; Wherein, speculum is also provided with plating fine line region pattern.
Be applied to technique scheme, in described External cavity tunable lasers, laser gain chip is moored sieve waveguide by semiconductor Fabry and is formed, and end face is provided with high reverse--bias (HR) film thereafter, and front end face is provided with antireflective (AR) film.
Be applied to each technique scheme, in described External cavity tunable lasers, the gain of laser gain chip goes centre wavelength to be 810nm, and its gain wavelength adjustable extent is 780nm-840nm.
Be applied to each technique scheme, in described External cavity tunable lasers, grating is set to balzed grating, or holographic grating.
Be applied to each technique scheme, in described External cavity tunable lasers, balzed grating, is the balzed grating, of 1200 lines per millimeters.
Be applied to each technique scheme, in described External cavity tunable lasers, plating fine line region pattern be adopt live width be 20 microns plating fine rule form pattern form.
Be applied to each technique scheme, in described External cavity tunable lasers, speculum adopts silicon materials as substrate, wherein, comprise sapphire, quartz glass, silicon, acrylic glue, and its plating fine line region pattern forms for adopting gold or silver or aluminum metal coating thin film.
Be applied to each technique scheme, in described External cavity tunable lasers, motor and speculum adopt the mode bonded to be connected and fixed, and motor chooses servomotor or stepping motor.
Be applied to each technique scheme, in described External cavity tunable lasers, the plating fine line region pattern that speculum is arranged is the pattern that the parallel metal curve of employing two or wall scroll metal Curves are formed.
Adopt such scheme, the advantage that the utility model has is:
(1) outer resonant reflec-tors is made by micro fabrication, and form plating fine line region pattern by micro Process, its narrow linewidth characteristic makes laser obtain very narrow bandwidth output spectrum, improves tuning precision and resolution.
(2) carry out rotation sweep by driven by motor speculum, its sweep velocity is determined with the speed of electric rotating machine jointly by the degree pattern essence of patterned speculum.This is a little for needing the laser radar scheme of frequency sweep to seem particularly evident, such as hypothesis adopts the electric rotating machine of 3000rpm, and suppose the band pattern speculum that micro Process obtains, often revolve to turn around 360 degree with the radius of 10mm and distributed 3000 stepped-frequency signal, the frequency-scan speed of 150kHz can be realized under this setting, and 20 microns are probably only had to micro-machined precision.This speed is greatly owing to adopting the MEMS micro mirror array external cavity laser scheme of switch frame, and its frame switch speed probably only has 6 ~ 10kHz.
(3) plating fine line region pattern can arbitrarily design, and therefore greatly can increase the elasticity of design, the problem that solution part cannot overcome in conventional tune method, such as the problem such as tuning non-linear, multi-wavelength emission.
(4) External cavity tunable lasers of the present utility model, integral manufacturing cost is lower, particularly for the standardization application scenario that only can use the outer resonant reflec-tors pattern of same for a long time, such as optics Continuous Wave with frequency modulation laser radar.And compare there is same sweep velocity exocoel tuning laser such as based on the External cavity tunable lasers of electrooptic crystal, scheme of the present utility model has cost advantage more.
Accompanying drawing explanation
Fig. 1 is optical system structure schematic diagram of the present utility model;
Fig. 2 is the utility model neutral line frequency modulation speculum pattern;
Fig. 3 is the frequency sweep curve that in the utility model, pattern shown in Fig. 2 obtains;
Fig. 4 is the utility model dual wavelength frequency modulation speculum pattern;
Fig. 5 is the wavelength change curve in time that shown in the utility model Fig. 4, pattern obtains.
Embodiment
Following the utility model is described in detail by reference to the accompanying drawings.
The utility model micro-machined method can make patterned outer resonant reflec-tors, namely plating fine line region pattern is provided with on the mirror, and laser light area, plating fine line region pattern can arrange the live width of pattern and plating fine rule as required, thus for External cavity tunable lasers provide flexible wavelength regulation mechanism, the External cavity tunable lasers be made has higher cost performance, for application such as requiring chirped laser radar, there is sweep velocity fast, the outstanding advantages such as spectrum line width, and cost of manufacture to compare schemes such as utilizing micro mirror array much lower.
Case study on implementation one:
The present embodiment provides a kind of External cavity tunable lasers, and by the design of plating fine line region pattern on speculum, can obtain linear frequency sweep and export, the present embodiment is applicable to optics Continuous Wave with frequency modulation laser radar as frequency-sweeping laser source.
The present embodiment as shown in Figure 1, laser gain chip 1 be gain region centre wavelength at 810nm, the Wavelength tunable scope of its gain is 780nm ~ 840nm, laser gain chip 1 can adopt semiconductor Fabry moor Luo Jiguang form.Laser gain chip 1 rear end face has the high reverse--bias HR plated film 11 for 800nm infrared band, and front end face has antireflective AR plated film 12, so, can try one's best many laser to be gone out from end-fire before laser gain chip 1, enter in collimating lens 2, wherein, the laser output power of employing is 5mW.Laser, by collimating through collimating lens 2 after laser gain chip 1, is then beaten on the balzed grating, 3 of 1200 lines per millimeters at a certain angle, and balzed grating, 3 also can adopt holographic grating to replace, but prioritizing selection balzed grating.Carry out after light splitting through balzed grating, choose first-order diffraction light as external cavity feedback light path, zero order diffracted light is then as the exit direction of laser.First-order diffraction light is after condenser lens 4, beat on the patterned speculum 5 processed by micro-processing methods such as photoetching in advance, speculum 5 is using silicon materials as substrate, wherein, substrate can adopt sapphire, quartz glass, silicon, acrylic glue etc., as shown in Figure 2, speculum is also provided with plating fine line region pattern 201 and laser light area 202, and, plating fine line region pattern 202 is for adopting gold, or silver, or aluminum metal coating thin film forms, it is the pattern processed on the mirror by micro-processing methods such as photoetching, Figure 2 shows that the pattern that a class is novel, the outline line of pattern forms plating fine line region pattern by plating, the thick black line of the present embodiment plating fine line region pattern adopts gold-plated shaping, live width is 20 microns.In Fig. 2, shadow region is laser light area.Patterned speculum 5 paste or mechanical caging on motor 6, wherein, motor and speculum adopt the mode bonded to be connected and fixed, or, motor and speculum also can adopt other fixed form to be fixed, and such as, adopt screw, further, motor chooses servomotor or stepping motor.
When motor 6 is with clockwise or when being rotated counterclockwise, wherein, due to the present embodiment because symmetry, clockwise with as broad as long counterclockwise, speculum 5 can form laser cavity by reflects laser only having the gold-plated fine rule of constantly change in laser light area together with chip gain 1, thus realizes the function of laser tuning.As shown in Figure 3, this frequency-time characteristic can as chirped laser light source, as the key components and parts of laser radar system for the frequency versus time curve that the implementation case obtains.
Case study on implementation two:
The present embodiment provides a kind of External cavity tunable lasers of dual wavelength.The continuous wave difference frequency that dual-wavelength laser is often applied to THz wave produces, the fields such as non-contact optical sensing, the manufacture method of dual-wavelength laser is a lot, the present embodiment realizes mainly through arranging speculum 5 plating fine line region pattern, as shown in Figure 4, the plating fine line region pattern that speculum is arranged is the pattern that the parallel gold-plated Curves of employing two is formed, wherein, comprise the plating fine line region pattern of plating curve 401 and plating curve 402 composition, the optics of the implementation case arranges the same with case study on implementation one, laser gain chip adopts with money product.As shown in Figure 4, two parallel curves represent two selected wavelength to the pattern of speculum 5, and frequency sweep process medium wavelength spacing remains unchanged, and obtains wavelength-time graph as shown in Figure 5.
These are only preferred embodiment of the present utility model, be not limited to the utility model, all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection range of the present utility model.
Claims (8)
1. an External cavity tunable lasers, is characterized in that: the laser light splitting after the collimating lens comprise the laser gain chip for carrying out wavelength gain to laser, laser beam being collimated, collimation produce first-order diffraction light and zero order diffracted light grating, first-order diffraction light carried out to poly-light transmissive condenser lens, for the speculum that reflects the first-order diffraction light after optically focused transmission and the motor for driving speculum to rotate;
Wherein, speculum is also provided with plating fine line region pattern.
2. External cavity tunable lasers according to claim 1, is characterized in that: laser gain chip is moored sieve waveguide by semiconductor Fabry and formed, and end face is provided with high reverse--bias HR plated film (11) thereafter, and front end face has antireflective AR plated film (12).
3. External cavity tunable lasers according to claim 2, is characterized in that: the gain centre wavelength of laser gain chip is 810nm, and its gain wavelength adjustable extent is 780nm-840nm.
4. External cavity tunable lasers according to claim 1, is characterized in that: grating is set to balzed grating, or holographic grating.
5. External cavity tunable lasers according to claim 4, is characterized in that: balzed grating, is the balzed grating, of 1200 lines per millimeters.
6. External cavity tunable lasers according to claim 1, is characterized in that: plating fine line region pattern be adopt live width be 20 microns plating fine rule form pattern form.
7. External cavity tunable lasers according to claim 1, is characterized in that: motor and speculum adopt the mode bonded to be connected and fixed, and motor chooses servomotor or stepping motor.
8. according to the arbitrary described External cavity tunable lasers of claim 1-6, it is characterized in that: the plating fine line region pattern that speculum is arranged is the pattern that the parallel metal curve of employing two or wall scroll metal Curves are formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520777884.1U CN205141361U (en) | 2015-10-09 | 2015-10-09 | Exocoel tuned laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520777884.1U CN205141361U (en) | 2015-10-09 | 2015-10-09 | Exocoel tuned laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205141361U true CN205141361U (en) | 2016-04-06 |
Family
ID=55627118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520777884.1U Active CN205141361U (en) | 2015-10-09 | 2015-10-09 | Exocoel tuned laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205141361U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105119142A (en) * | 2015-10-09 | 2015-12-02 | 深圳力策科技有限公司 | External cavity tuning laser |
| US20210190953A1 (en) * | 2017-10-17 | 2021-06-24 | Bridger Photonics, Inc. | Apparatuses and methods for a rotating optical reflector |
| US11604280B2 (en) | 2017-10-02 | 2023-03-14 | Bridger Photonics, Inc. | Processing temporal segments of laser chirps and examples of use in FMCW LiDAR methods and apparatuses |
| US11656075B2 (en) | 2015-10-06 | 2023-05-23 | Bridger Photonics, Inc. | High-sensitivity gas-mapping 3D imager and method of operation |
| US11692900B2 (en) | 2017-11-14 | 2023-07-04 | Bridger Photonics, Inc. | Apparatuses and methods for anomalous gas concentration detection |
-
2015
- 2015-10-09 CN CN201520777884.1U patent/CN205141361U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11656075B2 (en) | 2015-10-06 | 2023-05-23 | Bridger Photonics, Inc. | High-sensitivity gas-mapping 3D imager and method of operation |
| CN105119142A (en) * | 2015-10-09 | 2015-12-02 | 深圳力策科技有限公司 | External cavity tuning laser |
| CN105119142B (en) * | 2015-10-09 | 2018-01-23 | 深圳力策科技有限公司 | A kind of External cavity tunable lasers |
| US11604280B2 (en) | 2017-10-02 | 2023-03-14 | Bridger Photonics, Inc. | Processing temporal segments of laser chirps and examples of use in FMCW LiDAR methods and apparatuses |
| US20210190953A1 (en) * | 2017-10-17 | 2021-06-24 | Bridger Photonics, Inc. | Apparatuses and methods for a rotating optical reflector |
| US11592563B2 (en) * | 2017-10-17 | 2023-02-28 | Bridger Photonics, Inc. | Apparatuses and methods for a rotating optical reflector |
| US11921211B2 (en) | 2017-10-17 | 2024-03-05 | Bridger Photonics, Inc. | Apparatuses and methods for a rotating optical reflector |
| US11692900B2 (en) | 2017-11-14 | 2023-07-04 | Bridger Photonics, Inc. | Apparatuses and methods for anomalous gas concentration detection |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205141361U (en) | Exocoel tuned laser | |
| CN103762487B (en) | A kind of tunable laser with dual output light beam | |
| CN201984180U (en) | Fiber Fabry-Perot tunable filter | |
| CN105119142A (en) | External cavity tuning laser | |
| US9876330B1 (en) | Wavelength tunable external cavity quantum cascade laser utilizing an angle tuned immersion grating as a wavelength selective filter element | |
| CN102832529A (en) | Dual-frequency-laser-based photoproduction tunable microwave source and frequency stabilization control method | |
| US8107509B2 (en) | Monolithic folded F-P cavity and semiconductor laser using the same | |
| JP2007234786A (en) | Wavelength variable laser light source | |
| CN103825195A (en) | Broadband tunable light parameter oscillator pumping by use of vertical external cavity surface emitting laser | |
| CN104330054A (en) | Micro angle measurement method and device based on laser self mixture and intervene | |
| CN103762489B (en) | Wavelength continuously adjustable laser aid | |
| CN101369015B (en) | Light splitting apparatus of wind detection laser radar based on dual-edge detection | |
| CN102570311A (en) | Tunable narrow-band UV laser generating device and generating method therefor | |
| CN112018597A (en) | External cavity semiconductor laser | |
| CN111129951A (en) | Wide-tuning external cavity semiconductor laser cavity based on grating and MEMS (micro-electromechanical systems) reflector | |
| US11095095B2 (en) | Low cost external cavity diode lasers | |
| CN211151045U (en) | Tunable external cavity semiconductor laser and coherent light communication system | |
| CN102315588A (en) | Fabry-Perot (F-P) cavity and laser using same | |
| KR20040051319A (en) | variable wavelength semiconductor laser diode | |
| CN114122882A (en) | Wavelength wide tuning single longitudinal mode laser based on single ring cavity | |
| CN206379619U (en) | A kind of tunable semiconductor laser | |
| JPH0745890A (en) | External cavity semiconductor laser | |
| CN114258619A (en) | External cavity laser device, corresponding system and method | |
| TW200407516A (en) | Tunable light source module | |
| CN104953466A (en) | Laser light source and design method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |