CN205081979U - Semiconductor device sprays board heating device - Google Patents
Semiconductor device sprays board heating device Download PDFInfo
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- CN205081979U CN205081979U CN201520748956.XU CN201520748956U CN205081979U CN 205081979 U CN205081979 U CN 205081979U CN 201520748956 U CN201520748956 U CN 201520748956U CN 205081979 U CN205081979 U CN 205081979U
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Abstract
The utility model relates to an electric heater unit specifically says to a semiconductor device sprays board heating device. The device includes temperature control system and hot plate, and temperature control system sets up the temperature that a thermocouple is used for gathering the hot plate through connecting AC filter circuit to hot plate including temperature controller and power controller, power controller's output, the thermocouple is connected at the temperature data collection of temperature controller input through connecting a TC filter circuit. The utility model discloses AC interference signal major part will be prevented to absorb and become magnetism and feel and heat energy by the inductance, and will be remaining most by electric capacity bypass to ground, and effect that this just can the interference suppression signal is at the output more net alternating current of acquisition just. Through TC filter circuit, adopt resistance, RLC filter circuit that inductance and electric capacity are constituteed strains radio frequency interference (more than the 13.56MHz) and 50Hz60Hz's (power) power line interference, and assurance temperature controller received signal can correctly reflect the true temperature of hot plate.
Description
Technical field
The utility model relates to a kind of electric heater unit, is particularly a kind of semiconductor equipment shower plate heater.
Background technology
Electric heating is the highest, fastest to the metal material efficiency of heating surface at present, the induction heating equipment of low-loss and energy-saving environment-friendly type.Teflon heating plate is exactly that a kind of consume electric power is converted into heat energy, a kind of device heated needing heated material.Compared with heating with general fuel, electric heating can obtain higher temperature, is easy to the automatic control and the far distance controlled that realize temperature.Electric heating can in the inner directly heat-dissipating of heating object, and thus the heat efficiency is high, and programming rate is fast, and according to the technological requirement of heating, can realize overall homogeneous heating or localized heating (comprising surface heating).In electric heating process, the waste gas of generation, residue and flue dust are few, can keep the cleaning of heating object, free from environmental pollution.Teflon heating plate is to the device of semiconductor equipment shower plate heating, due to pole when shower plate is the work of 13.56MHZ radio-frequency power supply, when radio-frequency power supply works, spray version has high frequency voltage exist, then be supplied in the circuit of heating plate and can produce with interference signal, thus have influence on heating effect.
Utility model content
Technical problem to be solved in the utility model is to provide one not disturb by high-frequency signal, accurately can reflect the semiconductor equipment shower plate heater of temperature of heating plate.
The utility model realizes like this, a kind of semiconductor equipment shower plate heater, this device comprises temperature control system and heating plate, temperature control system includes thermostat and power controller, the output of power controller is by connecting AC filter circuit to heating plate, arrange a thermocouple for gathering the temperature of heating plate, described thermocouple is connected to the temperature acquisition input of thermostat by connection one TC filter circuit.
The utility model further, thermostat is detected by the temperature of heating element by the thermocouple connected, regulated the output current of thermostat by current temperature value, this output current controls the power output of power controller, regulates the power be added on heating object.
Further, described heating plate is Teflon heating plate to the utility model.
Further, described power controller adopts the heating rate of 5 degrees/min to carry out heating electric hot plate to the utility model, and power controller controls the output of heating power by the output of thermostat.
The utility model compared with prior art, beneficial effect is: the utility model AC influence signal major part will be stoped absorption to become magnetic strength and heat energy by inductance, remaining major part by capacitive bypass to, this just can suppress the effect of interference signal, just obtains purer alternating current at output.
Through TC filter circuit, adopt resistance, the RLC filter circuit of inductance and electric capacity composition, filters the Hz noise of radio frequency interference (more than 13.56MHz) and 50Hz/60Hz (power supply), ensures that signal that thermostat receives correctly can reflect the true temperature of heating plate.
The utility model temperature control system mainly contains thermostat and power controller composition.Because heating plate is arranged on above the spray head of equipment, there is good rapid heating function.Because the power density of heating plate is larger; programming rate is very fast, needs the function ratio of thermostat more powerful, has the function that can control heating rate and adopt the heating rate of 5 degrees/min to heat; effectively can protect heating plate like this, PID control can be carried out very well again.Power controller controls the output of heating power by the output of thermostat.
Embodiment
The system module block diagram that Fig. 1 provides for the utility model embodiment;
The circuit theory diagrams of the AC filter circuit that Fig. 2 provides for the utility model embodiment;
Fig. 3 implements the circuit theory diagrams of the TC filter circuit provided for the utility model.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with embodiment, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
See Fig. 1, for the system module block diagram of a kind of semiconductor equipment shower plate heater that the utility model provides, this device comprises temperature control system and heating plate, temperature control system includes thermostat and power controller, the output of power controller is by connecting AC filter circuit to heating plate, arrange a thermocouple for gathering the temperature of heating plate, thermocouple is connected to the temperature acquisition input of thermostat by connection one TC filter circuit.Thermostat is detected by the temperature of heating element by the thermocouple connected, and is regulated the output current of thermostat by current temperature value, and this output current controls the power output of power controller, regulates the power be added on heating object.Heating plate is Teflon heating plate.Power controller adopts the heating rate of 5 degrees/min to carry out heating electric hot plate, and power controller controls the output of heating power by the output of thermostat.
Temperature control system mainly contains thermostat and power controller composition.Because heating plate is arranged on above the spray head of equipment, there is good rapid heating function.Because the power density of heating plate is larger; programming rate is very fast; need the function ratio of thermostat more powerful; there is the function that can control heating rate; in our system, adopt the heating rate of 5 degrees/min to heat at present; effectively can protect heating plate like this, PID control can be carried out very well again.Power controller controls the output of heating power by the output of thermostat.
The utility model adopts AC influence signal major part absorption will be stoped to become magnetic strength and heat energy by inductance by AC filter circuit, remaining major part by capacitive bypass to, this just can suppress the effect of interference signal, just obtains purer alternating current at output.
Thermocouple is the element of detected temperatures, and thermocouple forms by connected two different metal lines, and connected end is called measurement (" heat ") junction point.Signal conditioning circuit cabling is received in the disjunct other end of metal wire, and it is generally made of copper.This junction point between thermo-electric metal and copper cabling is called with reference to (" cold ") junction point.The K type thermocouple that we adopt, voltage signal is too weak, and at room temperature, its change in voltage amplitude is 41 μ V/ DEG C.So the thermocouple being connected to temperature control system necessarily needs through TC filter circuit, adopt resistance, the RLC filter circuit of inductance and electric capacity composition, filter the Hz noise of radio frequency interference (more than 13.56MHz) and 50Hz/60Hz (power supply), ensure that signal that thermostat receives correctly can reflect the true temperature of heating plate.
TC filter circuit is primarily of electric capacity and inductance composition, and low-frequency filter allows that low frequency signal passes through, but weakens (or reduce) frequency and pass through higher than the signal of cut-off frequency.Firstorder filter when frequency doubles by signal strength weakening half (approximately-6dB).So the speed of roll-offing of 6 rank filters is every frequency multiplication 6*6dB.Electric capacity has reaction to stop low frequency signal to pass through, and low frequency signal is through overload.Weaken at upper frequency reaction, electric capacity plays short circuit effect.On electric capacity, the object of a series connection resistance provides a discharge loop to electric capacity, prevents other device of high-voltage breakdown on electric capacity.
See Fig. 2, the positive and negative terminal V1 that AC filter circuit is included in out-put supply arranges the inductance L 5 of series connection, the inductance L 7 of inductance L 6 and series connection and inductance L 8 respectively, by electric capacity C13 ground connection between inductance L 5 and inductance L 6, by electric capacity C14 ground connection between inductance L 7 and inductance L 8, between inductance L 6 with inductance L 8, be connected heating resistor R5.
See Fig. 3, TC filter circuit is multi-stage filter circuit, the two ends of be connected temperature measurement one are connected on respectively by the inductance L 1 of two-way and inductance L 2, the other end of inductance L 1 and inductance L 2 exports or connects multistage filter circuit, what be connected with inductance L 1 passes through electric capacity C1 ground connection on the way, by electric capacity C3 ground connection, and passes through resistance R1 and the electric capacity C5 ground connection of series connection, inductance L 2 connect on the way by electric capacity C2 ground connection, by electric capacity C4 ground connection, and by series connection resistance R2 and electric capacity C6 ground connection.
Inductance L 1 exports after connecting inductance L 3 further, by electric capacity C7 ground connection, electric capacity C9 ground connection, the resistance R3 also passing through series connection and electric capacity C11 ground connection on the outlet line after inductance L 3.
Inductance L 2 exports after connecting inductance L 4 further, by electric capacity C8 ground connection, electric capacity C10 ground connection, the resistance R4 also passing through series connection and electric capacity C12 ground connection on the outlet line after inductance L 4.Form multi-stage filter circuit.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection range of the present utility model.
Claims (4)
1. a semiconductor equipment shower plate heater, it is characterized in that, this device comprises temperature control system and heating plate, temperature control system includes thermostat and power controller, the output of power controller is by connecting AC filter circuit to heating plate, arrange a thermocouple for gathering the temperature of heating plate, described thermocouple is connected to the temperature acquisition input of thermostat by connection one TC filter circuit.
2., according to semiconductor equipment shower plate heater according to claim 1, it is characterized in that,
Thermostat is detected by the temperature of heating element by the thermocouple connected, and is regulated the output current of thermostat by current temperature value, and this output current controls the power output of power controller, regulates the power be added on heating object.
3. according to semiconductor equipment shower plate heater according to claim 1, it is characterized in that, described heating plate is Teflon heating plate.
4. according to semiconductor equipment shower plate heater according to claim 1, it is characterized in that, described power controller adopts the heating rate of 5 degrees/min to carry out heating electric hot plate, and power controller controls the output of heating power by the output of thermostat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520748956.XU CN205081979U (en) | 2015-09-24 | 2015-09-24 | Semiconductor device sprays board heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520748956.XU CN205081979U (en) | 2015-09-24 | 2015-09-24 | Semiconductor device sprays board heating device |
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| Publication Number | Publication Date |
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| CN205081979U true CN205081979U (en) | 2016-03-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520748956.XU Active CN205081979U (en) | 2015-09-24 | 2015-09-24 | Semiconductor device sprays board heating device |
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| CN (1) | CN205081979U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112653419A (en) * | 2020-12-11 | 2021-04-13 | 北京北方华创微电子装备有限公司 | Filtering method and filtering circuit |
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2015
- 2015-09-24 CN CN201520748956.XU patent/CN205081979U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112653419A (en) * | 2020-12-11 | 2021-04-13 | 北京北方华创微电子装备有限公司 | Filtering method and filtering circuit |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |